Patents Examined by Pauline Vu
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Patent number: 10186573Abstract: In one embodiment, a RESURF structure between a source and a drain in a lateral MOSFET is formed in a trench having a flat bottom surface and angled sidewalls toward the source. Alternating P and N-type layers are epitaxially grown in the trench, and their charges balanced to achieve a high breakdown voltage. In the area of the source, the ends of the P and N-layers angle upward to the surface under the lateral gate and contact the body region. Thus, for an N-channel MOSFET, a positive gate voltage above the threshold forms a channel between the source and the N-layers in the RESURF structure as well as creates an inversion of the ends of the P-layers near the surface for low on-resistance. In another embodiment, the RESURF structure is vertically corrugated by being formed around trenches, thus extending the length of the RESURF structure for a higher breakdown voltage.Type: GrantFiled: July 5, 2016Date of Patent: January 22, 2019Assignee: MaxPower Semiconductor, Inc.Inventors: Hamza Yilmaz, Mohamed N. Darwish, Richard A. Blanchard
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Patent number: 10170482Abstract: A method for preventing epitaxial growth in a semiconductor device is described. The method includes cutting the fins of FinFET structure to form a set of exposed fin ends. A set of sidewall spacers are formed on the set of exposed fin ends, forming a set of spacer covered fin ends. The set of sidewall spacers prevent epitaxial growth at the set of spacer covered fin ends. A semiconductor device includes a set of fin structures having a set of fin ends. A set of inhibitory layers are disposed at the set of fin ends to inhibit excessive epitaxial growth at the fin ends.Type: GrantFiled: February 27, 2016Date of Patent: January 1, 2019Assignee: International Business Machines CorporationInventors: Balasubramanian Pranatharthiharan, Hui Zang
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Patent number: 10163828Abstract: A semiconductor structure includes an oval-shaped pad and a dielectric layer. The oval-shaped pad is on a substrate and includes a major axis corresponding to the largest distance of the oval-shaped pad. The major axis is toward a geometric center of the substrate. The dielectric layer covers the substrate and surrounds the oval-shaped pad.Type: GrantFiled: November 18, 2013Date of Patent: December 25, 2018Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.Inventors: Chang-Pin Huang, Tung-Liang Shao, Hsien-Ming Tu, Ching-Jung Yang, Yu-Chia Lai
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Patent number: 10128174Abstract: In accordance with an embodiment, a semiconductor component includes a support and a plurality of leads. An insulated metal substrate having a first portion and a second portion bonded to the support. A semiconductor chip comprising a III-N semiconductor material is bonded to the first portion of the insulated metal substrate and a first electrical interconnect is coupled between a drain bond pad the first portion of the insulated metal substrate. A second semiconductor chip is bonded to the first electrical interconnect. A second electrical interconnect coupled between a lead of the plurality of leads and the second semiconductor chip. In accordance with another embodiment, a method of manufacturing a semiconductor component includes coupling a first semiconductor chip to a first electrically conductive layer and coupling a second semiconductor chip to a second electrically conductive layer.Type: GrantFiled: July 7, 2016Date of Patent: November 13, 2018Assignee: Semiconductor Components Industries, LLCInventors: Balaji Padmanabhan, Ali Salih, Prasad Venkatraman
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Patent number: 10090291Abstract: A layout structure of an ESD protection semiconductor device includes a substrate, a first doped region, a pair of second doped regions, a pair of third doped regions, at least a first gate structure formed within the first doped region, and a drain region and a first source region formed at two sides of the first gate structure. The substrate, the first doped region and the third doped regions include a first conductivity type. The second doped regions, the drain region and the first source region include a second conductivity type complementary to the first conductivity type. The first doped region includes a pair of lateral portions and a pair of vertical portions. The pair of second doped regions is formed under the pair of lateral portions, and the pair of third doped regions is formed under the pair of vertical portions.Type: GrantFiled: April 26, 2016Date of Patent: October 2, 2018Assignee: UNITED MICROELECTRONICS CORP.Inventors: Mei-Ling Chao, Tien-Hao Tang, Kuan-Cheng Su
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Patent number: 10068876Abstract: A semiconductor devise includes a first substrate and a second substrate which are bonded each other. A first substrate includes an insulating first surface film as an uppermost layer, a first electrode and an insulating second surface film respectively formed inside a plurality of openings in the first surface film, and a first seal ring. A second substrate includes an insulating third surface film as an uppermost layer, and a second electrode, an insulating fourth surface film respectively formed inside a plurality of openings in the third surface film, and a second seal ring. The first electrode and the second electrode are directly bonded together. The first surface film and the third surface film are directly bonded together. The second surface film and the fourth surface film are directly bonded together. A seal ring formed of the first seal ring, the second surface film, the fourth surface film, and the second seal ring is continuous between the first substrate and the second substrate.Type: GrantFiled: March 6, 2016Date of Patent: September 4, 2018Assignee: Panasonic Intellectual Property Management Co., Ltd.Inventors: Tatsuya Kabe, Hideyuki Arai
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Patent number: 10056321Abstract: A semiconductor package having improved performance and reliability and a method of fabricating the same are provided. The semiconductor package includes a processing chip including a first pin at a first side to output a first signal, and a second pin at a second side to output a second signal different from the first signal, and a substrate having the processing chip thereon, the substrate including a first bump ball electrically connected to the first pin and a second bump ball electrically connected to the second pin, wherein the first bump ball and the second bump ball are adjacent at one of the first and second sides of the substrate.Type: GrantFiled: October 31, 2013Date of Patent: August 21, 2018Assignee: SAMSUNG ELECTRONICS CO., LTD.Inventors: Heung-Kyu Kwon, Jong-Kook Kim
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Patent number: 10049938Abstract: Semiconductor devices, fin field effect transistor (FinFET) devices, and methods of manufacturing semiconductor devices are disclosed. In some embodiments, a semiconductor device includes a substrate comprising a first fin and a second fin. A first epitaxial fin is disposed over the first fin, and a second epitaxial fin is disposed over the second fin. The second fin is proximate the first fin. The first epitaxial fin and the second epitaxial fin have an upper portion with a substantially pillar shape.Type: GrantFiled: January 16, 2015Date of Patent: August 14, 2018Assignee: Taiwan Semiconductor Manufacturing CompanyInventors: Sung-Li Wang, Chih-Sheng Chang, Sey-Ping Sun
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Patent number: 10014383Abstract: A method of manufacturing a semiconductor device includes introducing nitrogen into a metal layer or into a metal nitride layer, the metal layer or metal nitride layer being formed in contact with a semiconductor material. A semiconductor device includes a semiconductor material and a metal nitride layer in contact with the semiconductor material. The metal nitride has a nitrogen content larger than a solubility limit of nitrogen in the metal nitride.Type: GrantFiled: December 17, 2014Date of Patent: July 3, 2018Assignee: Infineon Technologies AGInventors: Jens Peter Konrath, Hans-Joachim Schulze, Reinhold Schoerner
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Patent number: 10014223Abstract: A device includes a semiconductor substrate, isolation regions in the semiconductor substrate, and a Fin Field-Effect Transistor (FinFET). The FinFET includes a channel region over the semiconductor substrate, a gate dielectric on a top surface and sidewalls of the channel region, a gate electrode over the gate dielectric, a source/drain region, and an additional semiconductor region between the source/drain region and the channel region. The channel region and the additional semiconductor region are formed of different semiconductor materials, and are at substantially level with each other.Type: GrantFiled: October 19, 2015Date of Patent: July 3, 2018Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Chih-Wei Kuo, Yuan-Shun Chao, Hou-Yu Chen, Shyh-Horng Yang
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Patent number: 9997510Abstract: The invention provides a semiconductor device layout structure disposed in an active region. The semiconductor device layout structure includes a first well region having a first conduction type. A second well region having a second conduction type opposite the first conduction type is disposed adjacent to and enclosing the first well region. A first doped region having the second conduction type is disposed within the first well region. A second doped region having the second conduction type is disposed within the first well region. The second doped region is separated from and surrounds the first doped region. A third doped region having the second conduction type is disposed within the second well region.Type: GrantFiled: September 9, 2015Date of Patent: June 12, 2018Assignee: VANGUARD INTERNATIONAL SEMICONDUCTOR CORPORATIONInventors: Chi-Li Tu, Ching-Wen Wang, Karuna Nidhi
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Patent number: 9997616Abstract: The present disclosure provides devices and methods which provide for strained epitaxial regions. A method of semiconductor fabrication is provided that includes forming a gate structure over a fin of a semiconductor substrate and forming a recess in the fin adjacent the gate structure. A sidewall of the recess is then altered. Exemplary alterations include having an altered profile, treating the sidewall, and forming a layer on the sidewall. An epitaxial region is then grown in the recess. The epitaxial region interfaces the altered sidewall of the recess and is a strained epitaxial region.Type: GrantFiled: February 12, 2016Date of Patent: June 12, 2018Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Feng Yuan, Chih Chieh Yeh, Hung-Li Chiang, Tsung-Lin Lee
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Patent number: 9991384Abstract: A semiconductor Fin FET device includes a fin structure disposed over a substrate. The fin structure includes a channel layer. The Fin FET device also includes a gate structure including a gate electrode layer and a gate dielectric layer, covering a portion of the fin structure. Side-wall insulating layers are disposed over both main sides of the gate electrode layer. The Fin FET device includes a source and a drain, each including a stressor layer disposed in a recess formed by removing the fin structure not covered by the gate structure. The stressor layer includes a first to a third stressor layer formed in this order. In the source, an interface between the first stressor layer and the channel layer is located under one of the side-wall insulating layers closer to the source or the gate electrode.Type: GrantFiled: May 15, 2015Date of Patent: June 5, 2018Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.Inventors: Chun Hsiung Tsai, Kei-Wei Chen
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Patent number: 9972716Abstract: Provided are semiconductor devices that include an active pattern on a substrate, first and second gate electrodes on the active pattern and arranged in a first direction relative to one another and a first source/drain region in a first trench that extends into the active pattern between the first and second gate electrodes. The first source/drain region includes a first epitaxial layer that is configured to fill the first trench and that includes at least one plane defect that originates at a top portion of the first epitaxial layer and extends towards a bottom portion of the first epitaxial layer.Type: GrantFiled: August 14, 2015Date of Patent: May 15, 2018Assignee: Samsung Electronics Co., Ltd.Inventors: Jin-Bum Kim, Seok-Hoon Kim, Chul Kim, Kwan-Heum Lee, Byeong-Chan Lee, Cho-Eun Lee, Su-Jin Jung, Bon-Young Koo
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Patent number: 9929242Abstract: A Fin FET semiconductor device includes a fin structure extending in a first direction and extending from an isolation insulating layer. The Fin FET device also includes a gate stack including a gate electrode layer, a gate dielectric layer, side wall insulating layers disposed at both sides of the gate electrode layer, and interlayer dielectric layers disposed at both sides of the side wall insulating layers. The gate stack is disposed over the isolation insulating layer, covers a portion of the fin structure, and extends in a second direction perpendicular to the first direction. A recess is formed in an upper surface of the isolation insulating layer not covered by the side wall insulating layers and the interlayer dielectric layers. At least part of the gate electrode layer and the gate dielectric layer fill the recess.Type: GrantFiled: June 24, 2015Date of Patent: March 27, 2018Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.Inventors: Che-Cheng Chang, Chih-Han Lin
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Patent number: 9929274Abstract: Methods of fabricating a thin-film transistor are provided. The methods include forming a gate electrode above a substrate, a gate insulating layer above the gate electrode, a non-crystalline silicon layer above the gate insulating layer, and a channel protective layer above the non-crystalline silicon layer. The non-crystalline silicon layer and the channel protective layer are processed to form a projecting part. The projecting part has an upper layer composed of the channel protective layer and a lower layer composed of the non-crystalline silicon layer. The projecting part and portions of the non-crystalline silicon layer on sides of the projecting part are irradiated with a laser beam to crystallize at least the non-crystalline silicon layer in the projecting part. An absorptance of the non-crystalline silicon layer for the laser beam is greater in the projecting part than in the portions on the sides of the projecting part.Type: GrantFiled: December 20, 2016Date of Patent: March 27, 2018Assignees: JOLED INC., PANASONIC LIQUID CRYSTAL DISPLAY CO., LTD.Inventors: Hiroshi Hayashi, Takahiro Kawashima, Genshirou Kawachi
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Patent number: 9923159Abstract: A thin film transistor includes a gate electrode, a semiconductor overlapping the gate electrode, a gate insulator between the gate electrode and the semiconductor, and a source electrode and a drain electrode electrically connected to the semiconductor, wherein the gate insulator includes an inorganic insulation layer facing the gate electrode and an organic insulation layer facing the semiconductor. A method of manufacturing the thin film transistor and an electronic device including the thin film transistor are provided.Type: GrantFiled: April 18, 2016Date of Patent: March 20, 2018Assignee: Samsung Electronics Co., Ltd.Inventors: Joo Young Kim, Jiyoung Jung, Jeong Il Park, Woo Young Yang, Youngjun Yun, Eun Kyung Lee, Ajeong Choi
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Patent number: 9917031Abstract: A semiconductor device includes an insulating substrate; a semiconductor element mounted on the insulating substrate; and a radiation block bonded to the semiconductor element. The radiation block includes a three-dimensional radiation portion and a base portion connected to the radiation portion. The radiation portion of the radiation block has a pin shape, a fin shape, or a porous shape.Type: GrantFiled: October 8, 2015Date of Patent: March 13, 2018Assignee: FUJI ELECTRIC CO., LTD.Inventor: Shin Soyano
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Patent number: 9893227Abstract: A photodiode for detecting photons comprising a substrate; first semiconducting region suitable for forming a contact thereon; a first contact; a second semiconducting region comprising an absorption region for the photons and being formed of a semiconductor having one or more of a high surface recombination velocity or a high interface recombination velocity; a second contact operatively associated with the second region; the first semiconducting region and the second semiconducting region forming a first interface; the second semiconducting region being configured such that reverse biasing the photodiode between the first and second contacts results in the absorption region having a portion depleted of electrical carriers and an undepleted portion at the reverse bias point of operation; the undepleted portion being smaller than the absorption depth for photons; whereby the depletion results in the creation of an electric field and photogenerated carriers are collected by drift; and a method of making.Type: GrantFiled: June 13, 2016Date of Patent: February 13, 2018Assignee: The United States of America as represented by the Secretary of the ArmyInventors: Anand Venktesh Sampath, Michael Wraback, Paul Shen
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Patent number: 9882016Abstract: Some embodiments include a semiconductor construction having a gate extending into a semiconductor base. Conductively-doped source and drain regions are within the base adjacent the gate. A gate dielectric has a first segment between the source region and the gate, a second segment between the drain region and the gate, and a third segment between the first and second segments. At least a portion of the gate dielectric comprises ferroelectric material. In some embodiments the ferroelectric material is within each of the first, second and third segments. In some embodiments, the ferroelectric material is within the first segment or the third segment. In some embodiments, a transistor has a gate, a source region and a drain region; and has a channel region between the source and drain regions. The transistor has a gate dielectric which contains ferroelectric material between the source region and the gate.Type: GrantFiled: January 20, 2017Date of Patent: January 30, 2018Assignee: Micron Technology, Inc.Inventors: Durai Vishak Ramaswamy, Kirk D. Prall, Wayne Kinney