Abstract: In one embodiment, a device in a network intercepts a Domain Name System (DNS) query sent by a node in the network to a DNS service. The device inserts metadata information about the node into the DNS query before sending the DNS query on to the DNS service. The device extracts policy information regarding the node from a DNS response sent from the DNS service back to the node in response to the DNS query. The device implements a network policy for the node within the network based on the policy information extracted from the DNS response.

Abstract: Secure substring searching on encrypted data may involve a first preprocessing comprising fragmenting a plaintext string slated for remote secure storage, in a plurality of overlapping plaintext substrings. A second preprocessing encrypts these substrings into ciphertexts (e.g., utilizing Frequency-Hiding Order Preserving Encryption) further including position information of the substring. A search index and a secret state result from the first and second preprocessing. The ciphertexts and search index are outsourced to a database within an unsecure server. An engine within the server determines candidate ciphertexts matching a query request received from a secure client. The engine returns ciphertexts to the client for decryption according to the secret state. Preprocessing may be delegated to a third party for outsourcing search index/ciphertexts to the server, and the secret state to the client.

Abstract: An electrostatic chuck includes an embedded electrode receiving a first voltage to electrostatically attract a semiconductor substrate to the electrostatic chuck. A plurality of current loops are disposed in at least one of the electrostatic chuck and an edge ring surrounding the electrostatic chuck. The current loops are laterally spaced apart. Each current loop is a wire formed into a loop. One or more DC power sources are electrically connected to the current loops. A controller supplies the first voltage to the embedded electrode, supplies a DC current to the current loops from the power sources, and controls the power sources. Each current loop is independently operable and generates a localized DC magnetic field proximate to the semiconductor substrate on receiving the DC current during plasma processing of the semiconductor substrate to adjust the plasma processing of the semiconductor substrate. The localized DC magnetic field does not generate plasma.

Abstract: A communication system for managing usage rights to a vehicle, having a vehicle which includes a communication module inside the vehicle, a mobile terminal, and an electronic vehicle key which communicates with the communication module inside the vehicle and with the mobile terminal and allocates usage rights for the vehicle. Allocation of usage rights for the vehicle, which are carried out by the electronic vehicle key, are controlled by the mobile terminal.

Abstract: Alignment systems employing actuators provide relative displacement between lid assemblies of process chambers and substrates, and related methods are disclosed. A process chamber includes chamber walls defining a process volume in which a substrate may be placed and the walls support a lid assembly of the process chamber. The lid assembly contains at least one of an energy source and a process gas dispenser. Moreover, an alignment system may include at least one each of a bracket, an interface member, and an actuator. By attaching the bracket to the chamber wall and securing the interface member to the lid assembly, the actuator may communicate with the bracket and the interface member to provide relative displacement between the chamber wall and the lid assembly. In this manner, the lid assembly may be positioned relative to the substrate to improve process uniformity across the substrate within the process chamber.

Abstract: Described are systems and methods for evaluating cyber effects in a cyber-physical system (CPS). In some embodiments, a simulation model of the CPS is built and includes an attacked component set and an evaluated component set. A control component is inserted into the simulation model. One or more direct connections between the attacked component set and the evaluated component set are disconnected. One or more indirect connections are identified and then disconnected from the simulation model with disconnected direct connections. The one or more direct connections and indirect connections are routed through the control component. A cyber-attack on the attacked component set can be simulated by configuring the control component to control outputs transmitted via a routed connection, the routed connection being one of the routed direct or indirect connections. The simulated components of the simulation model can be progressively and iteratively replaced by corresponding components from the CPS.

Abstract: A substrate processing apparatus is provided to deposit a film including a reaction product on a substrate by repeating a supply cycle of sequentially supplying at least two kinds of reaction gases reactable with each other to a surface of the substrate in a chamber. The substrate processing apparatus includes a turntable provided in the chamber and having a concave portion for receiving the substrate formed in its surface and through-holes formed in the concave portion, a lifting mechanism including lift pins used when transferring the substrate placed on the concave portion, and a control unit configured to control the lifting mechanism. The control unit controls the lifting mechanism to carry the substrate out of the concave portion by moving the lifting pins upward in a vertical direction and inward in a radial direction of the turntable after the lifting pins contact the substrate through the through-holes.

Abstract: A method for detecting co-located virtual machines (VMs) includes receiving one or more VM deployment requests from a user device. One or more VMs are deployed in a cloud infrastructure based on the VM deployment requests. The cloud infrastructure includes one or more host machines each having a trusted execution environment (TEE). Evidence is collected for each of the one or more VMs using a trusted application running in the respective TEE of the respective host machine. The collected evidence is inspected to determine whether at least two VMs in the one or more VMs share a same host machine in the one or more host machines. At least one VM is requested to be redeployed to meet a policy based on results of inspecting the collected evidence.

Abstract: A method and apparatus for a pedestal is provided. In one embodiment, the pedestal includes a body comprising a ceramic material having a flange, one or more heating elements embedded in the body, a first shaft coupled to the flange, and a second shaft coupled to the first shaft; wherein the second shaft includes a plurality of fluid channels formed therein that terminate in the second shaft.

Abstract: A computer-implemented method includes detecting initiation of submission of content on a forum. Using a computer processor, an expertise associated with the content is determined. Using the computer processor, challenge data is determined based at least in part on the expertise. Using the computer processor, expected response data corresponding to the challenge data is determined. The challenge data is presented. An entered response is received in reply to the challenge data. The content is allowed to be posted on the forum based at least in part on comparing the entered response data to the expected response data.

Abstract: A computer-implemented method is provided for communicating authorized data to a destination computer system. The method may include receiving a data transmission including a data stream; introspecting the data stream to find at least one identifier; matching the located identifier with at least one validation profile; retrieving one reference data set from the matched validation profile; parsing a portion of the data stream to extract at least one key piece of information; and validating the key piece of information extracted from the data stream against the retrieved reference data sets to determine the existence of mismatched data. Validated data can then be communicated to the destination system as authorized data.

Abstract: A chemical deposition apparatus having a chemical deposition chamber formed within the chemical isolation chamber includes a gas seal. The chemical deposition chamber includes a showerhead module having a faceplate with gas inlets to deliver reactor chemistries to a wafer cavity for processing a semiconductor substrate. The showerhead module includes primary exhaust gas outlets to remove reaction gas chemistries and inert gases from the wafer cavity. An inert gas feed delivers seal gas which flows radially inwardly at least partly through a gap between a step of the showerhead module and the pedestal module to form a gas seal. Secondary exhaust gas outlets withdraw at least some of the inert gas flowing through the gap to provide a high Peclet number.

Abstract: The present application describes a method, system, and non-transitory computer-readable medium for end-to-end encryption during a secure communication session. According to the present disclosure, a first device initializes a secure communication session with at least one second device. Initializing the secure communication session includes transmitting an invitation to a secure communication session to the at least one second device. The first device subsequently receives the token from the at least one second device and validates the token. When the token is invalid, the first devices terminates the secure communication session. However, when the token is valid, the first device performs a three-way handshake with the at least one second device to negotiate a first encryption key and a second encryption key.

Abstract: A apparatus includes a susceptor and a non-reactive gas source. The susceptor has through holes and a wafer support surface. Each through hole includes a lift pin and a lift pin head. The lift pin has a vertical degree of motion in the through hole to lift up or place a wafer on the susceptor. The lift pin head has at least one flow channel structure running from its first surface at least partially exposed to a bottom side of the susceptor through its second surface exposed to a top side of the susceptor wherein the lift pin. The non-reactive gas source is configured to flow a gas to a backside of the wafer through the flow channel structure through the bottom side of the susceptor.

Abstract: Disclosed are a substrate holder and a semiconductor manufacturing apparatus including the substrate holder. The substrate holder provides a reaction region by making face-sealing contact with a reactor wall. The substrate holder has an elastic behavior when pressure is applied thereto while the substrate holder makes face-sealing contact with the reactor wall. The semiconductor manufacturing apparatus includes the substrate holder and a gas supply unit configured to supply gas to the reaction region provided by the reactor wall and the substrate holder.

Abstract: Blockchain applications can generate public/private key pairs without knowing the true identity of the owner of the private key. Many applications, such as in healthcare or corporate banking, require known identities for legal or regulatory reasons. Therefore a mapping between PKI certificate credentials maintained by certificate authorities and blockchain credentials is needed as one means of transferring real-world identity to blockchain applications. A method and system are provided to associate a PKI certificate to one or more accounts in a cryptographic wallet and extend the due diligence of a third-party certificate authority for identity management on blockchains.

Abstract: A solution is proposed for identifying software components in a computing system. A corresponding method comprises monitoring events relating to one or more software components of the computing system, filtering the events into filtered events according to finalizing events of corresponding event sequences ending with the finalizing events, each of the event sequences relating to a logical operation for a corresponding current software component of the software components being finalized by the finalizing events, and determining corresponding current signatures of the current software components of the filtered events, each of the current signatures being determined according to at least part of a content of the corresponding current software component for use to identify the current software component according to a comparison of the current signature with one or more known signatures of known software components.

Abstract: Systems and methods for self-provisioning of mobile devices in a deployable telecommunications network are disclosed. A telecommunications network may include an enhanced provisioning server for recording and maintaining user data and authentication information associating users with applications of the network, and for generating secure, transportable user credentials that carry the user data and authentication information on a per-user basis. An enhanced deployable mobile communication system may include local versions of the applications, as well as a local subscriber database and provisioning server. The enhanced deployable mobile system securely import individual user data and authentication information from a user's transportable credentials, and use the imported data to provision the user in the deployable mobile system. Multiple deployable systems may be used, each enabling individual users to self-provision.

Abstract: A CVD apparatus includes a process chamber, a susceptor, an auxiliary supporting part, a gas spray part, and a shadow frame. The susceptor may be in the process chamber to support and heat a mother substrate. The auxiliary supporting part may be mounted on the susceptor in a tetragonal frame form to support and heat an edge of the mother substrate supported by the susceptor. The gas spray part may be in the process chamber to face the susceptor and may spray a process gas to the mother substrate. The shadow frame may cover an edge of the auxiliary supporting part and an edge of the susceptor extending from the edge of the auxiliary supporting part.

Abstract: An apparatus for processing a flexible substrate is provided including a vacuum chamber having a first chamber portion, second chamber portion and third chamber portion. The apparatus further includes an unwinding shaft supporting the flexible substrate to be processed and a winding shaft supporting the flexible substrate after processing, wherein the unwinding shaft and the winding shaft are disposed in the first chamber portion, a first wall separating the first chamber portion from the second chamber portion, wherein the first wall is inclined with respect to a vertical and horizontal orientation, a coating drum having a first portion disposed in the second chamber portion and a second portion disposed in the third chamber portion, and a plurality of processing stations disposed at least partially in the third chamber portion, wherein a majority of the plurality of the processing stations are disposed below a rotational axis of the coating drum.