Abstract: An apparatus for fabricating a semiconductor device has a housing defining a buffer chamber, a plurality of reactor ports formed in the housing for establishing interfaces with a plurality of process chambers that are to receive a wafer during a fabrication process to fabricate the semiconductor device, a wafer positioning robot positioned within the buffer chamber to transport the wafer between the plurality of process chambers through the plurality of reactor ports, a purge port formed in the housing for introducing a purge gas into the buffer chamber, a pump port formed in the housing for exhausting a portion of the purge gas from the buffer chamber, and a first flow enhancer that directs the purge gas flowing in an axial direction along a longitudinal axis of the purge port into the buffer chamber in a plurality of radial directions relative to the longitudinal axis.

Abstract: A method of extending a reach of a material mover may include uncoupling and removing a first linkage that couples a work implement to an actuator on the material mover; uncoupling the work implement from one or more lifter arms; securing one or more extensions to each of the one or more lifter arms by (a) fastening, with a first fastener, an extension to a corresponding lifter arm, though a lifter-arm retention aperture, and (b) further securing the extension to the corresponding lifter arm with one or more additional fasteners adjacent the lifter-arm retention aperture and a top edge or bottom edge of an end of the corresponding lifter arm; coupling the work implement to the one or more extensions; and coupling a second linkage, which is longer than the first linkage, to the work implement and to the actuator.

Abstract: In an embodiment, a system includes: a tool port of a semiconductor processing tool; a processing port with an internal processing port location and an external processing port location; a robot configured to move a die vessel between the internal processing port location and the tool port; and an actuator configured to move the die vessel between the internal processing port location and the external processing port location.

Abstract: A compact utility loader is operated by a standing operator at the rear of a frame. A loader arm assembly comprises a scissors linkage on either side of the frame nesting around the prime mover. Each scissors linkage has an upper loader arm that is pivoted at its rear end to rears ends of a pair of lower loader arms such that the pivot connections to the upper loader arm move upwardly and forwardly relative to the frame during elevation of the loader arm assembly to provide a high lift capability. The frame is self-propelled by a differential drive and steering system that is operated by dual levers. A hand grip extends between and unifies the operation of the levers to permit the operator to more easily move the levers in the ways that are needed to provide either straight motion of the frame or turns of the frame.

Abstract: An apparatus for transferring a substrate is disclosed herein. More specifically, the apparatus relates to substrate handling systems used in semiconductor device manufacturing, and more particularly, to substrate handling systems having a substrate handler with enclosed moving elements and increased compatibility with post-CMP cleaning modules. The apparatus includes one or more indexing assemblies. Each of the indexing assemblies including an enclosure, an actuator assembly disposed within the enclosure, and two handling blades disposed outside of the disclosure. Each of the two blades are moveable in either of a translational or a rotating manner.

Abstract: A substrate processing apparatus including a frame, a SCARA arm mounted to the frame at a shoulder joint having two links with at least one end effector dependent therefrom, the links defining an upper arm and a forearm, each end effector pivotally joined to the forearm at a wrist to rotate about a wrist axis, and a drive section with at least one degree of freedom operably coupled to the arm to rotate the arm about a shoulder axis articulating extension and retraction, wherein the end effector is coupled to a wrist joint pulley so that extension and retraction effects rotation of the pulley and end effector as a unit about the wrist axis, and wherein a height of the end effector is within a stack height profile of the wrist joint so that a total stack height is sized to conform with and pass through a pass-through of a slot valve.

Abstract: To realize a laser irradiation apparatus by using which accuracy in processing a substrate can be improved. A laser irradiation apparatus according to an embodiment includes a laser irradiation unit configured to apply laser light to a substrate, a base part, and a conveyance stage configured to convey the substrate. The conveyance stage includes a stage configured to be movable over the base part, a base flange fixed over the stage, a substrate stage fixed to an upper end part of the base flange and configured so that the substrate is placed thereover, and a pusher pin for supporting the substrate, the pusher pin being configured to penetrate the substrate stage and to be movable up and down.

Abstract: Apparatus and methods for handling die carriers are disclosed. In one example, a disclosed apparatus includes: a load port configured to load a die carrier operable to hold a plurality of dies into a processing tool; and a lane changer coupled to the load port and configured to move at least one die in the die carrier to an input of the processing tool and transfer the at least one die into the processing tool for processing the at least one die.

Abstract: The present invention includes: a base carrier; a revolving superstructure provided above the base carrier in a manner capable of revolving; a boom bracket supported by the revolving superstructure in a horizontally rotatable manner; a work machine supported by the boom bracket in a vertically rotatable manner; a first position detecting device that detects a horizontal position of the boom bracket with respect to the revolving superstructure; a second position detecting device that detects a vertical position of the work machine with respect to the revolving superstructure; and an arithmetic unit that calculates a position of a working end of the work machine based on the results of detection by those position detecting devices.

Abstract: An apparatus for transferring a substrate is provided. A unit for transferring a substrate, includes a support structure, a first hand to place the substrate, a second hand stacked with the first hand and placing the substrate, a first guide rail guiding movement of a first support rod to support the first hand in the support structure, a second guide rail guiding movement of a second support rod in the support structure to support the second hand, and a pressure reducing member reducing pressure of an exhaust fluid passage provided in the support structure. The exhaust fluid passage includes a first fluid passage communicating with the first guide rail, a second fluid passage communicating with the second guide rail, and a third fluid passage formed by combining the first fluid passage with the second fluid passage. The pressure reducing member reduces pressure of the third fluid passage.

Abstract: An automatic picking fixture device: a fixture locked with a mechanical arm and includes a coupling orifice, a motor, a rotor, and a gear. The fixture includes four elongated orifices and two movable holders. The two movable holders have four through orifices corresponding to the gear, four passing orifices, and two toothed sections received in the four through orifices and meshing with and driving the gear. The four passing orifices of the fixture is configured to lock with the four pneumatic cylinders or four servo motors, and the four pneumatic cylinders or the four servo motors are configured to push four jaws outward or inward, the four jaws include four symmetrical clamping grooves configured to clamp at least one material. The four racks are fixed on the top of the fixture, and a respective rack has two rollers rolling along a respective elongated orifice.

Abstract: A pick arm for a pick and place apparatus for electronic devices has a main body having a proximal end whereat the pick arm is mountable onto a pick arm support, and a distal end at which a collet is mounted for holding an electronic device. A first rigid body is located adjacent to the proximal end of the pick arm and a second rigid body is located adjacent to the distal end of the pick arm. The first and second flexures connect the first rigid body to the second rigid body. Moreover, the first flexure is spaced from the second flexure, and the first and second flexures have opposing faces that are arranged substantially parallel to each other. An actuator is operative to apply a biasing force onto the second rigid body so as to bend the first and second flexures relative to the first rigid body for biasing the collet of the pick arm to move.

Abstract: A lifting sling apparatus for lifting, holding, and transporting materials. More particularly, the invention relates to a lifting sling comprising a reinforced heavy-duty fabric body, such as, for example, a geotextile fabric, i.e., a synthetic fabric made from polypropylene, polyester, or other like synthetic materials, having heavy-duty sling webbing loops and reinforcement webbing on the body.

Abstract: A rack and lifter system and method is described. The system includes a rack having at least a first engagement opening, and a lifter having at least a first engagement member and at least a first vertical extension member, wherein in use the at least a first engagement member interlocks with the at least a first engagement opening of the rack, and the at least a first vertical extension member extends to lift the interlocked lifter and rack, wherein the at least a first vertical extension member includes means for movement. The lifter may include a guiding-and-lifting member which lifts the lifter and guides the lifter into an interior space of the rack. The lifter may include a towing machine connection member which connects the lifter to a towing machine which positions the lifter within the rack and tows the connected lifter and rack.

Abstract: A tower lift includes a main frame extending in a vertical direction, a carriage module configured to be movable in the vertical direction along the main frame, a weight module disposed behind the carriage module and configured to be movable in the vertical direction along the main frame, a driving module disposed on the main frame and configured to move the carriage module and the weight module in the vertical direction using at least one timing belt, an auto tensioner disposed on a lower portion of the main frame and connected with the carriage module and the weight module by a balance belt, and an upper alignment unit for aligning a horizontal position of the at least one timing belt.

Abstract: A transfer head for an electronic component transfer apparatus and a method therefor. The transfer head includes a first vacuum pipet laterally spaced from a second vacuum pipet with a first pitch therebetween. The first pitch is variable between a first pitch position and a second pitch position.

Abstract: A machine for use in picking up objects having a cellophane outer covering using a vacuum, the machine comprising a housing, a vacuum source, a suction cup coupled to the vacuum source, a transport system for moving the suction cup horizontally and vertically within the housing, and a plurality of objects having a cellophane outer covering in the housing below the pick-up device. The plurality of objects include an adhesively applied target on at least one of the cellophane outer coverings, the adhesively applied target having a surface area greater than a surface area circumscribed by a lowermost edge of the suction cup, and the suction cup includes a threaded tubular member extending axially therein through, the threaded tubular member including stops that engage an upper and lower surface of the suction cup.

Abstract: A storage apparatus for storing an object includes a load port unit that a receptacle is loaded onto or unloaded from, in which the receptacle accommodates the object in a storage space formed by a body and a cover that covers the body, and a controller. The load port unit includes a housing having an interior space, a stage member that is provided on the housing and that opens the storage space by moving the body, the receptacle being seated on the stage member, and an exhaust tube that evacuates a spacing space between the body and the cover spaced apart from each other. One end of the exhaust tube faces toward the spacing space, and an opposite end of the exhaust tube faces toward the interior space.

Abstract: An aligner device includes a robot hand, a lifting mechanism, sensors, a misalignment calculating unit, an x-y misalignment correcting unit, and a ? misalignment correcting unit. The robot hand includes vertically aligned hand members each configured to hold a planar workpiece. The lifting mechanism moves planar workpieces transported by the robot hand up from and down to the hand members, respectively. Each of the sensors, vertically spaced apart from each other, has a downward sensor surface to capture the outline of a planar workpiece brought close to the sensor surface by the workpiece lifting mechanism. The misalignment calculating unit calculates, by using the images of the captured outline shapes of the planar workpieces, an amount of positional misalignment of each planar workpiece with a reference position in X, Y and ? directions.

Abstract: An embodiment provides a wafer cassette stoker comprising: a cassette on which a plurality of wafers are loaded; a plurality of chambers disposed in one line while forming at least one layer, wherein the cassette after being cleaned is inserted in each of the chambers and a humidity control unit for supplying a compressed dry air (CDA) into the insides of the chambers so as to control humidity of the cassette.