Patents Examined by Niki H Nguyen
  • Patent number: 11476176
    Abstract: A semiconductor device is disclosed. The semiconductor device includes a via passivation layer disposed on an inactive surface of a substrate, a through-electrode vertically penetrating the substrate and the via passivation layer, a concave portion formed in the top surface of the via passivation layer and disposed adjacent to the through-electrode, and a via protective layer coplanar with the via passivation layer and the through-electrode and to fill the concave portion. In a horizontal cross-sectional view, the via protective layer has a band shape surrounding the through-electrode.
    Type: Grant
    Filed: September 28, 2020
    Date of Patent: October 18, 2022
    Assignee: SAMSUNG ELECTRONICS CO., LTD.
    Inventors: Jumyong Park, Solji Song, Jinho An, Jeonggi Jin, Jinho Chun, Juil Choi
  • Patent number: 11456284
    Abstract: Disclosed is a microelectronic device assembly comprising a substrate having conductors exposed on a surface thereof. Two or more microelectronic devices are stacked on the substrate and the components are connected with conductive material in preformed holes in dielectric material in the bond lines aligned with TSVs of the devices and the exposed conductors of the substrate. Methods of fabrication are also disclosed.
    Type: Grant
    Filed: July 27, 2020
    Date of Patent: September 27, 2022
    Assignee: Micron Technology, Inc.
    Inventors: Randon K. Richards, Aparna U. Limaye, Owen R. Fay, Dong Soon Lim
  • Patent number: 11456280
    Abstract: A semiconductor package includes a first die, a second die, a molding compound and a redistribution structure. The first die has a first conductive pillar and a first complex compound sheath surrounding and covering a sidewall of the first conductive pillar. The second die has a second conductive pillar and a protection layer laterally surrounding the second conductive pillar. The molding compound laterally surrounds and wraps around the first and second dies, and is in contact with the first complex compound sheath of the first die. The redistribution structure is disposed on the first and second dies and the molding compound.
    Type: Grant
    Filed: November 9, 2020
    Date of Patent: September 27, 2022
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Wei-Chih Chen, Hung-Jui Kuo, Yu-Hsiang Hu, Sih-Hao Liao, Hung-Chun Cho
  • Patent number: 11450637
    Abstract: Embodiments of semiconductor devices and fabrication methods thereof are disclosed. In an example, a method for forming a semiconductor device is provided. The method includes the following operations. In a first semiconductor structure, a first bonding layer is formed having a first dielectric layer and a plurality of protruding contact structures. In a second semiconductor structure, a second bonding layer is formed having a second dielectric layer and a plurality of recess contact structures. The plurality of protruding contact structures are bonded with the plurality of recess contact structures such that each of the plurality of protruding contacts is in contact with a respective recess contact structure.
    Type: Grant
    Filed: September 14, 2020
    Date of Patent: September 20, 2022
    Assignee: YANGTZE MEMORY TECHNOLOGIES CO., LTD.
    Inventors: Di Wang, Zhiliang Xia
  • Patent number: 11450611
    Abstract: In one embodiment, a semiconductor device includes a substrate including two element regions that extend in a first direction parallel to a surface of the substrate and are adjacent to each other in a second direction crossing the first direction. The device further includes an interconnection layer provided above the substrate. The device further includes an insulator provided between the substrate and the interconnection layer. The device further includes a plug extending in the second direction and in a third direction crossing the first and second directions in the insulator, provided on each of the element regions, and electrically connected to the element regions and the interconnection layer.
    Type: Grant
    Filed: September 9, 2020
    Date of Patent: September 20, 2022
    Assignee: Kioxia Corporation
    Inventors: Tomoya Sanuki, Keisuke Nakatsuka, Yasuhito Yoshimizu
  • Patent number: 11444045
    Abstract: A semiconductor device is provided that includes a bond pad, an insulating layer, and a bonding structure. The bond pad is in a dielectric layer and the insulating layer is over the bond pad; the insulating layer having an opening over the bond pad formed therein. The bonding structure electrically couples the bond pad in the opening. The bonding structure has a height that at least extends to an upper surface of the insulating layer.
    Type: Grant
    Filed: August 16, 2020
    Date of Patent: September 13, 2022
    Assignee: GlobalFoundries Singapore Pte. Ltd.
    Inventors: Ramasamy Chockalingam, Juan Boon Tan, Xiaodong Li, Kai Chong Chan, Ranjan Rajoo
  • Patent number: 11444037
    Abstract: Semiconductor devices having metallization structures including crack-inhibiting structures, and associated systems and methods, are disclosed herein. In one embodiment, a semiconductor device includes a metallization structure formed over a semiconductor substrate. The metallization structure can include a bond pad electrically coupled to the semiconductor substrate via one or more layers of conductive material, and an insulating material—such as a low-? dielectric material—at least partially around the conductive material. The metallization structure can further include a crack-inhibiting structure positioned beneath the bond pad between the bond pad and the semiconductor substrate. The crack-inhibiting structure can include a barrier member extending vertically from the bond pad toward the semiconductor substrate and configured to inhibit crack propagation through the insulating material.
    Type: Grant
    Filed: September 3, 2020
    Date of Patent: September 13, 2022
    Assignee: Micron Technology, Inc.
    Inventors: Hyunsuk Chun, Sheng Wei Yang, Shams U. Arifeen
  • Patent number: 11433487
    Abstract: A method of processing a workpiece includes a holding step, a height position detecting step, a modified layer forming step, and a dividing step. The height position detecting step is a step of, after the holding step, applying a measuring laser beam emitted from a height position detecting unit to the workpiece while moving a chuck table that holds the workpiece thereon and the height position detecting unit relatively to each other to detect a height position of the workpiece using a reflected beam from a reverse side of the workpiece. In the height position detecting step, the measuring laser beam is applied clear of areas of the workpiece where columnar conductive electrodes are embedded in streets.
    Type: Grant
    Filed: January 3, 2020
    Date of Patent: September 6, 2022
    Assignee: DISCO CORPORATION
    Inventors: Satoshi Genda, Andy Sher
  • Patent number: 11424209
    Abstract: An apparatus is described that includes a redistribution layer and a semiconductor die on the redistribution layer. An electrically conductive layer resides over the semiconductor die. A compound mold resides over the electrically conductive layer.
    Type: Grant
    Filed: May 11, 2020
    Date of Patent: August 23, 2022
    Assignee: Intel Corporation
    Inventors: Sven Albers, Klaus Reingruber, Georg Seidemann, Christian Geissler, Richard Patten
  • Patent number: 11417684
    Abstract: A semiconductor device includes a substrate, a first semiconductor fin and a gate stack. The first semiconductor fin is over the substrate and includes a first germanium-containing layer and a second germanium-containing layer over the first germanium-containing layer. The first germanium-containing layer has a germanium atomic percentage higher than a germanium atomic percentage of the second germanium-containing layer. The gate stack is across the first semiconductor fin.
    Type: Grant
    Filed: December 11, 2020
    Date of Patent: August 16, 2022
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Tsung-Yu Hung, Pei-Wei Lee, Pang-Yen Tsai
  • Patent number: 11404376
    Abstract: A semiconductor device includes a semiconductor substrate, a contact region present in the semiconductor substrate, and a silicide present on a textured surface of the contact region. A plurality of sputter ions is present between the silicide and the contact region. Since the surface of the contact region is textured, the contact area provided by the silicide is increased accordingly, thus the resistance of an interconnection structure in the semiconductor device is reduced.
    Type: Grant
    Filed: December 7, 2020
    Date of Patent: August 2, 2022
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Yu-Hung Lin, Chi-Wen Liu, Horng-Huei Tseng
  • Patent number: 11398455
    Abstract: In one example, a semiconductor device can comprise a substrate, a device stack, first and second internal interconnects, and an encapsulant. The substrate can comprise a first and second substrate sides opposite each other, a substrate outer sidewall between the first substrate side and the second substrate side, and a substrate inner sidewall defining a cavity between the first substrate side and the second substrate side. The device stack can be in the cavity and can comprise a first electronic device, and a second electronic device stacked on the first electronic device. The first internal interconnect can be coupled to the substrate and the device stack. The second internal interconnect can be coupled to the second electronic device and the first electronic device. The encapsulant can cover the substrate inner sidewall and the device stack, and can fill the cavity. Other examples and related methods are disclosed herein.
    Type: Grant
    Filed: June 3, 2019
    Date of Patent: July 26, 2022
    Assignee: Amkor Technology Singapore Holding Pte. Ltd.
    Inventors: Gyu Wan Han, Won Bae Bang, Ju Hyung Lee, Min Hwa Chang, Dong Joo Park, Jin Young Khim, Jae Yun Kim, Se Hwan Hong, Seung Jae Yu, Shaun Bowers, Gi Tae Lim, Byoung Woo Cho, Myung Jea Choi, Seul Bee Lee
  • Patent number: 11393781
    Abstract: A semiconductor device according to an embodiment comprises a first chip and a second chip. The first chip includes a first wire, a first connection pad electrically connected to the first wire, and a first dummy pad. The second chip includes a second wire, a second connection pad electrically connected to the second wire and joined to the first connection pad, and a second dummy pad joined to the first dummy pad. A thickness of the first dummy pad is smaller than a thickness of the first connection pad and a thickness of the second dummy pad is also smaller than a thickness of the second connection pad, or the thickness of the first dummy pad is smaller than the thickness of the first connection pad or the thickness of the second dummy pad is smaller than the thickness of the second connection pad.
    Type: Grant
    Filed: September 1, 2020
    Date of Patent: July 19, 2022
    Assignee: Kioxia Corporation
    Inventor: Takashi Watanabe
  • Patent number: 11373969
    Abstract: An embodiment is a method including forming a first passive device in a first wafer, forming a first dielectric layer over a first side of the first wafer, forming a first plurality of bond pads in the first dielectric layer, planarizing the first dielectric layer and the first plurality of bond pads to level top surfaces of the first dielectric layer and the first plurality of bond pads with each other, hybrid bonding a first device die to the first dielectric layer and at least some of the first plurality of bond pads, and encapsulating the first device die in a first encapsulant.
    Type: Grant
    Filed: August 10, 2020
    Date of Patent: June 28, 2022
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Chi-Hsi Wu, Der-Chyang Yeh, Hsien-Wei Chen, Jie Chen
  • Patent number: 11373945
    Abstract: An electronic device includes a substrate, a first conductive pad and a chip. The first conductive pad is disposed on the substrate. The chip includes a second conductive pad electrically connected to the first conductive pad, and the first conductive pad is disposed between the substrate and the second conductive pad. The first conductive pad has a first groove.
    Type: Grant
    Filed: June 12, 2020
    Date of Patent: June 28, 2022
    Assignee: INNOLUX CORPORATION
    Inventors: Wei-Cheng Chu, Chih-Yuan Lee, Yun-Chih Tsai
  • Patent number: 11362652
    Abstract: A method and apparatus for use in improving the linearity characteristics of MOSFET devices using an accumulated charge sink (ACS) are disclosed. The method and apparatus are adapted to remove, reduce, or otherwise control accumulated charge in SOI MOSFETs, thereby yielding improvements in FET performance characteristics. In one exemplary embodiment, a circuit having at least one SOI MOSFET is configured to operate in an accumulated charge regime. An accumulated charge sink, operatively coupled to the body of the SOI MOSFET, eliminates, removes or otherwise controls accumulated charge when the FET is operated in the accumulated charge regime, thereby reducing the nonlinearity of the parasitic off-state source-to-drain capacitance of the SOI MOSFET. In RF switch circuits implemented with the improved SOI MOSFET devices, harmonic and intermodulation distortion is reduced by removing or otherwise controlling the accumulated charge when the SOI MOSFET operates in an accumulated charge regime.
    Type: Grant
    Filed: August 6, 2020
    Date of Patent: June 14, 2022
    Assignee: pSemi Corporation
    Inventors: Christopher N. Brindle, Michael A. Stuber, Dylan J. Kelly, Clint L. Kemerling, George Imthurn, Robert B. Welstand, Mark L. Burgener
  • Patent number: 11362070
    Abstract: Disclosed is a microelectronic device assembly comprising a substrate having conductors exposed on a surface thereof. Two or more stacks of microelectronic devices are located on the substrate, and microelectronic devices of the stacks are connected to vertical conductive paths external to the stacks and extending to the substrate and to lateral conductive paths extending between the stacks. Methods of fabrication are also disclosed.
    Type: Grant
    Filed: July 27, 2020
    Date of Patent: June 14, 2022
    Assignee: Micron Technology, Inc.
    Inventors: Aparna U. Limaye, Dong Soon Lim, Randon K. Richards, Owen R. Fay
  • Patent number: 11352251
    Abstract: An electronic integrated circuit (IC) component is mounted to a substrate. A cap member is applied onto the substrate and covers the electronic IC component. The cap member includes an outer wall defining an opening and an inner wall surrounding the electronic IC component. The inner wall extends from a proximal end at the substrate towards a distal end facing the opening in the outer wall to provide a reception chamber for the electronic IC component and a peripheral chamber between the inner wall and the outer wall of the cap member. An encapsulant material is provided in the reception chamber to seal the electronic IC component without being present in the peripheral chamber.
    Type: Grant
    Filed: March 26, 2020
    Date of Patent: June 7, 2022
    Assignee: STMicroelectronics (Malta) Ltd
    Inventors: Kevin Formosa, Eftal Saribas
  • Patent number: 11348836
    Abstract: Semiconductor structures and methods for forming the same are provided. The method includes forming a fin protruding from a substrate and forming an isolation structure surrounding the fin. The method also includes epitaxially growing channel fins on sidewalls of the fin over the isolation structure and etching the fin to form a space between the channel fins. The method further includes forming a gate structure to fill the space between the channel fins.
    Type: Grant
    Filed: July 9, 2020
    Date of Patent: May 31, 2022
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Pei-Hsun Wang, Chun-Hsiung Lin, Chih-Hao Wang, Chih-Chao Chou
  • Patent number: 11329016
    Abstract: A semiconductor device package includes a carrier, an emitting device, a first building-up circuit and a first package body. The carrier has a first surface, a second surface opposite to the first surface and a lateral surface extending from the first surface to the second surface. The emitting element is disposed on the first surface of carrier. The first building-up circuit is disposed on the second surface of the carrier. The first package body encapsulates the lateral surface of the carrier.
    Type: Grant
    Filed: February 12, 2020
    Date of Patent: May 10, 2022
    Assignee: ADVANCED SEMICONDUCTOR ENGINEERING, INC.
    Inventors: Meng-Wei Hsieh, Chieh-Chen Fu