Abstract: A semiconductor processing system, including: an elongated transfer chamber including a middle portion, a first end portion disposed at a first end of the middle portion and a second end portion disposed at a second end of the middle portion, wherein at least two lateral semiconductor processing modules attach to the first and second sidewall of the middle portion; the second end portion of the transfer chamber is further attached with one end portion semiconductor processing module, the end portion semiconductor processing module including two process chambers, the two process chambers of the end portion semiconductor processing module being respectively connected to an end face of the second end portion via two air-tight valves; wherein a traverse distance (D4) is provided between the two air-tight valves of the end portion semiconductor processing module, the width of the end face is greater than the traverse distance, and the spacing (D2) between the first and sidewall.

Abstract: Apparatus and methods to process one or more substrates are described. A plurality of process stations are arranged in a circular configuration around a rotational axis. A support assembly with a rotatable center base defining a rotational axis, at least two support arms extending from the center base and heaters on each of the support arms is positioned adjacent the processing stations so that the heaters can be moved amongst the various process stations to perform one or more process condition. The support assembly configured to offset the position of the substrate with respect to the processing stations.

Abstract: An end-effector of a programmable motion device is disclosed. The end-effector includes a body that provides an open interior, the open interior being coupled to a vacuum source, and the body including a contact surface for contacting an object to be grasped by the end effector. The contact surface is at least partially defining an aperture, and the body includes a flexible portion that permits at least a portion of the contact surface to be drawn at least partially into the open interior of the body when a flow of air drawn by the vacuum source through the aperture is reduced due to the aperture being at least partially blocked.

Abstract: A substrate loading device including a frame adapted to connect to a substrate processing apparatus, the frame having a transport opening through which substrates are transported to the processing apparatus, a cassette support connected to the frame for holding at least one substrate cassette container proximate the transport opening, the support configured so that a sealed internal atmosphere of the container is accessed from the support at predetermined access locations of the container, and the cassette support has a predetermined continuous steady state differential pressure plenum region, determined at least in part by boundaries of fluid flow generating differential pressure, so that the predetermined continuous steady state differential pressure plenum region defines a continuously steady state fluidic flow isolation barrier disposed on the support between the predetermined access locations of the container and another predetermined section of the support isolating the other predetermined section from

Abstract: The present invention provides a system and method for monitoring conditions within an electrical distribution system. According to a first preferred embodiment, the present invention provides a sensor module delivery system which uses UAVs to deploy sensor modules within the electrical distribution system. According to a first preferred embodiment, the system includes a drone mounting system and a gripper mechanism for attaching to a sensor module. The system also includes an extended carbon fiber shaft which vertically extends down from the drone mounting system and which supports a controller module, a transceiver, a battery module, a camera and the gripper mechanism. According to a further preferred embodiment, the gripper mechanism includes two or more gripping arms which are movable by the controller module between a first open position and a second closed position.

Abstract: The present disclosure generally relates to a method and apparatus for loading, processing, and unloading substrates. A processing system comprises a load/unload system coupled to a photolithography system. The load/unload system comprises a first set of tracks having a first height and a first width, and a second set of tracks having a second height and a second width different than the first height and first width. An unprocessed substrate is transferred from a lift pin loader to a chuck along the first set of tracks on a first tray while a processed substrate is transferred from the chuck to the lift pin loader along the second set of tracks on a second tray. While a first tray remains with a substrate on the chuck during processing, the load/unload system is configured to unload a processed substrate and load an unprocessed substrate on a second tray.

Abstract: A working machine according to one aspect of the present invention, includes a support member, a turn member, a pin inserted to both of the support member and the turn member to turnably support the turn member on the support member, a flange fixed to the pin, a collar inserted to an insertion hole formed in the flange, a retainer bolt inserted to the collar and attached by being screwed to the turn member and the support member, a contact portion included in the flange, and a regulator included in the support member. The regulator contacts to the contact portion with a clearance kept between the collar and an inner circumference surface of the insertion hole, thereby regulating turning of the flange around the pin.

Abstract: A substrate transport apparatus comprising a support frame an articulated arm connected to the support frame, having at least one movable arm link and an end effector connected to the movable arm link, with a substrate holding station located thereon. Wherein the movable arm link is a reconfigurable arm link having a modular composite arm link casing, formed of link case modules rigidly coupled to each other, and a pulley system cased in and extending through the rigidly coupled link case modules substantially end to end of the modular composite arm link casing, wherein the rigidly coupled link case modules include link case end modules connected by at least one interchangeable link case extension module having a predetermined characteristic determining a length of the movable arm link, wherein at least one interchangeable link case extension module is selectable for connection to link case end modules forming the reconfigurable arm link.

Abstract: Coupled processing containers include a first processing container and a second processing container provided side by side in a horizontal direction to form a gap therebetween, the first processing container and the second processing container being configured to store substrates, respectively, in order to perform vacuum processing, and a connecting part provided across the gap so as to connect the first processing container and the second processing container to each other, the connecting part being configured to be slidable in the horizontal direction with respect to at least one of the first processing container and the second processing container.

Abstract: A substrate carrying apparatus that can reduce attachment of dust to substrates can be provided. The substrate carrying apparatus 1 of the present embodiment includes a carrying arm 2 for carrying a substrate, a column 32 standing up from a base body 31 with fixed angle, an upper link 33 which supports the carrying arm 2 at one end, which is rotatably connected to the column 32, and which moves the carrying arm 2 up and down in accordance with a rotation, a lower link 34 which is connected to be rotatable around an axis in parallel with a rotation axis of the upper link 33 as a center below a portion of the column 32 connected to the upper link 33, a connection link 35 which is rotatably connected to the upper link 33 and the lower link 34 so that the upper link 33 rotates in accordance with a rotation of the lower link 34, and a driving unit 4 which rotates the lower link 34.

Abstract: An apparatus for advancing and supplying bars to a machine tool, comprises: a plurality of tubular elements each suitable for containing longitudinally a respective bar; at least one first carriage unit and a second carriage unit supporting the tubular elements and movable longitudinally on a drum structure to move the tubular elements parallel to an advancement direction for the bars; the drum structure extends from a front end, suitable for being placed in a position adjacent to a spindle of the machine tool, to a rear end, suitable for being further from the machine tool. Each tubular element is provided with a feed finger unit that is suitable for clamping and pulling a respective bar to advance the bar advancement direction.

Abstract: An overhead transport vehicle includes a container accommodation portion sandwiched by a pair of cover portions in a front-and-rear direction in a traveling direction and configured to hold a cassette in a state in which a lid faces in a width direction intersecting the traveling direction and a vertical direction; and a lid-fall prevention member on the cover portion to prevent the lid that has come off from the cassette held in the container accommodation portion from falling. The lid-fall prevention member includes a lower support portion extending along the width direction below the cassette and partially protruding from the lid in a planar view seen from the vertical direction, and a front support portion standing upright in the vertical direction from the lower support portion so as to face at least a portion of the lid. The lower support portion and the front support portion are integrally defined by a unitary structure.

Abstract: To provide a method of controlling a robot and a suction gripping device capable of preventing occurrence of wrinkling in a workpiece having a thin packaging material with a content contained therein. A method of controlling an industrial robot according to an embodiment, configured to suction and grip a workpiece having a thin packaging material with a content contained therein, includes: pressing a suction pad against the content with the packaging material interposed therebetween and, upon starting the suction, suction-gripping the workpiece by the suction pad. Starting suction may be performed in a state in which the suction pad is pressed to the content with the packing material therebetween or before the suction pad is pressed to the content.

Abstract: A handling robot (100), which relates to the field of warehouse logistics, comprises: a mobile chassis (10); a storage shelf (20) mounted to the mobile chassis (10), the storage shelf (20) comprising a plurality of layered plate components (21) distributed at different heights, each layered plate component (21) comprising a layered plate (210) for placing materials; a handling device (40), comprising a handling assembly (42), the handling assembly (42) being configured to handle a material to a layered plate (210) at the same height as the handling assembly (42), or to handle a material out of a layered plate (210) at the same height as the handling assembly (42); and a lift component (30), configured to drive the handling device (40) to lift relative to the storage shelf (20) so that the handling assembly (42) is at the same height as one layered plate (210).

Abstract: Exemplary substrate processing systems may include a transfer region housing defining an internal volume. A sidewall of the transfer region housing may define a sealable access for providing and receiving substrates. The systems may include a plurality of substrate supports disposed within the transfer region. The systems may also include a transfer apparatus having a central hub including a first shaft and a second shaft concentric with and counter-rotatable to the first shaft. The transfer apparatus may include a first end effector coupled with the first shaft. The first end effector may include a plurality of first arms. The transfer apparatus may also include a second end effector coupled with the second shaft. The second end effector may include a plurality of second arms having a number of second arms equal to the number of first arms of the first end effector.

Abstract: A transportation head for a microchip transfer device capable of minimizing mechanical and chemical damage to a microchip, a microchip transfer device having same, and a transfer method thereby, and the transportation head includes a head body having a pickup area and a dummy area; a first protruding pin disposed in the pickup area of the head body; and a liquid droplet attached to the first protruding pin.

Abstract: The present invention provides a vertical feeding and wafer inserting integrated machine, comprising a rack and a silicon wafer transfer device provided on the rack; a carrying-transporting water tank for carrying and transporting silicon wafers is provided on one end of the rack; the rack is further provided with a feeding unit for conveying the silicon wafers in the carrying-transporting water tank to a silicon wafer transfer belt a wafer inserting unit for inserting the silicon wafers into wafer baskets is provided on one end, away from the feeding unit, of the silicon wafer transfer device, and a wafer basket arraying mechanism is provided on the other end of the wafer inserting unit; and a washing manipulator for transferring grouped wafer baskets to a washing procedure is further correspondingly provided on the rack.

Abstract: A vacuum powered pickup tool with mechanically moveable discrete nozzles allows for selective activation of the nozzles through the mechanical movement of the nozzles relative to a vacuum manifold. The movement of a nozzle from an inactive position where an inlet port of the nozzle is fluidly decoupled with the vacuum manifold to an active position where the inlet port is fluidly coupled with the vacuum manifold allows for independent activation of discrete nozzles of the pickup tool. Aspects also contemplate varying an associate manifold through movement of the manifolds accessible to the inlet port of the nozzle when in the active position.

Abstract: A grapple-heel rack having a frame, a grapple, and first and second angle-enabler catches. A grapple attachment (which may be or may include a universal joint) may be used to support the grapple from a nose of the frame. A mechanical grapple return system may be used to return the grapple from anon-neutral position to a neutral position. At least one method for using the grapple-heel rack.

Abstract: A zero-turn mower including a removably attached front-end loader, where front-end loader includes two boom arms and a bucket, and an attachment mechanism. The attachment mechanism may include a center plate, a loader attachment mechanism, and a mower attachment mechanism.