Abstract: A system and method of characterizing a work piece, comprising: scanning an ion beam across an exposed surface of a work piece, the ion beam causing the emission of secondary electrons at multiple imaging points of the scan, the number of secondary electrons emitted varying at different ones of the multiple imaging points; detecting the emitted secondary electrons at each of the multiple imaging point to form an image, the brightness of each point in the image being determined by the number of secondary electrons detected at a corresponding imaging point on the work piece; determining grain boundaries in the work piece using the differences in brightness at different points in the image, the grain boundaries defining multiple grains; directing a charged particle beam toward one or more analysis points within one or more of the grains, the number of the one or more analysis points within each grain being less than the number of imaging points within the same grain; and detecting emissions from the work piec

Abstract: A technique is disclosed for electro-optically inducing a force to fabricated samples and/or devices with laser light. The technique uses the interaction of the oscillating electric field of the laser beam in opposition with the electric field produced by an appropriate electric charge carrier to achieve a net repulsive (or attractive) force on the component holding the electric charge. In one embodiment, force is achieved when the field near the charge carrier is modulated at a subharmonic of the electric field oscillation frequency of the laser and the relative phases of the light field and electric charge carrier field are controlled to provide optimal repulsion/attraction. The effect is scalable by applying the technique to an array of charge carrier fields sequentially as well as using higher power lasers and higher carrier field voltages.

Abstract: A method, apparatus and algorithms are disclosed for operating an open electrostatic trap (E-trap) or a multi-pass TOF mass spectrometer with an extended flight path. A string of start pulses with non equal time intervals is employed for triggering ion packet injection into the analyzer, a long spectrum is acquired to accept ions from the entire string and a true spectrum is reconstructed by eliminating or accounting overlapping signals at the data analysis stage while using logical analysis of peak groups. The method is particularly useful for tandem mass spectrometry wherein spectra are sparse. The method improves the duty cycle, the dynamic range and the space charge throughput of the analyzer and of the detector, so as the response time of the E-trap analyzer. It allows flight extension without degrading E-trap sensitivity.

Abstract: Provided is an exposure apparatus that exposes a pattern on a sample, the exposure apparatus including a plurality of blanking electrodes that are provided corresponding to a plurality of charged particle beams and each switch whether the corresponding particle beam irradiates the sample according to an input voltage; an irradiation control section that outputs switching signals for switching blanking voltages supplied respectively to the blanking electrodes; and a measuring section that, for each blanking electrode, measures a delay amount that is from when the switching signal changes to when the blanking voltage changes.

Abstract: A multi-functional cutlery sterilizer, having a heating panel and a heating tube, operable via a press button panel of a main control device, so that the sterilization chamber can reach a high temperature to achieve sterilization. Also, a UV sterilization device is provided; by placing cutlery in the sterilization chamber and operating the UV sterilization device via the press button panel, UV light will illuminate and achieve UV sterilization. The cutlery sterilizer is additionally provided with UV sterilization, thereby providing an additional means for sterilization and thus equipping itself with more powerful functions. The sterilizer can sterilize cutlery made of different materials and therefore has a wider applicability. Further, cutlery not suitable for high temperature sterilization can be sterilized by UV sterilization.

Abstract: An analytical instrument is disclosed comprising a liquid chromatography system comprising a first column, a chromatographic delay line and a splitter arranged and adapted in a mode of operation to split eluent from the first column into a first portion of eluent and a second portion of eluent. The instrument further comprises a first device. The liquid chromatography system is arranged and adapted in the mode of operation: (i) to pass the first portion of eluent from the splitter to the first device such that a first part of the first portion of eluent arrives at the first device at a first time ti and a second part of the first portion of eluent arrives at the first device at a second time t2.

Abstract: The invention relates to a device for correlative scanning transmission electron microscopy (STEM) and light microscopy. In order to create a device for correlative microscopy which enables an improved combination of light microscopy and STEM methods, a STEM detector (7) according to the invention is combined with a photo-optical lens (8). This detection device combines the efficient detection by means of STEM microscopy of materials having a high atomic number, for example specific nanoparticle markers in a specimen in a liquid, such as a cell, with simultaneous light microscopy.

Abstract: A method for delivering therapeutic light ion radiation to a target volume of a subject, wherein the target volume is located at a predetermined depth from the skin, includes irradiating a surface of the skin with an array of light ion minibeams comprising parallel, spatially distinct minibeams at the surface in an amount and spatially arranged and sized to maintain a tissue-sparing effect from the skin to a proximal side of the target volume, and to merge into a solid beam at a proximal side of the target volume. A gap between the parallel, spatially distinct minibeams at the surface and a species of light ions forming the minibeams are selected such that the array merges into a solid beam at a predetermined beam energy, and across all energies for Bragg-peak spreading, at a proximal side of the target volume.

Abstract: Quantitative Secondary Electron Detection (QSED) using the array of solid state devices (SSD) based electron-counters enable critical dimension metrology measurements in materials such as semiconductors, nanomaterials, and biological samples (FIG. 3). Methods and devices effect a quantitative detection of secondary electrons with the array of solid state detectors comprising a number of solid state detectors. An array senses the number of secondary electrons with a plurality of solid state detectors, counting the number of secondary electrons with a time to digital converter circuit in counter mode.

Abstract: A multi charged particle beam apparatus includes a forming aperture array substrate, where there are formed a plurality of first openings and a plurality of second openings on the periphery of the whole plurality of first openings, each being larger than each of the plurality of first openings, to form multi-beams by the plurality of first openings, and to be able to form a plurality of calibration beams by the plurality of second openings, a shutter to select, one by one, one of the plurality of calibration beams formed by passing through the plurality of second openings, in accordance with a slide position, and a detector to detect a secondary electron including a reflected electron generated by scanning a mark by deflecting the selected calibration beam, in the state of all the multi-beams controlled to be OFF.

Abstract: A system for electrically testing an object, the system may include a scanning electron microscope that comprises a column; and nano-probe modules that are mechanically connected to the column; wherein the column is configured to illuminate areas of the object, with a beam of charged particles; wherein nano-probes of the nano-probe modules are configured to electrically contact elements of the object, during electrical tests of the object, wherein the elements of the object are located within the areas of the object.

Abstract: A method and corresponding apparatus are disclosed for analysis of a peptide-containing sample. The sample is prepared by adding isotopically-labeled peptides corresponding to endogenous peptides of interest, and the prepared sample is analyzed by liquid chromatography-mass spectrometry (LCMS). Detection in a high-resolution, accurate mass (HRAM) MS1 spectrum of a precursor ion matching an isotopically-labeled peptide triggers acquisition of an MS/MS spectrum (preferably acquired in an ion trap or other fast mass analyzer) to determine if a product ion is present matching a characteristic product ion (e.g., the y1 ion) of the isotopically-labeled peptide. If the characteristic product ion is present, then a HRAM MS/MS spectrum is acquired for detection and quantitation of the corresponding endogenous peptide.

Abstract: An electron beam irradiation device includes a stage, a main body unit, and a first mechanism. The main body unit includes a substrate, first members, and a first layer. The first members are arranged to be separated in a second direction intersecting a first direction and is provided at a first surface of the substrate opposing the stage. The first layer is provided between the stage and the first members and between the stage and the substrate. The first layer converts a light ray into an electron beam. The first mechanism is provided in the stage and moves the stage in the second direction. A distance of the movement is not less than a spacing between a center in the second direction of the first member and a center in the second direction of one other first member adjacent to the first member.

Abstract: The infrared scene projector has a support structure having an airtight chamber; an image projector secured to the support structure; a conversion chip having a substrate secured to the support structure, and an array of conversion units received on a face of the substrate, the array of conversion units being enclosed inside the airtight chamber and being optically coupled to the image projector, each one of the conversion units having at least one supporting post secured to the face of the substrate and a suspended platform held spaced apart from the face of the substrate by the at least one supporting post, the conversion chip being adapted to convert at least one of visible and near-infrared light received from the image projector into infrared radiation; and an infrared beam path extending away from the array of conversion units.

Abstract: An ion source is provided comprising one or more nebulizers and one or more targets, wherein the one or more nebulizers are arranged and adapted to emit, in use, a stream predominantly of droplets which are caused to impact upon the one or more targets and to ionise the droplets to form a plurality of ions. The ion source further comprises one or more electrodes arranged adjacent to and/or attached to the one or more targets wherein the one or more electrodes comprise one or more apertures, notches or cut-outs wherein at least some of the plurality of ions pass, in use, through the one or more apertures, notches or cut-outs.

Abstract: A calibration method for calibrating the position error in the point of interest induced from the stage of the defect inspection tool is achieved by controlling the deflectors directly. The position error in the point of interest is obtained from the design layout database.

Abstract: A technique to identify non-visual defects, such as SEM non-visual defects (SNVs), includes generating an image of a layer of a wafer, evaluating at least one attribute of the image using a classifier, and identifying the non-visual defects on the layer of the wafer. A controller can be configured to identify the non-visual defects using the classifier. This controller can communicate with a defect review tool, such as a scanning electron microscope (SEM).

Abstract: There is provided a method of introducing ions into a mass spectrometer, comprising ionising a sample using a Matrix Assisted Laser Desorption Ionisation (“MALDI”) ion source to form a plurality of ions, transporting said plurality of ions in a first, primary gas through a passageway and into an inlet of a mass spectrometer, introducing a second, auxiliary gas into said inlet, and controlling a flow rate of said second gas into said inlet so as to control a flow rate of said first gas through said passageway.

Abstract: A technique for time interval measurement is provided. First and second signal components are received, sampled and digitized. The first signal component is derived from a trigger signal that causes or indicates generation 5 of the second signal component. A time interval between the first and second signal components is determined based on a reference time defined by the sampled and digitized first signal component and based on a reference time defined by the sampled and digitized second signal component.

Abstract: Shaft members which respectively protrude toward at least one beam member and the other beam member in a z-axis direction are formed in a mesh support member. A through hole for penetrating a space between a shaft end surface and an opening portion in the z-axis direction and introducing a focused ion beam toward a fine sample piece is formed in at least one shaft member.