Abstract: Disclosed is an apparatus for transferring a substrate. The apparatus includes a transfer robot, a linear rail unit including a movable plate on which the transfer robot is mounted and a running shaft on which the movable plate travels, and a particle diffusion prevention member that prevents diffusion of particles to the outside by maintaining a differential pressure between the movable plate and the running shaft.

Abstract: A includes a control arm comprising a first link and a second link, a lift arm articulately connected to the first link by a first joint and a first actuating means articulately connected to the first link by the second joint. The second link and the lift arm are adapted to permit a pivotal connection with a loading means by a third joint and a fourth joint, wherein the lift arm is adapted to lift and lower the loading means and the first actuating means is adapted for actuating the control arm, by acting on the first link in at least a direction from the first actuating means, to achieve a rotational movement of the loading means around said fourth joint, when the loading means is connected to the control arm and to the lift arm. During action of the first actuating means on the first link in the direction from the first actuating means a decrease of a distance between the second joint and the third joint is achieved.

Abstract: A tubing assembly for a work vehicle includes a tube having a first end and a second end, wherein the first end is configured to fluidly couple to a fluid source. The tubing assembly also includes a fitting positioned at the second end of the tube. The fitting includes a first radially-expanded portion configured to engage a first side of a plate that is configured to form part of a chassis of the work vehicle, a threaded portion configured to extend through an opening in the plate, and a second radially-expanded portion configured to engage a second side of the plate to trap the plate between the first radially-expanded portion and the second radially-expanded portion, thereby coupling the tube to the plate.

Abstract: The disclosure concerns a pivoting unit for a handling robot for opening a flap (e.g. door) of a motor vehicle body, comprising a mounting flange, a gripper arm and a first gripping tool for gripping an engagement on the flap to be opened, the first gripping tool being mounted on the gripper arm, and a pivoting head for pivoting the gripper arm between an initial position and an engaged position. The disclosure provides that a second gripping tool is also mounted on the gripper arm, and that the two gripping tools on the gripper arm are adapted to be inserted in different insertion directions into engagement with the openable flap of the motor vehicle body, in particular from top to bottom for the first gripping tool and from bottom to top for the second gripping tool. The disclosure further comprises an associated method.

Abstract: A substrate processing apparatus including a frame, a first arm coupled to the frame at a shoulder axis having a first upper arm, a first forearm and at least one substrate holder serially and rotatably coupled to each other, a second arm coupled to the frame at the shoulder axis where shoulder axes of rotation of the arms are substantially coincident, the second arm having a second upper arm, a second forearm and at least one substrate holder serially and rotatably coupled to each other, and a drive section connected to the frame and coupled to the arms, the drive section being configured to independently extend and rotate each arm where an axis of extension of the first arm is angled relative to an axis of extension of the second arm substantially at each angular position of at least one of the first arm or the second arm.

Abstract: A boom clamp attachment has a gib frame, a boom quick-connect, a shaft arm axle, a shaft arm torque assembly, and at least one gib clamp assembly. The gib clamp assembly has a clamp support member having a first gib clamp at a first end and second gib clamp at a second end. The gib clamp has a fixed finger and a moveable finger, the moveable finger controlled via hydraulics. The boom clamp may hoist, tilt, and position an assembled section of panels.

Abstract: The movable lifting system (1, 2) comprising a telehandler (1) which in turn comprises: a movable lifting arm (11) provided at a distal end, with a coupling device (111) for the removable fixing of equipment (112) or of the type adapted to grip loads, such as a fork, grippers or the like, or of the type suitable for lifting persons and work tools such as a basket or the like; and a powertrain assembly for movement on the ground. The system (1, 2) further comprises: control means, arranged on board the telehandler (1), provided to manage the operation of the powertrain assembly, adapted to receive command signals and adapted to regulate the operation of the assembly according to the command signals; and command means (2), separate from the telehandler (1), to be activated by an operator (3) and predisposed to produce the command signals.

Abstract: A work machine includes: a vehicle body front part to which a front wheel is attached; a vehicle body rear part which is coupled to the vehicle body front part through an articulated mechanism and to which a rear wheel is attached; a working equipment coupled to the vehicle body front part; a headlight supported by the vehicle body front part and arranged above the front wheel; and a three-dimensional measurement device arranged on an outer side of the headlight in a vehicle width direction that is in parallel with a rotation axis of the front wheel.

Abstract: Embodiments of the present disclosure provide a plasma processing system, comprising: a transfer chamber, the transfer chamber including a plurality of sidewalls, each sidewall being connected with a plurality of process chambers; each process chamber including a base therein, the base including a central point; wherein at least two process chambers connected to a same sidewall form one process chamber group, wherein a first distance is provided between the central points of two bases in a first process chamber group, and a second distance is provided between the central points of two bases in a second process chamber group, the first distance being greater than the second distance; and the transfer chamber comprises a mechanical transfer device; a rotating pedestal includes two independently movable robot arms thereon, the two robot arms; and the two robot arms both include a plurality of rotating shafts and a plurality of rotating arms, wherein a remote rotating arm of each robot arm further includes an end

Abstract: A substrate aligner providing minimal substrate transporter extend and retract motions to quickly align substrate without back side damage while increasing the throughput of substrate processing. In one embodiment, the aligner having an inverted chuck connected to a frame with a substrate transfer system capable of transferring substrate from chuck to transporter without rotationally repositioning substrate. The inverted chuck eliminates aligner obstruction of substrate fiducials and along with the transfer system, allows transporter to remain within the frame during alignment. In another embodiment, the aligner has a rotatable sensor head connected to a frame and a substrate support with transparent rest pads for supporting the substrate during alignment so transporter can remain within the frame during alignment. Substrate alignment is performed independent of fiducial placement on support pads.

Abstract: A coupling assembly for releasably mounting, and hydraulically coupling, a tool to a work machine. The coupling assembly includes a mount attachable to the work machine and configured to receive the tool in a mounted position of the tool, a rigid retaining body movable in translation relative to the mount along a translation axis between a retaining position for retaining the tool to the mount and a release position for releasing the tool from the mount, a first and a second actuator operable to move the retaining body between the retaining and release positions, and a hydraulic coupling manifold movable in translation relative to the mount along the translation axis for hydraulically coupling the tool to the machine, wherein the hydraulic coupling manifold uses the first and second actuators as guides for moving along the translation axis.

Abstract: The present invention refers to a substrate holder loading device to be used in a clean room and a clean room treatment device containing such substrate holder loading device. Furthermore, the present invention refers to a method of loading a substrate holder with a first substrate, more preferably with a first and a second substrate.

Abstract: The disclosed system includes a robot system with a robot having a modular platform and a controller operably coupled to the robot. The modular platform includes a plurality of mount connectors and a plurality of receiving port connectors. Each of the mount connectors is configured to attach to the robot and each of the receiving ports is configured to connect to an end effector such as a gripper, sensor or other tool. The modular platform is configured to mount to the robot in a plurality of orientations and to connect with a plurality of different end effectors.

Abstract: A multi-level hand apparatus includes a plurality of hands arranged in a vertical direction, and a plurality of clamp members disposed at the plurality of hands, respectively. Each of the clamp members is movable in a forward-rearward direction to clamp and release a workpiece. The apparatus further includes a movable head member extending in the vertical direction. Each clamp member includes a fixed spring receiving member, a movable spring receiving member movable in the forward-rearward direction, and a compression spring member arranged between the fixed spring receiving member and the movable spring receiving member. In each clamp member, the movable spring receiving member, as moving rearward, comes into contact with a front surface of the movable head member in a manner such that the movable spring receiving member is capable of moving in the vertical direction relative to the front surface.

Abstract: A quick-change coupler device for coupling and uncoupling an implement attachment to a construction vehicle comprises a support member; first receiving members on one side of the support member for receiving a first coupling member; second receiving members disposed on the other side for receiving a second coupling member, the second receiving members having a locking member moveable between a release position for coupling or uncoupling the implement attachment and a coupling position for retaining the implement attachment on the coupler device; and a mechanical signaling mechanism for monitoring the locking status. The mechanical signaling mechanism comprises an assembly for signaling failure of the second coupling member to engage in the second receiving members.

Abstract: A substrate transfer device and method as well as a photolithography apparatus are disclosed. The device includes a motion platform and a plurality of transfer stages which are arranged side-by-side along a first direction are configured to transfer substrates in a second direction that is perpendicular to the first direction. The motion platform includes a base table and a plurality of motion tables in movable connection with the base table. Each of the transfer stages is connected to, and movable in the first direction with, a corresponding one of the motion tables. A pre-alignment assembly for pre-alignment and positional adjustments of the substrates is provided on the motion platform and on the transfer stages. When one of the transfer stages is unloading a first substrate, another one of the transfer stages receives a second substrate and effectuates its first- and second-directional pre-alignment with the aid of the pre-alignment assembly.

Abstract: A substrate gripping hand which grips a substrate with a disc shape, includes a base plate, and a guide member provided at the base plate, and having a L-shape when viewed from a horizontal direction, the guide member having a shape in which a base end portion of a bottom surface has a horizontal portion and a first corner portion which is a corner portion formed by the bottom surface and an inner wall surface has a curve line shape.

Abstract: A substrate support device includes a blade and at least one pad provided on the blade to support a substrate. The pad includes a first fixed member, a second fixed member, and a bridge. The first fixed member is provided at an outer portion of the blade. The outer portion is located outside an outer circumference portion of the substrate when the substrate is supported on the pad. The second fixed member is provided at an inner portion of the blade. The inner portion is under the substrate when the substrate is supported on the pad. The bridge is flexible and connects the first fixed member and the second fixed member to support the outer circumference portion of the substrate. An upper surface of the bridge is inclined downward from the first fixed member toward the second fixed member when the substrate is not supported on the pad.

Abstract: The present invention relates to a safety device for a quick coupler and, more particularly, to a safety device for a quick coupler, the safety device having an improved structure that is configured to improve the structure of a locking device, the locking device preventing the fixing hook from being arbitrarily released from a locking engagement, by using a safety plate that is laterally moved in a sliding manner by an elastic force of a DIE spring after a fixing hook and a first attachment pin are assembled together.

Abstract: A substrate gripping mechanism, for gripping a substrate between a fixed clamp portion to be engaged with an edge portion of a substrate and a movable clamp portion configured to reciprocate with respect to the fixed clamp portion by a reciprocating driving unit, includes an interlocking member configured to move together with the movable clamp portion, and a first sensor and a second sensor, each having a detection region and configured to detect whether or not the interlocking member exists in the detection region. The interlocking member has a first to a fourth portion connected in a reciprocating direction of the movable clamp portion. The first to the fourth portion have shapes to make detection results thereof by the first sensor and the second sensor different from each other.