Patents Examined by Tu Tu V Ho
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Patent number: 12272751Abstract: A semiconductor device includes a substrate. The semiconductor device includes a dielectric layer disposed over a portion of the substrate. The semiconductor device includes a diffusion blocking layer disposed over the dielectric layer. The diffusion blocking layer and the dielectric layer have different material compositions. The semiconductor device includes a ferroelectric layer disposed over the diffusion blocking layer.Type: GrantFiled: February 13, 2023Date of Patent: April 8, 2025Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.Inventors: Chi-Hsing Hsu, Ching-Wei Tsai, Kuan-Lun Cheng, Chih-Hao Wang, Sai-Hooi Yeong
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Patent number: 12272678Abstract: A semiconductor package includes a first chip package including a plurality of first semiconductor dies and a first insulating encapsulant, a second semiconductor die, a third semiconductor die, and a second insulating encapsulant. The plurality of first semiconductor dies are electrically connected to each other, and the first insulating encapsulant encapsulates the plurality of first semiconductor dies. The second semiconductor die and the third semiconductor die are electrically communicated to each other by connecting to the first chip package, wherein the first chip package is stacked on the second semiconductor die and the third semiconductor die. The second insulating encapsulant encapsulates the first chip package, the second semiconductor die, and the third semiconductor die.Type: GrantFiled: July 12, 2023Date of Patent: April 8, 2025Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Jie Chen, Hsien-Wei Chen
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Patent number: 12266684Abstract: A method of forming a capacitor is disclosed. The method includes forming a portion of a metallization layer on a substrate, forming a via layer on the substrate, and forming a first electrode between the metallization layer and the via layer, where the first electrode is electrically connected to the metallization layer. The method also includes forming a second electrode between the metallization layer and the via layer, where the second electrode is electrically connected to the via layer, and forming a dielectric layer between the first electrode and the second electrode, where the first electrode is not electrically connected to any other conductors other than through the metallization layer, and where the second electrode is not electrically connected to any conductors other than through the via layer.Type: GrantFiled: March 21, 2022Date of Patent: April 1, 2025Assignee: Taiwan Semicondcutor Manufacturing Company, Ltd.Inventors: Pei-Jen Wang, Ching-Hung Kao, Tzy-Kuang Lee, Meng-Chang Ho, Kun-Mao Wu
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Patent number: 12266648Abstract: A package structure includes an insulating encapsulation, a semiconductor die, and a filter structure. The semiconductor die is encapsulated in the insulating encapsulation. The filter structure is electrically coupled to the semiconductor die, wherein the filter structure includes a patterned metallization layer with a pattern having a double-spiral having aligned centroids thereof.Type: GrantFiled: August 2, 2023Date of Patent: April 1, 2025Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Sen-Kuei Hsu, Hsin-Yu Pan, Ming-Hsien Tsai
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Patent number: 12261080Abstract: A method of forming a structure includes forming an alternating stack of first material layers and second material layers over a substrate, forming a mask layer over the alternating stack, forming a cavity in the mask layer, forming a first cladding liner on a sidewall of the cavity in the mask layer, and forming a via opening the alternating stack by performing an anisotropic etch process that transfers a pattern of the cavity in the mask layer through the alternating stack using a combination of the first cladding liner and the mask layer as an etch mask.Type: GrantFiled: March 31, 2022Date of Patent: March 25, 2025Assignee: Sandisk Technologies, Inc.Inventors: Roshan Jayakhar Tirukkonda, Monica Titus, Senaka Kanakamedala, Raghuveer S. Makala, Rahul Sharangpani, Adarsh Rajashekhar
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Patent number: 12255140Abstract: A semiconductor device, includes a plurality of semiconductor elements, each of the plurality of semiconductor elements including a gate structure extending in a first direction and an active region provided on both sides of the gate structure in a second direction intersecting the first direction; and a plurality of interconnection patterns connected to the plurality of semiconductor elements, wherein the plurality of interconnection patterns include a plurality of upper interconnections provided above the plurality of semiconductor elements in a third direction, a plurality of intermediate interconnections provided between the plurality of semiconductor elements and the plurality of upper interconnections in the third direction, and a routing interconnection adjacent to at least one of the plurality of semiconductor elements in the second direction, wherein the routing interconnection is connected to at least one of the plurality of intermediate interconnections in the first direction or the second directioType: GrantFiled: July 18, 2022Date of Patent: March 18, 2025Assignee: SAMSUNG ELECTRONICS CO., LTD.Inventors: Seungil Chai, Kyunghee Shin, Daehee Lee, Moonhui Lee
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Patent number: 12255199Abstract: An integrated circuit is provided and includes a multi-bit cell having multiple bit cells disposed in multiple cell rows. The bit cells include M bit cells, M being positive integers. A first bit cell of the bit cells and a M-th bit cell of the bit cells are arranged diagonally in different cell rows in the multi-bit cell. The multi-bit cell includes first to fourth cell boundaries. The first and second boundaries extend in a first direction and the third and fourth boundaries extend in a second direction different from the first direction. The first bit cell and a second bit cell of the bit cells abut the third cell boundary, and the first bit cell and a (M/2+1)-th bit cell of the bit cells abut the first cell boundary.Type: GrantFiled: January 17, 2024Date of Patent: March 18, 2025Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.Inventors: Shao-Lun Chien, Po-Chun Wang, Hui-Zhong Zhuang, Chih-Liang Chen, Li-Chun Tien
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Patent number: 12256555Abstract: A semiconductor device including a semiconductor substrate and an interconnect structure is provided. The semiconductor substrate includes a transistor, wherein the transistor has a source region and a drain region. The interconnect structure is disposed over the semiconductor substrate, wherein the interconnect structure includes a plurality of interlayer dielectric layers, a first via and a memory cell. The plurality of interlayer dielectric layers are over the semiconductor substrate. The first via is embedded in at least two interlayer dielectric layers among the plurality of interlayer dielectric layers and electrically connected with the drain region of the transistor. The memory cell is disposed over the at least two interlayer dielectric layers among the plurality of interlayer dielectric layers and electrically connected with the first via.Type: GrantFiled: June 12, 2023Date of Patent: March 18, 2025Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Carlos H. Diaz, Shy-Jay Lin, Ming-Yuan Song
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Patent number: 12250817Abstract: An alternating stack of first material layers and second material layers is formed over a substrate. A hard mask layer is formed over the alternating stack and cavities are formed in the hard mask layer. A cladding liner is formed on sidewalls of the cavities in the hard mask layer. Via openings are formed through each layer within the alternating stack by performing an anisotropic etch process that transfers a pattern of the cavities through the alternating stack.Type: GrantFiled: October 5, 2021Date of Patent: March 11, 2025Assignee: Sandisk Technologies, Inc.Inventors: Katsufumi Okamoto, Monica Titus
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Patent number: 12249573Abstract: Disclosed herein is an apparatus that includes a plurality of signal wiring patterns, a plurality of shield patterns each provided between corresponding two of the signal wiring patterns, a common pattern coupled to each of the plurality of shield patterns, and a transistor coupled between the common pattern and a power line supplied with a fixed power potential.Type: GrantFiled: July 26, 2022Date of Patent: March 11, 2025Assignee: Micron Technology, Inc.Inventor: Tetsuji Takahashi
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Patent number: 12243776Abstract: A source-level semiconductor layer and an alternating stack of first material layers and second material layers is formed above a substrate. A hard mask layer is formed over the alternating stack, and is subsequently patterned to provide a pattern of cavities therethrough. Via openings are formed through the alternating stack by performing an anisotropic etch process. A cladding liner is formed on sidewalls of the cavities in the hard mask layer and on a top surface of the hard mask layer. The via openings are vertically extended at least through the source-level semiconductor layer by performing a second anisotropic etch process employing a combination of the cladding liner and the hard mask layer as an etch mask.Type: GrantFiled: October 22, 2021Date of Patent: March 4, 2025Assignee: Sandisk Technologies, Inc.Inventors: Roshan Jayakhar Tirukkonda, Senaka Kanakamedala, Raghuveer S. Makala, Rahul Sharangpani, Monica Titus, Adarsh Rajashekhar
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Patent number: 12245434Abstract: A method includes forming an alternating stack of first and second layers, forming a composite hard mask layer over the alternating stack, forming openings in the hard mask, and forming via openings through the alternating stack by performing an anisotropic etch process that transfers a pattern of the openings in the composite hard mask layer through the alternating stack. The compositing hard mask includes a first cladding material layer which has higher etch resistance than upper and lower patterning films of the composite hard mask.Type: GrantFiled: February 1, 2022Date of Patent: March 4, 2025Assignee: Sandisk Technologies, Inc.Inventors: Monica Titus, Roshan Jayakhar Tirukkonda, Senaka Kanakamedala, Raghuveer S. Makala
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Patent number: 12237425Abstract: A nanowire FET device includes a vertical stack of nanowire strips configured as the semiconductor body. One or more of the top nanowire strips are receded and are shorter than the rest of the nanowire strips stacked lower. Inner spacers are uniformly formed adjacent to the receded nanowire strips and the rest of the nanowire strips. Source/drain structures are formed outside the inner spacers and a gate structure is formed inside the inner spacers, which wraps around the nanowire strips.Type: GrantFiled: June 12, 2023Date of Patent: February 25, 2025Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.Inventors: I-Sheng Chen, Chao-Ching Cheng, Tzu-Chiang Chen, Carlos H Diaz
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Patent number: 12224380Abstract: A display apparatus is provided. The display apparatus includes a substrate, a transistor, a metal layer, and a light-emitting diode. The transistor is disposed on the substrate. The metal layer is disposed on the transistor and electrically connected to the transistor, wherein a first distance is between the upper surface of the metal layer and the substrate in a direction perpendicular to the substrate. The light-emitting diode is disposed on the metal layer, wherein the light-emitting diode includes a light-emitting diode body and an electrode, the light-emitting diode body is electrically connected to the metal layer via the electrode, the light-emitting diode body has a first surface and a second surface opposite to the first surface, the first surface and the second surface are parallel to the substrate, and in the direction above, a second distance is between the first surface and the second surface, wherein the ratio of the second distance to the first distance is greater than or equal to 0.Type: GrantFiled: June 12, 2023Date of Patent: February 11, 2025Assignee: Innolux CorporationInventors: Kuan-Feng Lee, Ting-Kai Hung, Yu-Hsien Wu, Chia-Hsiung Chang
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Patent number: 12223989Abstract: A method for fabricating a semiconductor device is provided. The method includes forming a first memory cell and a second memory cell over a substrate, wherein each of the first and second memory cells comprises a bottom electrode, a resistance switching element over the bottom electrode, and a top electrode over the resistance switching element; depositing a first dielectric layer over the first and second memory cells, such that the first dielectric layer has a void between the first and second memory cells; depositing a second dielectric layer over the first dielectric layer; and forming a first conductive feature and a second conductive feature in the first and second dielectric layers and respectively connected with the top electrode of the first memory cell and the top electrode of the second memory cell.Type: GrantFiled: January 9, 2023Date of Patent: February 11, 2025Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.Inventors: Harry-Hak-Lay Chuang, Sheng-Huang Huang, Hung-Cho Wang, Sheng-Chang Chen
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Patent number: 12218298Abstract: A display panel includes a substrate, a plurality of conductive components on a surface of the substrate, a plurality of light-emitting diodes. The conductive components are on a surface of the substrate and spaced apart from each other. Each conductive component includes a first conductive part and a second conductive part. The second conductive part is electrically connected to the first conductive part. A projection of the second conductive part on the surface at least partially overlaps a projection of the first conductive part on the surface. Each light-emitting diode includes a binding electrode, and the binding electrode is electrically connected to the second conductive part. The first conductive part is made of metal; the second conductive part is made of a transparent conductive oxide. The binding electrode is made of metal. A eutectic material is formed between the second conductive part and the binding electrode.Type: GrantFiled: April 21, 2022Date of Patent: February 4, 2025Assignee: HON HAI PRECISION INDUSTRY CO., LTD.Inventors: Chin-Yueh Liao, Hui-Chu Lin
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Patent number: 12218003Abstract: A method is presented forming a fully-aligned via (FAV) and airgaps within a semiconductor device. The method includes forming a plurality of copper (Cu) trenches within an insulating layer, forming a plurality of ILD regions over exposed portions of the insulating layer, selectively removing a first section of the ILD regions in an airgap region, and maintaining a second section of the ILD regions in a non-airgap region. The method further includes forming airgaps in the airgap region and forming a via in the non-airgap region contacting a Cu trench of the plurality of Cu trenches.Type: GrantFiled: April 25, 2023Date of Patent: February 4, 2025Assignee: Adeia Semiconductor Solutions LLCInventors: Christopher J. Penny, Benjamin D. Briggs, Huai Huang, Lawrence A. Clevenger, Michael Rizzolo, Hosadurga Shobha
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Patent number: 12218186Abstract: A device structure according to the present disclosure includes a metal-insulator-metal (MIM) stack that includes a plurality of conductor plate layers interleaved by a plurality of insulator layers. The MIM stack includes a first region and a second region and the first region and the second region overlaps in a third region. The MIM stack further includes a first via passing through the first region and electrically coupled to a first subset of the plurality of conductor plate layers, a second via passing through the second region and electrically coupled to a second subset of the plurality of conductor plate layers, and a ground via passing through the third region and electrically coupled to a third subset of the plurality of conductor plate layers.Type: GrantFiled: February 7, 2022Date of Patent: February 4, 2025Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.Inventors: Wen-Chiung Tu, Hsiang-Ku Shen, Yuan-Yang Hsiao, Tsung-Chieh Hsiao, Chen-Chiu Huang, Dian-Hau Chen
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Patent number: 12211764Abstract: The third side surface includes inclined surfaces inclined in a direction in which a center in an up-down direction of the third side surface is convex. The mold resin further includes a residual section provided in the center of the third side surface and a dowel section provided between the inclined surface and the residual section. The dowel section projects further in a lateral direction than the inclined surface. The residual section further projects in the lateral direction than the dowel section and has a fracture surface perpendicular to the up-down direction.Type: GrantFiled: June 9, 2022Date of Patent: January 28, 2025Assignee: Mitsubishi Electric CorporationInventors: Ken Sakamoto, Keitaro Ichikawa
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Patent number: 12205898Abstract: A semiconductor device includes a metal-oxide-metal (MOM) cell including a first bus at a first elevation and extending along a first direction, and a second bus at a second elevation, extending along a second direction different from the first direction, and electrically connected to the first bus through a via. The MOM cell also includes a first group of fingers at the first elevation and extending along the first direction; and a second group of fingers at the second elevation and extending along the second direction. Each finger of the first group of fingers is electrically connected to the second bus through a corresponding via, each finger of the second group of fingers is electrically connected to the first bus through a corresponding via, and each finger of the first group of fingers overlaps each finger of the second group of fingers.Type: GrantFiled: June 29, 2022Date of Patent: January 21, 2025Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.Inventors: Chung-Chieh Yang, Chung-Ting Lu