Patents Examined by Theresa T. Doan
  • Patent number: 11362187
    Abstract: A semiconductor device includes first and second active regions on a substrate, an element isolation layer between the first and second active regions, a dummy gate line, dummy gate spacers at opposite side walls of the dummy gate line, and a dummy gate capping layer on the dummy gate line and. An upper surface of the element isolation layer is proximate to an upper surface of the substrate in relation to an upper end of the first active region in a vertical direction. The dummy gate line includes a horizontal section extending on the first active region to the element isolation layer in a horizontal direction, and a vertical section extending downwards from the horizontal section along a side wall of the first active region, the dummy gate line having an L shape, a vertical thickness of the horizontal section being smaller than a vertical thickness of the vertical section.
    Type: Grant
    Filed: November 17, 2020
    Date of Patent: June 14, 2022
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Juyoun Kim, Jinwoo Kim, Kyuman Hwang
  • Patent number: 11362003
    Abstract: A method for semiconductor fabrication includes providing a device structure having an isolation structure, a fin adjacent the isolation structure, gate structures over the fin and the isolation structure, one or more dielectric layers over the isolation structure and the fin and between the gate structures, a first contact hole over the fin, and a second contact hole over the isolation structure. The method further includes depositing a protection layer and treating it with a plasma so that the protection layer in the first contact hole and the protection layer in the second contact hole have different etch selectivity in an etching process; and etching the protection layer to etch through the protection layer on the bottom surface of the first contact hole without etching through the protection layer on the bottom surface of the second contact hole.
    Type: Grant
    Filed: November 2, 2020
    Date of Patent: June 14, 2022
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Yun Lee, Chung-Ting Ko, Chen-Ming Lee, Mei-Yun Wang, Fu-Kai Yang
  • Patent number: 11355608
    Abstract: Self-aligned gate endcap architectures with gate-all-around devices having epitaxial source or drain structures are described. For example, a structure includes first and second vertical arrangements of nanowires, the nanowires of the second vertical arrangement of nanowires having a horizontal width greater than a horizontal width of the nanowires of the first vertical arrangement of nanowires. First and second gate stacks are over the first and second vertical arrangements of nanowires, respectively. A gate endcap isolation structure is between the first and second gate stacks, respectively. First epitaxial source or drain structures are at ends of the first vertical arrangement of nanowires and have an uppermost surface below an uppermost surface of the gate endcap isolation structure. Second epitaxial source or drain structures are at ends of the second vertical arrangement of nanowires and have an uppermost surface below the uppermost surface of the gate endcap isolation structure.
    Type: Grant
    Filed: September 24, 2018
    Date of Patent: June 7, 2022
    Assignee: Intel Corporation
    Inventors: Leonard P. Guler, Biswajeet Guha, Tahir Ghani, Swaminathan Sivakumar
  • Patent number: 11348886
    Abstract: An integrated fan-out (InFO) package includes a plurality of dies, an encapsulant, an insulating layer, a redistribution structure, a plurality of conductive structures, an antenna confinement structure, and a slot antenna. The encapsulant laterally encapsulates the dies. The insulating layer is disposed over the dies and the encapsulant. The redistribution structure is sandwiched between the insulating layer and the dies. The conductive structures and the antenna confinement structure are embedded in the insulating layer. The slot antenna is disposed on the insulating layer.
    Type: Grant
    Filed: May 28, 2020
    Date of Patent: May 31, 2022
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Chuei-Tang Wang, Tzu-Chun Tang, Chieh-Yen Chen, Che-Wei Hsu
  • Patent number: 11349027
    Abstract: The present disclosure provides one embodiment of a method of forming an integrated circuit structure. The method includes forming a shallow trench isolation (STI) structure in a semiconductor substrate of a first semiconductor material, thereby defining a plurality of fin-type active regions separated from each other by the STI structure; forming gate stacks on the fin-type active regions; forming an inter-layer dielectric (ILD) layer filling in gaps between the gate stacks; patterning the ILD layer to form a trench between adjacent two of the gate stacks; depositing a first dielectric material layer that is conformal in the trench; filling the trench with a second dielectric material layer; patterning the second dielectric material layer to form a contact opening; and filling a conductive material in the contact opening to form a contact feature.
    Type: Grant
    Filed: August 3, 2020
    Date of Patent: May 31, 2022
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventor: Jhon Jhy Liaw
  • Patent number: 11335728
    Abstract: Magnetoresistive device architectures and methods for manufacturing are presented that facilitate integration of process steps associated with forming such devices into standard process flows used for surrounding logic/circuitry. In some embodiments, the magnetoresistive device structures are designed such that the devices are able to fit within the vertical dimensions of the integrated circuit associated with a single metal layer and a single layer of interlayer dielectric material. Integrating the processing for the magnetoresistive devices can include using the same standard interlayer dielectric material as used in the surrounding circuits on the integrated circuit as well as using standard vias to interconnect to at least one of the electrodes of the magnetoresistive devices.
    Type: Grant
    Filed: May 22, 2020
    Date of Patent: May 17, 2022
    Assignee: Everspin Technologies, Inc.
    Inventors: Kerry Joseph Nagel, Sanjeev Aggarwal, Thomas Andre, Sarin A. Deshpande
  • Patent number: 11328961
    Abstract: A method of manufacturing an inverter and an inverter are provided. The method of manufacturing the inverter includes following steps: forming a substrate and forming a first insulating layer on the substrate; forming a semiconductor-type carbon nanotube film on the first insulating layer; patterning the semiconductor-type carbon nanotube film to form a first active layer and a second active layer arranged at an interval; forming a first barrier layer on the first active layer and forming a second barrier layer on the second active layer, wherein the first barrier layer is an electrophilic film layer, and the second barrier layer is an electron donor film layer; and forming a first source and a first drain which are in contact with and spaced apart from two ends of the first active layer and forming a second source and a second drain which are in contact with and spaced with two ends of the second active layer, wherein the first drain is connected to the second source.
    Type: Grant
    Filed: November 21, 2019
    Date of Patent: May 10, 2022
    Inventor: Huafei Xie
  • Patent number: 11329045
    Abstract: A field effect transistor structure includes a connection hole leading out a gate structure arranged on the formation area of one of a plurality of fins, and connection holes leading out a source electrode and a drain electrode, wherein the connection hole leading out the gate structure is located on formation areas of different fins; a gate cap layer formed at the top of the gate structure formed on the same fin body and adjacent to the connection holes leading out the source electrode and the drain electrode, wherein the gate cap layer protects the corresponding gate structure; buried holes formed on the source electrode and the drain electrode at both sides of the connection hole leading out the gate structure; a buried hole cap layer formed on the buried holes, and the buried hole cap layer protects the buried holes connecting the source and the drain electrode.
    Type: Grant
    Filed: December 10, 2020
    Date of Patent: May 10, 2022
    Assignee: SHANGHAI HUALI INTEGRATED CIRCUIT CORPORATION
    Inventor: Wenyin Weng
  • Patent number: 11322439
    Abstract: Aspects of the invention include forming a semiconductor device. Gates are formed in a first direction over fins, the gates including gate material, the fins being formed in a second direction. Fin interconnects are formed in the first direction over the fins. A dielectric material is formed on the fins, and capacitor interconnects are formed over portions of the dielectric material in the first direction over the fins.
    Type: Grant
    Filed: November 13, 2019
    Date of Patent: May 3, 2022
    Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
    Inventors: Michael Sperling, Erik English, Akil Khamisi Sutton, Pawel Owczarczyk
  • Patent number: 11315851
    Abstract: A method of fabricating a semiconductor package structure is provided. The structure is configured to include a base substrate, a die placed on the base substrate, the die including a semiconductor device, a solder bump placed on one surface of the die to exhaust heat generated in the die to an outside; and a solder ball placed on other surface of the die facing the one surface to transmit a signal, which is produced by the semiconductor device of the die, to an external device.
    Type: Grant
    Filed: October 23, 2020
    Date of Patent: April 26, 2022
    Assignee: SAMSUNG ELECTRONICS CO., LTD.
    Inventors: Youngho Kim, Hwanpil Park
  • Patent number: 11309235
    Abstract: A semiconductor module includes a printed wiring board and a semiconductor device. The printed wiring board includes a plurality of lands bonded to the semiconductor device via solder, and a solder resist. The plurality of lands includes a first land positioned in a vicinity of an outer edge of the insulating substrate and including a first edge portion, a second edge portion, a third edge portion, and a fourth edge portion. The first edge portion and the second edge portion are configured not to overlap with the solder resist and the third edge portion and the fourth edge portion are configured to overlap with the solder resist.
    Type: Grant
    Filed: June 15, 2020
    Date of Patent: April 19, 2022
    Assignee: CANON KABUSHIKI KAISHA
    Inventor: Hideto Takahashi
  • Patent number: 11302803
    Abstract: Semiconductor structure and fabrication method are provided. The method includes providing a substrate including a first region and a second region; forming a plurality of fins on the first region of the substrate; forming a first isolation structure on the first region and the second region of the substrate; forming a gate structure and a dummy gate structure each across fins and the first isolation structure at the first region; forming an epitaxial layer in each fin on two sides of the gate structure; forming a first opening by etching a portion of each of the first isolation structure and the substrate that are at the second region; filling the first opening with a conductive material layer; removing the dummy gate structure and a portion of the conductive material layer in the first opening to form a power rail; and forming a second isolation structure in a second opening.
    Type: Grant
    Filed: September 28, 2020
    Date of Patent: April 12, 2022
    Assignees: Semiconductor Manufacturing International (Shanghai) Corporation, Semiconductor Manufacturing International (Beijing) Corporation
    Inventors: Haiyang Zhang, Panpan Liu
  • Patent number: 11302802
    Abstract: The present disclosure provides semiconductor devices and methods of forming the same. A semiconductor device according to one embodiment of the present disclosure includes a first fin-shaped structure extending lengthwise along a first direction over a substrate, a first epitaxial feature over a source/drain region of the first fin-shaped structure, a gate structure disposed over a channel region of the first fin-shaped structure and extending along a second direction perpendicular to the first direction, and a source/drain contact over the first epitaxial feature. The bottommost surface of the gate structure is closer to the substrate than a bottommost surface of the source/drain contact.
    Type: Grant
    Filed: October 30, 2020
    Date of Patent: April 12, 2022
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Jia-Heng Wang, Chun-Han Chen, I-Wen Wu, Chen-Ming Lee, Fu-Kai Yang, Mei-Yun Wang
  • Patent number: 11302693
    Abstract: A semiconductor device structure, along with methods of forming such, are described. The structure includes a first, second, and third gate electrode layers, a first dielectric feature disposed between the first and second gate electrode layers, a second dielectric feature disposed between the second and third gate electrode layers, a first seed layer in contact with the first gate electrode layer, the first dielectric feature, and the second gate electrode layer, a first conductive layer disposed on the first seed layer, a second seed layer in contact with the third gate electrode layer, a second conductive layer disposed on the second seed layer, and a dielectric material disposed on the second dielectric feature, the first conductive layer, and the second conductive layer. The dielectric material is between the first seed layer and the second seed layer and between the first conductive layer and the second conductive layer.
    Type: Grant
    Filed: August 31, 2020
    Date of Patent: April 12, 2022
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Jia-Chuan You, Shi-Ning Ju, Kuo-Cheng Chiang, Chih-Hao Wang
  • Patent number: 11302684
    Abstract: In one embodiment, a semiconductor device includes a first interconnection including a first extending portion extending in a first direction, and a first curved portion curved with respect to the first extending portion. The device further includes a second interconnection including a second extending portion extending in the first direction and adjacent to the first extending portion in a second direction, and a second curved portion curved with respect to the second extending portion. The device further includes a first plug provided on the first curved portion, or on a first non-opposite portion included in the first extending portion and not opposite to the second extending portion in the second direction. The device further includes a second plug provided on the second curved portion, or on a second non-opposite portion included in the second extending portion and not opposite to the first extending portion in the second direction.
    Type: Grant
    Filed: February 6, 2020
    Date of Patent: April 12, 2022
    Assignee: KIOXIA CORPORATION
    Inventors: Jun Iijima, Yumi Nakajima
  • Patent number: 11296215
    Abstract: [Object] To stably form a low-resistance electrical coupling between a metal and a semiconductor. [Solution] An electrical coupling structure includes: a semiconductor layer; a metal layer; and an intermediate layer that is held between the semiconductor layer and the metal layer, and includes an insulating layer provided on the semiconductor layer side and a two-dimensional material layer provided on the metal layer side.
    Type: Grant
    Filed: June 19, 2018
    Date of Patent: April 5, 2022
    Assignee: Sony Semiconductor Solutions Corporation
    Inventor: Kazuyuki Tomida
  • Patent number: 11289384
    Abstract: A method of manufacturing a semiconductor device includes forming a plurality of fin structures extending in a first direction over a semiconductor substrate. Each fin structure includes a first region proximate to the semiconductor substrate and a second region distal to the semiconductor substrate. An electrically conductive layer is formed between the first regions of a first adjacent pair of fin structures. A gate electrode structure is formed extending in a second direction substantially perpendicular to the first direction over the fin structure second region, and a metallization layer including at least one conductive line is formed over the gate electrode structure.
    Type: Grant
    Filed: December 7, 2020
    Date of Patent: March 29, 2022
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Hung-Li Chiang, Chih-Liang Chen, Tzu-Chiang Chen, I-Sheng Chen, Lei-Chun Chou
  • Patent number: 11282787
    Abstract: The semiconductor device provided comprises a substrate that includes active regions that extends in a first direction and a device isolation layer that defines the active regions, word lines that run across the active regions in a second direction that intersects the first direction, bit-line structures that intersect the active regions and the word lines and that extend in a third direction that is perpendicular to the second direction, first contacts between the bit-line structures and the active regions, spacer structures on sidewalls of the bit-line structures, and second contacts that are between adjacent bit-line structures and are connected to the active regions. Each of the spacer structures extends from the sidewalls of the bit-line structures onto a sidewall of the device isolation layer.
    Type: Grant
    Filed: May 20, 2020
    Date of Patent: March 22, 2022
    Inventors: Taejin Park, Keunnam Kim, Sohyun Park, Jin-Hwan Chun, Wooyoung Choi, Sunghee Han, Inkyoung Heo, Yoosang Hwang
  • Patent number: 11282836
    Abstract: Provided is an integrated circuit including at least one cell, the at least one cell includes first and second active regions spaced apart from each other, a dummy region disposed between the first and second active regions, at least one first active fin disposed in the first active region and extending in a first direction, at least one second active fin extending along the first direction over the entire length of the second active region, and an active gate line extending in a second direction that is substantially perpendicular to the first direction, wherein the active gate line vertically overlaps the first active region and the dummy region and does not vertically overlap the second active region.
    Type: Grant
    Filed: June 5, 2020
    Date of Patent: March 22, 2022
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Deepak Sharma, Hyun-jong Lee, Raheel Azmat, Chul-hong Park, Sang-jun Park
  • Patent number: 11276763
    Abstract: A semiconductor device and methods of forming the same are disclosed. The semiconductor device includes a substrate, first and second source/drain (S/D) regions, a channel between the first and second S/D regions, a gate engaging the channel, and a contact feature connecting to the first S/D region. The contact feature includes first and second contact layers. The first contact layer has a conformal cross-sectional profile and is in contact with the first S/D region on at least two sides thereof. In embodiments, the first contact layer is in direct contact with three or four sides of the first S/D region so as to increase the contact area. The first contact layer includes one of a semiconductor-metal alloy, an III-V semiconductor, and germanium.
    Type: Grant
    Filed: November 13, 2019
    Date of Patent: March 15, 2022
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Carlos H. Diaz, Chung-Cheng Wu, Chia-Hao Chang, Chih-Hao Wang, Jean-Pierre Colinge, Chun-Hsiung Lin, Wai-Yi Lien, Ying-Keung Leung