Patents Examined by Sonya McCall-Shepard
  • Patent number: 11855220
    Abstract: A device a includes a substrate, two source/drain (S/D) features over the substrate, and semiconductor layers suspended over the substrate and connecting the two S/D features. The device further includes a dielectric layer disposed between two adjacent layers of the semiconductor layers and an air gap between the dielectric layer and one of the S/D features, where a ratio between a length of the air gap to a thickness of the first dielectric layer is in a range of 0.1 to 1.0.
    Type: Grant
    Filed: June 27, 2022
    Date of Patent: December 26, 2023
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Shih-Chiang Chen, Wei-Yang Lee, Chia-Pin Lin, Yuan-Ching Peng
  • Patent number: 11855009
    Abstract: A chip package is provided. The chip package includes a substrate and a semiconductor chip over the substrate. The chip package also includes an upper plate extending across edges of the semiconductor chip. The chip package further includes a first support structure connecting a first corner portion of the substrate and a first corner of the upper plate. In addition, the chip package includes a second support structure connecting a second corner portion of the substrate and a second corner of the upper plate. The upper plate has a side edge connecting the first support structure and the second support structure, and the side edge extends across opposite edges of the semiconductor chip.
    Type: Grant
    Filed: July 1, 2022
    Date of Patent: December 26, 2023
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Shu-Shen Yeh, Chin-Hua Wang, Kuang-Chun Lee, Po-Yao Lin, Shyue-Ter Leu, Shin-Puu Jeng
  • Patent number: 11842898
    Abstract: Quality of a crystalline film is improved. In a method for manufacturing a panel, a polysilicon film is formed by emission of laser light to an amorphous silicon film 3A through a light-transmittable member 4 that can transmit the laser light.
    Type: Grant
    Filed: June 19, 2019
    Date of Patent: December 12, 2023
    Assignee: JSW AKTINA SYSTEM CO., LTD
    Inventors: Suk-Hwan Chung, Masashi Machida
  • Patent number: 11842930
    Abstract: A method may include forming a mask layer on top of a first dielectric layer formed on a first source/drain and a second source/drain, and creating an opening in the mask layer and the first dielectric layer that exposes portions of the first source/drain and the second source/drain. The method may include filling the opening with a metal layer that covers the exposed portions of the first source/drain and the second source/drain, and forming a gap in the metal layer to create a first metal contact and a second metal contact. The first metal contact may electrically couple to the first source/drain and the second metal contact may electrically couple to the second source/drain. The gap may separate the first metal contact from the second metal contact by less than nineteen nanometers.
    Type: Grant
    Filed: May 10, 2022
    Date of Patent: December 12, 2023
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Yu-Lien Huang, Ching-Feng Fu, Huan-Just Lin, Fu-Sheng Li, Tsai-Jung Ho, Bor Chiuan Hsieh, Guan-Xuan Chen, Guan-Ren Wang
  • Patent number: 11837552
    Abstract: A semiconductor package includes a first substrate, a first layer structure, a second layer structure, a first antenna layer and an electronic component. The first antenna layer is formed on at least one of the first layer structure and the second layer structure, wherein the first antenna layer has an upper surface flush with a layer upper surface of the first layer structure or the second layer structure. The electronic component is disposed on a substrate lower surface of the first substrate and exposed from the first substrate. The first layer structure is formed between the first substrate and the second layer structure.
    Type: Grant
    Filed: May 19, 2022
    Date of Patent: December 5, 2023
    Assignee: MediaTek Inc.
    Inventors: Wen-Sung Hsu, Tao Cheng, Nan-Cheng Chen, Che-Ya Chou, Wen-Chou Wu, Yen-Ju Lu, Chih-Ming Hung, Wei-Hsiu Hsu
  • Patent number: 11830866
    Abstract: Manufacturing method of semiconductor package includes following steps. Bottom package is provided. The bottom package includes a die and a redistribution structure electrically connected to die. A first top package and a second top package are disposed on a surface of the redistribution structure further away from the die. An underfill is formed into the space between the first and second top packages and between the first and second top packages and the bottom package. The underfill covers at least a side surface of the first top package and a side surface of the second top package. A hole is opened in the underfill within an area overlapping with the die between the side surface of the first top package and the side surface of the second top package. A thermally conductive block is formed in the hole by filling the hole with a thermally conductive material.
    Type: Grant
    Filed: April 14, 2022
    Date of Patent: November 28, 2023
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Shih-Wei Chen, Chih-Hua Chen, Hsin-Yu Pan, Hao-Yi Tsai, Lipu Kris Chuang, Tin-Hao Kuo
  • Patent number: 11817479
    Abstract: A transistor includes a bulk semiconductor substrate, and first and second raised source/drain regions above the bulk semiconductor substrate. A gate is between the first and second raised source/drain regions. A first dielectric section is beneath the first raised source/drain region in the bulk semiconductor substrate, and a second dielectric section is beneath the second raised source/drain region in the bulk semiconductor substrate. A first air gap is defined in at least the first dielectric section under the first raised source/drain region, and a second air gap is defined in at least the second dielectric section under the second raised source/drain region. The air gaps reduce off capacitance of the bulk semiconductor structure to near semiconductor-on-insulator levels without the disadvantages of an air gap under the channel region.
    Type: Grant
    Filed: September 29, 2021
    Date of Patent: November 14, 2023
    Assignee: GlobalFoundries U.S. Inc.
    Inventors: Uzma B. Rana, Steven M. Shank, Anthony K. Stamper
  • Patent number: 11818945
    Abstract: A method of manufacturing a transparent organic light emitting display apparatus having an emission area, and a transmission area disposed adjacent to the emission area and configured to pass external light therethrough, includes sequentially forming an interlayer dielectric and a first protection layer on a first substrate, patterning a planarization layer over the first protection layer, forming an organic light emitting device over the planarization layer, forming an encapsulation layer and an encapsulation substrate over the organic light emitting device, and exposing and etching at least some portions of the transmission area by using photolithography after the patterning of the planarization layer.
    Type: Grant
    Filed: April 4, 2022
    Date of Patent: November 14, 2023
    Assignee: LG DISPLAY CO., LTD.
    Inventors: Joonsuk Lee, SeJune Kim, Dohyung Kim, Saemleenuri Lee
  • Patent number: 11810999
    Abstract: Resonant optical cavity light emitting devices are disclosed, where the device includes a substrate, a first spacer region, a light emitting region, a second spacer region, and a reflector. The light emitting region is configured to emit a target emission deep ultraviolet wavelength and is positioned at a separation distance from the reflector. The reflector may be a distributed Bragg reflector. The device has an optical cavity comprising the first spacer region, the second spacer region and the light emitting region, where the optical cavity has a total thickness less than or equal to K·?/n. K is a constant ranging from 0.25 to 10, ? is the target wavelength, and n is an effective refractive index of the optical cavity at the target wavelength.
    Type: Grant
    Filed: September 17, 2021
    Date of Patent: November 7, 2023
    Assignee: Silanna UV Technologies Pte Ltd
    Inventor: Petar Atanackovic
  • Patent number: 11810951
    Abstract: Disclosed are a semiconductor structure and method of forming the structure. The structure includes a field effect transistor (FET) with a channel region between source/drain regions that extend through a semiconductor layer and into an insulator layer, that include a first portion in the insulator layer, and a second portion on the first portion in the semiconductor layer and, optionally, extending above the semiconductor layer. The first portion is relatively wide, includes a shallow section below the second portion, and a deep section adjacent to the channel region and overlayed by the semiconductor layer. The uniquely shaped first portion boosts saturation current to be boosted to allow the height of the second portion to be reduced to minimize overlap capacitance. Optionally, each source/drain region includes multiple semiconductor materials including a stress-inducing semiconductor material grown laterally from the semiconductor layer to improve charge carrier mobility in the channel region.
    Type: Grant
    Filed: December 16, 2021
    Date of Patent: November 7, 2023
    Assignee: GlobalFoundries U.S. Inc.
    Inventors: Jianwei Peng, Hong Yu, Viorel Ontalus
  • Patent number: 11810775
    Abstract: A method includes disposing a semiconductor die between a first high voltage isolation carrier and a second high voltage isolation carrier, disposing a first molding material in a space between the semiconductor die and the first high voltage isolation carrier, and disposing a conductive spacer between the semiconductor die and the second high voltage isolation carrier. The method further includes encapsulating the first molding material and the conductive spacer with a second molding material.
    Type: Grant
    Filed: July 23, 2021
    Date of Patent: November 7, 2023
    Assignee: SEMICONDUCTOR COMPONENTS INDUSTRIES, LLC
    Inventors: Yusheng Lin, Jerome Teysseyre
  • Patent number: 11804480
    Abstract: An integrated circuit chip including a substrate including first and second element regions; a first channel active region extending in a first direction; a second channel active region; gate lines extending in a second direction and intersecting the first and second channel active regions; a diffusion break extending in the second direction; source/drain regions at opposite sides of the gate lines and on the first and second channel active regions; a first power line electrically connected to the source/drain regions; and a second power line electrically connected to the source/drain regions and having a lower voltage level than the first power line, wherein the diffusion break includes a first region including an insulator and overlapping the first element region, and a second region including a same material as the gate lines and overlapping the second element region, wherein the second region is electrically connected to the second power line.
    Type: Grant
    Filed: November 16, 2021
    Date of Patent: October 31, 2023
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Panjae Park, Byungju Kang, Yoonjeong Kim, Kwanyoung Chun
  • Patent number: 11804487
    Abstract: A semiconductor device includes: a first fin and a second fin extending from a substrate and an epitaxial source/drain region. The epitaxial source/drain region includes a first portion grown on the first fin and a second portion grown on the second fin, and the first portion and the second portion are joined at a merging boundary. The epitaxial source/drain region further includes a first subregion extending from a location level with a highest point of the epitaxial source/drain region to a location level with a highest point of the merging boundary, a second subregion extending from the location level with the highest point of the merging boundary to a location level with a lowest point of the merging boundary, and a third subregion extending from the location level with the lowest point of the merging boundary to a location level with a top surface of an STI region.
    Type: Grant
    Filed: April 4, 2022
    Date of Patent: October 31, 2023
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Wei Hao Lu, Yi-Fang Pai, Cheng-Wen Cheng, Li-Li Su, Chien-I Kuo
  • Patent number: 11785816
    Abstract: A display apparatus includes a substrate having a bending region between a first region and a second region, the bending region being configured to be bent about a bending axis that extends in one direction; a display unit on the substrate; a first wiring unit at the bending region, the first wiring unit including a first bending portion having a plurality of first holes; and a second wiring unit spaced apart from the first wiring unit and at the bending region, the second wiring unit including a second bending portion having a different shape from the first bending portion.
    Type: Grant
    Filed: March 14, 2022
    Date of Patent: October 10, 2023
    Assignee: Samsung Display Co., Ltd.
    Inventors: Yangwan Kim, Sunja Kwon, Byungsun Kim, Hyunae Park, Sujin Lee, Jaeyong Lee
  • Patent number: 11784055
    Abstract: A method includes following steps. A substrate is etched using a hard mask as an etch mask to form a fin. A bottom anti-reflective coating (BARC) layer is over the fin. A recess is formed in the BARC layer to expose a first portion of the hard mask. A protective coating layer is formed at least on a sidewall of the recess in the BARC layer. A first etching step is performed to remove the first portion of the hard mask to expose a first portion of the fin, while leaving a second portion of the fin covered under the protective coating layer and the BARC layer. A second etching step is performed to lower a top surface of the first portion of the fin to below a top surface of the second portion of the fin.
    Type: Grant
    Filed: March 11, 2022
    Date of Patent: October 10, 2023
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Chang-Yin Chen, Che-Cheng Chang, Chih-Han Lin
  • Patent number: 11775724
    Abstract: An integrated circuit includes a first and second set of gate structures. A center of each of the first set of gate structures is separated from a center of an adjacent gate of the first set of gate structures in a first direction by a first pitch. A center of each of the second set of gate structures is separated from a center of an adjacent gate of the second set of gate structures in the first direction by the first pitch. The first and second set of gate structures extend in a second direction. A gate of the first set of gate structures is aligned in the second direction with a corresponding gate of the second set of gate structures. The gate of the first set of gate structures is separated from the corresponding gate of second set of gate structures in the second direction by a first distance.
    Type: Grant
    Filed: October 5, 2021
    Date of Patent: October 3, 2023
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Yu-Jung Chang, Chin-Chang Hsu, Hsien-Hsin Sean Lee, Wen-Ju Yang
  • Patent number: 11769824
    Abstract: In some examples, a transistor comprises a gallium nitride (GaN) layer; a GaN-based alloy layer having a top side and disposed on the GaN layer, wherein source, drain, and gate contact structures are supported by the GaN layer; and a first doped region positioned in a drain access region and extending from the top side into the GaN layer.
    Type: Grant
    Filed: February 2, 2021
    Date of Patent: September 26, 2023
    Assignee: Texas Instruments Incorporated
    Inventors: Dong Seup Lee, Jungwoo Joh, Pinghai Hao, Sameer Pendharkar
  • Patent number: 11756995
    Abstract: A semiconductor device structure, along with methods of forming such, are described. The structure includes first and second dielectric features and a first semiconductor layer disposed between the first and second dielectric features. The structure further includes an isolation layer disposed between the first and second dielectric features, and the isolation layer is in contact with the first and second dielectric features. The first semiconductor layer is disposed over the isolation layer. The structure further includes a gate dielectric layer disposed over the isolation layer and a gate electrode layer disposed over the gate dielectric layer. The gate electrode layer has an end extending to a level between a first plane defined by a first surface of the first semiconductor layer and a second plane defined by a second surface opposite the first surface.
    Type: Grant
    Filed: August 27, 2021
    Date of Patent: September 12, 2023
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Lung-Kun Chu, Mao-Lin Huang, Chung-Wei Hsu, Jia-Ni Yu, Kuan-Lun Cheng, Kuo-Cheng Chiang, Chih-Hao Wang
  • Patent number: 11758820
    Abstract: A magnetic device for magnetic random access memory (MRAM), spin torque MRAM, or spin torque oscillator technology is disclosed wherein a magnetic tunnel junction (MTJ) with a sidewall is formed between a bottom electrode and a top electrode. A passivation layer that is a single layer or multilayer comprising one of B, C, or Ge, or an alloy thereof wherein the B, C, and Ge content, respectively, is at least 10 atomic % is formed on the MTJ sidewall to protect the MTJ from reactive species during subsequent processing including deposition of a dielectric layer that electrically isolates the MTJ from adjacent MTJs, and during annealing steps around 400° C. in CMOS fabrication. The single layer is about 3 to 10 Angstroms thick and may be an oxide or nitride of B, C, or Ge. The passivation layer is preferably amorphous to prevent diffusion of reactive oxygen or nitrogen species.
    Type: Grant
    Filed: June 1, 2021
    Date of Patent: September 12, 2023
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Jodi Mari Iwata, Guenole Jan, Ru-Ying Tong
  • Patent number: 11735480
    Abstract: Embodiments of the invention are directed to a transistor that includes a source or drain (S/D) region having an S/D formation assistance region, wherein the S/D formation assistance region includes a top surface, sidewalls, and a bottom surface. The S/D formation assistance region is at least partially within a portion of a substrate. An S/D isolation region is formed around the sidewalls and the bottom surface of the S/D formation assistance region and configured to electrically isolate the S/D formation assistance region from the substrate.
    Type: Grant
    Filed: February 23, 2022
    Date of Patent: August 22, 2023
    Assignee: International Business Machines Corporation
    Inventors: Ruilong Xie, Alexander Reznicek, Effendi Leobandung, Jingyun Zhang