Abstract: The profile of a single feature formed on a wafer can be determined by obtaining an optical signature of the single feature using a beam of light focused on the single feature. The obtained optical signature can then be compared to a set of simulated optical signatures, where each simulated optical signature corresponds to a hypothetical profile of the single feature and is modeled based on the hypothetical profile.

Abstract: Disclosed is a method of determining an overlay error between two layers of a multiple layer sample. For a plurality of periodic targets that each have a first structure formed from a first layer and a second structure formed from a second layer of the sample, an optical system is employed to thereby measure an optical signal from each of the periodic targets. There are predefined offsets between the first and second structures. An overlay error is determined between the first and second structures by analyzing the measured optical signals from the periodic targets using a scatterometry overlay technique based on the predefined offsets.

Abstract: A system for measuring light absorption levels for a liquid for use in a printing system includes a light source adapted to provide a divergent beam of light, a liquid container with a hole that acts as a focusing lens, and a prism disposed over the hole to split the divergent beam of light into a reference beam and a measurement beam. The systems include a measurement detector to measure the intensity of the focused beam to produce a liquid measurement signal. A reference detector measures the intensity of the reference beam for compensating the effects of temperature and light source variations on the system signals. A device calculates signal ratios and stores the ratios so that the signal ratios of subsequent colored liquids can be converted into colorant concentrations from a look-up table or through calculations using a signal ratio/colorant concentration.

Abstract: Devices, systems and methods are provided for producing a collimated light path. Theses devices, systems and methods may be used to determine an optical property of a small volume sample.

Abstract: The invention relates to a method for inspecting quality criteria of flat textile structures embodied in a multi-layer form according to a contour, in particular woven, stitched, knitted, sewn or non-woven finished structures, preferably provided with cut areas or holes, separated or forming a material web, in particular when said structures are used for producing airbags. The inventive method is carried out using image-forming inspection means, in particular optical inspection means, preferably a linear array camera or CCD array camera, whereby a relative motion is produced between the structures to be inspected and the camera, and the structure is arranged at least by area at a defined distance from the image-forming inspection means, preferably on the substantially flat surface of a control table or inspection line. The texture of the structure is analyzed according to a segmentation method. Characteristics such as center of gravity, area, main axes, etc.

Abstract: A system for performing nanostructure-enhanced Raman spectroscopy (NERS) includes a radiation source, a radiation detector configured to detect Raman scattered radiation scattered by an analyte, and a container configured to provide a sealed enclosure. The NERS system further includes a turbulence generating device configured to generate random dynamic motion of a plurality of nanoparticles within the container. A method for performing NERS includes providing a container configured to provide a sealed enclosure, providing a plurality of nanoparticles each comprising a NERS-active material and an analyte within the container, causing random dynamic motion of the plurality of nanoparticles and the analyte, irradiating the plurality of nanoparticles and the analyte with radiation, and detecting Raman scattered radiation scattered by the analyte.

Abstract: Methods for grading gemstones, apparatus for grading gemstones, and systems that utilize such methods and apparatus are disclosed.

Abstract: In a three-dimensional shape detecting system comprising a three-dimensional shape detecting device and an external calculating device, the three-dimensional shape detecting device includes: projection means which projects pattern light onto a subject; image data obtaining means which captures a pattern light projection image of the subject and thereby obtains image data of the pattern light projection image while capturing a pattern light non-projection image of the subject and thereby obtaining image data of the pattern light non-projection image; pattern light position extraction means which extracts a position of the pattern light projected on the subject based on the obtained image data; and three-dimensional shape calculation means which figures out three-dimensional shape data of the subject based on the position of the pattern light extracted by the pattern light position extraction means.

Abstract: A method and system for visualizing deviations on an actual surface 10, 30 from a nominal, or designed, surface 28 utilizes a system and method for mapping the spatial (e.g. x, y and z) coordinates of the actual surface 10, 30 into a computer 13, comparing the mapped actual surface to the nominal surface 28 to produce a three-dimensional distribution of deviation values (D), processing this distribution into a topographical pattern 34 of multiple contours or areas 34a . . . 34n, each contour or area having the same, or generally the same, deviation value (D), and optically projecting this topographical pattern 34 onto the actual surface 10, 30 in registry with the initial surface mapping to provide a display of the surface deviations (D) directly on the actual surface 10, 30. The deviations are measured along a direction D normal to the actual surface so that the three-dimensional distribution is given in x, y, D coordinates. The optical projection is preferably a laser projection 38.

Abstract: An apparatus for photometric measurement of the concentration of a chemical substance in a solution, wherein a cuvette is provided containing the solution The cuvette is transmissive at least in predetermined regions for electromagnetic radiation, wherein a transmitting unit is provided, which produces electromagnetic radiation in at least two wavelength regions and which radiates into the cuvette The electromagnetic radiation in a first wavelength region serves for measurement purposes and the electromagnetic radiation in a second wavelength region is used for reference purposes The electromagnetic radiation in the two wavelength regions takes the same path through the cuvette and through the solution At least one detector unit is provided, which is so arranged that it receives the electromagnetic radiation in the at least two wavelength regions following passage through the solution, and wherein a control/evaluation unit is provided, which determines the concentration of at least one chemical substance in t

Abstract: A light source for an atomizing device, specifically an atom absorption spectrometer comprising one, two, or more lamps, whose ray can be selected by means of at least one two-dimensionally moveable optical selection element, and which can be directed in the direction of atomizing device. Fine-tuning is thereby achieved quickly with little constructive expenditure and with low costs. A very high degree of accuracy is possible from the selector through a rotational and highly adjustable rotation spindle.

Abstract: Spatially-separated heterodyne interferometer architecture is combined with monolithic glass construction techniques to provide a monolithic, spatially-separated, common-path interferometer. The monolithic interferometer includes multiple optical components bonded together into a monolithic structure. The bonded components provide both optics and structure for the interferometer, thereby producing a small, compact, and light-weight interferometry system. Beam splitters and combiners are provided on the interfaces between the optical components to direct and combine signal measurement, signal reference and local oscillator beams used in the interferometry system. The spatially-separated architecture reduces cyclic error values below those of polarization-separated interferometers. In addition, the monolithic architecture of the interferometer minimizes the impact of mechanical, thermal, and optical variations within the system.

Abstract: An apparatus is provided for measuring a gas within a semiconductor thin film process. The apparatus includes an optical resonator disposed within an environment of the thin-film process, a tunable laser that excites the optical resonator at a characteristic frequency of the gas and a detector that detects an energy within the resonator.

Abstract: An apparatus for measuring the rate of flow of a volume of particulate material comprising a transparent tube of known cross-sectional area, means for supplying a flow of particulate material through the transparent tube, and an optical signal sensor for receiving an optical signal through the wall of the transparent tube from the flow of particulate material. The received optical signal is delivered to a controller for analyzing and determining the relative movement of the flow of particulate material at the wall of the tube and calculating the rate of volume flow through the tube. These observations may be used to control upstream and downstream system processes and equipment.

Abstract: The invention relates to a method of performing an optical measurement on a sample, such as an ellipticity measurement. The sample is irradiated with a polarized irradiation beam and a return beam is linearly polarized. The irradiation or return beam is modulated with a birefringence modulator, such as a photoelastic modulator, in accordance with a primary modulation signal. The return beam is directed onto a multichannel detector. Typically the detector is a slow detector, such as a CCD, having a response time greater than a period of the primary modulation signal. Detection values are generated simultaneously at each detection element and processed to determine a plurality of measurements. Various measurement techniques are described, including detector signal averaging over gated intervals; a design employing coherent modulation of the gain of an ICCD , and a modulator-coherent flash lamp design.

Abstract: A measuring apparatus which applies light, emitted from a light source, to a sample contained in a container, and detects light emitted from the sample to measure physical or chemical properties of the sample, includes a measuring optical system which measures the sample, and a position detection optical system which detects the position of the bottom of the container.

Abstract: A system for measuring dimension of photomasks comprises a light source emitting measuring light having a wavelength, a transmission detector for receiving the measuring light, a stage on which a photomask having circuit patterns is placed, the stage being disposed between the light source and the transmission detector, and a controller having a dimension-deciding algorithm to determine a dimension of the circuit patterns from a spectroscopic characteristic of the received measuring light, the controller being connected to the transmission detector.

Abstract: A color luminance meter 1 is provided with a polychrometer 4 as a spectral optical system including a light receiving sensor array 43, a signal processing circuit 5 and an operation control unit 6. The operation control unit 6 carries out calculations to obtain characteristics of a measurement light based on a specified spectral responsitivity, using light reception signals and specified weighting coefficients. The spectral responsitivities of light receiving sensors constructing the light receiving sensor array 43 are selected such that B?5 nm and A/B lies within a range of 1.5 to 4.0 when A, B denote the half power band width of the spectral responsitivities and a center wavelength interval of the spectral responsitivities. Accordingly, there can be provided a light measuring apparatus capable of maximally suppressing errors to highly precisely measure color luminance values and the like even in a measurement of a light lying in a narrow band such as a monochromatic light.

Abstract: It is an object of the present invention to provide a substrate processing apparatus, comprising a housing body mounting unit that is capable of mounting a plurality of housing bodies which can house a plurality of substrates, a processing apparatus main body for processing a substrate extracted from the housing body, a transportation unit for transporting the substrate between the housing body and the processing apparatus main body, a processing control unit for controlling the transportation unit and making it transport the substrate between the housing body and the processing apparatus main body, and a transportation control unit for controlling the transportation unit and making it transport the substrate from one housing body to another housing body without passing through the processing apparatus main body.

Abstract: Methods and sub-systems for substantially optimizing the absorbance measurement in optical instruments are provided. A method comprises forming a liquid sample into a droplet extending between two opposing surfaces, passing a light beam through the sample, and varying the distance between the two opposing surfaces until a distance substantially corresponding to a optimum absorbance is obtained.