Abstract: A method and system for cleaning opposed surfaces of a semiconductor wafer having particulate matter thereon. The method includes generating relative movement between a fluid and the substrate. The relative movement is in a direction that is transverse to a normal to one of the opposed surfaces and creates two spaced-apart flows. Each of the flows is adjacent to one of the opposed surfaces that is different from the opposed surface that is adjacent to the remaining flow of the plurality of flows. The fluid has coupling elements entrained therein, and the relative movement is established to impart sufficient drag upon a subset of the coupling elements to create movement of the coupling elements of the subset within the fluid. In this manner, a quantity of the drag is imparted upon the particulate matter to cause the particulate matter to move with respect to the substrate.

Abstract: A cleaning method for a substrate processing system capable of appropriately cleaning a housing chamber. In the substrate processing system, the number of execution times of product processing is accumulated, if the product processing to be executed next corresponds to first product processing for a subsequent lot, a time interval between preceding and subsequent lots is not longer than a predetermined time period, and a type of the last product processing performed for the preceding lot is the same as that of the first product processing to be performed for the subsequent lot. When the accumulated number of execution times is not less than a predetermined number of times, a cleaning treatment is executed, which corresponds to a chamber indicated in a system recipe set for a lot including a wafer on which the product processing is performed immediately before execution of the cleaning treatment.

Abstract: A gate valve cleaning method that can clean a gate valve that brings an atmospheric transfer chamber and an internal pressure variable transfer chamber that transfer a substrate into communication with each other or shuts them off from each other without bringing about a decrease in the throughput of a substrate processing system. Before the gate valve brings the atmospheric transfer chamber and the internal pressure variable transfer chamber into communication with each other, the pressure in the internal pressure variable transfer chamber is increased so that the pressure in the internal pressure variable transfer chamber can become higher than the pressure in the atmospheric transfer chamber.

Abstract: An autonomous floor cleaning robot includes a transport drive and control system arranged for autonomous movement of the robot over a floor for performing cleaning operations. The robot chassis carries a first cleaning zone comprising cleaning elements arranged to suction loose particulates up from the cleaning surface and a second cleaning zone comprising cleaning elements arraigned to apply a cleaning fluid onto the surface and to thereafter collect the cleaning fluid up from the surface after it has been used to clean the surface. The robot chassis carries a supply of cleaning fluid and a waste container for storing waste materials collected up from the cleaning surface.

Abstract: An apparatus for loading items to be washed with an air flow, comprising a substantially closed first channel system for guiding an air flow which loads the items to be washed. A treatment chamber for receiving the items to be washed, a blower for driving the air flow, a heater for heating the air flow before the items to be washed are loaded, and a cooler for cooling the air flow after the items to be washed have been loaded are arranged in the first channel system. Here, the first channel system has outside the treatment chamber and the blower, two branches and which are connected to one another in parallel and can be flowed through in parallel by corresponding parts of the air flow. Here, the heater is arranged in a first branch and the cooler is arranged in a second branch of said branches. The invention likewise relates to a corresponding method.

Abstract: A method of cleaning an screen in a manufacturing process step that employs a chamber including a drain line having a screen configured and disposed in the chamber above the drain line to trap soluble materials includes detecting a build-up of soluble material on the screen, ceasing a work operation in the chamber, and initiating a screen cleaning operation. The screen cleaning operation includes closing a computer operated valve fluidly connected to the drain line to fluidly isolate a portion of the chamber, automatically introducing an amount of solvent into the chamber once the computer operated valve is closed with the amount of solvent filling the chamber and/or the drain line to fully immerse the screen, and opening the operated valve after a predetermined amount of time to empty the chamber and the drain line of solvent once the soluble materials trapped on the screen are dissolved.

Abstract: A method for separating an oil-substance mixture includes communicating the oil-substance mixture into a first separator tank to separate the oil from the substance, and communicating a remaining portion of the oil-substance mixture into a second separator tank to separate the oil from the substance of the remaining portion.

Abstract: A method of treatment for inhibiting sulfur-based corrosion or scaling or for removing scaling from a surface including inhibiting corrosion caused by sulfur-containing materials, reducing corrosion caused by sulfur-containing materials, inhibiting scaling caused by sulfur-containing materials in gas, liquid or solid phase or any combination of multiple phases of materials, reducing scaling caused by sulfur-containing materials, and removing scaling caused by sulfur-containing materials. The method involves contacting sulfur-containing materials with a composition containing a turpentine liquid. The method also involves contacting corrodible surfaces or surfaces prone to scaling with a composition containing a turpentine liquid.

Abstract: Methods and apparatus for cleaning electrostatic chucks in processing chambers are provided. The process comprises flowing a backside gas comprising a reactive agent into a zone in a process chamber, the zone defined by a space between a surface of an electrostatic chuck or of a cleaning station and a surface of a substrate. The surface of the electrostatic chuck is etched with the reactive agent to remove debris. An apparatus for cleaning an electrostatic chuck is also provided, the apparatus comprising: a process chamber; an elongate arm having a reach disposed through a wall of the process chamber; an electrostatic chuck attached to the elongate arm; a cleaning station located within the reach of the elongate arm; and a reactive gas source that is operatively connected to the cleaning station.

Abstract: The present invention discloses a sterilizable washing machine using ultraviolet radiation, and a sterilizable washing method in the same. The sterilizable washing machine includes a cabinet (2) having an inlet for putting the laundry into the washing machine, a door (50) installed at the cabinet (2), for opening and closing the inlet of the cabinet (2), a tub (6) installed in the cabinet with a buffing function and containable wash water, a drum (8) rotatably installed inside the tub (6) for performing washing, a gasket G installed between the inlet of the cabinet (2) and the tub (6), for sealing the gap between the door (50) and the tub (6), and an ultraviolet light source (20) installed at the gasket (6), for radiating ultraviolet rays into the drum (8).

Abstract: A deposit removing method that can reliably remove deposit produced in plasma processing using plasma produced from a process gas containing methane gas and oxygen gas. In a chamber in which an electrode to which radio frequency electrical power is supplied is disposed, plasma processing is carried out on a substrate using the plasma produced from the process gas containing methane gas and oxygen gas, and then a cleaning step is carried out in which plasma is produced from a mixed gas containing fluorinated compound gas containing hydrogen in the chamber.

Abstract: A combination parts washer for cleaning mechanical parts of oil, grease and contaminants. The washer has a cabinet which has two reservoirs. A parts receptacle in the one of the reservoirs receives the parts which are cleaned by ultrasonic waves. An operable sink for manual cleaning is positioned on the top of the cabinet and opens to access the cabinet and reservoir. Fluid from the sink drains to the first reservoir. In the closed position, the sink covers the top of the cabinet and may be used as a sink washer using the attached brush supplied by fluid from the first reservoir. Initial pre-cleaning may be performed in the sink using the brush. Subsequent precision cleaning may be accomplished by immersion and ultrasonic cleaning in the second reservoir.

Abstract: A dishwasher and a method for detecting the quantity of dishes in the washing container of the dishwasher are provided. The method includes detecting data relating to the motor operation of a circulating pump and detecting data relating to the heat increase in the dishwasher during a pre-washing phase and a heating phase and comparing the detected data with stored target values. A quantity value for the quantity of dishes in the washing container is set based upon a comparison of the detected data with stored target values. The method also includes adapting the washing program according to the set dishes quantity value.

Abstract: An apparatus for clearing tubing includes a grip assembly connected to the pair of rollers. The grip assembly is operable to move the rollers to engage the tubing therebetween. The movement of the grip assembly is limited such that a minimum tubing gap between the rollers is equal to approximately twice a wall thickness of the tubing. The rollers are moved along the tubing to clear obstructions. The apparatus can also include a clamp assembly having one or more plates that limits movement of the grip assembly to bring the rollers no closer than the minimum tubing gap. Alternately, the grip assembly can include first and second shell halves movable between open and closed positions with a channel defined therebetween, and the rollers are mounted in the grip assembly.

Abstract: A method of cleaning a turbo pump is described. The turbo pump is coupled with a CVD chamber of depositing a material and thus accumulates the material therein. The method includes switching off the turbo pump and using another pump to pump a reactive gas, which can react with the material to form gaseous products, through the turbo pump. Thereby, the turbo pump is cleaned up and is prevented from being a particle source in subsequent CVD operations.

Abstract: Mat washing device, method of using the mat washing device, and method of washing mats. The mat washing device includes a system that may be transported on a flat bed trailer from one location to another. The mat washing device includes conveying systems, brush systems, rails systems and control mechanisms. The mat washing device may be used by placing mat, on edge, on a conveying system and conveying the mat to a first brushing system and a second brushing system. In one aspect the first brushing system includes a cable brush having a bolt secured at the end of a cable in order to beat or brush material from the mat when the cable brush is spun.

Abstract: Mat washing device, method of using the mat washing device, and method of washing mats. The mat washing device includes a system that may be transported on a flat bed trailer from one location to another. The mat washing device includes conveying systems, brush systems, rails systems and control mechanisms. The mat washing device may be used by placing mat, on edge, on a conveying system and conveying the mat to a first brushing system and a second brushing system. In one aspect the first brushing system includes a cable brush having a bolt secured at the end of a cable in order to beat or brush material from the mat when the cable brush is spun.

Abstract: Devices and methods for the effective clearing of artificial tubes, especially in-situ clearing of artificial tubes in a living being are covered in this disclosure. The devices and methods provide an elongated clearing member having a first end that is coupled to a driving mechanism and having a second working end that is subjected to repetitive motion for clearing blockages within the artificial tube. The elongated clearing member includes either a fixed or an adjustable element that selectively defines the portion of the elongated clearing member that is insertable within the artificial tube. The proximal end of the clearing member is releasably secured to the driving mechanism and the driving mechanisms may comprise a wide variety of repetitive motion drivers such as voice coil motors, piezoelectric actuators, pneumatic actuators, DC motors, etc. These devices/methods may comprise a free-standing console for hands-free operation or may comprise hand-held versions.

Abstract: An aggregate for a washing machine provided with a substantially hollow cylindrical suds container of fiberglass reinforced polymeric material and consisting of two end walls and a shell, a hollow cylindrical washing drum disposed in the suds container for rotation on a shaft about a non-vertical axis, and a unitary support structure embedded substantially completely in one of the end walls and with a bearing support adapted to receive the shaft and at least one arm extending radially from the bearing support.

Abstract: Several embodiments of cleaning systems using polyelectrolyte and various associated methods for cleaning microelectronic substrates are disclosed herein. One embodiment is directed to a system that has a substrate support for holding the microelectronic substrate, a dispenser positioned above the substrate support and facing a surface of the microelectronic substrate, a reservoir in fluid communication with the dispenser via a conduit, and a washing solution contained in the reservoir. The washing solution includes a polyelectrolyte.