Patents Examined by Natasha Campbell
  • Patent number: 8980013
    Abstract: A substrate cleaning method that includes: a step in which, while a substrate holder is being continuously rotated, a to-be-discharged position of the cleaning liquid on the substrate is changed to an eccentric position deviated from the central part of the substrate, and a gas is discharged from a gas nozzle to the central part of the substrate so as to form a dried area of the cleaning liquid under a condition in which a shortest distance between an edge of a cleaning liquid flow output from the cleaning-liquid nozzle and an edge of a gas flow output from the gas nozzle is set between 9 mm and 15 mm.
    Type: Grant
    Filed: June 1, 2012
    Date of Patent: March 17, 2015
    Assignee: Tokyo Electron Limited
    Inventors: Kousuke Yoshihara, Yuichi Yoshida, Taro Yamamoto
  • Patent number: 8956463
    Abstract: A method for cleaning a photomask-related substrate, when the photomask-related substrate is contaminated by a sulfate ion. The photomask-related substrate is cleaned with pure water to remove the sulfate ion, and a deaerating step of removing dissolved gas is performed in advance on the pure water used for cleaning. When the substrate to be cleaned is cleaned by filtering the cleaning fluid with a filter for removing foreign matter and supplying the filtered cleaning fluid to the cleaning apparatus through a supply pipe, prior to a supply of the filtered cleaning fluid to the cleaning apparatus, the filtered cleaning fluid is discharged to the outside of a system through a discharge pipe, and then the filtered cleaning fluid is supplied to the cleaning apparatus through the supply pipe.
    Type: Grant
    Filed: September 1, 2009
    Date of Patent: February 17, 2015
    Assignee: Shin-Etsu Chemical Co., Ltd.
    Inventor: Tsuneo Numanami
  • Patent number: 8956465
    Abstract: [Problem] To provide a liquid processing method with which, while alleviating a watermark occurring in the surface of a substrate, it is possible to hydrophobize the surface using a hydrophobing gas. [Solution] A substrate (W), retained in substrate retaining parts (21, 22, 23), is rotated and has a liquid compound supplied to the surface thereof, whereby a liquid process is carried out. Next, a rinse liquid is supplied to the surface of the substrate (W) while the substrate (W) is rotated, and the liquid compound is replaced with the rinse liquid. Next, supplying a hydrophobing gas for hydrophobizing the surface of the substrate (W) and supplying the rinse liquid to the surface of the substrate (W) after supplying the hydrophobing gas are repeated alternately, thus hydrophobizing the substrate (W). Next, the rinse liquid is removed by rotating the substrate (W), drying the substrate (W).
    Type: Grant
    Filed: January 11, 2013
    Date of Patent: February 17, 2015
    Assignee: Tokyo Electron Limited
    Inventor: Jun Nonaka
  • Patent number: 8951355
    Abstract: A device for clearing obstructions from a medical tube, such as a chest tube, is disclosed in various embodiments. The device features a clearance member in the form of a loop. The loop desirably has a diameter that substantially corresponds to the inner diameter of the medical tube. Also desirably, the loop presents a substantially unobstructed pathway therethrough for the flow of material from a location in the medical tube distal to the loop to a location in the medical tube proximal to the loop regardless whether the clearance member is being translated or is at rest in the medical tube. Methods of utilizing such a device are also disclosed.
    Type: Grant
    Filed: January 24, 2013
    Date of Patent: February 10, 2015
    Assignee: ClearFlow, Inc.
    Inventors: Edward M. Boyle, Jr., Nathan J. Dale, Paul C. Leonard, Alan Marc Gillinov, Sam Kiderman, William E. Cohn
  • Patent number: 8940100
    Abstract: Cleaning of a hot dip galvanized steel sheet is conducted by bringing a strip-shaped steel sheet which was treated by surface oxidation in advance into contact with a cleaning liquid for 1 second or more, and then bringing the hot dip galvanized steel sheet into contact with pure water, while continuously transferring the hot dip galvanized steel sheet. The method allows efficiently and fully washing off the acidic solution adhered to the surfaces of the hot dip galvanized steel sheet treated by surface oxidation. The invention also provides an apparatus for cleaning the hot dip galvanized steel sheet to carry out the above cleaning method.
    Type: Grant
    Filed: January 22, 2007
    Date of Patent: January 27, 2015
    Assignee: JFE Steel Corporation
    Inventors: Satoshi Yoneda, Takahiro Sugano
  • Patent number: 8940098
    Abstract: A plasma etch processing chamber configured to clean a bevel edge of a substrate is provided. The chamber includes a bottom edge electrode and a top edge electrode defined over the bottom edge electrode. The top edge electrode and the bottom edge electrode are configured to generate a cleaning plasma to clean the bevel edge of the substrate. The chamber includes a gas feed defined through a top surface of the processing chamber. The gas feed introduces a processing gas for striking the cleaning plasma at a location in the processing chamber that is between an axis of the substrate and the top edge electrode. A pump out port is defined through the top surface of the chamber and the pump out port located along a center axis of the substrate. A method for cleaning a bevel edge of a substrate is also provided.
    Type: Grant
    Filed: July 2, 2013
    Date of Patent: January 27, 2015
    Assignee: Lam Research Corporation
    Inventors: Greg Sexton, Andrew D. Bailey, III, Alan Schoepp
  • Patent number: 8926757
    Abstract: The plasma reactor defines a reaction chamber provided with a support for the metallic pieces and an anode-cathode system, and a heating means is mounted externally to said plasma reactor. The plasma process, for a cleaning operation, includes the steps of connecting the support to the grounded anode and the cathode to a negative potential of a power source; feeding an ionizable gaseous charge into the reaction chamber and heating the latter at vaporization temperatures of piece contaminants; applying an electrical discharge to the cathode; and providing the exhaustion of the gaseous charge and contaminants. A subsequent heat treatment includes the steps of: inverting the energization polarity of the anode-cathode system; feeding a new gaseous charge to the reaction chamber and maintaining it heated; applying an electrical discharge to the cathode; and exhausting the gaseous charge from the reaction chamber.
    Type: Grant
    Filed: June 9, 2009
    Date of Patent: January 6, 2015
    Assignee: Whirlpool S. A.
    Inventors: Roberto Binder, Aloisio Nelmo Klein, Cristiano Binder, Gisele Hammes
  • Patent number: 8920577
    Abstract: A method of treating a substrate comprises, in one aspect, placing a substrate having material on a surface thereof in a treatment chamber; directing a stream of a liquid treatment composition to impinge the substrate surface; and directing a stream of water vapor to impinge the substrate surface and/or to impinge the liquid treatment composition. A preferred aspect of this invention is the removal of materials, and preferably photoresist, from a substrate, wherein the treatment composition is a liquid sulfuric acid composition comprising sulfuric acid and/or its desiccating species and precursors.
    Type: Grant
    Filed: September 1, 2010
    Date of Patent: December 30, 2014
    Assignee: Tel FSI, Inc.
    Inventors: David DeKraker, Jeffery W. Butterbaugh, Richard E. Williamson
  • Patent number: 8916003
    Abstract: A wafer scrubber is disclosed, including a chamber, and a holder connecting to a spindle disposed in the chamber, wherein the holder supports a wafer, and the wafer spins to remove water on the wafer, and a meshed inner cup comprising a plurality of through holes disposed between the holder and a wall of the chamber, wherein the meshed inner cup receives water from a surface of the wafer and rotates around the spindle to release the water through the through holes.
    Type: Grant
    Filed: September 23, 2011
    Date of Patent: December 23, 2014
    Assignee: Nanya Technology Corporation
    Inventors: Jeng-Hsing Jang, Yi-Nan Chen, Hsien-Wen Liu
  • Patent number: 8911559
    Abstract: A method for cleaning an etching chamber is disclosed. The method comprises providing an etching chamber; introducing a first gas comprising an inert gas into the etching chamber for a first period of time; and transporting a first wafer into the etching chamber after the first period of time, wherein the first wafer undergoes an etching process.
    Type: Grant
    Filed: May 8, 2009
    Date of Patent: December 16, 2014
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Yu Chao Lin, Ryan Chia-Jen Chen, Yih-Ann Lin, Jr Jung Lin
  • Patent number: 8911562
    Abstract: The present invention is improved cleaning method using a composition having at least one ketone for cleaning organic residue.
    Type: Grant
    Filed: March 7, 2011
    Date of Patent: December 16, 2014
    Inventor: Marco T. Gonzalez
  • Patent number: 8906169
    Abstract: Devices and methods for the effective clearing of artificial tubes, especially in-situ clearing of artificial tubes in a living being are covered in this disclosure. An elongated clearing member includes either a fixed or an adjustable element that selectively defines the portion of the elongated clearing member that is insertable within the artificial tube. The proximal end of the clearing member is releasably secured to the driving mechanism and the driving mechanisms may comprise a wide variety of repetitive motion drivers such as voice coil motors, piezoelectric actuators, pneumatic actuators, DC motors, etc. These devices/methods may comprise a free-standing console for hands-free operation or may comprise hand-held versions. The distal working end of the clearing member may comprise tips of differing functions, including an irrigation/aspiration feature.
    Type: Grant
    Filed: October 14, 2013
    Date of Patent: December 9, 2014
    Assignee: Actuated Medical, Inc.
    Inventors: Roger B Bagwell, Brian M Park, Maureen L Mulvihill, Gabriela Hernandez Meza, Dana B Mallen, Paul L Frankhouser, Josue R Crespo, Debora L Demers
  • Patent number: 8900373
    Abstract: A method of cleaning containers in a container cleaning machine, in which the containers are moved in receptacles to a cleaning area, where both the containers and the receptacles are at least partially submerged in a dipping bath of liquid cleaning medium. The containers are positioned such that closed portions of the containers are at an equivalent or higher vertical position than mouth portions of the containers. A nozzle arrangement is used to produce a jet of a cleaning medium which impinges the interior of a corresponding container. The jet has a force which is insufficient to move the container from its resting position in its corresponding container receptacle.
    Type: Grant
    Filed: February 20, 2009
    Date of Patent: December 2, 2014
    Assignee: KHS GmbH
    Inventors: Bernd Molitor, Klaus Jendrichowski
  • Patent number: 8894773
    Abstract: A method of operating a sweeping machine, including a battery, a positioning receiver, a battery charge monitoring system and a computer, and having a cleaning and a transport mode of operation The method comprising the steps of: a) providing the computer with the location of a charging station, b) using the positioning receiver to provide the computer with the location of the sweeping machine, c) using the computer to provide an estimate of an amount of energy required to drive the sweeping machine from its location to the charging station in the transport mode, d) using the battery charge monitoring system to provide the computer with the amount of energy remaining in the battery, e) using the computer to compare the estimate with this amount of energy, and f) providing an operator notification when the amount of energy remaining in the battery falls below a predetermined amount of the estimate.
    Type: Grant
    Filed: August 19, 2009
    Date of Patent: November 25, 2014
    Assignee: Tennant N.V.
    Inventors: Alan Bryson Riach, Andrew Francis Robert Galashan
  • Patent number: 8876977
    Abstract: A method for cleaning the U-tube of the measurement cell of a densimeter, the measurement cell including an isothermic enclosure defining a measurement chamber closed by a stopper surrounded by a resilient seal, a U-tube extending inside the measurement chamber for containing a sample, the U-tube secured to the stopper at a base of the U-tube which includes free ends projecting outwardly from the measurement chamber to permit injection of the sample via an injection opening and evacuation of the sample via an evacuation opening, and means for causing the U-tube to vibrate. The method comprises, following a step of analyzing a sample, injecting a rinsing solvent into the injection opening of the U-tube, and subjecting the stopper to ultrasonic waves.
    Type: Grant
    Filed: June 30, 2011
    Date of Patent: November 4, 2014
    Assignee: Instrumentation Scientifique de Laboratoire
    Inventors: Urvantsau Viachaslau, Marie Patrick
  • Patent number: 8876978
    Abstract: An object is to reduce changes in mechanical properties of a gas turbine blade base material during repair or regeneration of a gas turbine blade. For this purpose, a gas turbine blade after being operated is washed by being immersed into a strong alkaline washing solution, and the gas turbine blade after being washed with the strong alkaline washing solution is washed with water. The gas turbine blade after being washed with water is then washed by being immersed into a weak acid washing solution, and the gas turbine blade after being washed with the weak acid washing solution is subjected to heat treatment. The gas turbine blade after the heat treatment is then immersed into a strong acid washing solution, whereby the coating formed on the surface of the gas turbine blade is removed.
    Type: Grant
    Filed: February 14, 2008
    Date of Patent: November 4, 2014
    Assignee: Mitsubishi Heavy Industries, Ltd.
    Inventors: Tetsuji Kawakami, Ikumasa Koshiro, Rumi Haruna, Yoshitaka Uemura
  • Patent number: 8869811
    Abstract: Disclosed is a liquid processing apparatus and a liquid processing method that can prevent a processing liquid from being left on a lift pin after a drying-out process of a substrate, thereby preventing the processing liquid from being attached to the back surface of the substrate after the liquid processing. The liquid processing apparatus of the present disclosure includes a holding plate that supports a substrate, a lift pin plate provided above the holding plate having a lift pin that supports the wafer from a lower side, and a processing liquid supply unit that supplies the processing liquid to the back surface of the wafer. The processing liquid supply unit is provided with a head part configured to close a penetrating hole of the lift pin plate. The processing liquid supply unit and the lift pin plate are configured to be elevated with respect to the holding plate.
    Type: Grant
    Filed: August 23, 2010
    Date of Patent: October 28, 2014
    Assignee: Tokyo Electron Limited
    Inventors: Nobuhiro Ogata, Shuichi Nagamine
  • Patent number: 8864910
    Abstract: A cleaning system is provided which includes a wash floor, a side trough adjacent the wash floor, which is positioned to receive waste from the wash floor and is attached to a filtering system. A method of using this cleaning system is also provided.
    Type: Grant
    Filed: August 13, 2013
    Date of Patent: October 21, 2014
    Assignee: Petter Investments, Inc.
    Inventors: Matthew J. Petter, Douglas A. Petter
  • Patent number: 8858723
    Abstract: Methods and apparatuses for integrated cleaning of objects comprising a sequence of wet cleaning and vacuum drying in a same process chamber. The present integrated cleaning process can eliminate moving parts, improving the system reliability. Vacuum decontamination can be included for degassing and decontaminating the cleaned objects. In an embodiment, a cleaner system combines various movements into an integrated movement to be handled by a robot, for example, to improve the throughput. For example, an integrated robot movement comprising picking up a closed container from the input load port, moving both the lid and body together, and then depositing the body and lid separately into the appropriate positions in the cleaner to be cleaned.
    Type: Grant
    Filed: November 23, 2013
    Date of Patent: October 14, 2014
    Assignees: Dynamic Micro System, Semiconductor Equipment GmbH
    Inventor: Lutz Rebstock
  • Patent number: 8852352
    Abstract: An air diffuser apparatus component in a membrane filtration unit including an air main pipe connected to an aeration blower(s), liquid supply piping that joins the air main pipe in midstream, a branch conduit horizontally connected through a gas supply pipe branched from the air main pipe, and a plurality of air diffusion pipes horizontally to the branch pipe conduit, each diffusion pipe having diffusion holes opening substantially vertically downward, is cleaned. This involves setting a gas flow rate in the branch pipe conduit in a range of 1 m/sec or more and 8 m/sec or less, and a liquid supply rate in the branch pipe conduit in a range from 0.03 L/min/mm2 to 0.2 L/min/mm2. This solid sludge clogging diffusion holes to be efficiently removed with a gas-liquid mixing fluid without stopping for a drainage treatment.
    Type: Grant
    Filed: July 4, 2007
    Date of Patent: October 7, 2014
    Assignee: Mitsubishi Rayon Co., Ltd.
    Inventors: Yoshihito Nakahara, Tetsuya Torichigai, Hirouki Okazaki