Abstract: The bump height is measure din a sample area on a wafer, the bump height distribution on the wafer is estimated on the bases of the measured value, the portion where the estimated height distribution is out of a predetermined range is determined as an inspection area, and the bump height is measured in the inspection area, and a chip area having a bump height out of a predetermined range is judged to be defective. Data of the inspection areas and inspection results are accumulated, and the inspection density is renewed on the basis of the accumulated data. In another method, the inspection area is divided into rectangular blocks so that each block has a width of approximately equal to a light beam scanning length and a distance between any adjacent bumps in the feeding direction is less than a predetermined value, feeding path being perpendicular to the scanning direction.

Abstract: An imaging spectrometer has fore-optics coupled to a spectral resolving system with an entrance slit extending in a first direction at an imaging location of the fore-optics for receiving the image, a convex diffraction grating for separating the image into a plurality of spectra of predetermined wavelength ranges; a spectrometer array for detecting the spectra; and at least one concave sperical mirror concentric with the diffraction grating for relaying the image from the entrance slit to the diffraction grating and from the diffraction grating to the spectrometer array. In one embodiment, the spectrometer is configured in a lateral mode in which the entrance slit and the spectrometer array are displaced laterally on opposite sides of the diffraction grating in a second direction substantially perpendicular to the first direction. In another embodiment, the spectrometer is combined with a polychromatic imaging camera array disposed adjacent said entrance slit for recording said image.

Abstract: A system for determining a dimension of a detail includes an optical scope for producing an image of the detail, an image scaling device for providing a scaled image size, and a processor. The system also includes a video camera which is either within the optical scope or external to the optical scope. The optical scope includes a focusing device for adjusting a focal position of the image of the detail and a device for providing a focus position signal based a position of the focusing device. The processor converts the focus position signal into an object distance signal, or a magnification signal, or both, and determines the dimension of the detail based on the scaled image size and based on the object distance signal, or the magnification signal, or both. The system further comprises means to compensate for changes in temperature of the optical scope to ensure that the measurement accuracy is not compromised by expansion or contraction of the scope.

Abstract: A fluorescent lighting system has: (A) a central power supply connected with regular power line voltage and including a number of power supply modules (e.g., eight), each such module having: (i) a parallel-resonant self-oscillating bridge inverter operative to provide a 35 kHz sinusoidal output voltage at a pair of primary output terminals; (ii) a tank-inductor and a tank-capacitor parallel-connected across the primary output terminals; and (iii) several (e.g., four) pairs of secondary output terminals, each connected with the primary output terminals via its own dedicated current-limiting sub- circuit; thereby to prevent a load connected with a pair of secondary output terminals from drawing more than a certain amount of power; thereby, in turn, to render each pair of secondary output terminals fire-hazard-safe; (B) a plurality of lighting fixtures (e.g.

Abstract: The invention is of a vehicle interlock system which utilizes non-invasive, optically based methods for detecting and measuring levels of certain target chemical substances in the blood or tissues of a user in preventing operation of the vehicle by persons exhibiting higher (or lower) than prescribed levels of such chemicals. The system of the present invention is not limited to simply measuring blood alcohol levels as are presently available breathalizer-based interlock systems, but lends itself to use in detecting unacceptable systemic levels of virtually any chemical for which the system if programmed to measure. In addition, the present system includes components for positively identifying, and during the course of vehicle operation, re-identifying the intended user and alcohol or drug user testee.

Abstract: Devices that comprise novel, mesoscopically periodic materials that combine crystalline colloidal array (CCA) self-assembly with the temperature ined volume phase transitions of various materials, preferably poly(N-isopropylacrylamide) (PNIPAM) are disclosed. In one embodiment, a PNIPAM CCA is formed in an aqueous media and contained within cell means. In another embodiment, a CCA of charged particles is formed and polymerized in a PNIPAM hydrogel. Methods for making these devices are also disclosed. The devices of the present invention are useful in many applications including, for example, optical switches, optical limiters, optical filters, display devices and processing elements. The devices are further useful as membrane filters. All of these devices have the feature of being tunable in response to temperature. Devices that change diffracted wavelength in response to pressure are also disclosed.

Abstract: A plastics material which contains a pigment composition comprising a pigment having adsorbed on its surface, or as a physical mixture, up to 10% by weight, based on the total weight of pigment composition of a coding compound which is a compound containing azo, azomethine or polycyclic chromophore and which has an absorption spectrum and a Raman spectrum different from that of the pigment.

Abstract: An end-point detector for a plasma etcher, includes a converging lens for receiving strip-like plasma light produced between a pair of opposed electrodes and a spectroscope, having a slit located at a substantial rear-side focal plane of the converging lens, for detecting an etching end time point from a time-based variation of spectrum light intensity of the plasma light which has been converged at the slit and has passed through the slit. The converging lens has a pupil diameter of not greater than ##EQU1## where W is a width of a short side of the strip-like plasma light produced between the electrodes, 1 is a distance between an end of each electrode and a pupil face of the converging lens, NAm is a numerical aperture required by the spectroscope, and h is a width of a short side of the slit of the spectroscope. The converging lens has a numerical aperture of not less than NAm.

Abstract: The present invention relates to an image sensor; and, more particularly, to an image sensor having test patterns for measuring characteristics of color filters. In accordance with the present invention, the separate quartz wafer or glass wafer is not required. Therefore, unnecessary cost can be saved and high price of light measuring instrument is not necessary any longer, because it is possible to measure the characteristic of exact color filter on substantial wafer. Moreover, since the measurement of color filter is available on the silicon wafer where substantial image sensor is manufactured, the results of measurement are much more exact and it is possible to promptly apply the results to successive wafer or lot. Thus, it contributes to the improvement of yield of the image sensors.

Abstract: A device for measuring transmittance through a material in which a detector and a light source are mounted in a single housing and light emitted from the light source is transmitted through the material and then retro-reflected by a retro-reflector into the light detector.

Abstract: A device for simultaneously and/or group-wise random measuring fluorescent light emitted by sample-reagent mixtures contained in a plurality of reaction vessels.In order to measure fluorescence light for each reaction vessel with high sensitivity and accuracy and at the lowest possible cost the device according to the invention has an array of photodiodes built on a chip. Each of the photodiodes of the array is configured to receive fluorescent light emitted by a sample-reagent mixture contained in one of said plurality of reaction vessels and to provide an output signal representative of the intensity of said fluorescent light. An integrated electronic circuit is connected to the said array of photodiodes for processing output signals provided by photodiodes of the array. The integrated electronic circuit is mounted on the chip on which the array of photodiodes is built.

Abstract: An optical check for electrical components on an equipping head is provided by moving the suction pipette of the equipping head with the component affixed thereto passed a line sensor that is parallel to the axial direction of the suction pipette. The free end of the suction pipette and the component proceed into the sensor region. The sensor values for the empty suction pipette are compared in an evaluation unit to sensor values of the suction pipette equipped with the component. The presence of the component and/or the height of the component and/or the length of the component are determined by the comparison.

Abstract: An apparatus and method for measuring in real time the rotational or linear position, direction or velocity of a rotating or linear moving body, particularly an encoded optical disk or strip attached to such rotating or linear moving body. A position measurement pattern comprising a plurality of spaced apart rows of "lands" and "pits" are included on the encoded disk or strip. A position read head with a plurality of laser beams is positioned to reflect laser light off the position measurement pattern on the disk or strip. The relative spacing of the laser beams on the position read head is adjusted to a non-integral multiple of the spacing of the rows. Output signals from the position read head are generated according to reflected laser light from the position measurement pattern which is detected by the error read head. The output signals are converted to position, direction and velocity information.

Abstract: A method for determining the thickness of a thin sample is described. The method includes the step of exciting time-dependent acoustic waveguide modes in the sample with an excitation radiation field. The acoustic waveguide modes are detected by diffracting probe radiation off a ripple morphology induced on the sample's surface by the acoustic waveguide modes. The diffracted probe radiation is then analyzed to measure phase velocities or frequencies of the acoustic waveguide modes. A thickness of the thin sample is determined by comparing the measured phase velocities or frequencies to the phase velocities or frequencies calculated from a mathematical model.

Abstract: A droplet travel path monitoring mechanism for a flow cytometer is operative to adjust the droplet break-off point back to an initially calibrated spatial location, in the event of the departure from calibrated timing of gaps in the unsorted fluid droplet stream that have been created by the deflection of charged droplets. In addition, the flow cytometer is operative to monitor prescribed characteristics of deflected droplet streams, and to controllably adjust drop-sorting deflection parameters, so as to maintain the deflected travel path of sorted droplets coincident with the opening into a sorted droplet collection container, thereby maximizing collection of all sorted droplets.

Abstract: The present invention relates to methods and apparatus for measuring the optical properties, eg twist angle, cell gap, input director, of a transmissive or reflective liquid crystal cell. For a transmissive liquid crystal cell the cell is placed between a polarizer and an analyzer and the transmission spectrum observed while rotating the analyzer until zero transmission is obtained at at least one wavelength. The twist angle and the surface rubbing orientations of the liquid crystal cell are determined by the relative angle between the polarizer and the analyzer while the cell gap is determined from the calculated retardation value d.DELTA.n with known .DELTA.n. For reflective cells cell gap is determined based on a knowledge of twist angle and is accomplished by observing zero reflection wavelengths from a reflective cell with the polarizer and analyzer in cross-orientation.

Abstract: A system and method for characterizing a surface are disclosed. The system includes a light source and source optics which direct a beam of light toward the surface. A first optical integrating device is positioned and configured to receive a first portion of the scattered light and a second optical integrating device is positioned and configured to receive a second portion of the scattered light. The second optical integrating device reflects the second portion of the scattered light through a segmenting optic. The segmenting optic is configured to segment the second portion of the scattered light to thereby isolate the anisotropic roughness amplitude to one or more segments. A roughness ratio indicative of the anisotropic roughness is produced by comparing the roughness amplitudes of the segments.

Abstract: Apparatus for testing electrical bonds of a semiconductor device includes a cantilever arm (14a) with a test head (16) mounted thereon. The test head (16) is biased by the arm (14a) against a base plate (11), but can be moved away from the base plate (11) by an air bearing (22) to ensure substantially frictionless initial positioning. Sensing means (32;34) for sensing contact with a semiconductor substrate are also disclosed.

Abstract: An optical scanning system includes a power meter that during calibration operations is illuminated by an attenuated excitation beam. The power meter measures optical power in the attenuated excitation beam at various index settings of a variable optical attenuator, and the system constructs a lookup table that relates incident excitation beam power to the index settings of the attenuator. The system then uses the table to select the appropriate setting for the attenuator in order to deliver to the sample an excitation beam of a specified optical power. The system calibrates the gain of a detector by redirecting, or reflecting, the excitation beam of known intensity to the detector. A photometric device in the detector produces a signal that is proportional to the intensity of the beam at various gain settings. The system then produces a lookup table that relates the gain settings to the actual gain of the detector, that is, to the ratio of the known incident power to the detector readings.

Abstract: An apparatus for sensing blend segregation in a mixture comprises a light transmissive window disposed within a feed connection between a hopper and an extruder for example, a light source for emitting a light beam, and a light sensor to perform spectrum analysis of any incident light supplied thereto. An illumination assembly has a first end optically coupled to the light source and a second end optically coupled to the light transmissive window to illuminate a portion of the internal path provided by the feed connection. At least one detection assembly is provided, having a first end disposed adjacent to the light transmissive window so as to detect the reflection from any illuminated polymer blend passing therethrough. The light sensor collects the diffuse reflecting light from the polymer blend and transforms the diffuse reflecting light into tri-color signals, reflection curves or the like, for comparison with other diffuse reflecting light so as to determine if a particular blend is segregating.