Abstract: A device for handling pot-shaped hollow bodies, more particularly transport containers for semiconductor wafers or for EUV lithography masks includes a wall, which encloses an inner space, a gripping and moving apparatus arranged in an inner space for moving the hollow body within the inner space and a wall opening which is formed by the wall, can be closed by a closure body and through which the inner space is accessible. The device includes a lid handling unit which can be detachably connected to the lid. The lid can be connected to the lid handling unit and is separated from the hollow body.

Abstract: A cross-shape transfer blade is configured to, in operation, be mounted or coupled to an end of a transfer robot arm (TRA). The cross-shape robot or transfer blade includes a plurality of raised regions to contact a backside of a workpiece or thin workpiece such that the cross-shape transfer blade supports and transports the respective workpiece between various locations within a semiconductor manufacturing plant (FAB). The cross-shape transfer blade includes a first prong structure, a second prong structure, a first wing structure, and a second wing structure. Respective ones of the plurality of raised regions are at corresponding ones of the first prong structure, the second prong structure, the first wing structure, and the second wing structure minimizing contact between the backside of the workpiece or thin workpiece and the cross-shape transfer blade when the workpiece or thin workpiece is being transferred, transported, and supported by the cross-shape transfer blade.

Abstract: An apparatus for transferring a substrate to a substrate processing chamber includes: a substrate transfer chamber including a floor surface portion having a traveling surface-side magnet provided therein and a sidewall portion having an opening for transferring the substrate therethrough; a substrate transfer module including a substrate holder and a floating body-side magnet acting a repulsive force with the traveling surface-side magnet, and configured to be movable on a traveling surface formed in a region provided with the traveling surface-side magnet by magnetic floating using the repulsive force; the substrate processing chamber connected to the substrate transfer chamber via a gate valve constituting a non-traveling region in which the substrate transfer module is not movable by the magnetic floating; and a transfer assist mechanism for assisting the transfer of the substrate by the substrate transfer module between the substrate transfer chamber and the substrate processing chamber via the non-trave

Abstract: A debris guard assembly comprises one or more flexible portions and one or more rigid portions. The debris guard assembly allows for motion of a moving component, such as, a hydraulic cylinder or a pivot arm, while preventing debris from falling into the cavity around the moving component.

Abstract: A rotary telehandler including a carriage movable on wheels, a tower mounted rotatably on the carriage, an actuating device configured for rotating the tower with respect to the carriage, a pin movable between a first position, wherein the pin prevents a relative rotation between the tower and the carriage, and a second position wherein the pin allows a relative rotation between the tower and the carriage. The telehandler includes an electric actuator and a mechanical mechanism connected or connectable to the pin and to the electric actuator, the electric actuator is configured to move, by means of the mechanical mechanism, the pin between the first position and the second position and to apply a pushing force on the pin to keep the pin in the first position for locking the telehandler in an operating condition of road travel wherein the tower is aligned with an axis of the carriage.

Abstract: A lifting control apparatus may include: a base for holding a basket containing silicon wafers; brackets provided on an outside of both ends of the base; and a driver for driving the brackets to move up and down. The driver is provided with a lead screw. The lead screw is connected with the bracket on a same side. The lead screw on one side is driven to rotate the lead screw on another side synchronously, and the lead screws on both sides are driven to move the brackets on both sides and the base between the brackets up and down together. Or the lead screws on both sides are driven to rotate synchronously, so that the lead screws on both sides drive the base between the brackets through the correspondingly brackets to move up and down together.

Abstract: A boom is configured such that, when the boom is in its fully raised position, a first section between an intermediate portion and a boom proximal portion extends upward from the boom proximal portion toward the intermediate portion and a second section between the intermediate portion and a boom distal portion extends diagonally forward and upward from the intermediate portion, and that a first straight line orthogonal to an arm support shaft and to a first cylinder support shaft and extending downward from the first cylinder support shaft passes forward of a machine body.

Abstract: A device for holding objects, e.g., driverless transport vehicles, includes a rack main frame and a pivot arm which can be pivoted relative to the rack main frame about a pivot axis extending in a longitudinal direction. The pivot arm has a first strut and a second strut which extend at a right angle to the pivot axis and are disposed parallel to each other at an offset in the longitudinal direction. One cutout is provided in the end region of each of the struts remote from the pivot axis for receiving respective fastening shafts.

Abstract: An End effector is disclosed. The exemplary end effector includes a substrate-supporting body for placing the substrate thereon; and a first array of wave generators disposed in the substrate-supporting body and configured to generate a surface wave to a backside of the substrate.

Abstract: Disclosed are a bending boom, a boom device and a work machine. The bending boom includes a middle portion and two extending portions. The middle portion is configured to connect external components. The extending portion has a first side wall and a second side wall opposite to the first side wall. The first side wall is flush with middle portion, and the second side wall is bent from middle portion towards a direction near first side wall. The two extending portions are connected to two opposite ends of middle portion. By providing the matching middle portion and extending portions, a situation in which stress concentration occurs at the middle portion can be prevented, which improves stress condition of the bending boom, and improves durability of the bending boom, the boom device and the work machine.

Abstract: The present disclosure provides a modular excavator, including a plurality of assembly modules that are detachably connected, the plurality of assembly modules including: a frame turntable base module; a track beam assembly module connected to the frame turntable base module; a track module connected to the track beam assembly module; a slewing drive module connected to the frame turntable base module; a power assembly module connected to the frame turntable base module; a counterweight module connected to the power assembly module; a cab module connected to the frame turntable base module; a fuel tank module connected to the frame turntable base module; a boom assembly module connected to the frame turntable base module; a bucket arm assembly module connected to the boom assembly module; and a work tool module connected to the bucket arm assembly module.

Abstract: The invention disclosed herein pertains to one or more rotatable arm elements that are attached to a skid-steer vehicle. Said skid-steer vehicle comprises a material loading and transfer device that requires one or more arms for lifting heavy material. Each of said arm elements comprises a Z-shaped feature that does not obstruct the doorway opening of said skid-steer vehicle when it is in a lowered and at rest position. When each of said arm elements is in a raised in-use position, they each obstruct the doorway opening of said skid-steer vehicle. The length of each said arm element is extendable and retractable when in-use. A variable counterweight device is attached to the bottom of said skid-steer vehicle for added rearward counterweight when each said arm element is in-use.

Abstract: Provided are a transfer unit and a substrate treatment apparatus which can stably vacuum-adsorb a substrate and can be used for a long time. The transfer unit includes: a robot arm; and an end effector connected to the robot arm, wherein the end effector includes: a body; a vacuum hole formed in the body; and a pad installed on the body to surround the vacuum hole and including a first pad layer and a second pad layer stacked sequentially, wherein the first pad layer has greater elasticity than the second pad layer, and the second pad layer has greater hardness than the first pad layer.

Abstract: An end effector is disclosed. Exemplary end effector includes a paddle, wherein a proximal end of the paddle is provided with a rear protrusion for positioning a substrate; a ring extending from the paddle, wherein the ring is provided with a circular protrusion for supporting the substrate; and a blade extending from the ring, wherein a distal end of the blade is provided with a front protrusion for positioning a substrate.

Abstract: A working mechanism (8) includes a lower boom (9), an upper boom (10), a middle arm (11), an arm (12), a working tool (13), a working tool cylinder (22), and a link (16). The working tool cylinder (22) is disposed on a lower surface (12B) side of the arm (12), and a cylinder guard (23) is fixed on a first link (17) of the link (16). The cylinder guard (23) is rotationally displaced in synchronization with an expanding or contracting operation of the working tool cylinder (22) and is interposed between the working tool (13) and the working tool cylinder (22) to protect the working tool cylinder (22).

Abstract: A carrier includes a carrier body, fingers attached to the carrier body, and a rotation prevention component attached to the carrier body. The fingers are configured to support a process kit ring. The rotation prevention component is configured to be disposed proximate a flat inner surface of the process kit ring to prevent rotation of the process kit ring.

Abstract: A work machine comprising a frame having laterally spaced sides and longitudinally spaced front and rear ends. The work machine additionally comprises at least one loader arms supported on the frame and shiftable relative to the frame between a raised position and a lowered position. The frame further comprises a pair of laterally spaced, longitudinally aligned lift eyes from which a full weight of the work machine can be suspended.

Abstract: There is provided a substrate processing apparatus comprising: a substrate transfer chamber having a floor provided with a first magnet a substrate transfer module including a stage on which a substrate is placed, a traveling plate disposed below the stage, and a second magnet having a repulsive force with respect to the first magnet, the substrate transfer module being configured to be movable in the substrate transfer chamber by magnetic levitation using the repulsive force; and a substrate processing chamber disposed on an upper surface side of the substrate transfer chamber to process the substrate, the substrate processing chamber having an opening having a size that allows at least a part of the stage on which the substrate is placed to pass therethrough, the opening being open toward the inside of the substrate transfer chamber.

Abstract: A work vehicle includes a vehicle body frame including a first inner frame including a first connection and a first inner projection projecting above the first connection in a height direction, a first outer frame including a second connection and a first outer projection projecting above the second connection in the height direction, and a first connection frame having a first opening and connected to the first connection and the second connection between the first inner frame and the first outer frame. A first arm hydraulic cylinder is provided to pass through the first opening. The first cover is configured to surround an outer periphery of the first arm hydraulic cylinder to cover the first opening and provided on the first connection frame to be slidably guided by the first connection frame, the first inner projection, and the first outer projection.

Abstract: A quick coupler for construction machines. An embodiment of the quick coupler comprises a housing with two opposing longitudinal walls, two opposing transverse walls, a top side, a bottom side, and a block cylinder inside the housing. The quick coupler may also comprise a locking device with a locking bolt and a drive device. The locking bolt protrudes from one of the two transverse walls in a locked position. The quick coupler may also comprise a first coupling element having a coupling end section and a second coupling element having a coupling end section hydraulically connected to one another, wherein the second coupling element is arranged on one of the two longitudinal walls of the housing.