Abstract: A substrate processing apparatus includes: a loading/unloading block; a processing station provided on one of left and right sides of the loading/unloading block; a relay block provided on one of left and right sides of the processing station; processing blocks provided side by side in a left-right direction to form the processing station, each of the processing blocks including a processing module configured to perform a process on the substrate and a main transfer mechanism configured to deliver the substrate to the processing module; and bypass transfer mechanisms provided separately from the main transfer mechanism and provided respectively for the processing blocks arranged side by side in the left-right direction to transfer the substrate between left and right blocks, wherein bypass transfer paths for the substrate transferred by the plurality of bypass transfer mechanisms have heights different from each other, and partially overlap each other in a plan view.

Abstract: A wafer transfer robot apparatus based on a direct drive motor, includes: a hand module including a hand loading a wafer from one surface and a hand arm coupled to the hand to transfer the wafer; an R-axis module; a connecting enclosing module having one end coupled to the R-axis module; and a T-axis module rotatably coupled to the connecting enclosure module.

Abstract: A failure analysis unit is a wafer conveyance unit configured to convey a wafer while holding the wafer in a semiconductor failure analysis apparatus, the wafer conveyance unit including: a placement table configured to fix a wafer at a predetermined observation position; and a wafer chuck configured to convey the wafer while holding the wafer to the observation position. The wafer chuck includes a plurality of holding members (protruding portions) provided so as to face a side surface of the wafer, and holds the wafer by sandwiching a peripheral portion of the wafer W with the plurality of holding members.

Abstract: A process module for a substrate processing tool includes a plurality of processing stations each configured to perform a process on a substrate and a mechanical indexer arranged within the process module. The mechanical indexer includes a plurality of end effectors including at least a first end effector, a second end effector, and a third end effector. Each of the plurality of end effectors extends in a radial direction from a central axis of the mechanical indexer and is configured to rotate about the central axis within the process module. The mechanical indexer is configured to position each of the plurality of end effectors at any one of the plurality of processing stations within the process module. The mechanical indexer is configured to position more than one of the plurality of end effectors at a same one of the plurality of processing stations at a same time.

Abstract: A linkage arrangement for a working machine, the linkage arrangement being connectable to a work implement. The linkage arrangement includes a single boom lifting arm extending along a longitudinal centre axis and being configured to lift the work implement, and a tilting arrangement having two hydraulically driven arms arranged in parallel and being configured to tilt the work implement relative the single boom lifting arm. Each one of the two hydraulically driven arms is hydraulically driven by a separate hydraulic tilting cylinder.

Abstract: The present invention includes a link mechanism including a movable member, a first coupling shaft, a first coupling member, a second coupling shaft, a second coupling member, and a third coupling shaft. When the movable member moves to a predetermined engagement position, a straight line connecting the first coupling shaft and the second coupling shaft to each other in a plane orthogonal the first coupling shaft and the second coupling shaft and a straight line connecting the second coupling shaft and the third coupling shaft to each other in a plane orthogonal the second coupling shaft and the third coupling shaft are orthogonal to each other.

Abstract: Described is a fork-carrier (2) for a telehandler, comprising: a frame (20) for supporting a fork equipped with an upper structure (200) comprising a gripping rod (21), which, in use, is positioned horizontally and designed to be removably attached to a coupling device (101), which is fitted to an operating arm (102) of a telehandler (10); and a lower contact element (25) designed to make contact with the rear of prongs (3) of fork; wherein the upper structure (200) is connected to the contact element (25) exclusively by means of one or more joining members (26) which are positioned inside the lateral dimensions of the supporting frame (20).

Abstract: A substrate processing apparatus including a frame, a first arm coupled to the frame at a shoulder axis having a first upper arm, a first forearm and at least one substrate holder serially and rotatably coupled to each other, a second arm coupled to the frame at the shoulder axis where shoulder axes of rotation of the arms are substantially coincident, the second arm having a second upper arm, a second forearm and at least one substrate holder serially and rotatably coupled to each other, and a drive section connected to the frame and coupled to the arms, the drive section being configured to independently extend and rotate each arm where an axis of extension of the first arm is angled relative to an axis of extension of the second arm substantially at each angular position of at least one of the first arm or the second arm.

Abstract: A door control apparatus is provided. The door control apparatus comprises a processor, a frame that includes a top frame portion and a bottom frame portion, a door control arm that is integrated as part of the frame and configured to move vertically between the top frame portion and the bottom frame portion, the door control arm including a door handle contact protrusion having a curve shaped end part, the door handle contact protrusion extending substantially perpendicularly relative to the frame, and a door interaction arm that is disposed on a surface of the frame and extends substantially perpendicularly relative to the frame.

Abstract: Electronic device manufacturing systems, robot apparatus and associated methods are described. The robot apparatus includes an arm having an inboard end and an outboard end, the inboard end is configured to rotate about a shoulder axis; a first forearm is configured for independent rotation relative to the arm about an elbow axis at the outboard end of the arm; a first wrist member is configured for independent rotation relative the first forearm about a first wrist axis at a distal end of the first forearm opposite the elbow axis, wherein the first wrist member includes a first end effector and a second end effector. The robot apparatus further includes a second forearm configured for independent rotation relative to the arm about the elbow axis; a second wrist member configured for independent rotation relative the second forearm about a second wrist axis, wherein the second wrist member comprises a third end effector and a fourth end effector.

Abstract: A substrate transfer apparatus that transfers a substrate in a vacuum chamber is provided. The substrate transfer apparatus includes: an elevating robot, a travel robot, and a substrate transfer robot. The travel robot includes: (i) a travel arm, through which a b1-st vertical through-hole and a b2-nd vertical through-hole are formed, wherein an internal slot is formed at inner area of the travel arm than where the b2-nd vertical through-hole is located, wherein the internal slot is separated from the b2-nd vertical through-hole with a partition, wherein a bottom-open-type space that connects the b2-nd vertical through-hole with the internal slot is formed in the travel arm, and wherein an internal wiring hole that connects the b1-st vertical through-hole with the internal slot is formed in the travel arm, (ii) a b-th driving motor installed in the internal slot, and (iii) a b-th speed reducer installed in the b2-nd vertical through-hole.

Abstract: A lift arm structure for a power machine with a frame can include a lift arm and an electrical lift actuator. The lift arm can be configured to be movably secured to the frame to extend along a lateral side of the frame. The electrical lift actuator can be secured to the lift arm within a pocket defined by the lift arm and can be configured to extend and retract between the lift arm and the frame of the power machine to raise and lower the lift arm.

Abstract: The present invention proposes a mobile robotic system capable of carrying out the movement, manipulation and precise installation of industrial loads (pipes, plates, equipment, parts, materials, etc.), using a single operator for that and presenting ease of use. The invention is basically composed of an anthropomorphic-type industrial robot (3) and a crawler mobile platform (11). The load capacity of the invention is limited by the maximum load capacity of the industrial robot employed. The precise positioning step has a special force amplification system (external exoskeleton) capable of moving a load fixed on the industrial robot wrist (position and orientation) with the force actions of an operator, directly on the robot wrist, or by means of a security extension. The robotic system can be controlled by radio control, capable of allowing both the control of the robot and the movement of the platform.

Abstract: A robot apparatus is configured to extend a first end effector into a first process chamber and extend a second end effector into a second process chamber. The first process chamber and the second process chamber are separated by a first pitch. The robot apparatus is further configured to retract the first end effector and the second end effector into a rectangular mainframe while maintaining a distance between the substrates bounded by the first pitch throughout a retraction process, and fold the first end effector and the second end effector inward within a sweep diameter defined by a width of the rectangular mainframe.

Abstract: A wafer processing apparatus may include a plurality of equipment front end modules (EFEMs), a wafer transfer chamber, a wafer processing chamber, and a wafer transfer arm. Each of the plurality of EFEMs may include an EFEM chamber, a plurality of load ports provided at a side of the EFEM chamber, and a load lock provided at a side of the EFEM chamber to overlap with at least one of the plurality of load ports in a vertical direction.

Abstract: A robot 100 includes a base 1 having side portions, an arm 3 rotatably coupled to the base 1, and a hand 8 coupled to the arm 3. A joint between the arm 3 and the base 1 is closest to a first side portion 11a in a plan view. The base 1 houses control components. A second side portion 11b is provided with a maintenance area 12 on which a maintenance component such as a first board 24 is disposed. The maintenance area 12 is used for maintenance of the maintenance component.

Abstract: A work vehicle according to the present embodiment comprises: a vehicle body; a pair of traveling parts disposed on both sides of the vehicle body; a cabin which is a front part of the vehicle body and disposed above the traveling parts; an arm which is disposed above the traveling parts and extends forward from behind the cabin and which is pivoted so as to be capable of swinging upward and downward; a first link for connecting the vehicle body and the arm; a cylinder for swinging the arm; a second link which is disposed between the arm and the traveling parts, and restricts the swing direction of the arm; a first pivoting part for pivoting one end of the first link; and a sixth pivoting part for pivoting the other end of the second link at a protruding end of a protrusion part protruding from the arm.

Abstract: A part transporting device for transporting a consumable part includes a part housing, a container, a robot arm, and a moving mechanism. The part housing accommodates an unused consumable part and a used consumable part. The container has an opening to be connected to a processing device and a gate valve for opening or closing the opening, the container being configured to accommodate the part housing. The robot arm is provided in the container and has at least one end effector at a tip end thereof, the robot arm transferring the used consumable part from the processing device through the opening to accommodate the used consumable part in the part housing and transferring the unused consumable part from the part housing to load the unused consumable part the processing device through the opening. The moving mechanism has a power source and is configured to move the part transporting device.

Abstract: An arm unit of a transfer robot includes an R-axis motor configured to relatively rotate a second arm with respect to a first arm. The R-axis motor is fixed to the first arm so as to protrude to below an arm axis holding portion of the first arm with an output shaft thereof facing upward. The output shaft is configured to penetrate the first arm from below. The output shaft is fixed to the second arm by a shaft fixing portion.

Abstract: A substrate transfer robot for transferring a substrate in a vacuum chamber, includes: a transfer arm platform having coupling holes, wherein link connecting members with blades are engaged at front and rear areas of the transfer arm platform and a support shaft of a lower support is inserted into the lower space of one of the coupling holes; and a first and a second transfer arm part each including an end effector for supporting the substrate, multiple transfer link arms, multiple subordinate link arms and a common link arm that are connected to each other or to the transfer arm platform, wherein, the transfer link arms include at least some of drive shafts, interlocked with transfer driving motors or speed reducers, and output shafts interlocked with the drive shafts, and wherein the end effectors are positioned at different heights from each other through using a bracket.