Patents Examined by Luan C Thai
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Patent number: 11367665Abstract: The present disclosure relates to a reconstituted wafer- and/or panel-level package comprising a glass substrate having a plurality of cavities. Each cavity is configured to hold a single IC chip. The reconstituted wafer- and/or panel-level package can be used in a fan-out wafer or panel level packaging process. The glass substrate can include at least two layers having different photosensitivities with one layer being sufficiently photosensitive to be capable of being photomachined to form the cavities.Type: GrantFiled: July 24, 2018Date of Patent: June 21, 2022Assignee: CORNING INCORPORATEDInventors: Heather Debra Boek, Paul Bennett Dohn, Jin Su Kim, Aize Li, Hugh Michael McMahon, Jun Ro Yoon
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Patent number: 11359286Abstract: Describe is a quartz crystal microbalance (QCM) device mounted within a heated sample chamber. The sample chamber temperature is maintained about 10° C. to about 30° C. greater than the temperature of the precursor vessel. The sample chamber is connected to the precursor delivery line and includes a high temperature valve and a flow pathway to foreline with a high temperature valve to permit removal of excess material. The QCM device includes a heater and gas cooling channel allowing the device to be maintained at a temperature about 10° C. to about 30° C. less than the temperature of the precursor vessel.Type: GrantFiled: May 1, 2020Date of Patent: June 14, 2022Assignee: Applied Materials, Inc.Inventors: Jereld Winkler, Mohith Verghese
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Patent number: 11362093Abstract: A method of performing co-integrated fabrication of a non-volatile memory (NVM) and a gate-all-around (GAA) nanosheet field effect transistor (FET) includes recessing fins in a channel region of the NVM and the FET to form source and drain regions adjacent to recessed fins, and removing alternating portions of the recessed fins of the NVM and the FET to form gaps in the recessed fins. A stack of layers that make up an NVM structure are conformally deposited within the gaps of the recessed fins leaving second gaps, smaller than the gaps, and above the recessed fins of the NVM while protecting the FET with the organic planarization layer (OPL) and a block mask. The OPL and block mask are removed from the FET, and another OPL and another block mask protect the NVM while a gate of the FET is formed above the recessed fins and within the gaps.Type: GrantFiled: September 30, 2020Date of Patent: June 14, 2022Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATIONInventors: Zhenxing Bi, Zheng Xu, Dexin Kong, Kangguo Cheng
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Patent number: 11348861Abstract: A semiconductor package includes a semiconductor die having a semiconductor device, and first and second contact pads arranged on opposite surfaces of the die. The semiconductor die is embedded in a dielectric layer. The semiconductor package also includes one or more first package contact pads and one or more second package contact pads arranged on a first major surface of the semiconductor package. The first contact pad of the die is coupled to the one or more first package contact pads, and the second contact pad of the die is coupled to the one or more second package contact pads. In operation, the semiconductor device causes a current path between the first contact pad and the second contact pad. The package contact pads are arranged on the first major surface of the semiconductor package to provide multiple non-parallel current paths.Type: GrantFiled: September 17, 2020Date of Patent: May 31, 2022Assignee: Infineon Technologies Austria AGInventors: Sergey Yuferev, Robert Fehler, Petteri Palm
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Patent number: 11342272Abstract: A substrate structure, a method for manufacturing the same and a semiconductor package structure including the same are provided. The substrate structure includes a substrate, a first electronic component, a second electronic component and a plurality of metal layers. The first electronic component is disposed within the substrate. The second electronic component is disposed within the substrate and arranged in a horizontal direction with the first electronic component. The metal layers are disposed above an upper surface of the substrate. The number of metal layers above the first electronic component is greater than the number of metal layers above the second electronic component.Type: GrantFiled: June 11, 2020Date of Patent: May 24, 2022Assignee: ADVANCED SEMICONDUCTOR ENGINEERING, INC.Inventors: Wu Chou Hsu, Min-Yao Chen
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Patent number: 11342309Abstract: In an embodiment, a package includes a first package structure including a first die having a first active side and a first back-side, the first active side including a first bond pad and a first insulating layer a second die bonded to the first die, the second die having a second active side and a second back-side, the second active side including a second bond pad and a second insulating layer, the second active side of the second die facing the first active side of the first die, the second insulating layer being bonded to the first insulating layer through dielectric-to-dielectric bonds, and a conductive bonding material bonded to the first bond pad and the second bond pad, the conductive bonding material having a reflow temperature lower than reflow temperatures of the first and second bond pads.Type: GrantFiled: July 13, 2020Date of Patent: May 24, 2022Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Chen-Hua Yu, Chih-Hang Tung, Kuo-Chung Yee
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Patent number: 11337312Abstract: Systems and methods for bonding an electronic component to substrate with a rough surface. The method comprising: disposing an insulating adhesive on the substrate; applying heat and pressure to the insulating adhesive to cause the adhesive to flow into at least one opening formed in the substrate; curing the insulating adhesive to form a pad that is at least partially embedded in the substrate and comprises a planar smooth surface that is exposed; disposing at least one trace on the planar smooth surface of the pad; depositing an anisotropic conductive material on the pad so as to at least cover the at least one trace; placing the electronic component on the pad so that an electrical coupling is formed between the electronic component and the at least one trace; and bonding the electronic component to the substrate by curing the anisotropic conductive material.Type: GrantFiled: September 8, 2020Date of Patent: May 17, 2022Assignee: Palo Alto Research Center IncorporatedInventor: Ping Mei
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Patent number: 11335646Abstract: The present disclosure provides a substrate structure. The substrate structure includes an interconnection structure, a dielectric layer on the interconnection structure, an electronic component embedded in the dielectric layer, and a first conductive via penetrating through the dielectric layer and disposed adjacent to the electronic component. The interconnection structure includes a carrier having a first surface and a second surface opposite to the first surface, a first conductive layer disposed on the first surface of the carrier, and a second conductive layer disposed on the second surface of the carrier. The first conductive via and at least one of the first conductive layer and the second conductive layer define a first shielding structure surrounding the electronic component. A method of manufacturing a substrate structure is also disclosed.Type: GrantFiled: March 10, 2020Date of Patent: May 17, 2022Assignee: ADVANCED SEMICONDUCTOR ENGINEERING, INC.Inventors: Chien-Fan Chen, Yu-Ju Liao
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Patent number: 11335630Abstract: A semiconductor packaging substrate and a method for fabricating the same are provided. The method includes forming a solder resist structure having a hole on a circuit structure, with a portion of the circuit structure exposed from the hole, and forming a cup-shaped solder stand on the exposed circuit layer and a hole wall of the hole. During a packaging process, the design of the solder stand increases a contact area of a solder tin ball with a metal material. Therefore, a bonding force between the solder tin ball and the solder stand is increased, and the solder tin ball can be protected from being broken or fell off. An electronic package having the semiconductor packaging substrate and a method for fabricating the electronic package are also provided.Type: GrantFiled: March 27, 2020Date of Patent: May 17, 2022Assignee: PHOENIX PIONEER TECHNOLOGY CO., LTD.Inventors: Pao-Hung Chou, Chun-Hsien Yu, Shih-Ping Hsu
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Patent number: 11329059Abstract: A semiconductor device, the device including: a first level overlaid by a first memory control level; a first memory level disposed on top of said first control level, where said first memory level includes a first thinned single crystal substrate; a second memory level, said second memory level disposed on top of said first memory level, where said second memory level includes a second thinned single crystal substrate, where said memory control level is bonded to said first memory level, and where said bonded includes oxide to oxide and conductor to conductor bonding.Type: GrantFiled: December 31, 2021Date of Patent: May 10, 2022Assignee: MONOLITHIC 3D INC.Inventors: Zvi Or-Bach, Jin-Woo Han, Brian Cronquist
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Patent number: 11329023Abstract: A method for interconnecting a first conductor and a second conductor includes forming a layer of substantially pure copper on the first conductor, applying a copper sintering material to the first conductor, the second conductor, or both, and interconnecting the first conductor and the second conductor by sintering the copper sintering material so as to form a copper-copper interface that includes the layer of substantially pure copper, the second conductor, and the copper sintering material.Type: GrantFiled: August 24, 2020Date of Patent: May 10, 2022Assignee: Schlumberger Technology CorporationInventors: Mark Alex Kostinovsky, Steven O. Dunford, Lweness Mazari
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Patent number: 11322419Abstract: A method includes forming a polymer layer covering a metal via in a wafer, grooving the wafer to form a trench, wherein the trench extends from a top surface of the polymer layer into the wafer, and performing a die-saw on the wafer to separate the wafer into a plurality of device dies. A kerf passes through the trench. One of the device dies is placed over a carrier. An encapsulating material is dispensed over and around the device die. The method further includes pressing and curing the encapsulating material. After the encapsulating material is cured, a sidewall of the polymer layer is tilted. A planarization is performed on the encapsulating material until the polymer layer and the metal via are exposed. A redistribution line is formed over and electrically coupled to the metal via.Type: GrantFiled: August 3, 2020Date of Patent: May 3, 2022Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Ming-Yen Chiu, Hsin-Chieh Huang, Ching Fu Chang
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Patent number: 11296019Abstract: A vertically structured pad system and method can include: a platform having etch attributes, a platform top surface, and a platform side surface; a structure on the platform, the structure including a structure side surface extended up from the platform top surface terminating in a structure top surface, the structure including a structure interior surface defining a cavity within the structure, and the platform top surface exposed from within the cavity; and an interconnect structure adhered to the platform and the structure, the interconnect structure conforming with an exterior shape of the platform side surface in combination with the structure for locking the interconnect structure onto the platform and the structure.Type: GrantFiled: July 31, 2020Date of Patent: April 5, 2022Assignee: Maxim Integrated Products, Inc.Inventors: Kwang Hong Tan, Mihalis Kolios Michael, David Alan Pruitt
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Patent number: 11296065Abstract: An embodiment a structure including a first semiconductor device bonded to a first side of a first redistribution structure by first conductive connectors, the first semiconductor device comprising a first plurality of passive elements formed on a first substrate, the first redistribution structure comprising a plurality of dielectric layers with metallization patterns therein, the metallization patterns of the first redistribution structure being electrically coupled to the first plurality of passive elements, a second semiconductor device bonded to a second side of the first redistribution structure by second conductive connectors, the second side of the first redistribution structure being opposite the first side of the first redistribution structure, the second semiconductor device comprising a second plurality of passive elements formed on a second substrate, the metallization patterns of the first redistribution structure being electrically coupled to the second plurality of passive elements.Type: GrantFiled: June 15, 2020Date of Patent: April 5, 2022Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.Inventors: Shin-Puu Jeng, Techi Wong, Po-Yao Chuang, Shuo-Mao Chen, Meng-Wei Chou
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Patent number: 11296032Abstract: An array of through-silicon via (TSV) structures is formed through a silicon substrate, and package-side metal pads are formed on backside surfaces of the array of TSV structures. The silicon substrate is disposed over a carrier substrate, and an encapsulant interposer frame, such as an epoxy molding compound (EMC) interposer frame is formed around the silicon substrate. A die-side redistribution structure is formed over the silicon substrate and the EMC interposer frame, and at least one semiconductor die is attached to the die-side redistribution structure. The carrier substrate is removed from underneath the package-side metal pads. A package-side redistribution structure is formed on the package-side metal pads and on the EMC interposer frame. Overlay tolerance between the package-side redistribution wiring interconnects and the package-side metal pads increases due to increased areas of the package-side metal pads.Type: GrantFiled: May 28, 2020Date of Patent: April 5, 2022Assignee: Taiwan Semiconductor Manufacturing Company LimitedInventors: Hsien-Ju Tsou, Chih-Wei Wu, Ying-Ching Shih, Szu-Wei Lu
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Patent number: 11282785Abstract: A package includes a device die, and an encapsulating material encapsulating the device die therein. The encapsulating material has a top surface coplanar with a top surface of the device die. A coil extends from the top surface to a bottom surface of the encapsulating material, and the device die is in the region encircled by the coil. At least one dielectric layer is formed over the encapsulating material and the coil. A plurality of redistribution lines is in the at least one dielectric layer. The coil is electrically coupled to the device die through the plurality of redistribution lines.Type: GrantFiled: July 13, 2020Date of Patent: March 22, 2022Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Chen-Hua Yu, Chiang-Jui Chu, Chung-Shi Liu, Hao-Yi Tsai, Ming Hung Tseng, Hung-Yi Kuo
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Patent number: 11282795Abstract: A packaged integrated circuit device includes a frame having a cavity therein and an inner semiconductor chip within the cavity. A lower re-distribution layer is provided, which extends adjacent lower surfaces of the frame and the inner semiconductor chip. The lower re-distribution layer has an opening therein which at least partially exposes the lower surface of the inner semiconductor chip. A lower semiconductor chip is provided, which extends adjacent the lower surface of the inner semiconductor chip, and within the opening in the lower re-distribution layer. This lower re-distribution layer includes: (i) an insulating layer covering the lower surface of the frame, (ii) a re-distribution pattern disposed on the insulating layer, and (iii) a barrier layer, which is disposed on the insulating layer and surrounds at least a portion of the lower semiconductor chip.Type: GrantFiled: July 15, 2020Date of Patent: March 22, 2022Inventor: Sanguk Kim
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Patent number: 11276615Abstract: A described example includes: a die with an active surface; a cap mounted over a portion of the active surface of the die; and mold compound covering the cap and covering portions of the die, the cap excluding the mold compound from contact with the portion of the active surface of the die.Type: GrantFiled: September 17, 2019Date of Patent: March 15, 2022Assignee: TEXAS INSTRUMENTS INCORPORATEDInventors: Laura May Antoinette Dela Paz Clemente, Jerry Gomez Cayabyab
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Patent number: 11276631Abstract: A module includes a substrate, a plurality of components on an upper surface of the substrate, a component on a lower surface of the substrate, solder balls on the lower surface, sealing resin layers stacked on the upper surface and the lower surface of the substrate, and a shield film covering a side surface and an upper surface of the module. Part of each solder ball is exposed from a surface of the sealing resin layer, and the exposed parts are shaped to protrude from the sealing resin layer. The module can be connected to a mother substrate by connecting the protruding parts of the solder balls. There are gaps between the solder balls and the sealing resin layer, and the occurrence of cracks in the solder balls can be suppressed by reducing stress arising from a difference in thermal expansion coefficient between the solder and the resin.Type: GrantFiled: December 17, 2019Date of Patent: March 15, 2022Assignee: MURATA MANUFACTURING CO., LTD.Inventors: Yoshitaka Matsukawa, Akio Katsube
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Patent number: 11270974Abstract: An electronic component and a method of manufacturing an electronic component, the method including surface mounting electronic components to a printed circuit board (PCB), applying a flip-chip die integrated circuit (IC) to the PCB and underfilling the flip-chip IC to secure the PCB. The method also includes sintering a copper block to the PCB, where the copper block is in thermal communication with the IC and acts as a thermal path for removing heat generated by the flip-chip IC.Type: GrantFiled: December 10, 2019Date of Patent: March 8, 2022Assignee: FLEX LTDInventors: Cheng Yang, Dongkai Shangguan, Li Yao