Abstract: A system and method are provided for the characterization of a sample containing a macromolecule in solution. A light source illuminates the sample, generally in the ultraviolet-visible wavelength range, and a plurality of sensors that are radially disposed about the sample at a plurality of observation angles simultaneously sense the light energy emerging from the sample. An intensity spectrum is calculated as a function of wavelength for each observation angle, from which is calculated a particle characteristic such as shape, conformational change, composition, and particle size distribution. Both scattering and absorption data are utilized to provide complementary information.

Abstract: A device is provided for measuring angular displacement and rotational movement of a shaft or linear displacement of an object comprising a light source, a Multichannel Fiber Optic Bundle, an optical code wheel or linear scale with optical tracks for light modulation, including typically a raster and a reference mark, a system of photodetectors, amplifiers, comparators of analog signals and a digital electronic block. The device forms a sequence of electric pulses whose number is proportional to displacement, a set of pulses indicating zero position of the disk, and also a logic signal indicating the direction of the displacement. A multichannel fiber optic bundle provides channels for the transmission and collection of light from the light source to the sensing site and back to the photodetectors and for light intensity monitoring of the source.

Abstract: 10A method is described for detecting and characterizing defects on a test surface of a semiconductor wafer. A three-dimensional image of the test surface is aligned and compared with a three-dimensional image of a defect-free reference surface. Intensity differences between corresponding pixels in the two images that exceed a predefined threshold value are deemed defect pixels. According to the method, the pixels of the reference image are grouped according to their respective z values (elevation) to identify different physical layers of the reference surface. Because different surface layers can have different image properties, such as reflectance and image texture, the groups of pixels are analyzed separately to determine an optimal threshold value for each of the groups, and therefore for each layer of the reference surface.

Abstract: An apparatus and method for detecting particles on a surface of a semiconductor wafer having repetitive patterns includes a laser for illuminating an area on the front surface at grazing angle of incidence with a beam of polarized light. A lens collects light scattered from the area and forms a Fourier diffraction pattern of the area illuminated. A Fourier mask blocks out light collected by the lens at locations in the Fourier diffraction pattern where the intensity is above a predetermined level indicative of background information and leaves in light at locations where the intensity is below the threshold level indicative of possible particle information. The Fourier mask includes an optically addressable spatial light modulator and a polarization discriminator. A camera detects scattered light collected from the area by the lens and not blocked out by the Fourier mask.

Abstract: Described is a process for determination of the position of a vehicle in a plane of travel by means of a laser beam transmitted by a sensor, mounted on the vehicle, parallel to the plane of travel and scanning approximately 360.degree.. The reflection from at least two fixed reference points is processed by a receiver and a computer. The reference points are formed by a limited number of distinguishable marks and the marks identified by the fact that their width and the beam angle are determined and, from them, the distance between the sensor and the mark is computed. The variance of the vehicle position is computed from the known variance of the bearing angle and the position of the measured mark relative to the sensor and utilized for the correction of the estimated position of the vehicle.

Abstract: An optical modulator (19) utilizes a variable beam splitter arrangement having two separate plano-periodic cylindrical lens arrays (20 and 22) arranged as a sandwiched air-spaced assembly with the plano surfaces facing outwardly from the assembly. The assembly further includes a means (26) for controllably translating or moving one of the lenses relative to the other. The periodic array is formed as alternating concave and convex cylindrical structures. In a nominal setting, the optical axes of the concave structures of one of the lens arrays are aligned with the optical axes of the convex structures of the other so that the assembly acts as an afocal window having little impact when placed in an optical system. To adjust the beam splitting properties, one lens array is slightly translated with respect to the other to cause controlled misalignment of the two lens array surfaces. The present invention is particularly suited for tuning the point spread function of an electronic imaging system.

Abstract: A method and resulting system for directing generally collimated illumination from a source at an oblique angle to a surface under inspection (SUS) to produce scattered nonspecular energy substantially normal to the SUS and for observing the scattered nonspecular energy in one of a plurality of fractional windows of a viewed image of the SUS via a plurality of focussing elements. Such arrangement results in simultaneous and significant throughput and sensitivity enhancement over existing art. The method can be enhanced further wherein the observing step is performed through suitable relative motion of the scattering image over the imaging plane to permit over sampling. Furthermore, the DMT is significantly simplified because imaging is utilized to electronically scan the wafer instead of using opto-mechanical scanning means. Imaging sensors with an aggregate 2000.times.2000 pixel resolution could image a 200 mm wafer to 100 microns pitch.

Abstract: A method is described for optimizing intensity-comparison thresholds used to compare test and reference images for defect detection. Intensity differences between corresponding pixels in the two images that exceed a predefined threshold value are deemed defect pixels. According to the method, the pixels of the reference image are grouped according to their respective z values (elevation) to identify different physical layers of the reference surface. Because different surface layers can have different image properties, such as reflectance and image texture, the groups of pixels are analyzed separately to determine an optimal threshold value for each of the groups, and therefore for each layer of the reference surface.

Abstract: Picture display device (1) comprising an illumination system (3) provided with a light source (5) for generating a light beam. The device (1) also comprises a picture display panel (9) having a matrix of pixels (10) for modulating said light beam in conformity with picture information to be displayed. A first microlens array (13) having a plurality of first lenses (15) and a pitch .DELTA.w.sub.1 is present between the illumination system (3) and the picture display panel 9. A second microlens array (17) having a plurality of second lenses (19) and a pitch .DELTA.w.sub.2 is present between the first microlens array (13) and the picture display panel (9). The focal planes of the two microlens arrays coincide and .DELTA.w.sub.1 =.DELTA.w.sub.2 =.DELTA..sub.w applies to the pitches. The first lenses (15) have dimensions which are substantially equal to the dimensions of the second lenses (19).

Abstract: A thin film light used in displays is disclosed. The thin film light is an organic light generating thin film located between two electrodes. One electrode facing the display is transparent, while another electrode is a reflective patterned electrode. The patterned electrode is aligned with pixel displays. At least one polarizer is used to provide a light or dark display background. The thin film light may be a backlight for transmission displays. Alternatively, the thin film light may be a frontlight for reflective displays, where display illumination and imaging are performed over the same front side of the reflective display.

Abstract: In a system for detecting a degree of unevenness of a surface of a semiconductor device, the surface is irradiated with light having a wavelength of approximately 240 nm to 500 nm. The degree of unevenness of the surface is determined in accordance with an intensity of reflected light from the surface.

Abstract: The invention resides in a method of measuring position and angle comprising the steps of providing a tooling telescope, a transparent target surface and an alignment target having a light reflecting face confronting the telescope. The light reflecting face being defined by a recess having a parabolic surface and a flat surface surrounding the parabolic recess. The method further includes using light reflected off the flat surface to create collimated light passing through the target surface to define an angle of measurement of the tooling telescope and using light reflected off the parabolic surface to focus a point on the transparent target surface to measure position.

Abstract: The invention relates to a system for monitoring a fiber optic cable (2) connected between optical signal transmitting (TX) and receiving (RX) equipment, and comprising first (3) and second (4) electro-optical devices for measuring optical power being both connected to a central control unit (14) over a bus (13) and permanently connected to the beginning and the end, respectively, of the fiber optic cable (2), at said transmitting (TX) and receiving (RX) equipment.The invention also relates to a compact electro-optical device (3) for measuring the operating optical power (P) of a fiber optic cable (2), having an optic input (5) and optic output (7), as well as an electric input (9) and electric output (11) and being of the type which comprises an optical power measuring circuit (20) having an input (19) connected to the optic input (5) and an output (21) connected to the electric output (11).

Abstract: A system for estimating the cutting condition of a double ground knife blade in which the width of each of the two adjacent bevels comprising the cutting edge are compared. The two bevels may be pictured on a monitor and compared visually, or may be processed to generate a data display or, additionally, signals to control a sharpening device.

Abstract: A resonant-cavity apparatus for cytometry or particle analysis. The apparatus comprises a resonant optical cavity having an analysis region within the cavity for containing one or more biological cells or dielectric particles to be analyzed. In the presence of a cell or particle, a light beam in the form of spontaneous emission or lasing is generated within the resonant optical cavity and is encoded with information about the cell or particle. An analysis means including a spectrometer and/or a pulse-height analyzer is provided within the apparatus for recovery of the information from the light beam to determine a size, shape, identification or other characteristics about the cells or particles being analyzed. The recovered information can be grouped in a multi-dimensional coordinate space for identification of particular types of cells or particles. In some embodiments of the apparatus, the resonant optical cavity can be formed, at least in part, from a vertical-cavity surface-emitting laser.

Abstract: A system of partially transparent light beam detectors that allow passage of the light beam through the detector allows multiple detectors that use the same reference light beam. Transparent detectors can be position sensitive detectors (PSD), photodiode arrays, or CCD imaging arrays. The detectors are attached to vibration susceptible structural elements, with detected movement of the light beam with respect to the partially transparent light beam detectors corresponding to movement of the vibration susceptible structural element.

Abstract: An electrochromic display device (ECD) for an optical pick-up apparatus which is capable of maximizing a transmissivity of a laser beam by forming a reflection prevention layer on the outer surfaces of transparent substrates, includes first and second transparent substrates formed at both sides of the ECD with a predetermined interval therebetween, first and second transparent electrodes coated on the inner surfaces of the transparent substrates, respectively, an electrochromic layer coated on the inner surface of the second transparent electrode so that colorizing or decolorizing may be carried out reversibly, a counter eletrode layer coated on the inner surface of the first transparent electrode, an electrolytic layer formed between the counter electrode layer and the electrochromic layer, and a reflection prevention layer coated to have more than one layer so as to prevent a beam from being reflected on the outer surfaces of the first and second transparent substrates.

Abstract: A piezoelectric actuatable array of light shutters is disclosed wherein each pixel aperture in the array is selectively opened and closed by way of an opaque piezoelectric shutter. Upon application of a voltage, each piezoelectric shutter extends laterally so as to close the corresponding pixel aperture and prevent light from passing therethrough. The pizeoelectric shutters contract, opening the corresponding pixel aperture, upon removal of the above-threshold voltage.

Abstract: Compensation is performed to eliminate noise generated by fluctuation of a medium that surrounds an object to be measured. First and second laser beams having different wavelengths are generated by a He--Ne laser and a YAG laser, respectively, and are superposed by a first dichroic mirror such that they propagate along a common path. The first laser beam is caused to reflect off the object to be measured, while the second laser beam is reflected by a second dichroic mirror before reaching the object. The first and second reflected laser beams are separated from each other by a third dichroic mirror. The reflected first laser beam is detected by a first position sensor, while the reflected second laser beam is detected by a second position sensor. This makes it possible to compensate for noise generated by fluctuation of the medium around the object to be measured, so that the object can be measured accurately and reliably.

Abstract: An improved semiconductor package is provided wherein the mounting pad for the semiconductor is made from a material selected from the group consisting of aluminum nitride, diamond, alumina, and boron nitride.