Patents Examined by Pavel G. Ivanov
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Patent number: 11569297Abstract: An image sensor includes an array of readout circuits in non-organic technology and photodiodes made of organic materials.Type: GrantFiled: November 16, 2018Date of Patent: January 31, 2023Assignee: ISORGInventors: Benjamin Bouthinon, Emeline Saracco, Jean-Yves Gomez, Olivier Dhez
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Patent number: 11495743Abstract: A memory cell with hard mask insulator and its manufacturing methods are provided. In some embodiments, a memory cell stack is formed over a substrate having a bottom electrode layer, a resistance switching dielectric layer over the bottom electrode layer, and a top electrode layer over the resistance switching dielectric layer. A first insulating layer is formed over the top electrode layer. A first metal hard masking layer is formed over the first insulating layer. Then, a series of etch is performed to pattern the first metal hard masking layer, the first insulating layer, the top electrode layer and the resistance switching dielectric layer to form a first metal hard mask, a hard mask insulator, a top electrode, and a resistance switching dielectric.Type: GrantFiled: May 5, 2020Date of Patent: November 8, 2022Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Chern-Yow Hsu, Chung-Chiang Min, Shih-Chang Liu
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Patent number: 11456303Abstract: A semiconductor structure includes a substrate including a substrate including a first surface, a first doped region disposed under the first surface, a second doped region disposed under the first surface, and a recess indented into the substrate and disposed between the first doped region and the second doped region; a control gate structure disposed over the first doped region and electrically connected to a control bit line; a fuse gate structure disposed over the second doped region and electrically connected to a fuse bit line; and a buried word to line disposed between the control gate structure and the fuse gate structure, wherein the buried word line is disposed within the recess of the substrate.Type: GrantFiled: October 29, 2019Date of Patent: September 27, 2022Assignee: NANYA TECHNOLOGY CORPORATIONInventor: Shian-Jyh Lin
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Patent number: 11450763Abstract: Provided is an IGBT power device. The device includes: a p-type collector region; an n-type drift region located above the p-type collector region; multiple first grooves, where a second groove is provided below each of the multiple first grooves; a gate structure located in the first groove and the second groove; a p-type body region located between two adjacent first grooves; an n-type emitter region located in the p-type body region; and an n-type hole charge blocking region located between two adjacent second grooves.Type: GrantFiled: January 30, 2019Date of Patent: September 20, 2022Assignee: Suzhou Oriental Semiconductor Co., Ltd.Inventors: Wei Liu, Lei Liu, Zhendong Mao, Yuanlin Yuan
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Patent number: 11387102Abstract: A semiconductor device includes a substrate, a first semiconductor stack including elongated semiconductor features isolated from each other and overlaid in a direction perpendicular to a top surface of the substrate, and a second semiconductor stack including elongated semiconductor features isolated from each other and overlaid in the direction perpendicular to the top surface of the substrate. The second semiconductor stack has different geometric characteristics than the first semiconductor stack. A top surface of the first semiconductor stack is coplanar with a top surface of the second semiconductor stack.Type: GrantFiled: November 15, 2019Date of Patent: July 12, 2022Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.Inventors: Tung Ying Lee, Shao-Ming Yu
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Patent number: 11380636Abstract: A semiconductor package includes a semiconductor chip, and including a passivation film disposed on an active surface and having a first opening exposing at least a portion of a connection pad of the semiconductor chip and a protective film disposed on the passivation film, filling at least a portion in the first opening, and having a second opening exposing at least a portion of the connection pad in the first opening, an encapsulant covering at least a portion of the semiconductor chip, and a connection structure disposed on the active surface of the semiconductor chip, and including a connection via connected to the connection pad in the first opening and the second opening and a redistribution layer electrically connected to the connection pad through the connection via. The second opening has a width narrower than a width of the first opening.Type: GrantFiled: March 5, 2019Date of Patent: July 5, 2022Assignee: SAMSUNG ELECTRONICS CO., LTD.Inventors: Seung Min Baek, Yoon Su Kim, Seok Il Hong, Byung Lyul Park, Sung Han
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Patent number: 11374094Abstract: A silicon carbide diode having a high surge current capability, and including a semiconductor base plate. The semiconductor base plate includes an N-type silicon carbide substrate and an N-type silicon carbide epitaxial layer located on the N-type silicon carbide substrate. The upper portion of the N-type silicon carbide epitaxial layer is provided with a plurality of P-type well regions. The N-type high resistance region is provided under the P-type well region or on the lower surface of the P-type well region. The resistivity of the N-type high resistance region is greater than the resistivity of the N-type silicon carbide epitaxial layer. The N-type high resistance region is provided under the P-type well region, and a plurality of grooves are provided in the P-type well region or a plurality of block-shaped P-type regions uniformly arranged at intervals are provided in the N-type high resistance region.Type: GrantFiled: September 12, 2018Date of Patent: June 28, 2022Assignee: WUXI NCE POWER CO., LTDInventors: Yuanzheng Zhu, Zhuo Yang, Jingcheng Zhou, Peng Ye
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Patent number: 11355492Abstract: A semiconductor device including a substrate with a first region and a second region and first and second transistors in the first and second regions, respectively. The first transistor includes a first gate insulating layer on the substrate, a first etch-stop layer, and a first work function layer on the first etch-stop layer. The second transistor includes a second gate insulating layer on the substrate, a second etch-stop layer, and a second work function layer on the second etch-stop layer. At least one of the first and second work function layers is chamfered.Type: GrantFiled: August 30, 2018Date of Patent: June 7, 2022Assignee: SAMSUNG ELECTRONICS CO., LTD.Inventors: Ju Youn Kim, Gi Gwan Park
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Matching nanowire FET periodic structuire to standard cell periodic structure in integrated circuits
Patent number: 11348925Abstract: A semiconductor integrated circuit device using nanowire FETs has a circuit block in which a plurality of cell rows each including a plurality of standard cells lined up in the X direction are placed side by side in the Y direction. The plurality of standard cells each include a plurality of nanowires that extend in the X direction and are placed at a predetermined pitch in the Y direction. The plurality of standard cells have a cell height, that is a size in the Y direction, M times (M is an odd number) as large as half the pitch of the nanowires.Type: GrantFiled: December 11, 2019Date of Patent: May 31, 2022Assignee: SOCIONEXT INC.Inventor: Junji Iwahori -
Patent number: 11322349Abstract: A TTV of the silicon carbide substrate is less than or equal to 3 ?m. The first main surface includes a first central region surrounded by a square having each side of 90 mm. An intersection of diagonal lines of the first central region coincides with a center of the first main surface. The first central region is constituted of nine square regions each having each side of 30 mm. A maximum LTV among the nine square regions is less than or equal to 1 ?m. An arithmetic mean roughness Sa in a second central region is less than or equal to 0.1 nm, the second central region being surrounded by a square centering on the intersection and having each side of 250 ?m.Type: GrantFiled: April 3, 2018Date of Patent: May 3, 2022Assignee: Sumitomo Electric Industries, Ltd.Inventors: Tsubasa Honke, Kyoko Okita
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Patent number: 11296212Abstract: A current switching semiconductor device to be used in a power conversion device achieves both a low conduction loss and a low switching loss. The semiconductor device includes the IGBT in which only Gc gates are provided and an impurity concentration of the p type collector layer is high, and the IGBT in which the Gs gates and the Gc gates are provided and an impurity concentration of the p type collector layer is low. When the semiconductor device is turned off, the semiconductor device transitions from a state in which a voltage lower than a threshold voltage is applied to both the Gs gates and the Gc gates to a state in which a voltage equal to or higher than the threshold voltage is applied to the Gc gates prior to the Gs gates.Type: GrantFiled: February 1, 2019Date of Patent: April 5, 2022Assignee: Hitachi Power Semiconductor Device, Ltd.Inventors: Tomoyuki Miyoshi, Mutsuhiro Mori, Tomoyasu Furukawa, Yujiro Takeuchi, Masaki Shiraishi
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Patent number: 11289475Abstract: A semiconductor device having favorable electrical characteristics is provided. The semiconductor device includes a transistor and a capacitor. The transistor includes a first conductor and a second insulator over a first insulator; a third insulator over the first conductor and the second insulator; a fourth insulator over the third insulator; a first oxide over the fourth insulator; a second oxide and a third oxide over the first oxide; a second conductor in contact with a top surface of the third insulator, a side surface of the fourth insulator, a side surface of the first oxide, a side surface of the second oxide, and a top surface of the second oxide; a third conductor in contact with the top surface of the third insulator, a side surface of the fourth insulator, a side surface of the first oxide, a side surface of the third oxide, and a top surface of the third oxide; a fourth oxide over the first oxide; a fifth insulator over the fourth oxide; and a fourth conductor over the fifth insulator.Type: GrantFiled: November 26, 2019Date of Patent: March 29, 2022Assignee: Semiconductor Energy Laboratory Co., Ltd.Inventors: Shunpei Yamazaki, Tatsuya Onuki, Katsuaki Tochibayashi
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Patent number: 11271099Abstract: A vertical bipolar transistor device is disclosed. The vertical bipolar transistor device includes a heavily-doped semiconductor substrate, a first semiconductor epitaxial layer, at least one first doped well, and an external conductor. The heavily-doped semiconductor substrate and the first doped well have a first conductivity type. The first semiconductor epitaxial layer has a second conductivity type. The first semiconductor epitaxial layer is formed on the heavily-doped semiconductor substrate. The first doped well is formed in the first semiconductor epitaxial layer. The external conductor is arranged outside the heavily-doped semiconductor substrate and the first semiconductor epitaxial layer and electrically connected to the heavily-doped semiconductor substrate and the first semiconductor epitaxial layer.Type: GrantFiled: July 28, 2020Date of Patent: March 8, 2022Assignee: Amazing Microelectronic Corp.Inventors: Chih-Ting Yeh, Sung-Chih Huang, Che-Hao Chuang
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Patent number: 11264286Abstract: Integrated circuits are disclosed in which the strain properties of adjacent pFETs and nFETs are independently adjustable. The pFETs include compressive-strained SiGe on a silicon substrate, while the nFETs include tensile-strained silicon on a strain-relaxed SiGe substrate. Adjacent n-type and p-type FinFETs are separated by electrically insulating regions formed by a damascene process. During formation of the insulating regions, the SiGe substrate supporting the n-type devices is permitted to relax elastically, thereby limiting defect formation in the crystal lattice of the SiGe substrate.Type: GrantFiled: June 19, 2019Date of Patent: March 1, 2022Assignee: STMicroelectronics, Inc.Inventors: Nicolas Loubet, Pierre Morin, Yann Mignot
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Patent number: 11211554Abstract: A magnetic cell includes a free region between an intermediate oxide region (e.g., a tunnel barrier) and a secondary oxide region. Both oxide regions may be configured to induce magnetic anisotropy (“MA”) with the free region, enhancing the MA strength of the free region. A getter material proximate to the secondary oxide region is formulated and configured to remove oxygen from the secondary oxide region, reducing an oxygen concentration and an electrical resistance of the secondary oxide region. Thus, the secondary oxide region contributes only minimally to the electrical resistance of the cell core. Embodiments of the present disclosure therefore enable a high effective magnetoresistance, low resistance area product, and low programming voltage along with the enhanced MA strength. Methods of fabrication, memory arrays, memory systems, and electronic systems are also disclosed.Type: GrantFiled: April 25, 2019Date of Patent: December 28, 2021Assignee: Micron Technology, Inc.Inventors: Gurtej S. Sandhu, Witold Kula
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Patent number: 11171043Abstract: Methods and architectures for IC interconnect trenches, and trench plugs that define separations between two adjacent trench ends. Plugs and trenches may be defined through a multiple patterning process. An upper grating pattern may be summed with a plug keep pattern into a pattern accumulation layer. The pattern accumulation layer may be employed to define plug masks. A lower grating pattern may then be summed with the plug masks to define a pattern in trench ILD material, which can then be backfilled with interconnect metallization. As such, a complex damascene interconnect structure can be fabricated at the scaled-down geometries achievable with pitch-splitting techniques. In some embodiments, the trenches are located at spaces between first spacer masks defined in a patterning process associated with the first grating pattern while the plug masks are located based on a tone-inversion of second spacer masks associated with the second grating pattern.Type: GrantFiled: September 30, 2016Date of Patent: November 9, 2021Assignee: Intel CorporationInventors: Charles H. Wallace, Marvin Y. Paik, Hyunsoo Park, Mohit K. Haran, Alexander F. Kaplan, Ruth A. Brain
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Patent number: 11171062Abstract: A semiconductor structure and a method for forming same, the forming method including: providing a base, where the base includes a substrate and a fin protruding from the substrate, an isolation layer is formed on the substrate exposed by the fin, and the isolation layer covers a part of side walls of the fin; forming a dummy gate structure across the fin, including a dummy gate layer, where the dummy gate structure covers a part of the top and a part of the side walls of the fin; forming an interlayer dielectric layer on the substrate exposed by the dummy gate structure, where the interlayer dielectric layer exposes the top of the dummy gate structure; removing the dummy gate layer and forming an opening in the interlayer dielectric layer; removing partial thickness of the isolation layer exposed by the opening and forming a groove in the isolation layer; and forming a gate structure in the groove and the opening, where the gate structure crosses the fin and covers a part of the top and a part of the side waType: GrantFiled: October 15, 2019Date of Patent: November 9, 2021Assignees: Semiconductor Manufacturing International (Beijing) Corporation, Semiconductor Manufacturing International (Shanghai) CorporationInventors: Nan Wang, Zhan Ying
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Patent number: 11171236Abstract: A method includes forming a first semiconductor fin and a second semiconductor fin parallel to each other and protruding higher than top surfaces of isolation regions. The isolation regions include a portion between the first and the second semiconductor fins. The method further includes forming a gate stack crossing over the first and the second semiconductor fins, etching a portion of the gate stack to form an opening, wherein the portion of the isolation regions, the first semiconductor fin, and the second semiconductor fin are exposed to the opening, etching the first semiconductor fin, the second semiconductor fin, and the portion of the isolation regions to extend the opening into a bulk portion of a semiconductor substrate below the isolation regions, and filling the opening with a dielectric material to form a cut-fin isolation region.Type: GrantFiled: October 5, 2018Date of Patent: November 9, 2021Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Shiang-Bau Wang, Li-Wei Yin, Shao-Hua Hsu
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Patent number: 11171058Abstract: Techniques are disclosed for customization of fin-based transistor devices to provide a diverse range of channel configurations and/or material systems within the same integrated circuit die. In accordance with one example embodiment, sacrificial fins are removed and replaced with custom semiconductor material of arbitrary composition and strain suitable for a given application. In one such case, each of a first set of the sacrificial fins is recessed or otherwise removed and replaced with a p-type material, and each of a second set of the sacrificial fins is recessed or otherwise removed and replaced with an n-type material. The p-type material can be completely independent of the process for the n-type material, and vice-versa. Numerous other circuit configurations and device variations are enabled using the techniques provided herein.Type: GrantFiled: August 3, 2017Date of Patent: November 9, 2021Assignee: Intel CorporationInventors: Glenn A. Glass, Daniel B. Aubertine, Anand S. Murthy, Gaurav Thareja, Tahir Ghani
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Patent number: 11158646Abstract: A memory device with a dielectric blocking layer for improving interpoly dielectric breakdown is provided. Embodiments include.Type: GrantFiled: January 14, 2019Date of Patent: October 26, 2021Assignee: GLOBALFOUNDRIES Singapore Pte. Ltd.Inventor: Soh Yun Siah