Patents Examined by Tarifur Chowdhury
  • Patent number: 9714824
    Abstract: A lens shape measurement device, includes: a rotation unit that rotates a lens supported by a stage; a laser displacement meter; a first moving unit that moves the laser displacement meter in a X-direction; a second moving unit that moves the lens in a Y-direction; and a drive controller that controls a drive of the rotation unit, the first moving unit, and the second moving unit in a mirror reflection state in which an incidence angle of the laser beams incident on a measurement target from the laser displacement meter, and a reflection angle of the laser beams reflected by the measurement target are equal to each other with a normal line of the lens passing through the measurement target set as a reference, for each of a plurality of measurement targets set on an edge of the lens in a rotating direction of the lens.
    Type: Grant
    Filed: March 31, 2011
    Date of Patent: July 25, 2017
    Assignee: HOYA CORPORATION
    Inventors: Masahiko Samukawa, Takashi Daimaru, Nobuhiko Takeda
  • Patent number: 9714825
    Abstract: A device (10) and methods for simultaneously measuring the thickness of individual wafer layers, the depth of etched features on a wafer, and the three-dimensional profile of a wafer. The structure of the device (10) is comprised of a source/receiver section (12) having a broadband source (14), a receiver (16) and a signal processing section (20). An interferometer (28) separates or combines measurement and reference light and has a measurement leg (30) and a reference leg (34), and a reference mirror (36). The device (10) analyzes a received spectrum which is comprised of a measurement of intensity versus wavelength. There are two measurement methods disclosed: the first method is utilized for taking a single measurement and the second method is utilized for multiple measurements.
    Type: Grant
    Filed: April 8, 2011
    Date of Patent: July 25, 2017
    Assignee: Rudolph Technologies, Inc.
    Inventors: David S. Marx, David L. Grant
  • Patent number: 9714901
    Abstract: The nitrate-nitrogen concentration in soil is estimated based on the nitrate-nitrogen 200 nm absorption peak. In one embodiment, a device measures the attenuation spectrum of a soil-extractant mixture over a wavelength range that includes wavelengths in the vicinity of the 200 nm absorption peak (the spectral operating range) and then determines the nitrate-nitrogen concentration based on the attenuation spectrum.
    Type: Grant
    Filed: January 28, 2016
    Date of Patent: July 25, 2017
    Assignee: Monsanto Technology LLC
    Inventors: Michael John Preiner, Nicholas Carleton Koshnick, Justin Stewart White, John Paul Strachan
  • Patent number: 9709510
    Abstract: Methods and systems for determining a configuration for an optical element positioned in a collection aperture during wafer inspection are provided. One system includes a detector configured to detect light from a wafer that passes through an optical element, which includes a set of collection apertures, when the optical element has different configurations thereby generating different images for the different configurations. The system also includes a computer subsystem configured for constructing additional image(s) from two or more of the different images, and the two or more different images used to generate any one of the additional image(s) do not include only different images generated for single collection apertures in the set. The computer subsystem is further configured for selecting one of the different or additional configurations for the optical element based on the different images and the additional image(s).
    Type: Grant
    Filed: June 24, 2015
    Date of Patent: July 18, 2017
    Assignee: KLA-Tencor Corp.
    Inventors: Pavel Kolchin, Mikhail Haurylau, Junwei Wei, Dan Kapp, Robert Danen, Grace Chen
  • Patent number: 9709505
    Abstract: Disclosed herein are a turbidity sensor and a control method thereof, and more particularly, to a turbidity sensor capable of measuring turbidity of water including a liquid detergent as well as water including a powdered detergent and a control method thereof. The turbidity sensor includes a first light emitting unit emitting visible light, a first light receiving unit disposed opposite to the first light emitting unit at a position spaced apart from the first light emitting unit and receiving visible light emitted from the first light emitting unit, and a control unit determining a turbidity of a solution according to a ratio between the amount of visible light emitted from the first light emitting unit and the amount of visible light received by the first light receiving unit. According to the turbidity sensor and control method thereof, turbidity of the solution by the first and second particles is accurately measured.
    Type: Grant
    Filed: April 22, 2013
    Date of Patent: July 18, 2017
    Assignee: SAMSUNG ELECTRONICS CO., LTD.
    Inventors: Jun Hoe Choi, Byung Ik Choi, Jeong Su Han, Ji Hoon Ha
  • Patent number: 9709379
    Abstract: The invention generally relates to an optical coherence tomography system that is reconfigurable between two different imaging modes and methods of use thereof.
    Type: Grant
    Filed: December 16, 2013
    Date of Patent: July 18, 2017
    Assignee: Volcano Corporation
    Inventor: Nathaniel J. Kemp
  • Patent number: 9709381
    Abstract: A surface emitting laser includes a lower reflector, an active layer, a gap portion, and an upper reflector, which are arranged in that order, and a driving unit. The surface emitting laser is capable of varying a wavelength of emitted light by changing a distance between the upper and lower reflectors. The driving unit moves one of the upper and lower reflectors in an optical axis direction of the emitted light. When ?g is a wavelength at which a gain at a time of laser oscillation of the active layer is at a maximum, ?0 is a center wavelength of the emitted light, and ?r is a wavelength at which a reflectance of one of the upper and lower reflectors from which the light is emitted is at a maximum, ?r <?0 <?g or ?g <?0 <?r is satisfied.
    Type: Grant
    Filed: November 24, 2014
    Date of Patent: July 18, 2017
    Assignee: CANON KABUSHIKI KAISHA
    Inventor: Takeshi Uchida
  • Patent number: 9709385
    Abstract: The present invention provides a detection device and a detection method. The detection device comprises a light source module, a receiving module, an image generation module and a judgment module, wherein the light source module is configured to emit light towards a film at a predetermined angle, the receiving module is configured to receive interference light formed by first reflected light reflected by an upper surface of the film and second reflected light reflected by a lower surface of the film, the image generation module is configured to generate an interference fringe image according to the interference light, and the judgment module is configured to judge whether thickness of the film is uniform according to the interference fringe image. The detection device can perform high accuracy detection on uniformity of the thickness of a film, thereby facilitating improving display quality of a display panel.
    Type: Grant
    Filed: June 17, 2015
    Date of Patent: July 18, 2017
    Assignees: BOE TECHNOLOGY GROUP CO., LTD., HEFEI BOE OPTOELECTRONICS TECHNOLOGY CO., LTD.
    Inventors: Yangkun Jing, Changjun Jiang
  • Patent number: 9709507
    Abstract: Provided are an apparatus and method for measuring contamination of a filter. The filter contamination measuring apparatus includes a light-emitting unit which provides light having, a predetermined wavelength to a filter adsorbs foreign materials, a light-receiving unit which receives light reflected by the filter and convert reflected light information into a digital code to output, and a contamination calculating unit which processes the digital code provided by the light-receiving unit and calculates a degree of contamination of the filter, wherein the contamination calculating unit calculates a degree, in which a wavelength of the light reflected by the filter is shifted from the predetermined wavelength, compares intensity of light provided by the light-emitting unit with intensity of the light reflected by the filter, and calculates the degree of contamination of the filter.
    Type: Grant
    Filed: May 15, 2015
    Date of Patent: July 18, 2017
    Assignee: RAYTRON CO., LTD
    Inventors: Hyun Young Lee, Ji Woong Jang
  • Patent number: 9709903
    Abstract: An overlay target for use in imaging based metrology is disclosed. The overlay target includes a plurality of target structures including three or more target structures, each target structure including a set of two or more pattern elements, wherein the target structures are configured to provide metrology information pertaining to different pitches, different coverage ratios, and linearity. Pattern elements may be separated from adjacent pattern elements by non-uniform distance; pattern elements may have non-uniform width; or pattern elements may be designed to demonstrate a specific offset as compared to pattern elements in a different layer.
    Type: Grant
    Filed: April 13, 2012
    Date of Patent: July 18, 2017
    Assignee: KLA-Tencor Corporation
    Inventors: DongSub Choi, David Tien
  • Patent number: 9709388
    Abstract: Higher-precision measurement is achieved by an optical inner surface measuring device configured to cause a probe to enter into the inner peripheral surface or deep hole of a target object, capture and observe reflection light from the inner surface in a three-dimensional manner, and measure the accuracy of the target object. In a structure including an optical fiber built into a tube, a light path conversion unit arranged at a leading end side of the optical fiber, and a motor configured to rotationally drive the light path conversion unit, a unit for measuring the amount of runout of a rotation shaft unit of the motor is provided. Shape data on the inner peripheral surface of a target object is obtained by calculating at a computer reflection light from the target object, and is modified by displacement amount data from a displacement measurement unit to realize high-precision measurement with no measurement error resulting from runout and rotational vibration of the rotation shaft of the motor.
    Type: Grant
    Filed: May 20, 2015
    Date of Patent: July 18, 2017
    Assignee: Namiki Seimitsu Houseki Kabushiki Kaisha
    Inventors: Hiroshi Yamazaki, Eri Fukushima, Kazumi Yanagiura, Takafumi Asada
  • Patent number: 9709696
    Abstract: An intensity-independent optical computing device and method for performing multivariate optical computing based on changes in polarization of the reflected and/or transmitted electromagnetic radiation to thereby determine sample characteristics.
    Type: Grant
    Filed: October 16, 2013
    Date of Patent: July 18, 2017
    Assignee: Halliburton Energy Services, Inc.
    Inventors: James M. Price, David L. Perkins
  • Patent number: 9702689
    Abstract: A method for providing film-thickness analysis with a spectrophotometer includes configuring an illuminator to emit a light beam at a film deposited on a substrate surface, configuring a linear sensor to receive light reflecting off the deposited film on the substrate surface via a gradient index lens and a linear variable filter, and configuring a processor to determine thickness of the film based on spectral reflectivity of the film received from the linear sensor.
    Type: Grant
    Filed: June 18, 2015
    Date of Patent: July 11, 2017
    Assignee: Xerox Corporation
    Inventors: Paul S. Bonino, Robert P. Herloski, Jason M. LeFevre
  • Patent number: 9702737
    Abstract: An optical ring resonator sensor array module for a passive SONAR system. The module includes a supporting structure; a silicon substrate mounted on the supporting structure, and a top plate mounted over the silicon structure. The silicon substrate includes an optical waveguide having an input and an output and a plurality of optical ring resonators distributed across the silicon substrate to form a two-dimensional pattern. Each optical ring resonator is positioned adjacent to the optical waveguide and each has a different predetermined diameter. The top plate includes a plurality of diaphragms, one for each of the plurality of optical ring resonators. The diaphragms are distributed on the top plate such that each of the plurality of diaphragms is positioned over an associated one of the plurality of optical ring resonators. In addition, each of the diaphragms is configured to flex in response to externally applied acoustical pressure.
    Type: Grant
    Filed: March 19, 2015
    Date of Patent: July 11, 2017
    Assignee: The Boeing Company
    Inventor: Brian C. Grubel
  • Patent number: 9702687
    Abstract: In one embodiment of the invention, a semiconductor optical amplifier (SOA) in a laser ring is chosen to provide low polarization-dependent gain (PDG) and a booster semiconductor optical amplifier, outside of the ring, is chosen to provide high polarization-dependent gain. The use of a semiconductor optical amplifier with low polarization-dependent gain nearly eliminates variations in the polarization state of the light at the output of the laser, but does not eliminate the intra-sweep variations in the polarization state at the output of the laser, which can degrade the performance of the SS-OCT system.
    Type: Grant
    Filed: November 7, 2014
    Date of Patent: July 11, 2017
    Assignee: LIGHTLAB IMAGING, INC.
    Inventor: Joseph M. Schmitt
  • Patent number: 9702815
    Abstract: A sampling device including a Near-Infrared Spectroscopy (NIRS) fiber optic probe and methods of using the device are provided. The sampling device performs both NIRS data collection and physical sample collection. The sampling device operates by inserting the device into a powder or blend to be sampled, collecting a sample within the sample chamber in the device, and performing NIRS analysis of the sample within the sample chamber.
    Type: Grant
    Filed: November 7, 2014
    Date of Patent: July 11, 2017
    Assignee: BOEHRINGER INGELHEIM ROXANE, INC.
    Inventors: Atish Dalal, Daniel Hill
  • Patent number: 9702817
    Abstract: Method and apparatus testing engine component, for blockage of one or more through-holes in a portion of a wall. The method including (i) providing a supply of test fluid, (ii) causing or permitting flow of test fluid to occur from first to second region, (iii) illuminating the second region with electromagnetic radiation to cause scattering of electromagnetic radiation by material exiting substantially non-blocked through-holes in wall portion having passed therethrough from the first to second side, (iv) detecting said scattering of electromagnetic radiation from said substantially non-blocked through-holes; and (v) comparing said detected scattering of electromagnetic radiation from said substantially non-blocked holes with known pattern of through-holes in component wall portion to determine the presence and/or location and/or identity of any blocked or partially blocked through-holes in component wall portion.
    Type: Grant
    Filed: December 22, 2015
    Date of Patent: July 11, 2017
    Assignee: ROLLS-ROYCE plc
    Inventors: Nicholas A Worth, Stephen C. Harding
  • Patent number: 9696254
    Abstract: The present disclosure generally relates to a device and a method for alignment. The alignment device provides optical architecture to align the alignment device to an analyte and measure the optical properties of an analyte. The method for alignment provides steps for aligning an optical measurement device to an analyte.
    Type: Grant
    Filed: April 8, 2016
    Date of Patent: July 4, 2017
    Assignee: Taiwan Biophotonic Corporation
    Inventors: Yu-Tang Li, Chang-Sheng Chu, Pei-Cheng Ho, Kuan-Jui Ho, Shuang-Chao Chung, Chih-Hsun Fan, Jyh-Chern Chen
  • Patent number: 9696207
    Abstract: A method and apparatus for improving contrast in prism coupling measurements of waveguide mode spectra, wherein the measured waveguide sample has a surface region of rapidly decreasing index, characterized with normalized slope ? ? n ? ? n ? z ? > 0.0004 . An opaque light-blocking element is placed in the portion of the light beam closest to the plane of the contact between prism and measured sample, on the input side, output side or both sides of the prism. The light blocking element prevents light from the light source to reach a portion of the length of the prism-sample coupling interface along the optical path, prevents light reflected from a portion of the aforementioned length to reach the detector, or both when input and output light-blocking elements are used.
    Type: Grant
    Filed: April 21, 2015
    Date of Patent: July 4, 2017
    Assignee: Corning Incorporated
    Inventors: Rostislav Vatchev Roussev, Emily Elizabeth Young
  • Patent number: 9690008
    Abstract: A method for detecting atmospheric icing potential comprises emitting, by a Doppler lidar (light detection and ranging) entity, electromagnetic radiation to the atmosphere and receiving radiation backscattered from the aerosol, such as a cloud, present in the atmosphere. From the received backscattered radiation, an indication of the icing potential at a number of distances, on the basis of the comparison and an indication of the temperature at the one or more distances, is determined.
    Type: Grant
    Filed: June 15, 2012
    Date of Patent: June 27, 2017
    Assignee: Teknologian Tutkimuskeskus VTT Oy
    Inventors: Petteri Antikainen, Andrea Vignaroli, Esa Peltola