Patents Examined by Theresa T. Doan
  • Patent number: 11764176
    Abstract: A semiconductor device is proposed. The semiconductor device includes a wiring metal layer structure. The semiconductor device further includes a dielectric layer structure arranged directly on the wiring metal layer structure. The semiconductor device further includes a bonding pad metal layer structure arranged, at least partly, directly on the dielectric layer structure. A layer thickness of the dielectric layer structure ranges from 1% to 30% of a layer thickness of the wiring metal layer structure. The wiring metal layer structure and the bonding pad metal structure are electrically connected through openings in the dielectric layer structure.
    Type: Grant
    Filed: August 12, 2021
    Date of Patent: September 19, 2023
    Assignee: Infineon Technologies AG
    Inventors: Evelyn Napetschnig, Jens Brandenburg, Christoffer Erbert, Joachim Hirschler, Oliver Humbel, Thomas Rupp, Carsten Schaeffer, Julia Zischang
  • Patent number: 11757022
    Abstract: The present disclosure provides semiconductor devices and methods of forming the same. A semiconductor device according to one embodiment of the present disclosure includes a first fin-shaped structure extending lengthwise along a first direction over a substrate, a first epitaxial feature over a source/drain region of the first fin-shaped structure, a gate structure disposed over a channel region of the first fin-shaped structure and extending along a second direction perpendicular to the first direction, and a source/drain contact over the first epitaxial feature. The bottom surface of the gate structure is closer to the substrate than a bottom surface of the source/drain contact.
    Type: Grant
    Filed: April 11, 2022
    Date of Patent: September 12, 2023
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Jia-Heng Wang, Chun-Han Chen, I-Wen Wu, Chen-Ming Lee, Fu-Kai Yang, Mei-Yun Wang
  • Patent number: 11756872
    Abstract: A package structure includes a carrier substrate, a die, and a first redistribution structure. The carrier substrate has a first surface and a second surface opposite to the first surface. The carrier substrate includes an insulating body and through carrier vias (TCV) embedded in the insulating body. The die is disposed over the firs surface of the carrier substrate. The die is electrically connected to the TCVs. The first redistribution structure is disposed on the second surface of the carrier substrate.
    Type: Grant
    Filed: March 11, 2021
    Date of Patent: September 12, 2023
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Sung-Yueh Wu, Chien-Ling Hwang, Jen-Chun Liao, Ching-Hua Hsieh, Pei-Hsuan Lee, Chia-Hung Liu
  • Patent number: 11756958
    Abstract: A semiconductor device structure, along with methods of forming such, are described. The structure includes a first, second, and third gate electrode layers, a first dielectric feature disposed between the first and second gate electrode layers, a second dielectric feature disposed between the second and third gate electrode layers, a first seed layer in contact with the first gate electrode layer, the first dielectric feature, and the second gate electrode layer, a first conductive layer disposed on the first seed layer, a second seed layer in contact with the third gate electrode layer, a second conductive layer disposed on the second seed layer, and a dielectric material disposed on the second dielectric feature, the first conductive layer, and the second conductive layer. The dielectric material is between the first seed layer and the second seed layer and between the first conductive layer and the second conductive layer.
    Type: Grant
    Filed: March 30, 2022
    Date of Patent: September 12, 2023
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Jia-Chuan You, Shi-Ning Ju, Kuo-Cheng Chiang, Chih-Hao Wang
  • Patent number: 11749681
    Abstract: A semiconductor device includes a first semiconductor fin that is formed over a substrate and extends along a first lateral axis. The semiconductor device includes a second semiconductor fin that is also formed over the substrate and extends along the first lateral axis. At least a tip portion of the first semiconductor fin and at least a tip portion of the second semiconductor fin bend toward each other along a second lateral axis that is perpendicular to the first lateral axis.
    Type: Grant
    Filed: March 9, 2021
    Date of Patent: September 5, 2023
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LIMITED
    Inventors: Duen-Huei Hou, Chao-Cheng Chen, Chun-Hung Lee, Hsin-Chih Chen, Kuo-Chin Liu, J. H. Wang
  • Patent number: 11749754
    Abstract: An active pattern structure includes a lower active pattern protruding from an upper surface of a substrate in a vertical direction substantially perpendicular to an upper surface of the substrate, a buffer structure on the lower active pattern, at least a portion of which may include aluminum silicon oxide, and an upper active pattern on the buffer structure.
    Type: Grant
    Filed: December 14, 2021
    Date of Patent: September 5, 2023
    Inventors: Sangmoon Lee, Kyungin Choi, Seunghun Lee
  • Patent number: 11749678
    Abstract: A semiconductor device includes a substrate with an active region being provided with a channel pattern, a device isolation layer including a first part defining the active region and a second part surrounding a first portion of the channel pattern, an upper epitaxial pattern disposed on an upper surface of the channel pattern, a gate electrode surrounding a second portion of the channel pattern and extending in a first direction, a gate spacer on the gate electrode, an interlayer dielectric layer on the gate spacer, and an air gap between a bottom surface of the gate electrode and the second part of the device isolation layer. At least a portion of the air gap vertically overlaps the gate electrode. The second portion of the channel pattern is higher than the first portion of the channel pattern.
    Type: Grant
    Filed: June 21, 2022
    Date of Patent: September 5, 2023
    Assignee: SAMSUNG ELECTRONICS CO., LTD.
    Inventors: Munhyeon Kim, Youngchai Jung, Mingyu Kim, Seon-Bae Kim, Yeonho Park
  • Patent number: 11742355
    Abstract: A semiconductor structure is provided. The semiconductor structure including: a substrate, where the substrate includes a first region and a second region adjacent to the first region; a plurality of fins formed over the first region of the substrate; an isolation layer over the substrate between adjacent fins of the plurality of fins, where a top of the isolation layer is lower than a top surface of a fin of the plurality of fins, the isolation layer over the second region and the second region of the substrate together contain a power rail opening, and the substrate contains a through-hole at a bottom of the power rail opening; and a first metal layer in the power rail opening and the through-hole, where a back surface of the first metal layer is above a back surface of the substrate.
    Type: Grant
    Filed: June 23, 2022
    Date of Patent: August 29, 2023
    Assignees: Semiconductor Manufacturing International (Shanghai) Corporation, Semiconductor Manufacturing International (Beijing) Corporation
    Inventor: Jisong Jin
  • Patent number: 11742383
    Abstract: A semiconductor device with an air gap includes a plurality of gate stacks disposed on a substrate; a liner layer conformally covering the gate stacks and the substrate; and a dielectric stack disposed on the liner layer on the gate stacks. The air gap is formed between the liner layer and the dielectric stack on two adjacent gate stacks. A height of the air gap is greater than heights of the two adjacent gate stacks, and the air gap includes: a lower portion between the two adjacent gate stacks, sidewalls and a bottom of the lower portion exposing the liner layer; a middle portion above the lower portion; and an upper portion above the middle portion. Sidewalls of the upper portion expose the dielectric stack, a top surface of the upper portion is covered by the dielectric stack, and the upper portion has a smaller width than the lower portion.
    Type: Grant
    Filed: June 21, 2022
    Date of Patent: August 29, 2023
    Assignee: Winbond Electronics Corp.
    Inventors: Ping-Lung Yu, Po-Chun Shao
  • Patent number: 11742389
    Abstract: A method for forming a semiconductor structure includes providing a substrate including a first region with a first gate structure and a second region with a second gate structure. First to third dielectric layers are formed on the substrate. The third dielectric layer is patterned to form a first portion in the first region and a second portion in the second region. The second region is covered and at least a portion of the first portion is removed to form a first mask. The second dielectric layer is pattern by using the first mask and the second portion as the second mask to expose a portion of the first dielectric layer. The portion of the first dielectric layer is removed to form a first stacked spacer on the first gate structure and a second stacked spacer on the second gate structure.
    Type: Grant
    Filed: May 18, 2021
    Date of Patent: August 29, 2023
    Assignee: VANGUARD INTERNATIONAL SEMICONDUCTOR CORPORATION
    Inventors: Hung-Chih Tan, Hsing-Chao Liu, Chih-Cherng Liao, Hsiao-Ying Yang, Kai-Chuan Kan, Jing-Da Li
  • Patent number: 11735635
    Abstract: A semiconductor device and a fabrication method thereof are provided. The semiconductor device includes a semiconductor structure, a dielectric layer, a metal-semiconductor compound film and a cover layer. The semiconductor structure has an upper surface and a lateral surface. The dielectric layer encloses the lateral surface of the semiconductor structure and exposes the upper surface of the semiconductor structure. The metal-semiconductor compound film is on the semiconductor structure, wherein the dielectric layer exposes a portion of a surface of the metal-semiconductor compound film. The cover layer encloses the portion of the surface of the metal-semiconductor compound film exposed by the dielectric layer, and exposes the dielectric layer.
    Type: Grant
    Filed: July 19, 2021
    Date of Patent: August 22, 2023
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Chun-Han Tsao, Chih-Ming Chen, Han-Yu Chen, Szu-Yu Wang, Lan-Lin Chao, Cheng-Yuan Tsai
  • Patent number: 11735703
    Abstract: A light emitting device, according to the present embodiment, has a light emitting panel, a flexible wiring substrate, a mold resin and a protective tape. The light emitting panel has a first substrate, which is transparent to light, a plurality of conductor patterns, which are formed on a surface of the first substrate, a plurality of light emitting elements, which are connected to any of the conductor patterns, and a resin layer, which holds the light emitting elements on the first substrate. The flexible wiring substrate has a circuit pattern that is electrically connected with an exposed part of the conductor patterns. The mold resin covers the exposed part of the conductor patterns and an exposed part of the circuit pattern. The protective tape covers the mold resin, and is wound around a joint part of the light emitting panel and the flexible wiring substrate.
    Type: Grant
    Filed: October 27, 2021
    Date of Patent: August 22, 2023
    Assignee: NICHIA CORPORATION
    Inventors: Naoki Takojima, Kairi Makita, Fumio Ueno
  • Patent number: 11728374
    Abstract: A capacitor structure for a power semiconductor device includes a semiconductor substrate, an isolation insulating layer having a ring-shape and including an outer periphery and an inner periphery defining an opening region, a first electrode disposed on the isolation insulating layer, a dielectric layer disposed on the first electrode, and a second electrode disposed on the dielectric layer.
    Type: Grant
    Filed: October 11, 2021
    Date of Patent: August 15, 2023
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Hong-Yang Chen, Tian Sheng Lin, Yi-Cheng Chiu, Hung-Chou Lin, Yi-Min Chen, Kuo-Ming Wu, Chiu-Hua Chung
  • Patent number: 11721764
    Abstract: A semiconductor structure includes a gate structure, a source region, a drain region, and an isolation structure. The gate structure includes a first portion, a second portion and a third portion. The first portion extends in a first direction, and the second portion and the third portion extend in a second direction. The second portion and the third portion are disposed at opposite ends of the first portion. The source region and the drain region are separated by the gate structure. The isolation structure surrounds the gate structure, the source region and the drain region. The first portion has a first sidewall, the second portion has a second sidewall, and the third portion has a third sidewall. The first sidewall, the second sidewall and the third sidewall are parallel to the first direction and aligned with each other to form a straight line.
    Type: Grant
    Filed: April 16, 2021
    Date of Patent: August 8, 2023
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.
    Inventor: Yu-Lien Huang
  • Patent number: 11715775
    Abstract: Self-aligned gate endcap architectures with gate-all-around devices having epitaxial source or drain structures are described. For example, a structure includes first and second vertical arrangements of nanowires, the nanowires of the second vertical arrangement of nanowires having a horizontal width greater than a horizontal width of the nanowires of the first vertical arrangement of nanowires. First and second gate stacks are over the first and second vertical arrangements of nanowires, respectively. A gate endcap isolation structure is between the first and second gate stacks, respectively. First epitaxial source or drain structures are at ends of the first vertical arrangement of nanowires and have an uppermost surface below an uppermost surface of the gate endcap isolation structure. Second epitaxial source or drain structures are at ends of the second vertical arrangement of nanowires and have an uppermost surface below the uppermost surface of the gate endcap isolation structure.
    Type: Grant
    Filed: April 29, 2022
    Date of Patent: August 1, 2023
    Assignee: Intel Corporation
    Inventors: Leonard P. Guler, Biswajeet Guha, Tahir Ghani, Swaminathan Sivakumar
  • Patent number: 11711915
    Abstract: Semiconductor device may include a landing pad and a lower electrode that is on and is connected to the landing pad and includes an outer portion and an inner portion inside the outer portion. The outer portion includes first and second regions. The semiconductor devices may also include a dielectric film on the first region of the outer portion on the lower electrode and an upper electrode on the dielectric film. The first region of the outer portion of the lower electrode may include a silicon (Si) dopant, the dielectric film does not extend along the second region of the outer portion. A concentration of the silicon dopant in the first region of the outer portion is different from a concentration of the silicon dopant in the second region of the outer portion and is higher than a concentration of the silicon dopant in the inner portion.
    Type: Grant
    Filed: January 7, 2022
    Date of Patent: July 25, 2023
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Chang Mu An, Sang Yeol Kang, Young-Lim Park, Jong-Bom Seo, Se Hyoung Ahn
  • Patent number: 11705389
    Abstract: Embodiments herein describe techniques for a semiconductor device including a package substrate. The package substrate includes a via pad at least partially in a core layer. A first dielectric layer having a first dielectric material is above the via pad and the core layer, where the first dielectric layer has a first through hole that is through the first dielectric layer to reach the via pad. A second dielectric layer having a second dielectric material is at least partially filling the first through hole, where the second dielectric layer has a second through hole that is through the second dielectric layer to reach the via pad. A via is further within the second through hole of the second dielectric layer, surrounded by the second dielectric material, and in contact with the via pad. Other embodiments may be described and/or claimed.
    Type: Grant
    Filed: June 11, 2019
    Date of Patent: July 18, 2023
    Assignee: Intel Corporation
    Inventors: Andrew J. Brown, Luke Garner, Liwei Cheng, Lauren Link, Cheng Xu, Ying Wang, Bin Zou, Chong Zhang
  • Patent number: 11705417
    Abstract: Embodiments include semiconductor packages and methods to form the semiconductor packages. A semiconductor package includes a plurality of first dies on a substrate, an interface layer over the first dies, a backside metallization (BSM) layer directly on the interface layer, where the BSM layer includes first, second, and third conductive layer, and a heat spreader over the BSM layer. The first conductive layer includes a titanium material. The second conductive layer includes a nickel-vanadium material. The third conductive layer includes a gold material, a silver material, or a copper material. The copper material may include copper bumps. The semiconductor package may include a plurality of second dies on a package substrate. The substrate may be on the package substrate. The second dies may have top surfaces substantially coplanar to top surface of the first dies. The BSM and interface layers may be respectively over the first and second dies.
    Type: Grant
    Filed: October 8, 2019
    Date of Patent: July 18, 2023
    Assignee: Intel Corporation
    Inventors: Chandra Mohan Jha, Prasad Ramanathan, Xavier F. Brun, Jimmin Yao, Mark Allen
  • Patent number: 11696467
    Abstract: An organic light-emitting display device includes: a substrate; a first organic light-emitting layer disposed on the substrate; a pixel defining film disposed on the first organic light-emitting layer and having a first opening, which at least partially exposes the first organic light-emitting layer; and an optical path converter disposed on the pixel defining film to overlap with the first organic light-emitting layer and including a first optical path converting member, which has a first refractive index, and a second optical path converting member, which has a second refractive index that is lower than the first refractive index.
    Type: Grant
    Filed: August 19, 2021
    Date of Patent: July 4, 2023
    Assignee: Samsung Display Co., Ltd.
    Inventors: Suk Kim, Gee Bum Kim, Sung Kook Park
  • Patent number: 11688632
    Abstract: Semiconductor devices and methods for forming semiconductor devices include opening at least one contact via through a sacrificial material down to contacts. Sides of the at least one contact via are lined by selectively depositing a barrier on the sacrificial material, the barrier extending along sidewalls of the at least one contact via from a top surface of the sacrificial material down to a bottom surface of the sacrificial material proximal to the contacts such that the contacts remain exposed. A conductive material is deposited in the at least one contact via down to the contacts to form stacked contacts having the hard mask on sides thereof. The sacrificial material is removed.
    Type: Grant
    Filed: December 29, 2020
    Date of Patent: June 27, 2023
    Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
    Inventors: Alex Joseph Varghese, Marc A. Bergendahl, Andrew M. Greene, Dallas Lea, Matthew T. Shoudy, Yann Mignot, Ekmini A. De Silva, Gangadhara Raja Muthinti