Patents Examined by Matthew E. Warren
  • Patent number: 12108606
    Abstract: A nonvolatile memory device includes a substrate having an upper surface, and a gate structure disposed over the substrate. The gate structure includes at least one gate electrode layer pattern and at least one gate insulation layer pattern, which are alternately stacked along a first direction perpendicular to the upper surface. The gate structure extends in a second direction perpendicular to the first direction. The nonvolatile memory device includes a ferroelectric layer disposed on at least a portion of one sidewall surface of the gate structure. The one sidewall surface of the gate structure forms a plane substantially parallel to the first and second directions. The nonvolatile memory device includes a channel layer disposed on the ferroelectric layer, and a source electrode structure and a drain electrode structure disposed to contact the channel layer and spaced apart from each other in the second direction.
    Type: Grant
    Filed: August 22, 2022
    Date of Patent: October 1, 2024
    Assignee: SK hynix inc.
    Inventors: Jae Hyun Han, Jae Gil Lee, Hyangkeun Yoo, Se Ho Lee
  • Patent number: 12101939
    Abstract: A method of forming a memory device includes: forming a first layer stack and a second layer stack successively over a substrate, the first layer stack and the second layer stack having a same layered structure that includes a dielectric material, a channel material over the dielectric material, and a source/drain material over the channel material; forming openings that extend through the first layer stack and the second layer stack; forming inner spacers by replacing portions of the source/drain material exposed by the openings with a first dielectric material; lining sidewalls of the openings with a ferroelectric material; forming gate electrodes by filling the openings with an electrically conductive material; forming a recess through the first layer stack and the second layer stack, the recess extending from a sidewall of the second layer stack toward the gate electrodes; and filling the recess with a second dielectric material.
    Type: Grant
    Filed: August 9, 2022
    Date of Patent: September 24, 2024
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Chun-Chieh Lu, Sai-Hooi Yeong, Bo-Feng Young, Yu-Ming Lin, Chi On Chui, Han-Jong Chia, Chenchen Jacob Wang
  • Patent number: 12094831
    Abstract: Embodiments that allow both high density and low density interconnection between microelectronic die and motherboard via. Direct Chip Attach (DCA) are described. In some embodiments, microelectronic die have a high density interconnect with a small bump pitch located along one edge and a lower density connection region with a larger bump pitch located in other regions of the die. The high density interconnect regions between die are interconnected using an interconnecting bridge made out of a material that can support high density interconnect manufactured into it, such as silicon. The lower density connection regions are used to attach interconnected die directly to a board using DCA. The high density interconnect can utilize current Controlled Collapsed Chip Connection (C4) spacing when interconnecting die with an interconnecting bridge, while allowing much larger spacing on circuit boards.
    Type: Grant
    Filed: April 17, 2023
    Date of Patent: September 17, 2024
    Assignee: Tahoe Research, Ltd.
    Inventors: Mihir K. Roy, Mathew J. Manusharow
  • Patent number: 12094924
    Abstract: A capacitor structure, a semiconductor memory device including the same, a method for fabricating the same, and a method for fabricating a semiconductor device including the same are provided. The capacitor structure includes a lower electrode, an upper electrode, and a capacitor dielectric film which is interposed between the lower electrode and the upper electrode, wherein the lower electrode includes an electrode film including a first metal element, and a doping oxide film including an oxide of the first metal element between the electrode film and the capacitor dielectric film, and the doping oxide film further includes a second metal element including at least one of Group 5 to Group 11 and Group 15 metal elements, and an impurity element including at least one of silicon (Si), aluminum (Al), zirconium (Zr) and hafnium (Hf).
    Type: Grant
    Filed: January 3, 2022
    Date of Patent: September 17, 2024
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Kyoo Ho Jung, Sang Yeol Kang, Su Hwan Kim, Dong Kwan Baek, Yu Kyung Shin, Won Sik Choi
  • Patent number: 12094907
    Abstract: An image sensor includes a semiconductor substrate of first conductivity type having first and second surfaces and including pixel regions, photoelectric conversion regions of second conductivity type respectively provided in the pixel regions, and a pixel isolation structure disposed in the semiconductor substrate to define the pixel regions and surrounding each of the photoelectric conversion regions. The pixel isolation structure includes a semiconductor pattern extending from the first surface to the second surface of the semiconductor substrate, a sidewall insulating pattern between a sidewall of the semiconductor pattern and the semiconductor substrate, and a dopant region in at least a portion of the semiconductor pattern.
    Type: Grant
    Filed: April 12, 2023
    Date of Patent: September 17, 2024
    Assignee: Samsung Electronics Co., Ltd.
    Inventor: Jingyun Kim
  • Patent number: 12087810
    Abstract: A capacitor including a lower electrode; an upper electrode apart from the lower electrode; and a between the lower electrode and the upper electrode, the dielectric including a dielectric layer including TiO2, and a leakage current reducing layer including GeO2 in the dielectric layer. Due to the leakage current reducing layer, a leakage current is effectively reduced while a decrease in the dielectric constant of the dielectric thin-film is small.
    Type: Grant
    Filed: April 7, 2022
    Date of Patent: September 10, 2024
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Jinhong Kim, Changsoo Lee, Yongsung Kim, Euncheol Do, Jooho Lee, Yong-Hee Cho
  • Patent number: 12089415
    Abstract: Various embodiments of the present disclosure are directed towards an integrated chip including a semiconductor layer overlying a substrate. A ferroelectric layer overlies the substrate. A pair of source/drain structures are disposed on the semiconductor layer. A lower metal layer is disposed along a lower surface of the ferroelectric layer. An upper metal layer is disposed along an upper surface of the ferroelectric layer.
    Type: Grant
    Filed: January 6, 2022
    Date of Patent: September 10, 2024
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Yen-Chieh Huang, Hai-Ching Chen, Chung-Te Lin
  • Patent number: 12079415
    Abstract: Some embodiments include a ferroelectric transistor having an active region which includes a first source/drain region, a second source/drain region vertically offset from the first source/drain region, and a channel region between the first and second source/drain regions. A first conductive gate is operatively adjacent to the channel region of the active region. Insulative material is between the first conductive gate and the channel region. A second conductive gate is adjacent to the first conductive gate. Ferroelectric material is between the first and second conductive gates. Some embodiments include integrated memory. Some embodiments include methods of forming integrated assemblies.
    Type: Grant
    Filed: October 10, 2022
    Date of Patent: September 3, 2024
    Assignee: Micron Technology, Inc.
    Inventor: Pankaj Sharma
  • Patent number: 12069863
    Abstract: A first conductive pillar is formed. A plurality of second conductive pillars are formed at different sides of the first conductive pillar. A plurality of dielectric pillars are respectively formed between the first conductive pillar and the plurality of second conductive pillars. A channel layer is formed to continuously surround the first conductive pillar, the plurality of second conductive pillars and the plurality of dielectric pillars. A memory material layer is formed to surround the channel layer.
    Type: Grant
    Filed: August 9, 2022
    Date of Patent: August 20, 2024
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Yu-Wei Jiang, Sheng-Chih Lai, TsuChing Yang, Hung-Chang Sun, Kuo-Chang Chiang
  • Patent number: 12069868
    Abstract: A gated ferroelectric memory cell includes a dielectric material layer disposed over a substrate, a metallic bottom electrode, a ferroelectric dielectric layer contacting a top surface of the bottom electrode, a pillar semiconductor channel overlying the ferroelectric dielectric layer and capacitively coupled to the metallic bottom electrode through the ferroelectric dielectric layer, a gate dielectric layer including a horizontal gate dielectric portion overlying the ferroelectric dielectric layer and a tubular gate dielectric portion laterally surrounding the pillar semiconductor channel, a gate electrode strip overlying the horizontal gate dielectric portion and laterally surrounding the tubular gate dielectric portion and a metallic top electrode contacting a top surface of the pillar semiconductor channel.
    Type: Grant
    Filed: November 28, 2022
    Date of Patent: August 20, 2024
    Assignee: Taiwan Semiconductor Manufacturing Company Limited
    Inventors: Bo-Feng Young, Sai-Hooi Yeong, Han-Jong Chia, Sheng-Chen Wang, Yu-Ming Lin
  • Patent number: 12063785
    Abstract: A memory cell, an integrated circuit and method of manufacturing the same are provided. The memory device includes a substrate, gate layers and insulating layers, an isolation column, a channel layer, a first conductive feature, a second conductive feature, a storage layer and a pair of isolation structures. The isolation column extends through the gate layers and the insulating layers along a first direction. The channel layer laterally covers the isolation column. The first conductive feature and second conductive feature extend along the first direction and adjacent to the isolation column. The storage layer is disposed between the gate layers and the channel layer. The pair of isolation structures extends along the first direction. The pair of isolation structures includes a first isolation structure disposed between the first conductive feature and the gate layers, and a second isolation structure disposed between the second conductive feature and the gate layers.
    Type: Grant
    Filed: August 31, 2021
    Date of Patent: August 13, 2024
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.
    Inventors: Kuo-Pin Chang, Chien Hung Liu, Chih-Wei Hung
  • Patent number: 12062688
    Abstract: Some embodiments include dielectric material having a first region containing HfO and having a second region containing ZrO, where the chemical formulas indicate primary constituents rather than specific stoichiometries. The first region contains substantially no Zr, and the second region contains substantially no Hf. Some embodiments include capacitors having a first electrode, a second electrode, and a dielectric material between the first and second electrodes. The dielectric material includes one or more first regions and one or more second regions. The first region(s) contain(s) Hf and substantially no Zr. The second region(s) contain(s) Zr and substantially no Hf. Some embodiments include memory arrays.
    Type: Grant
    Filed: April 21, 2021
    Date of Patent: August 13, 2024
    Assignee: Micron Technology, Inc.
    Inventors: Richard Beeler, Matthew N. Rocklein, Timothy A. Quick, An-Jen B. Cheng, Sumeet C. Pandey
  • Patent number: 12063788
    Abstract: A thin film molecular memory is provided that satisfies criteria needed to make a molecular spintronic device, based on spin crossover complexes, competitive with silicon technology. These criteria include, device implementation, a low coercive voltage (less than 1V) and low write peak currents (on the order of 104 A/cm2), a device on/off ratio >10, thin film quality, the ability to “lock” the spin state (providing nonvolatility), the ability to isothermally “unlock” and switch the spin state with voltage, conductance change with spin state, room temperature and above room temperature operation, an on-state device resistivity less than 1 ?·cm, a device fast switching speed (less than 100 ps), device endurance (on the order of 1016 switches without degradation), and the ability of having a device with a transistor channel width of 10 nm or below.
    Type: Grant
    Filed: January 25, 2022
    Date of Patent: August 13, 2024
    Assignees: NUTECH VENTURES, GEORGIA TECH RESEARCH CORPORATION, THE TRUSTEES OF INDIANA UNIVERSITY, BOARD OF REGENTS, THE UNIVERSITY OF TEXAS SYSTEM, THE REGENTS OF THE UNIVERSITY OF CALIFORNIA
    Inventors: Peter A. Dowben, Ruihua Cheng, Xiaoshan Xu, Alpha T. N'Diaye, Aaron Mosey, Guanhua Hao, Thilini K. Ekanayaka, Xuanyuan Jiang, Andrew J. Yost, Andrew Marshall, Azad J. Naeemi
  • Patent number: 12063787
    Abstract: A memory device includes a first stacking structure, a second stacking structure, a plurality of first isolation structures, gate dielectric layers, channel layers and channel layers. The first stacking structure includes a plurality of first gate layers, and a second stacking structure includes a plurality of second gate layers, where the first stacking structure and the second stacking structure are located on a substrate and separated from each other through a trench. The first isolation structures are located in the trench, where a plurality of cell regions are respectively confined between two adjacent first isolation structures of the first isolation structures in the trench, where the first isolation structures each includes a first main layer and a first liner surrounding the first main layer, where the first liner separates the first main layer from the first stacking structure and the second stacking structure.
    Type: Grant
    Filed: January 17, 2023
    Date of Patent: August 13, 2024
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd
    Inventors: Sheng-Chen Wang, Meng-Han Lin, Sai-Hooi Yeong, Yu-Ming Lin, Han-Jong Chia
  • Patent number: 12058849
    Abstract: Described herein are IC devices that include semiconductor nanoribbons stacked over one another to realize high-density three-dimensional (3D) dynamic random-access memory (DRAM). An example device includes a first semiconductor nanoribbon, a second semiconductor nanoribbon, a first source or drain (S/D) region and a second S/D region in each of the first and second nanoribbons, a first gate stack at least partially surrounding a portion of the first nanoribbon between the first and second S/D regions in the first nanoribbon, and a second gate stack, not electrically coupled to the first gate stack, at least partially surrounding a portion of the second nanoribbon between the first and second S/D regions in the second nanoribbon. The device further includes a bitline coupled to the first S/D regions of both the first and second nanoribbons.
    Type: Grant
    Filed: November 9, 2021
    Date of Patent: August 6, 2024
    Assignee: Intel Corporation
    Inventors: Wilfred Gomes, Kinyip Phoa, Mauro J. Kobrinsky, Tahir Ghani, Uygar E. Avci, Rajesh Kumar
  • Patent number: 12058868
    Abstract: A semiconductor die comprises: a device portion comprising an array of semiconductor devices extending in a first direction; and at least one interface portion located adjacent to an axial end of the device portion in the first direction. The at least one interface portion has a staircase profile in a vertical direction. The interface portion comprises: a stack comprising a plurality of gate layers and a plurality of insulating layers alternatively stacked on top of one another, and memory layers interposed between each of the plurality of gate layers and the plurality of insulating layers.
    Type: Grant
    Filed: August 27, 2021
    Date of Patent: August 6, 2024
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Meng-Han Lin, Chia-En Huang
  • Patent number: 12058870
    Abstract: A method includes forming a stack of multi-layers, each multi-layer including a first isolation layer, a semiconductor layer, and a first metal layer; etching the stack of multi-layers to form gate trenches in a channel region; removing the first isolation layers and the first metal layers from the channel region, resulting in channel portions of the semiconductor layers exposed in the gate trenches; laterally recessing the first metal layers from the gate trenches, resulting in gaps between adjacent layers of the first isolation layers and the semiconductor layers; forming an inner spacer layer in the gaps; forming a ferroelectric (FE) layer surrounding each of the channel portions and over sidewalls of the gate trenches, wherein the inner spacer layer is disposed laterally between the FE layer and the first metal layers; and depositing a metal gate layer over the FE layer and filling the gate trenches.
    Type: Grant
    Filed: July 19, 2022
    Date of Patent: August 6, 2024
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Sai-Hooi Yeong, Bo-Feng Young, Yu-Ming Lin, Chi On Chui
  • Patent number: 12058869
    Abstract: The present disclosure provides a semiconductor structure, including a first layer including a logic device, a second layer over the first layer including a first type memory device, and a though silicon via (TSV) electrically connecting the logic device and the first type memory device.
    Type: Grant
    Filed: June 10, 2022
    Date of Patent: August 6, 2024
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.
    Inventors: Bo-Feng Young, Han-Jong Chia, Sai-Hooi Yeong, Yu-Ming Lin, Chung-Te Lin
  • Patent number: 12058847
    Abstract: Embodiments may relate to a microelectronic package that includes a first plurality of memory cells of a first type coupled with a substrate. The microelectronic package may further include a second plurality of memory cells of a second type communicatively coupled with the substrate such that the first plurality of memory cells is between the substrate and the second plurality of memory cells. Other embodiments may be described or claimed.
    Type: Grant
    Filed: June 1, 2020
    Date of Patent: August 6, 2024
    Assignee: Intel Corporation
    Inventors: Prashant Majhi, Abhishek A. Sharma, Charles Kuo, Brian S. Doyle, Urusa Shahriar Alaan, Van H Le, Elijah V. Karpov, Kaan Oguz, Arnab Sen Gupta
  • Patent number: 12051746
    Abstract: A semiconductor device structure is provided. The semiconductor device structure includes a substrate. The semiconductor device structure includes a gate stack over the substrate. The gate stack includes a first dielectric layer, a work function layer, and a gate electrode sequentially stacked over the substrate, the first dielectric layer has a thin portion and a thick portion, the thin portion is thinner than the thick portion and surrounds the thick portion, and the first dielectric layer is a single-layer structure. The semiconductor device structure includes an insulating layer over the substrate and wrapping around the gate stack. The thin portion is between the thick portion and the insulating layer.
    Type: Grant
    Filed: August 9, 2022
    Date of Patent: July 30, 2024
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Chung-Liang Cheng, Ziwei Fang