Abstract: A Raman spectrum is measured inside animal tissue, such us human skin tissue, at a selected depth from a surface the tissue. A pH value is computed using a function that assigns a pH value as a function of the measured Raman spectrum. The computation may involve computing a number representing a ratio of concentrations of a protonated and a deprotonated version of a chemical substance from the Raman spectrum and generating pH information on the basis of said number. The chemical substance is for example a form of Urocanic acid (UCA). UV exposure is measured from the weight of the spectrum of cis-UCA.
Type:
Grant
Filed:
February 28, 2002
Date of Patent:
February 2, 2010
Assignee:
River Diagnostics B.V.
Inventors:
Gerwin Jan Puppels, Peter Jacobus Caspers, Gerhardus Wilhelmus Lucassen
Abstract: A method for evaluating semiconductor layers includes irradiating semiconductor layers on a substrate with light; measuring an optical spectrum peculiar to excitons in the semiconductor layers; and analyzing a broadening factor of optical spectral features of the optical spectrum. The method provides a quick measurement of a surface state of the semiconductor layers with high accuracy.
Abstract: The present invention discloses an overlay alignment measurement apparatus and method. The overlay target is periodic and is illuminated by coherent radiation; a Fourier transform lens optically computes the Fourier transform of the target. Analysis of the spatial frequencies at the Fourier plane yields overlay alignment information.
Abstract: A device (and methods of using and manufacturing the device) that utilize a plurality of photomultipliers (PMT)s or a photodiodes coupled with a set of filters to collect Raman signal from samples. Also a method of detecting Raman signals includes receiving Raman signals from a sample utilizing a plurality of photomultiplier tubes (PMT)s or photodiodes, wherein at least one PMT or photodiode provides a different Raman signal than at least one other PMT or photodiode.
Abstract: Fiber optic surface-enhanced Raman spectroscopic (SERS) systems (also referred to as “SERS system”), portable SERS systems, SERS probes, and methods of using the SERS systems and SERS probes to detect an analyte, are disclosed.
Type:
Grant
Filed:
August 6, 2007
Date of Patent:
February 2, 2010
Assignee:
University of Georgia Research Foundation, Inc.
Abstract: A method and system to measure misalignment error between two overlying or interlaced periodic structures are proposed. The overlying or interlaced periodic structures are illuminated by incident radiation, and the diffracted radiation of the incident radiation by the overlying or interlaced periodic structures are detected to provide an output signal. The misalignment between the overlying or interlaced periodic structures may then be determined from the output signal.
Type:
Grant
Filed:
February 9, 2007
Date of Patent:
February 2, 2010
Assignee:
KLA-Tencor Corporation
Inventors:
Ibrahim Abdulhalim, Mike Adel, Michael Friedmann, Michael Faeyrman
Abstract: A modulated reflectance measurement system includes lasers for generating an intensity modulated pump beam and a UV probe beam. The pump and probe beams are focused on a measurement site within a sample. The pump beam periodically excites the measurement site and the modulation is imparted to the probe beam. For one embodiment, the wavelength of the probe beam is selected to correspond to a local maxima of the temperature reflectance coefficient of the sample. For a second embodiment, the probe laser is tuned to either minimize the thermal wave contribution to the probe beam modulation or to equalize the thermal and plasma wave contributions to the probe beam modulation.
Type:
Grant
Filed:
January 30, 2008
Date of Patent:
January 12, 2010
Assignee:
KLA-Tencor Corporation
Inventors:
Jon Opsal, Lena Nicolaides, Alex Salnik, Allan Rosencwaig
Abstract: The invention relates to a system, method and device for evaluating imperfections in a lens for a display for an electronic device. For the device, it comprises: a substrate; and a pattern imposed on the substrate. For the pattern, when the pattern is viewed through the lens, the pattern is noticeably distorted around an area where a defect is present in the lens. For the system, it comprises: an evaluation table for the lens, the table having a mounting area; and a substrate for mounting on the mounting area, the substrate having a pattern imposed thereon wherein when the pattern is viewed through the lens, the pattern is noticeably distorted around an area where a defect is present in the lens.
Abstract: The invention relates to a detection device for identifying objects in a material stream, preferably a cullet stream. The device comprises several light sources, which emit light in a rectilinear manner, preferably diode light sources and which are combined to form at least one optical emitter, at least one receiver that contains a lens system and a photoelectric cell, in addition to a detection section, which is located between the emitter and the receiver and is traversed by the material stream. The aim of the invention is to provide a detection device, which eliminates to a great extent the error sources that are inherent in optical lens systems. To achieve this, the light sources of an emitter are directed onto the area of intersection of the optical axis of the lens system with the lens system of the receiver that is assigned to the emitter.
Abstract: The stress of a sample semiconductor wafer is detected with high accuracy in the form of an absolute value without rotating the sample or the entire optical system. A laser light R is subjected to photoelastic modulation in a PEM 6 to generate a birefringence phase difference and then it is passed through first and second quarter wavelength plates and passes through a semiconductor wafer D having residual stress. When it is passed through a test piece, the direction of the stress of the test piece is detected when the angle between the laser light R and a linear polarization light is 0 and 90 degrees. The transmitted electric signal is delivered to an analog/digital converter 16, and the signal is inputted to a signal processor thus generating transmission signal data. The signal processor reads out the stored reference signal data and the transmission signal data and calculates a reference birefringence phase difference and the absolute values of the birefringence phase difference.
Abstract: An underwater imaging system includes an underwater imaging polarimeter that captures images of the water surface. The captured images are indicative of the captured light, and are equivalent to four-component Stokes vector S=(I,Q,U,V) data. Advantageously, the passive imaging technique of the present invention utilizes polarmetric data. In contrast, conventional optical remote sensing techniques rely on light amplitude and frequency to carry information about the scattering surface. The imaging technique of the present invention exploits these properties, as well as the polarization properties of light to sense information about the scattering media. The two-dimensional slope field of surface wave can be recovered from a distance without interfering with the fluid dynamics of the air or water. By employing the physics of light scattering by a specular surface, the geometry of the surface can be found by measuring the polarimetric properties of the reflected and/or refracted light.
Type:
Grant
Filed:
October 15, 2007
Date of Patent:
December 8, 2009
Assignee:
University of Massachusetts
Inventors:
Howard Schultz, Andres Corrada-Emmanuel
Abstract: A method of producing a finish for a paper substrate, wherein the finish provides the paper substrate with a color that matches the color of a target object. In accordance with the method, calculations are performed to determine the quantities of at least one group of colorants required to produce a semitransparent wood stain from a vehicle, wherein when the semitransparent wood stain is applied to the paper substrate, the paper substrate will have a color that matches the target object. The calculations are performed using reflectance measurements of the target object obtained using a spectrophotometer and previously obtained spectral data of the colorants as applied to a paper substrate. The colorants used to form the transparent or semitransparent wood stain do not include a white colorant or black-and-white masstone.
Abstract: A spectroscopic device that can suppress the occurrence of cross-talk when light beams of different wavelength ranges are optically received is provided. Detected light is made incident to a dichroic minor (hereinafter referred to as “mirror”) DM1 along the perpendicular direction of a photoelectric surface 7. Accordingly, light transmitted through the mirror DM1 is made incident substantially perpendicular to the photoelectric surface 7. On the other hand, light reflected from the mirror DM1 is reflected from a main mirror surface 23. At this time, the dichroic mirror array 21 is inclined so that the mirror DM8 side having the minimum shortest wavelength is nearer to the photoelectric surface 7 than the minor DM1 side having the maximum shortest wavelength and substantially parallel to the main minor surface 23a, so that light reflected from the main mirror surface 23a is made incident to the mirror DM2 along the perpendicular direction of the photoelectric surface 7.
Abstract: Various systems for measurement of a specimen are provided. One system includes an optical subsystem configured to perform measurements of a specimen using vacuum ultraviolet light and non-vacuum ultraviolet light. This system also includes a purging subsystem that is configured to maintain a purged environment around the optical subsystem during the measurements. Another system includes a cleaning subsystem configured to remove contaminants from a specimen prior to measurement. In one embodiment, the cleaning subsystem may be a laser-based cleaning subsystem that is configured to remove contaminants from a localized area on the specimen. The system also includes an optical subsystem that is configured to perform measurements of the specimen using vacuum ultraviolet light. The optical subsystem is disposed within a purged environment. In some embodiments, the system may include a differential purging subsystem that is configured to provide the purged environment for the optical subsystem.
Abstract: A marker structure on a substrate for optical alignment of the substrate includes a plurality of first structural elements and a plurality of second structural elements. In use, the marker structure allows the optical alignment based upon providing at least one light beam directed on the marker structure, detecting light received from the marker structure at a sensor, and determining alignment information from the detected light, the alignment information comprising information relating a position of the substrate to the sensor.
Type:
Grant
Filed:
December 21, 2007
Date of Patent:
November 17, 2009
Assignee:
ASML Netherlands B.V.
Inventors:
Richard Johannes Franciscus Van Haren, Paul Christiaan Hinnen, Sanjay Lalbahadoersing, Henry Megens, Maurits Van Der Schaar
Abstract: The present invention relates to a light wavelength and intensity measuring device. The device automatically measures a center wavelength of the light source and an intensity of the light corresponding to the center wavelength by using a main photodetector, at least one optical filter, and at least one sub photodetector when the light source is connected to the device. The main photodetector detects the intensity of the light applied by the light source, the optical filter transmits the light corresponding to a prediscriminated transmission wavelength, and the sub photodetector detects the intensity of the light transmitted through the optical filter. Therefore, the light intensity is more accurately measured by calibrating the intensity according to the wavelength.
Type:
Grant
Filed:
June 7, 2006
Date of Patent:
November 17, 2009
Assignee:
Raybit Systems Inc.
Inventors:
Gap Youl Lyu, Kilhun Koo, Min Hee Kang, Ba Cao
Abstract: A method for optical inspection of a surface includes selecting an apodization scheme in response to a characteristic of the surface, and applying an apodizer to apodize a beam of radiation in response to the selected apodization scheme. The apodized beam of radiation is directed to impinge on the surface, whereby a plurality of rays are scattered from the surface, and at least one of the scattered rays is detected, typically in order to detect a defect on the surface.
Abstract: A sample information obtaining apparatus includes an electromagnetic wave generator; a sample holding unit which holds a sample to be tested and serves as a polarizer having a polarization axis which defines how an incident electromagnetic wave is to be divided according to a polarization state of the incident electromagnetic wave; an electromagnetic wave detecting unit which separately detects a transmitted electromagnetic wave transmitted through the sample holding unit and a reflected electromagnetic wave reflected off the sample holding unit, the transmitted and reflected electromagnetic waves being obtained by dividing the incident electromagnetic wave incident on the sample holding unit according to a relative positional relationship between the polarization state of the incident electromagnetic wave and the polarization axis of the sample holding unit; and a processor which processes signals of the electromagnetic waves detected by the electromagnetic wave detecting unit and obtains information about t
Abstract: Radiation is projected onto a plurality of targets on a substrate. By assuming that the overlay error derivable from asymmetry varies smoothly across the substrate, the number of targets measured can be reduced. This may result in a smaller area of the scribe lane being used by targets for each layer of the substrate.
Type:
Grant
Filed:
January 22, 2007
Date of Patent:
November 17, 2009
Assignee:
ASML Netherlands B.V
Inventors:
Everhardus Cornelis Mos, Maurits Van Der Schaar
Abstract: A biometric identification apparatus that can accurately and rapidly perform liveness detection with a simple structure. The apparatus includes a plurality of light sources 102, 103, 106, and 107, each having a wavelength different from one another, for emitting light to a finger 200 as an object to be identified, and receivers 104 and 105 for detecting the light passing through the finger. The ratio of the light emitted from the light sources to the light detected with the receivers is obtained as transmittance. Determination in liveness detection is made by comparing the transmittance with a previously-set threshold of transmittance.
Type:
Grant
Filed:
January 29, 2007
Date of Patent:
November 10, 2009
Assignee:
Hitachi Media Electronics Co., Ltd.
Inventors:
Shingo Yokoyama, Tadayuki Abe, Hiromi Sugo, Shoichi Sato