Patents Examined by Sonya McCall-Shepard
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Patent number: 11830866Abstract: Manufacturing method of semiconductor package includes following steps. Bottom package is provided. The bottom package includes a die and a redistribution structure electrically connected to die. A first top package and a second top package are disposed on a surface of the redistribution structure further away from the die. An underfill is formed into the space between the first and second top packages and between the first and second top packages and the bottom package. The underfill covers at least a side surface of the first top package and a side surface of the second top package. A hole is opened in the underfill within an area overlapping with the die between the side surface of the first top package and the side surface of the second top package. A thermally conductive block is formed in the hole by filling the hole with a thermally conductive material.Type: GrantFiled: April 14, 2022Date of Patent: November 28, 2023Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Shih-Wei Chen, Chih-Hua Chen, Hsin-Yu Pan, Hao-Yi Tsai, Lipu Kris Chuang, Tin-Hao Kuo
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Patent number: 11818945Abstract: A method of manufacturing a transparent organic light emitting display apparatus having an emission area, and a transmission area disposed adjacent to the emission area and configured to pass external light therethrough, includes sequentially forming an interlayer dielectric and a first protection layer on a first substrate, patterning a planarization layer over the first protection layer, forming an organic light emitting device over the planarization layer, forming an encapsulation layer and an encapsulation substrate over the organic light emitting device, and exposing and etching at least some portions of the transmission area by using photolithography after the patterning of the planarization layer.Type: GrantFiled: April 4, 2022Date of Patent: November 14, 2023Assignee: LG DISPLAY CO., LTD.Inventors: Joonsuk Lee, SeJune Kim, Dohyung Kim, Saemleenuri Lee
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Patent number: 11817479Abstract: A transistor includes a bulk semiconductor substrate, and first and second raised source/drain regions above the bulk semiconductor substrate. A gate is between the first and second raised source/drain regions. A first dielectric section is beneath the first raised source/drain region in the bulk semiconductor substrate, and a second dielectric section is beneath the second raised source/drain region in the bulk semiconductor substrate. A first air gap is defined in at least the first dielectric section under the first raised source/drain region, and a second air gap is defined in at least the second dielectric section under the second raised source/drain region. The air gaps reduce off capacitance of the bulk semiconductor structure to near semiconductor-on-insulator levels without the disadvantages of an air gap under the channel region.Type: GrantFiled: September 29, 2021Date of Patent: November 14, 2023Assignee: GlobalFoundries U.S. Inc.Inventors: Uzma B. Rana, Steven M. Shank, Anthony K. Stamper
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Patent number: 11810999Abstract: Resonant optical cavity light emitting devices are disclosed, where the device includes a substrate, a first spacer region, a light emitting region, a second spacer region, and a reflector. The light emitting region is configured to emit a target emission deep ultraviolet wavelength and is positioned at a separation distance from the reflector. The reflector may be a distributed Bragg reflector. The device has an optical cavity comprising the first spacer region, the second spacer region and the light emitting region, where the optical cavity has a total thickness less than or equal to K·?/n. K is a constant ranging from 0.25 to 10, ? is the target wavelength, and n is an effective refractive index of the optical cavity at the target wavelength.Type: GrantFiled: September 17, 2021Date of Patent: November 7, 2023Assignee: Silanna UV Technologies Pte LtdInventor: Petar Atanackovic
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Patent number: 11810951Abstract: Disclosed are a semiconductor structure and method of forming the structure. The structure includes a field effect transistor (FET) with a channel region between source/drain regions that extend through a semiconductor layer and into an insulator layer, that include a first portion in the insulator layer, and a second portion on the first portion in the semiconductor layer and, optionally, extending above the semiconductor layer. The first portion is relatively wide, includes a shallow section below the second portion, and a deep section adjacent to the channel region and overlayed by the semiconductor layer. The uniquely shaped first portion boosts saturation current to be boosted to allow the height of the second portion to be reduced to minimize overlap capacitance. Optionally, each source/drain region includes multiple semiconductor materials including a stress-inducing semiconductor material grown laterally from the semiconductor layer to improve charge carrier mobility in the channel region.Type: GrantFiled: December 16, 2021Date of Patent: November 7, 2023Assignee: GlobalFoundries U.S. Inc.Inventors: Jianwei Peng, Hong Yu, Viorel Ontalus
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Patent number: 11810775Abstract: A method includes disposing a semiconductor die between a first high voltage isolation carrier and a second high voltage isolation carrier, disposing a first molding material in a space between the semiconductor die and the first high voltage isolation carrier, and disposing a conductive spacer between the semiconductor die and the second high voltage isolation carrier. The method further includes encapsulating the first molding material and the conductive spacer with a second molding material.Type: GrantFiled: July 23, 2021Date of Patent: November 7, 2023Assignee: SEMICONDUCTOR COMPONENTS INDUSTRIES, LLCInventors: Yusheng Lin, Jerome Teysseyre
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Patent number: 11804480Abstract: An integrated circuit chip including a substrate including first and second element regions; a first channel active region extending in a first direction; a second channel active region; gate lines extending in a second direction and intersecting the first and second channel active regions; a diffusion break extending in the second direction; source/drain regions at opposite sides of the gate lines and on the first and second channel active regions; a first power line electrically connected to the source/drain regions; and a second power line electrically connected to the source/drain regions and having a lower voltage level than the first power line, wherein the diffusion break includes a first region including an insulator and overlapping the first element region, and a second region including a same material as the gate lines and overlapping the second element region, wherein the second region is electrically connected to the second power line.Type: GrantFiled: November 16, 2021Date of Patent: October 31, 2023Assignee: Samsung Electronics Co., Ltd.Inventors: Panjae Park, Byungju Kang, Yoonjeong Kim, Kwanyoung Chun
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Patent number: 11804487Abstract: A semiconductor device includes: a first fin and a second fin extending from a substrate and an epitaxial source/drain region. The epitaxial source/drain region includes a first portion grown on the first fin and a second portion grown on the second fin, and the first portion and the second portion are joined at a merging boundary. The epitaxial source/drain region further includes a first subregion extending from a location level with a highest point of the epitaxial source/drain region to a location level with a highest point of the merging boundary, a second subregion extending from the location level with the highest point of the merging boundary to a location level with a lowest point of the merging boundary, and a third subregion extending from the location level with the lowest point of the merging boundary to a location level with a top surface of an STI region.Type: GrantFiled: April 4, 2022Date of Patent: October 31, 2023Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.Inventors: Wei Hao Lu, Yi-Fang Pai, Cheng-Wen Cheng, Li-Li Su, Chien-I Kuo
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Patent number: 11785816Abstract: A display apparatus includes a substrate having a bending region between a first region and a second region, the bending region being configured to be bent about a bending axis that extends in one direction; a display unit on the substrate; a first wiring unit at the bending region, the first wiring unit including a first bending portion having a plurality of first holes; and a second wiring unit spaced apart from the first wiring unit and at the bending region, the second wiring unit including a second bending portion having a different shape from the first bending portion.Type: GrantFiled: March 14, 2022Date of Patent: October 10, 2023Assignee: Samsung Display Co., Ltd.Inventors: Yangwan Kim, Sunja Kwon, Byungsun Kim, Hyunae Park, Sujin Lee, Jaeyong Lee
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Patent number: 11784055Abstract: A method includes following steps. A substrate is etched using a hard mask as an etch mask to form a fin. A bottom anti-reflective coating (BARC) layer is over the fin. A recess is formed in the BARC layer to expose a first portion of the hard mask. A protective coating layer is formed at least on a sidewall of the recess in the BARC layer. A first etching step is performed to remove the first portion of the hard mask to expose a first portion of the fin, while leaving a second portion of the fin covered under the protective coating layer and the BARC layer. A second etching step is performed to lower a top surface of the first portion of the fin to below a top surface of the second portion of the fin.Type: GrantFiled: March 11, 2022Date of Patent: October 10, 2023Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.Inventors: Chang-Yin Chen, Che-Cheng Chang, Chih-Han Lin
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Patent number: 11775724Abstract: An integrated circuit includes a first and second set of gate structures. A center of each of the first set of gate structures is separated from a center of an adjacent gate of the first set of gate structures in a first direction by a first pitch. A center of each of the second set of gate structures is separated from a center of an adjacent gate of the second set of gate structures in the first direction by the first pitch. The first and second set of gate structures extend in a second direction. A gate of the first set of gate structures is aligned in the second direction with a corresponding gate of the second set of gate structures. The gate of the first set of gate structures is separated from the corresponding gate of second set of gate structures in the second direction by a first distance.Type: GrantFiled: October 5, 2021Date of Patent: October 3, 2023Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.Inventors: Yu-Jung Chang, Chin-Chang Hsu, Hsien-Hsin Sean Lee, Wen-Ju Yang
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Patent number: 11769824Abstract: In some examples, a transistor comprises a gallium nitride (GaN) layer; a GaN-based alloy layer having a top side and disposed on the GaN layer, wherein source, drain, and gate contact structures are supported by the GaN layer; and a first doped region positioned in a drain access region and extending from the top side into the GaN layer.Type: GrantFiled: February 2, 2021Date of Patent: September 26, 2023Assignee: Texas Instruments IncorporatedInventors: Dong Seup Lee, Jungwoo Joh, Pinghai Hao, Sameer Pendharkar
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Patent number: 11756995Abstract: A semiconductor device structure, along with methods of forming such, are described. The structure includes first and second dielectric features and a first semiconductor layer disposed between the first and second dielectric features. The structure further includes an isolation layer disposed between the first and second dielectric features, and the isolation layer is in contact with the first and second dielectric features. The first semiconductor layer is disposed over the isolation layer. The structure further includes a gate dielectric layer disposed over the isolation layer and a gate electrode layer disposed over the gate dielectric layer. The gate electrode layer has an end extending to a level between a first plane defined by a first surface of the first semiconductor layer and a second plane defined by a second surface opposite the first surface.Type: GrantFiled: August 27, 2021Date of Patent: September 12, 2023Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.Inventors: Lung-Kun Chu, Mao-Lin Huang, Chung-Wei Hsu, Jia-Ni Yu, Kuan-Lun Cheng, Kuo-Cheng Chiang, Chih-Hao Wang
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Patent number: 11758820Abstract: A magnetic device for magnetic random access memory (MRAM), spin torque MRAM, or spin torque oscillator technology is disclosed wherein a magnetic tunnel junction (MTJ) with a sidewall is formed between a bottom electrode and a top electrode. A passivation layer that is a single layer or multilayer comprising one of B, C, or Ge, or an alloy thereof wherein the B, C, and Ge content, respectively, is at least 10 atomic % is formed on the MTJ sidewall to protect the MTJ from reactive species during subsequent processing including deposition of a dielectric layer that electrically isolates the MTJ from adjacent MTJs, and during annealing steps around 400° C. in CMOS fabrication. The single layer is about 3 to 10 Angstroms thick and may be an oxide or nitride of B, C, or Ge. The passivation layer is preferably amorphous to prevent diffusion of reactive oxygen or nitrogen species.Type: GrantFiled: June 1, 2021Date of Patent: September 12, 2023Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.Inventors: Jodi Mari Iwata, Guenole Jan, Ru-Ying Tong
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Patent number: 11735480Abstract: Embodiments of the invention are directed to a transistor that includes a source or drain (S/D) region having an S/D formation assistance region, wherein the S/D formation assistance region includes a top surface, sidewalls, and a bottom surface. The S/D formation assistance region is at least partially within a portion of a substrate. An S/D isolation region is formed around the sidewalls and the bottom surface of the S/D formation assistance region and configured to electrically isolate the S/D formation assistance region from the substrate.Type: GrantFiled: February 23, 2022Date of Patent: August 22, 2023Assignee: International Business Machines CorporationInventors: Ruilong Xie, Alexander Reznicek, Effendi Leobandung, Jingyun Zhang
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Patent number: 11728376Abstract: Structures and formation methods of a semiconductor device structure are provided. The semiconductor device structure includes a semiconductor substrate and a gate stack over the semiconductor substrate. The gate stack includes a gate dielectric layer and a work function layer. The gate dielectric layer is between the semiconductor substrate and the work function layer. The semiconductor device structure also includes a halogen source layer. The gate dielectric layer is between the semiconductor substrate and the halogen source layer.Type: GrantFiled: August 23, 2021Date of Patent: August 15, 2023Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.Inventors: Chih-Wei Lin, Chih-Lin Wang, Kang-Min Kuo
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Patent number: 11728170Abstract: A semiconductor device includes: a fin structure disposed on a substrate; a gate feature that traverses the fin structure to overlay a central portion of the fin structure; a pair of source/drain features, along the fin structure, that are disposed at respective sides of the gate feature; and a plurality of contact structures that are formed of tungsten, wherein a gate electrode of the gate feature and the pair of source/drain features are each directly coupled to a respective one of the plurality of contact structures.Type: GrantFiled: July 8, 2021Date of Patent: August 15, 2023Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.Inventors: Hong-Ying Lin, Cheng-Yi Wu, Alan Tu, Chung-Liang Cheng, Li-Hsuan Chu, Ethan Hsiao, Hui-Lin Sung, Sz-Yuan Hung, Sheng-Yung Lo, C. W. Chiu, Chih-Wei Hsieh, Chin-Szu Lee
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Patent number: 11723207Abstract: The present disclosure relates to an integrated chip comprising a substrate having a first pair of opposing sidewalls that define a trench. The trench extends into a front-side surface of the substrate. A first source/drain region is disposed along the front-side surface of the substrate. A second source/drain region is disposed along the front-side surface of the substrate. A gate structure is disposed within the trench and is arranged laterally between the first source/drain region and the second source/drain region. The gate structure extends along the first pair of opposing sidewalls to an upper surface of the substrate. A bottom surface of the gate structure is disposed below a bottom surface of the first source/drain region.Type: GrantFiled: August 27, 2021Date of Patent: August 8, 2023Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Yong-Sheng Huang, Ming Chyi Liu
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Patent number: 11721546Abstract: A method for making a semiconductor device may include forming a superlattice above a semiconductor layer, the superlattice including a plurality of stacked groups of layers, with each group of layers including a plurality of stacked base semiconductor monolayers defining a base semiconductor portion and at least one non-semiconductor monolayer constrained within a crystal lattice of adjacent base semiconductor portions. The method may further include selectively etching the superlattice to remove semiconductor atoms and cause non-semiconductor atoms to accumulate adjacent the semiconductor layer, epitaxially growing an active semiconductor device layer above the semiconductor layer and accumulated non-semiconductor atoms after the selective etching, and forming at least one circuit in the epitaxially grown active semiconductor device layer.Type: GrantFiled: October 28, 2021Date of Patent: August 8, 2023Assignee: ATOMERA INCORPORATEDInventors: Marek Hytha, Keith Doran Weeks, Nyles Wynn Cody
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Patent number: 11715736Abstract: A semiconductor device includes a first semiconductor fin and a second semiconductor fin extending along a first direction. The semiconductor device includes a dielectric fin, extending along the first direction, that is disposed between the first and second semiconductor fins. The semiconductor device includes a gate isolation structure vertically disposed above the dielectric fin. The semiconductor device includes a metal gate layer extending along a second direction perpendicular to the first direction, wherein the metal gate layer includes a first portion straddling the first semiconductor fin and a second portion straddling the second semiconductor fin. The gate isolation structure has a central portion and one or more side portions, the central portion extends toward the dielectric fin a further distance than at least one of the one or more side portions.Type: GrantFiled: June 23, 2021Date of Patent: August 1, 2023Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.Inventors: Ya-Yi Tsai, Wen-Shuo Hsieh, Shu-Yuan Ku, Chieh-Ning Feng