Patents Examined by Mohammad Timor Karimy
  • Patent number: 7408251
    Abstract: A thin semiconductor device difficult to cause breakage of a semiconductor chip is disclosed.
    Type: Grant
    Filed: December 21, 2005
    Date of Patent: August 5, 2008
    Assignee: Renesas Technology Corp.
    Inventors: Toshiyuki Hata, Hiroshi Sato
  • Patent number: 7394128
    Abstract: A semiconductor memory (26) having a plurality of memory cells (25), the semiconductor memory (26) having a substrate (1), at least one wordline (2) and first (3) and second lines (4). Each memory cell (25) of the plurality of memory cells (25) includes a fin (15) of semiconductor material, the fin (15) having a top surface (5), first (6) and second (7) opposing sidewalls and first (8) and second (9) opposing ends. The fin (15) extends along a first direction (X). Each memory cell (25) also includes a charge-trapping layer (11) disposed on the first (6) and second (7) sidewalls of said fin (15), a patterned first insulating layer (10) disposed on the top surface (5) of the fin (15), wherein the first insulating layer (10) abuts the top surface (5) of the fin (15) and the charge-trapping layer (11). Each memory cell (25) also includes a first doping region (12) coupled to the first end (8) of said fin (15) and a second doping region (13) coupled to the second end (9) of the fin (15).
    Type: Grant
    Filed: December 15, 2005
    Date of Patent: July 1, 2008
    Assignee: Infineon Technologies AG
    Inventor: Lars Bach
  • Patent number: 7368822
    Abstract: The present invention provides an ohmic contact for a copper metallization whose heat diffusion is improved and cost is reduced. Therein, the ohmic contact is formed through a depositing and an annealing of three metal layers of Pd, Ge and Cu; and, the contact resistance of the ohmic contact is adjusted by the thicknesses of the three layers.
    Type: Grant
    Filed: March 17, 2006
    Date of Patent: May 6, 2008
    Assignee: National Chiao Tung University
    Inventors: Cheng-Shih Lee, Edward Yi Chang, Ke-Shian Chen
  • Patent number: 7335964
    Abstract: In one aspect, the invention encompasses a semiconductor processing method of forming a material over an uneven surface topology. A substrate having an uneven surface topology is provided. The uneven surface topology comprises a valley between a pair of outwardly projecting features. A layer of material is formed over the uneven surface topology. The layer comprises outwardly projecting portions over the outwardly projecting features of the surface topology and has a gap over the valley. The layer is etched, and the etching forms protective material within the gap while removing an outermost surface of the layer. The etching substantially does not remove the material from the bottom of the gap. In another aspect, the invention encompasses a semiconductor processing method of forming a material over metal-comprising lines. A first insulative material substrate is provided. A pair of spaced metal-comprising lines are formed over the substrate.
    Type: Grant
    Filed: May 6, 2005
    Date of Patent: February 26, 2008
    Inventors: Werner Juengling, Kevin G. Donohoe
  • Patent number: 7329940
    Abstract: A structure comprises a single wafer with a first subcollector formed in a first region having a first thickness and a second subcollector formed in a second region having a second thickness, different from the first thickness. A method is also contemplated which includes providing a substrate including a first layer and forming a first doped region in the first layer. The method further includes forming a second layer on the first layer and forming a second doped region in the second layer. The second doped region is formed at a different depth than the first doped region. The method also includes forming a first reachthrough in the first layer and forming a second reachthrough in second layer to link the first reachthrough to the surface.
    Type: Grant
    Filed: November 2, 2005
    Date of Patent: February 12, 2008
    Assignee: International Business Machines Corporation
    Inventors: Douglas D. Coolbaugh, Alvin J. Joseph, Seong-dong Kim, Louis D. Lanzerotti, Xuefeng Liu, Robert M. Rassel
  • Patent number: 7326593
    Abstract: The inventive method is based on the a idea of releasing a mechanical connection between the semiconductor chip and the supporting substrate during the manufacturing of the packing. The mechanical connection required for producing the electrical contacts between the semiconductor chip and the supporting substrate ensues only temporarily. As a result, a critical interface in the packing is removed thereby resulting in distinctly reducing the thermomechanical stresses.
    Type: Grant
    Filed: July 4, 2002
    Date of Patent: February 5, 2008
    Assignee: Infineon Technologies AG
    Inventors: Andreas Bischof, Knut Kahlisch, Henning Mieth
  • Patent number: 7321172
    Abstract: In one embodiment, a method including providing a semiconductor pad package having a first pad and a second pad is disclosed. A first layer comprising a first metal is deposited on the first pad using a first process. A second metal is then deposited on the first pad and the first layer using a second process. In another embodiment, the first process comprises and electroplating process, and the second process comprises a direct immersion gold (DIG) process. In a further embodiment, the first pad is a power or ground pad, and the second pad is a signal pad.
    Type: Grant
    Filed: September 14, 2005
    Date of Patent: January 22, 2008
    Assignee: Intel Corporation
    Inventors: Dustin P. Wood, Debendra Mallik
  • Patent number: 7312535
    Abstract: The objects of the present invention is to improve the impact resistance of the semiconductor device against the impact from the top surface direction, to improve the corrosion resistance of the surface of the top layer interconnect, to inhibit the crack occurred in the upper layer of the interconnect layer when the surface of the electrode pad is poked with the probe during the non-defective/defective screening, and to prevent the corrosion of the interconnect layer when the surface of electrode pad is poked with the probe during the non-defective/defective screening. A Ti film 116, a TiN film 115 and a pad metal film 117 are formed in this sequence on the upper surface of a Cu interconnect 112. The thermal annealing process is conducted within an inert gas atmosphere to form a Ti—Cu layer 113, and thereafter a polyimide film 118 is formed, and then a cover through hole is provided thereon to expose the surface of the pad metal film 117, and finally a solder ball 120 is joined thereto.
    Type: Grant
    Filed: March 18, 2004
    Date of Patent: December 25, 2007
    Assignee: NEC Electronics Corporation
    Inventors: Toshiyuki Takewaki, Noriaki Oda, Yorinobu Kunimune
  • Patent number: 7309900
    Abstract: There is provided a thin-film transistor that is formed on an insulating substrate, is capable of a high-speed operation, has small non-uniformity among devices, is hardly susceptible to device destruction due to high voltage, and is free from the effect of a parasitic transistor that forms at an edge part of an Si island. The thin-film semiconductor device is formed using a thin-film semiconductor provided on the insulating substrate and includes a gate region for formation of a channel region through which a drain current flows. The gate region has a ring shape in plan on the insulating substrate. High concentration impurity-doped regions are dividedly provided on an inside and an outside of the ring-shaped gate region, and the channel region is formed of a plurality of fan-shaped semiconductor single-crystal portions.
    Type: Grant
    Filed: March 22, 2005
    Date of Patent: December 18, 2007
    Assignee: Advanced LCD Technologies Development Center Co., Ltd.
    Inventors: Fumiki Nakano, Genshiro Kawachi, Yoshiaki Nakazaki, Shinzo Tsuboi, Takahiko Endo, Tomoya Kato
  • Patent number: 7301188
    Abstract: An image sensor includes a substrate with an epitaxial layer deposited thereon, a plurality of photodiodes buried in the epitaxial layer, and a plurality of field oxide films interposed between the photodiodes for insulating the photodiodes. Each of the field oxide films includes a trench formed on the epitaxial layer, a first oxide layer deposited on an inside of the trench, a reflective layer deposited on the first oxide film for reflecting incident light to a side of the photodiode, and a second oxide layer formed on the reflective layer.
    Type: Grant
    Filed: June 8, 2005
    Date of Patent: November 27, 2007
    Assignee: Samsung Electronics Co., Ltd.
    Inventor: Hwa-Yong Kang
  • Patent number: 7276754
    Abstract: A memory structure having a vertically oriented access transistor with an annular gate region and a method for fabricating the structure. More specifically, a transistor is fabricated such that the channel of the transistor extends outward with respect to the surface of the substrate. An annular gate is fabricated around the vertical channel such that it partially or completely surrounds the channel. A buried annular bitline may also be implemented. After the vertically oriented transistor is fabricated with the annular gate, a storage device may be fabricated over the transistor to provide a memory cell.
    Type: Grant
    Filed: August 4, 2005
    Date of Patent: October 2, 2007
    Assignee: Micron Technology, Inc.
    Inventors: Lucien J. Bissey, Kevin G. Duesman
  • Patent number: 7274085
    Abstract: A capacitor structure has a plurality of stacked conductive patterns, and each conductive pattern has a closed conductive ring, a plurality of major conductive bars arranged in parallel and electrically to the closed conductive ring, and a plurality of minor conductive bars arranged alternately with the major conductive bars and not electrically connected to the closed conductive ring. The major conductive bars and the minor conductive bars of an odd layer conductive pattern are respectively corresponding to the minor conductive bars and the major conductive bars of an even layer conductive pattern.
    Type: Grant
    Filed: March 9, 2006
    Date of Patent: September 25, 2007
    Assignee: United Microelectronics Corp.
    Inventors: Tsun-Lai Hsu, Ya-Nan Mou, Yu-Yee Liow
  • Patent number: 7271431
    Abstract: According to the present invention, the integrated circuit includes isolation field regions on a semiconductor substrate. Gate dielectrics are formed on a surface of a substrate. Gate electrodes are formed on the gate dielectrics. A photo resist is formed covering the active regions. Dummy patterns are selectively etched. A dummy substrate is selectively etched. The photo resist is then removed. A pair of spacers is formed along opposite sidewalls of the gate electrode and the gate dielectric. The source and drain are formed on the surface of said substrate and on opposite sides of the gate. Silicide is formed on the gate electrode, source, and drain. A layer of inter-level dielectric is then formed. A contact opening and metal wiring are then formed.
    Type: Grant
    Filed: June 25, 2004
    Date of Patent: September 18, 2007
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Chuan-Yi Lin, Shien-Yang Wu, Yee-Chia Yeo
  • Patent number: 7268394
    Abstract: Junction field effect transistors (JFETs) can be fabricated with an epitaxial layer that forms a sufficiently thick channel region to enable the JFET for use in high voltage applications (e.g., having a breakdown voltage greater than about 20V). Additionally or alternatively, threshold voltage (VT) implants can be introduced at one or more of the gate, source and drain regions to improve noise performance of the JFET. Additionally, fabrication of such a JFET can be facilitated forming the entire JFET structure concurrently with a CMOS fabrication process and/or with a BiCMOS fabrication process.
    Type: Grant
    Filed: January 18, 2005
    Date of Patent: September 11, 2007
    Assignee: Texas Instruments Incorporated
    Inventors: Pinghai Hao, Fan-Chi Hou, Imran Khan
  • Patent number: 7262452
    Abstract: In a method of forming a DRAM device having a capacitor and a DRAM device so formed, an interlayer dielectric having at least one layer is formed on a semiconductor substrate. The interlayer dielectric layer and a predetermined portion of the semiconductor substrate are sequentially etched to form a storage node hole. A lower electrode is conformally formed in the storage node hole and on the interlayer dielectric layer. A planarization process is performed to remove a portion of the lower electrode layer that lies on the interlayer dielectric layer and to form a lower electrode in the storage node hole. A dielectric layer and an upper electrode layer are sequentially formed on the lower electrode. The upper electrode layer and the dielectric layer are sequentially patterned.
    Type: Grant
    Filed: December 13, 2005
    Date of Patent: August 28, 2007
    Assignee: Samsung Electronics Co., Ltd.
    Inventor: Hee-Il Chae
  • Patent number: 7262503
    Abstract: The invention encompasses methods of forming insulating materials between conductive elements. In one aspect, the invention includes a method of forming a material adjacent a conductive electrical component comprising: a) partially vaporizing a mass to form a matrix adjacent the conductive electrical component, the matrix having at least one void within it. In another aspect, the invention includes a method of forming a material between a pair of conductive electrical components comprising the following steps: a) forming a pair of conductive electrical components within a mass and separated by an expanse of the mass; b) forming at least one support member within the expanse of the mass, the support member not comprising a conductive interconnect; and c) vaporizing the expanse of the mass to a degree effective to form at least one void between the support member and each of the pair of conductive electrical components.
    Type: Grant
    Filed: December 29, 2004
    Date of Patent: August 28, 2007
    Assignee: Micron Technology, Inc.
    Inventors: Werner Juengling, Kirk D. Prall, Ravi Iyer, Gurtej S. Sandhu, Guy Blalock
  • Patent number: 7259452
    Abstract: A system and method for electrically and thermally coupling adjacent IC packages to one another in a stacked configuration is provided. A flex circuit is inserted in part between ICs to be stacked and provides a connective field that provides plural contact areas that connect to respective leads of the ICs. Thus, the flex does not require discrete leads which must be individually aligned with the individual leads of the constituent ICs employed in the stack. The principle may be employed to aggregate two or more contact areas for respective connection to leads of constituent ICs but is most profitably employed with a continuous connective field that provides contact areas for many leads of the ICs.
    Type: Grant
    Filed: October 11, 2005
    Date of Patent: August 21, 2007
    Assignee: Staktek Group L.P.
    Inventors: James Douglas Wehrly, Jr., David Roper
  • Patent number: 7244666
    Abstract: For fabricating a multi-gate transistor, at least one active pattern having uniform critical dimension is formed. Epitaxy structures are grown from exposed portions of the active pattern. A channel region of the transistor is formed from at least two surfaces of the active pattern. Source and drain are formed using the epitaxy structures.
    Type: Grant
    Filed: January 31, 2005
    Date of Patent: July 17, 2007
    Assignee: Samsung Electronics Co., Ltd.
    Inventor: You-Seung Jin
  • Patent number: 7245016
    Abstract: A circuit layout structure for a chip is provided. The chip has a bonding pad area, a nearby device area, and a substrate. The circuit layout structure essentially comprises a plurality of circuit layers, a plurality of dielectric layers and a plurality of vias. The circuit layers are sequentially stacked over the substrate. Each dielectric layer is sandwiched between a pair of adjacent circuit layers. The vias pass through the dielectric layers and electrically connect various circuit layers. The farthest circuit layer away from the substrate has pluralities of bonding pads within the bonding pad area. The bonding pads near the device area overstrides at least one non-signed circuit layer through the furthest circuit layer away from the substrate and electrically connects to a circuit layer nearer the substrate with vias. The circuit layout structure can avoid a direct conflict of signals between the power/ground circuits and the signal circuits.
    Type: Grant
    Filed: September 7, 2004
    Date of Patent: July 17, 2007
    Assignee: VIA Technologies, Inc.
    Inventor: Chi Chang
  • Patent number: 7235859
    Abstract: An arrangement for protecting fuses/anti-fuses on chips which serve to activate redundant circuits or chip functions includes a passivation layer (e.g., hard passivation) arranged on a fully processed chip with the exception of metal contacts of a metallization level and the fuses. The chip is provided with a redistribution layer that is electrically contact-connected to the metallization level, and to a process for protecting such fuses/anti-fuses. The invention is now based on the object of ensuring sufficient protection of fuses/anti-fuses on integrated circuits. This is achieved by virtue of the fact that a dielectric (3.1, 3.2), which covers at least the region of the fuses/anti-fuses (4) and to which the redistribution layer (2) comprising the combination of materials Cu/Ni/Au is applied, is arranged on the passivation layer (5).
    Type: Grant
    Filed: October 1, 2004
    Date of Patent: June 26, 2007
    Assignee: Infineon Technologies AG
    Inventors: Axel Brintzinger, Octavio Trovarelli, David Wallis, Wolfgang Leiberg