Patents Examined by Thanh Y. Tran
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Patent number: 11676954Abstract: A semiconductor structure includes a memory die bonded to a logic die. The memory die includes an alternating stack of insulating layers and electrically conductive layers; memory openings extending through the alternating stack, memory opening fill structures located in the memory openings and comprising a respective vertical semiconductor channel and a respective memory film, a source layer contacting the vertical semiconductor channels, a backside isolation dielectric layer contacting a backside surface of the source layer, and a source power supply mesh including a planar portion of a source-side electrically conductive layer that is located on a backside of the backside isolation dielectric layer and electrically connected to the source layer by conductive material portions that extend through the backside isolation dielectric layer.Type: GrantFiled: December 28, 2020Date of Patent: June 13, 2023Assignee: SANDISK TECHNOLOGIES LLCInventors: Peter Rabkin, Masaaki Higashitani, Kwang-ho Kim
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Patent number: 11676913Abstract: A semiconductor package includes a substrate. A first semiconductor chip is disposed on the substrate and is electrically connected to the substrate. The first semiconductor chip comprises a first sidewall extending in a first direction, a second sidewall extending in a second direction that crosses the first direction, and a third sidewall disposed between the first sidewall and the second sidewall and configured to connect the first sidewall and the second sidewall. The third sidewall has a curved surface shape. A second semiconductor chip is disposed on the first semiconductor chip and is electrically connected to the first semiconductor chip.Type: GrantFiled: December 28, 2020Date of Patent: June 13, 2023Assignee: SAMSUNG ELECTRONICS CO., LTD.Inventor: Eun-Kyoung Choi
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Patent number: 11670623Abstract: A semiconductor package is provided. The semiconductor package includes a first substrate, a first semiconductor chip disposed on the first substrate, a heat sink structure comprising a lower heat sink pattern disposed on the first semiconductor chip, a metal film pattern disposed on the lower heat sink pattern, and an insulating film disposed on side walls of the lower heat sink pattern and side walls of the metal film pattern, an interposer disposed on the heat sink structure, and a solder ball which connects the heat sink structure and the interposer.Type: GrantFiled: January 22, 2021Date of Patent: June 6, 2023Assignee: SAMSUNG ELECTRONICS CO., LTD.Inventors: Myung Sam Kang, Sang Kyu Lee, Jin Gu Kim, Yong Koon Lee
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Patent number: 11653491Abstract: A method of manufacturing contacts is provided in the present invention, which include the steps of forming a plurality of mask bars on a substrate, forming a circular mask surrounding each mask bar, wherein the circular masks connect each other and define a plurality of opening patterns collectively with the mask bars, using the mask bars and the circular masks as etch masks to perform an etch process and to transfer the opening patterns and form a plurality recesses in the substrate, and filling up the recesses with metal to form contacts.Type: GrantFiled: April 21, 2021Date of Patent: May 16, 2023Assignees: UNITED MICROELECTRONICS CORP., Fujian Jinhua Integrated Circuit Co., Ltd.Inventors: Feng-Yi Chang, Fu-Che Lee
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Patent number: 11652059Abstract: Techniques and mechanisms for high interconnect density communication with an interposer. In some embodiments, an interposer comprises a substrate and portions disposed thereon, wherein respective inorganic dielectrics of said portions adjoin each other at a material interface, which extends to each of the substrate and a first side of the interposer. A first hardware interface of the interposer spans the material interface at the first side, wherein a first one of said portions comprises first interconnects which couple the first hardware interface to a second hardware interface at the first side. A second one of said portions includes second interconnects which couple one of first hardware interface or the second hardware interface to a third hardware interface at another side of the interposer. In another embodiment, a metallization pitch feature of the first hardware interface is smaller than a corresponding metallization pitch feature of the second hardware interface.Type: GrantFiled: November 29, 2021Date of Patent: May 16, 2023Assignee: Intel CorporationInventors: Adel Elsherbini, Shawna Lift, Johanna Swan, Gerald Pasdast
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Patent number: 11652056Abstract: A semiconductor memory device includes a first substrate including a first region and a second region, a stacked structure only on the first region of the first substrate among the first region and the second region of the first substrate, the stacked structure including word lines, an interlayer insulating film covering the stacked structure, a dummy conductive structure inside the interlayer insulating film, the dummy conductive structure extending through the stacked structure to contact the first substrate, and a plate contact plug inside the interlayer insulating film, the plate contact plug being connected to the second region of the first substrate, and a height of an upper surface of the dummy conductive structure being greater than a height of an upper surface of the plate contact plug relative to an upper surface of the first substrate.Type: GrantFiled: September 29, 2021Date of Patent: May 16, 2023Assignee: SAMSUNG ELECTRONICS CO., LTD.Inventors: Ha-Min Hwang, Jong Soo Kim, Ju-Young Lim, Won Seok Cho
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Patent number: 11646261Abstract: An integrated circuit includes a plurality of layers stacked in a first direction, a plurality of unit circuits at least partially overlapping each other in a second direction that is perpendicular to the first direction and configured to operate in parallel with one another, control circuitry configured to generate a control signal to control the plurality of unit circuits, and a multi-layer conducting line configured to transfer the control signal from the control circuitry to the plurality of unit circuits. The multi-layer conducting line may be integrally formed in a wiring layer and a via layer and extends in the second direction. The wiring layer and the via layer may be adjacent to each other.Type: GrantFiled: March 10, 2021Date of Patent: May 9, 2023Assignee: Samsung Electronics Co., Ltd.Inventors: Tae-hyung Kim, Chan-Ho Lee
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Patent number: 11646256Abstract: A semiconductor device and method of manufacture are provided whereby an interposer and a first semiconductor device are placed onto a carrier substrate and encapsulated. The interposer comprises a first portion and conductive pillars extending away from the first portion. A redistribution layer located on a first side of the encapsulant electrically connects the conductive pillars to the first semiconductor device.Type: GrantFiled: May 14, 2021Date of Patent: May 9, 2023Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.Inventors: Po-Hao Tsai, Po-Yao Chuang, Shin-Puu Jeng, Techi Wong
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Patent number: 11646275Abstract: A semiconductor package includes a substrate having a first surface and a second surface opposing the first surface; a plurality of first pads disposed on the first surface of the substrate and a plurality of second pads disposed on the second surface of the substrate and electrically connected to the plurality of first pads; a semiconductor chip disposed on the first surface of the substrate and connected to the plurality of first pads; a dummy chip having a side surface facing one side surface of the semiconductor chip, disposed on the first surface of the substrate spaced apart from the semiconductor chip in a direction parallel to the first surface of the substrate, the dummy chip having an upper surface positioned lower than an upper surface of the semiconductor chip in a direction perpendicular to the first surface of the substrate; an underfill disposed between the semiconductor chip and the first surface of the substrate, and having an extension portion extended along the facing side surfaces of the sType: GrantFiled: July 14, 2021Date of Patent: May 9, 2023Assignee: SAMSUNG ELECTRONICS CO., LTD.Inventor: Su Chang Lee
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Patent number: 11646234Abstract: A semiconductor device includes a semiconductor substrate, a semiconductor fin protruding from the semiconductor substrate, and an isolation layer disposed above the semiconductor substrate. The isolation layer includes a first portion disposed on a first sidewall of the semiconductor fin and a second portion disposed on a second sidewall of the semiconductor fin. Top surfaces of the first and second portions of the isolation layer are leveled. The first portion of the isolation layer includes an air pocket. The semiconductor device also includes a dielectric fin with a bottom portion embedded in the second portion of the isolation layer.Type: GrantFiled: June 29, 2021Date of Patent: May 9, 2023Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTDInventors: Han-Yu Lin, Yi-Ruei Jhan, Fang-Wei Lee, Tze-Chung Lin, Chao-Hsien Huang, Li-Te Lin, Pinyen Lin, Akira Mineji
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Patent number: 11640943Abstract: A semiconductor wafer includes a wafer body including an active layer having a first crystal orientation and having first and second surfaces opposing each other, and a support layer having a second crystal orientation different from the first crystal orientation and having third and fourth surfaces opposing each other, a bevel portion that extends along an outer periphery of the wafer body to connect the first surface to the fourth surface, and a notch portion formed at a predetermined depth in a direction from the outer periphery of the wafer body toward a center portion of the wafer body. The bevel portion includes a first beveled surface connected to the first surface and a second beveled surface connected to the fourth surface. The first beveled surface has a width in a radial direction of the wafer body that is 300 ?m or less.Type: GrantFiled: September 1, 2021Date of Patent: May 2, 2023Inventors: Jung-A Lee, Yeon Sook Kim, Han Byul Jang
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Patent number: 11640948Abstract: A connector structure and a manufacturing method thereof are provided. The connector structure includes a semiconductor substrate, a metal layer, a passivation layer, and a conductive structure. The metal layer is over the semiconductor substrate. The passivation layer is over the metal layer and includes an opening. The conductive structure is in contact with the metal layer in a patterned surface structure of the conductive structure through the opening of the passivation layer.Type: GrantFiled: March 11, 2021Date of Patent: May 2, 2023Assignee: Micron Technology, Inc.Inventors: Shing-Yih Shih, Tieh-Chiang Wu
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Patent number: 11637150Abstract: The present disclosure provides an organic light-emitting diode display substrate, a method of preparing the same, and a display device. The organic light-emitting diode display substrate includes: a light-emitting layer, a light modulation layer, and a color conversion layer, in which the light-emitting layer is configured to emit first color light, the light modulation layer and the color conversion layer are arranged on different light-exiting paths of the light-emitting layer, the color conversion layer is configured to convert first color light into second color light and third color light, and the light modulation layer is configured to modulate an emergent direction of first color light.Type: GrantFiled: June 21, 2021Date of Patent: April 25, 2023Assignee: BOE TECHNOLOGY GROUP CO., LTD.Inventors: Guang Yan, Changyen Wu, Juanjuan You, Linlin Wang
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Patent number: 11637130Abstract: An object is to provide a display device which operates stably with use of a transistor having stable electric characteristics. In manufacture of a display device using transistors in which an oxide semiconductor layer is used for a channel formation region, a gate electrode is further provided over at least a transistor which is applied to a driver circuit. In manufacture of a transistor in which an oxide semiconductor layer is used for a channel formation region, the oxide semiconductor layer is subjected to heat treatment so as to be dehydrated or dehydrogenated; thus, impurities such as moisture existing in an interface between the oxide semiconductor layer and the gate insulating layer provided below and in contact with the oxide semiconductor layer and an interface between the oxide semiconductor layer and a protective insulating layer provided on and in contact with the oxide semiconductor layer can be reduced.Type: GrantFiled: January 12, 2022Date of Patent: April 25, 2023Assignee: Semiconductor Energy Laboratory Co., Ltd.Inventors: Junichiro Sakata, Toshinari Sasaki, Miyuki Hosoba
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Patent number: 11631767Abstract: A semiconductor structure and a method for forming a semiconductor structure are disclosed. One form a semiconductor structure includes: a substrate, comprising a first region used to form a well region and a second region used to form a drift region, wherein the first region is adjacent to the second region; and a fin, protruding out of the substrate, wherein the fins comprise first fins located at a junction of the first region and the second region and second fins located on the second region, and a quantity of the second fins is greater than a quantity of the first fins.Type: GrantFiled: September 9, 2021Date of Patent: April 18, 2023Assignees: SEMICONDUCTOR MANUFACTURING INTERNATIONAL (BEIJING) CORPORATION, SEMICONDUCTOR MANUFACTURING INTERNATIONAL (SHANGHAI) CORPORATIONInventor: Fei Zhou
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Patent number: 11631738Abstract: The present application discloses a semiconductor device and a method for fabricating the semiconductor device. The semiconductor device includes a substrate, a first semiconductor stack having a first threshold voltage and comprising a first insulating stack positioned on the substrate, a second semiconductor stack having a second threshold voltage and comprising a second insulating stack positioned on the substrate, and a third semiconductor stack having a third threshold voltage and comprising a third insulating stack positioned on the substrate. The first threshold voltage, the second threshold voltage, and the third threshold voltage are different from each other, a thickness of the first insulating stack is different from a thickness of the second insulating stack and a thickness of the third insulating stack, and the thickness of the second insulating stack is different from the thickness of the third insulating stack.Type: GrantFiled: November 24, 2021Date of Patent: April 18, 2023Assignee: NANYA TECHNOLOGY CORPORATIONInventor: Tse-Yao Huang
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Patent number: 11626375Abstract: A semiconductor memory device includes: a stack above a peripheral circuit on a first substrate, in which first conductive layers and first insulation layers are alternately stacked in a first direction each; a first pillar through the stack, in which a semiconductor layer and each first conductive layer form a memory cell at their intersection; a second substrate including a first region above the stack and the first pillar, being connected to a semiconductor layer, and a second region juxtaposed with the first region in a second direction; a second insulation layer through the second substrate, insulating the regions from each other; and a second conductive layer including a first portion through the second substrate, and a second portion extending in the second direction above the second substrate and including a part defining a bonding pad. The second portion overlaps with the second insulation layer in the first direction.Type: GrantFiled: June 14, 2021Date of Patent: April 11, 2023Assignee: Kioxia CorporationInventor: Hideo Wada
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Patent number: 11616035Abstract: A semiconductor structure, including a substrate and multiple chips, is provided. The chips are stacked on the substrate. Each of the chips has a first side and a second side opposite to each other. Each of the chips includes a transistor adjacent to the first side and a storage node adjacent to the second side. Two adjacent chips are bonded to each other. The transistor of one of the two adjacent chips is electrically connected to the storage node of the other one of the two adjacent chips to form a memory cell.Type: GrantFiled: August 9, 2021Date of Patent: March 28, 2023Assignee: UNITED MICROELECTRONICS CORP.Inventors: Teng-Chuan Hu, Chun-Hung Chen, Chu-Fu Lin
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Patent number: 11610878Abstract: The present application discloses a semiconductor device and a method for fabricating the semiconductor device. The method includes providing a bottom substrate; bonding a first stacking chip and a second stacking chip onto the bottom substrate; conformally forming a first isolation layer to cover the first and second stacking chips and to at least partially fill a gap between the first and second stacking chips; performing a thinning process to expose back surfaces of the first and second stacking chips; performing a removal process to expose through substrate vias of the first and second stacking chips; forming a first capping layer to cover the through substrate vias of the first and second stacking chips; and performing a planarization process to expose the through substrate vias of the first and second stacking chips and provide a substantially flat surface.Type: GrantFiled: September 2, 2021Date of Patent: March 21, 2023Assignee: NANYA TECHNOLOGY CORPORATIONInventor: Yi-Jen Lo
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Patent number: 11609330Abstract: A silicon phased array based LiDAR device that measures a distance using a quasi-frequency modulation is disclosed.Type: GrantFiled: April 3, 2020Date of Patent: March 21, 2023Assignee: KOREA ADVANCED INSTITUTE OF SCIENCE AND TECHNOLOGYInventors: Hyo-Hoon Park, Hyeonho Yoon, Nam-Hyun Kwon, Kyeongjin Han, Hyun-Woo Rhee, Geum-Bong Kang