Patents Examined by Mofoluwaso S Jebutu
  • Patent number: 11248308
    Abstract: A substrate holder prevents a substrate to be bent or damaged owing to inward declining of a seal lip. The substrate holder with an opening includes a seal, and a seal support which has a seal support surface, and is formed on an outer circumference of the opening. The seal includes a seal body and a seal lip. At least a part of the seal support surface has an inclination angle that allows an inner end of the seal support surface to approach the plane on which the substrate is to be positioned. The inner end of the seal support surface is positioned on an inner side than the seal lip.
    Type: Grant
    Filed: February 13, 2020
    Date of Patent: February 15, 2022
    Assignee: EBARA CORPORATION
    Inventors: Shoichiro Ogata, Matsutaro Miyamoto
  • Patent number: 11214888
    Abstract: According to an embodiment, there is provided a substrate holder including: a first holding member; a second holding member; a clamper configured to clamp the first holding member and the second holding member; and a seal including a contact portion configured to contact at least one of the first holding member, the second holding member, and a substrate when the first holding member and the second holding member are clamped, in which the contact portion includes, in cross-section viewed in a plane passing a center of the substrate and perpendicular to a surface of the substrate, a first arc portion centered on a first point and a second arc portion centered on a second point different from the first point, and at least one of the first arc portion and the second arc portion has a curvature radius of 0.01 mm to 0.1 mm.
    Type: Grant
    Filed: November 7, 2019
    Date of Patent: January 4, 2022
    Assignee: EBARA CORPORATION
    Inventor: Matsutaro Miyamoto
  • Patent number: 11214878
    Abstract: Functionalized substrates are provided comprising a substrate and a plurality of transition metal dichalcogenide (TMD) heterostructures on a surface of the substrate, each TMD heterostructure comprising a TMD shell over a heterogeneous nucleation site, thereby providing a core-shell heterostructure, the heterogeneous nucleation site composed of a heterogeneous nucleation material; and a TMD wing extending outwardly from the core-shell heterostructure and non-parallel to and above the substrate surface. Electrocatalytic systems comprising the functionalized substrates are also provided.
    Type: Grant
    Filed: January 22, 2020
    Date of Patent: January 4, 2022
    Assignee: Northwestern University
    Inventors: Yuan Li, Jennifer G. DiStefano, Xinqi Chen, Vinayak P. Dravid
  • Patent number: 11085123
    Abstract: An anode for generating ozone by electrolysis of water, a preparation method and use thereof, an ozone generating system, and a dental scaler are provided. The anode includes a titanium substrate and a composite oxide layer attached to a surface of the titanium substrate. The composite oxide layer is made of a metal oxide. Metal elements in the metal oxide comprise tin, ruthenium, manganese, titanium, and nickel, and a molar ratio of tin, ruthenium, manganese, titanium, and nickel is (200-500):(2.5-20):1:(1.5-7):(5-15).
    Type: Grant
    Filed: December 24, 2019
    Date of Patent: August 10, 2021
    Assignee: NICEFEEL MEDICAL DEVICE TECHNOLOGY CO., LTD
    Inventors: Qing Zhang, Xiaowen Liu, Gang Wang, Xinquan Liu, Jinfeng Li, Gang Zhou