Patents Examined by Phuc Dang
-
Patent number: 9520398Abstract: A device includes a substrate, a deep well, a first well, and a second well. The deep well is formed in the substrate. The first well includes a first portion formed on the deep well and a second portion formed in the substrate. The second well is formed partially on the deep well. A first separator structure is formed on the deep well to isolate the first portion of the first well from the second well, and a second separator structure is formed on the substrate to isolate the second well and a second portion of the first well.Type: GrantFiled: August 4, 2015Date of Patent: December 13, 2016Assignee: Broadcom CorporationInventor: Akira Ito
-
Patent number: 9520354Abstract: An isolation system, isolation capacitor, and Integrated Circuit are disclosed. The isolation capacitor is described to include a first capacitive element, a second capacitive element, a primary isolation layer positioned between the first and second capacitive elements, as well as a secondary isolation layer positioned between the first and second capacitive elements. The secondary isolation layer has an area that is larger than an area of one or both of the first and second capacitive elements, thereby reducing the likelihood of breakdown between the first and second capacitive elements.Type: GrantFiled: July 29, 2015Date of Patent: December 13, 2016Assignee: Avago Technologies General IP (Singapore) Pte. Ltd.Inventors: Ricky Chow, Dominique Ho, Qian Tao
-
Patent number: 9514985Abstract: A method of making a substrate-through metal via having a high aspect ratio, in a semiconductor substrate, and a metal pattern on the substrate surface, includes providing a semiconductor substrate (wafer) and depositing poly-silicon on the substrate. The poly-silicon on the substrate surface is patterned by etching away unwanted portions. Then, Ni is selectively deposited on the poly-silicon by an electroless process. A via hole is made through the substrate, wherein the walls in the hole is subjected to the same processing as above. Cu is deposited on the Ni by a plating process. Line widths and spacings <10 ?m are provided on both sides of the wafer.Type: GrantFiled: September 27, 2013Date of Patent: December 6, 2016Assignee: SILEX MICROSYSTEMS ABInventors: Thorbjorn Ebefors, Henrik Knutsson
-
Patent number: 9508827Abstract: A method for fabricating semiconductor device is disclosed. The method includes the steps of: providing a substrate; forming a gate structure on the substrate; forming a lightly doped drain in the substrate; and performing a first implantation process for implanting fluorine ions at a tiled angle into the substrate and part of the gate structure.Type: GrantFiled: October 21, 2015Date of Patent: November 29, 2016Assignee: UNITED MICROELECTRONICS CORP.Inventors: Jian-Cun Ke, Chih-Wei Yang, Chia-Fu Hsu
-
Patent number: 9508715Abstract: The present invention provides a semiconductor structure including a substrate, having a recess disposed thereon. Two first protruding portions are disposed on two sides of the recess respectively, an epitaxial layer is disposed in the recess, and an insulating layer is disposed on the substrate. A top portion of the first protruding portion is higher than a top surface of the insulating layer.Type: GrantFiled: August 4, 2015Date of Patent: November 29, 2016Assignee: UNITED MICROELECTRONICS CORP.Inventors: Li-Wei Feng, Chien-Ting Lin, Shih-Hung Tsai, Ssu-I Fu, Hon-Huei Liu, Jyh-Shyang Jenq
-
Patent number: 9502579Abstract: A thin film transistor substrate includes a gate electrode disposed on a substrate; a semiconductor layer disposed on the substrate that partially overlaps the gate electrode and includes an oxide semiconductor material; and a source electrode and a drain electrode disposed on the semiconductor layer, where the drain electrode is spaced apart from the source electrode. The source electrode and the drain electrode each include a barrier layer and a main wiring layer, the a main wiring layer is disposed on the barrier layer, and the barrier layer includes a first metal layer disposed on the semiconductor layer, and a second metal layer disposed on the first metal layer.Type: GrantFiled: May 20, 2015Date of Patent: November 22, 2016Assignee: SAMSUNG DISPLAY CO., LTD.Inventors: Bong-Kyun Kim, Seung-Ho Yoon, Shin-Il Choi
-
Patent number: 9502335Abstract: A package structure is provided, which includes: a chip carrier having a plurality of conductive connection portions; at least an electronic element disposed on the chip carrier; a plurality of conductive wires erectly positioned on the conductive connection portions, respectively; an encapsulant formed on the chip carrier for encapsulating the conductive wires and the electronic element, wherein one ends of the conductive wires are exposed from the encapsulant; and a circuit layer formed on the encapsulant and electrically connected to exposed ends of the conductive wires. According to the present invention, the conductive wires serve as an interconnection structure. Since the wire diameter of the conductive wires is small and the pitch between the conductive wires can be minimized, the present invention reduces the size of the chip carrier and meets the miniaturization requirement.Type: GrantFiled: September 16, 2014Date of Patent: November 22, 2016Assignee: Siliconware Precision Industries Co., Ltd.Inventors: Chieh-Lung Lai, Hsien-Wen Chen, Hong-Da Chang, Mao-Hua Yeh
-
Patent number: 9490455Abstract: A light emitting diode (LED) containing device including a light emitting diode (LED) structure, and a light transmissive substrate in contact with the LED structure. The light transmissive substrate has a texture surface tuned to include features with dimensions greater than a wavelength of light produced by the LED structure. In some embodiments, increasing the feature size of the texture to be comparable to the wavelength of light produced by the LED increases light extraction from the LED in comparison to when the feature size of the texture is substantially less or substantially larger than the wavelength of light.Type: GrantFiled: March 16, 2015Date of Patent: November 8, 2016Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATIONInventors: Keith E. Fogel, Jeehwan Kim, Ning Li, Devendra K. Sadana
-
Patent number: 9490195Abstract: An assembly includes a plurality of stacked encapsulated microelectronic packages, each package including a microelectronic element having a front surface with a plurality of chip contacts at the front surface and edge surfaces extending away from the front surface. An encapsulation region of each package contacts at least one edge surface and extends away therefrom to a remote surface of the package. The package contacts of each package are disposed at a single one of the remote surfaces, the package contacts facing and coupled with corresponding contacts at a surface of a substrate nonparallel with the front surfaces of the microelectronic elements therein.Type: GrantFiled: October 15, 2015Date of Patent: November 8, 2016Assignee: Invensas CorporationInventors: Ashok S. Prabhu, Rajesh Katkar, Sean Moran
-
Patent number: 9484332Abstract: Micro LEDs may be placed on a substrate in regularly spaced rows with an empty row between at least two successive rows of micro LED. A micro solar cell may then be placed in the empty row.Type: GrantFiled: March 18, 2015Date of Patent: November 1, 2016Assignee: Intel CorporationInventors: Kumaran Natarajan, Prakash K. Radhakrishnan, Peter L. Chang, Kunjal Parikh
-
Patent number: 9484266Abstract: A method includes providing a substrate that underlies a layer of SiGe; forming a plurality of fins in the layer of SiGe. Each formed fin has a fin shape and fin location preserving hard mask layer on a top surface. The method also includes depositing Si on a first subset of the set of fins in what will be an nFET area; performing a Si—Ge inter-mixing process on the first subset of fins to reduce a concentration of Ge in the first subset while producing a Si—Ge intermix layer; removing the Si—Ge intermix layer leaving the first subset of fins having the reduced concentration of Ge, and forming a second subset of fins in what will be a pFET area. The second subset is also formed from the layer of SiGe and has a greater percentage of Ge than a percentage of Ge in the first subset of fins.Type: GrantFiled: August 4, 2015Date of Patent: November 1, 2016Assignee: International Business Machines CorporationInventors: Karthik Balakrishnan, Kangguo Cheng, Pouya Hashemi, Alexander Reznicek
-
Patent number: 9478641Abstract: Disclosed herein is a method for fabricating a FinFET with separated double gates on a bulk silicon, comprising: forming a pattern for a source, a drain and a thin bar connecting the source and the drain; forming an oxidation isolation layer; forming a gate structure and a source/drain structure; and forming a metal contact and a metal interconnection. By means of the method herein, it is very easy to fabricate the FinFET with separated double gates on the bulk silicon wafer, and the overall process flow is completely compatible with the conventional silicon-based very large scale integrated circuit manufacturing technology. Thus, the method herein is simple, convenient and has a short process period, greatly economizing the cost of the silicon wafer. In addition, by employing the FinFET with separated double gates fabricated by the method according to the invention, the short channel effect can be effectively suppressed.Type: GrantFiled: October 11, 2012Date of Patent: October 25, 2016Assignee: PEKING UNIVERSITYInventors: Ru Huang, Jiewen Fan, Xiaoyan Xu, Jia Li, Runsheng Wang
-
Patent number: 9478617Abstract: Methods for forming a semiconductor device structure are provided. The method includes providing a substrate and forming an isolation structure in the substrate. The method also includes forming a gate stack structure on the substrate and etching a portion of the substrate to form a recess in the substrate, and the recess is adjacent to the gate stack structure. The method includes forming a stressor layer in the recess, and a portion of the stressor layer is grown along the (311) and (111) crystal orientations.Type: GrantFiled: October 29, 2015Date of Patent: October 25, 2016Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.Inventors: Shin-Yeh Huang, Kai-Hsiang Chang, Chih-Chen Jiang, Yi-Wei Peng, Kuan-Yu Lin, Ming-Shan Tsai, Ching-Lun Lai
-
Patent number: 9478521Abstract: A device comprises a top package mounted on a bottom package through a joint structure, wherein the joint structure comprises a solder ball of the top package coupled to a metal structure embedded in the bottom package and an epoxy protection layer having a first edge in direct contact with a top surface of the bottom package and a second edge surrounding a lower portion of the solder ball.Type: GrantFiled: September 25, 2014Date of Patent: October 25, 2016Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Hsien-Wei Chen, An-Jhih Su, Ying-Ju Chen
-
Patent number: 9478653Abstract: A field effect transistor includes multi-finger electrodes, a gate terminal electrode, a drain terminal electrode, a source terminal and a source terminal electrode. Each of the multi-finger electrodes includes two finger gate electrodes, a finger drain electrode, and at least two finger source electrodes. Finger electrodes are arranged so as to intersect with the first straight line at an angle of approximately +45 degrees and approximately ?45 degrees alternately. The gate terminal electrode commonly bundles and connects the finger gate electrodes of two adjacent cell regions. The drain terminal electrode commonly bundles and connects the finger drain electrodes of two adjacent cell regions. And the source terminal electrode commonly bundles and connects the finger source electrodes of two adjacent cell regions. The gate terminal electrodes and the drain terminal electrodes are alternately provided in a connecting region of the multi-finger electrodes of two adjacent cell regions.Type: GrantFiled: July 14, 2015Date of Patent: October 25, 2016Assignee: Kabushiki Kaisha ToshibaInventor: Kazutaka Takagi
-
Patent number: 9472632Abstract: A semiconductor device is provided. The semiconductor device includes a semiconductor substrate, and a core device and a dummy device disposed on the semiconductor substrate. The core device includes a first gate disposed on the semiconductor substrate and a first stress layer disposed on opposing sides of the first gate. The dummy device includes a second gate disposed on the semiconductor substrate and a second stress layer disposed on opposing sides of the second gate.Type: GrantFiled: April 24, 2015Date of Patent: October 18, 2016Assignee: SEMICONDUCTOR MANUFACTURING INTERNATIONAL (SHANGHAI) CORPORATIONInventors: Shicheng Ding, Fenghua Fu
-
Patent number: 9472670Abstract: A method for forming field effect transistors comprises forming a first dummy gate stack over a first fin, forming a second dummy gate stack over a second fin, depositing a first layer of spacer material on the first dummy gate stack, the first fin, the second dummy gate stack, and the second fin, patterning a first masking layer on the first dummy gate stack and the first fin, etching to remove portions of the first layer of spacer material and form a spacer adjacent to the second dummy gate stack, removing the first masking layer, epitaxially growing a silicon material on the second fin, depositing a layer of oxide material on the first layer of spacer material, the first epitaxial material and the second dummy gate stack, and depositing a second layer of spacer material on the layer of oxide material.Type: GrantFiled: March 30, 2016Date of Patent: October 18, 2016Assignees: INTERNATIONAL BUSINESS MACHINES CORPORATION, GLOBALFOUNDRIES INC.Inventors: Rama Kambhampati, Junli Wang, Ruilong Xie, Tenko Yamashita
-
Patent number: 9472772Abstract: An active device substrate includes a flexible substrate, an inorganic de-bonding layer, and at least one active device. The flexible substrate has a first surface and a second surface opposite to the first surface, wherein the first surface is a flat surface. The inorganic de-bonding layer covers the first surface of the flexible substrate, and the material of the inorganic de-bonding layer is metal, metal oxide or combination thereof. The active device is disposed on or above the second surface of the flexible substrate.Type: GrantFiled: December 1, 2015Date of Patent: October 18, 2016Assignee: AU OPTRONICS CORPORATIONInventor: Tsung-Ying Ke
-
Patent number: 9472454Abstract: In a tungsten film forming method, a substrate having a recess is provided in a processing chamber, and a first tungsten film is formed on the substrate to fill the recess with a tungsten by simultaneously or alternately supplying WCl6 gas as a tungsten source and a reducing gas under a depressurized atmosphere of the processing chamber, and by reacting the WCl6 gas with the reducing gas while heating the substrate. Then, an opening is formed in the tungsten filled in the recess by supplying WCl6 gas into the processing chamber and etching an upper portion of the tungsten. Thereafter, a second tungsten film is formed on the substrate having the opening by simultaneously or alternately supplying the WCl6 gas and the reducing gas into the processing chamber, and by reacting the WCl6 gas with the reducing gas while heating the substrate.Type: GrantFiled: March 25, 2015Date of Patent: October 18, 2016Assignee: TOKYO ELECTRON LIMITEDInventors: Takanobu Hotta, Yasushi Aiba
-
Patent number: 9466606Abstract: A semiconductor storage device according to an embodiment comprises stacks comprising insulating films and first wires that are alternately stacked. Semiconductor parts are provided in the stacks. The longitudinal direction of the semiconductor parts is a stacking direction of the insulating films and the first wires. Charge accumulation layers are provided between the first wires and the semiconductor parts and a plurality of the charge accumulation layers are provided corresponding to one of the semiconductor parts in a cross-section in a direction perpendicular to the longitudinal direction of the semiconductor parts. A width of first side surfaces of the semiconductor parts on which the charge accumulation layers are provided is larger at bottom ends of the semiconductor parts than at top ends of the semiconductor parts.Type: GrantFiled: July 23, 2015Date of Patent: October 11, 2016Assignee: KABUSHIKI KAISHA TOSHIBAInventor: Satoshi Nagashima