Abstract: The present invention relates to an apparatus for creating a pattern on a workpiece sensitive to radiation, such as a photomask a display panel or a microoptical device. The apparatus may include a source for emitting light flashes, a spatial modulator having modulating elements (pixels), adapted to being illuminated by the radiation, and a projection system creating an image of the modulator on the workpiece. It may further include an electronic data processing and delivery system receiving a digital description of the pattern to be written, converting the pattern to modulator signals, and feeding the signals to the modulator. An electronic control system may be provided to control a trigger signal to compensate for flash-to-flash time jitter in the light source.

Abstract: There is provided a high-definition imaging optical system including: an aperture stop; a first lens disposed at an image side of the aperture stop, the first lens having a positive refractive power and having a convex object-side surface; a second lens disposed at an image side surface of the first lens; a third lens disposed at an image side surface of the second lens; a fourth lens having a convex image-side surface and having a positive refractive power; and a fifth lens having a concave image-side surface and having a negative refractive power, wherein a combined refractive power of the second and third lenses is negative. The optical system is high-performing and compact and can be further improved in resolution. Also, the optical system can correct chromatic aberration and improve color fringing in the case of indoor or outdoor photographing.

Abstract: At least one exemplary embodiment is directed to an optical element driving apparatus which includes a first actuator configured to drive an optical element in accordance with a deformation target value, a sensor arranged to measure a position and an orientation of the optical element, a second actuator configured to drive the optical element in accordance with position and orientation target values and an output of the sensor, and a correcting unit configured to correct a measurement error of the sensor caused by deformation of the optical element.

Abstract: A projection apparatus comprising a light source for projecting an illumination light through an illumination optical system to a spatial light modulator (SLM) for modulating the illumination light for generating and transmitting an image projection light to an image projection surface through a projection optical system to display an image. The projection apparatus further includes an image process unit for receiving and analyzing an input image data; and the image process unit applies a conversion process to a signal related to the input image data to generate different control patterns for a plurality of adjacent pixel elements included in the SLM for a predetermined period during at least one frame period to reproduce a gradation of the pixel whereby each of the plurality of adjacent pixel elements has a gradation of approximately a same level.

Abstract: An imaging optical system includes: an object-side lens group having, in order from its object side, an object-side positive meniscus lens that is convex on its object side and has positive refracting power, and an object side negative meniscus lens that is convex on its object side and has negative refracting power; and image-side lens group having, in order from its object side, an image-side negative lens, an image-side first positive lens and an image-side second positive lens. The image-side negative lens and the image-side first positive lens adjacent thereto form together a cemented doublet.

Abstract: An optical system for arranging between a light source and a field diaphragm in an illumination beam path of a microscope comprises n imaging optical elements with focal lengths fi and Abbe numbers ?i (i=1, . . . , n). The following relationship is met for the optical system: ? i = 1 n ? h i f i · v i ? 0.07 , where hi is one half of the bundle diameter of a bundle of light rays proceeding from a point of the light source at the entrance to the imaging optical element i.

Abstract: A lens includes a gradient index of refraction and a curved shape. A method of making the lens includes forming a plurality of layers, forming a shaped resist on the plurality of layers, and etching the resist and the plurality of layers to transfer the shape of the resist into the plurality of layers.

Abstract: The present invention relates to a multilayer, surface structured solid plate for light guidance, the base material of which consists of a transparent plastic material, and optionally one or more cover layers.

Abstract: A microlens for an image sensor fabricated using a seed layer and a method for fabrication of the same that does not involve a reflow process. The method of fabricating a microlens includes forming a seed layer pattern on a wafer, rounding the corner portions of the seed layer pattern by applying plasma, and then depositing an oxide film on the seed layer pattern.

Abstract: A thin-film interference filter structure has a generally wavelength-dependent resonant response to incident optical energy in a predetermined range of wavelengths. The thin-film interference filter structure includes a thermally tunable layer having a thermally tunable optical characteristic such that a range of wavelength-dependent resonant optical responses of the thermally tunable layer are induced by a corresponding range of thermal conditions of the thermally tunable layer. The thin-film interference filter structure is configured to (1) receive a spatially varying pattern of thermal energy at the thermally tunable layer to impart a corresponding spatially varying pattern to the thermally tunable characteristic of the thermally tunable layer, and (2) receive the incident optical energy into the thermally tunable layer and output optical energy having spatial modulation corresponding to the spatially varying pattern of the thermally tunable characteristic.

Abstract: A crystallization method includes wavefront-dividing an incident light beam into a plurality of light beams, condensing the wavefront-divided light beams in a corresponding phase shift portion of a phase shift mask or in the vicinity of the phase shift portion to form a light beam having an light intensity distribution of an inverse peak pattern in which a light intensity is minimum in a point corresponding to the phase shift portion of the phase shift mask, and irradiating a polycrystalline semiconductor film or an amorphous semiconductor film with the light beam having the light intensity distribution to produce a crystallized semiconductor film.

Abstract: A deformable mirror formed out of two layers of a nanolaminate foil attached to a stiff substrate is introduced. Deformation is provided by an electrostatic force between two of the layers. The internal stiffness of the structure allows for high-spatial-frequency shapes. The nanolaminate foil of the present invention allows for a high-quality mirror surface. The device achieves high precision in the vertical direction by using foils with accurately controlled thicknesses, but does not require high precision in the lateral dimensions, allowing such mirrors to be fabricated using crude lithography techniques. Such techniques allow structures up to about the meter scale to be fabricated.

Abstract: Air gap variation in an interferometric modulator over a two-dimensional spatial map of the modulator is determined by acquiring a digital photograph of the modulator. Color parameters of individual pixels in the photograph are determined and compared to a model of color parameters as a function of air gap distance. The model and individual pixel color parameters may be plotted on a color space plot for comparison. The determined distances may be plotted over a two-dimensional spatial map of the interferometric modulator to visualize the mirror curvature and air gap variation.

Abstract: It is made possible to provide a deformable mirror apparatus which is deformable to a complicated shape (high-order shape). A deformable mirror apparatus includes: a substrate; a plurality of electrodes provided on the substrate; a spacer fixed above the substrate, having a first opening passing through from a first face of the spacer facing to the substrate to a second face of the spacer facing opposite from the first face, surrounding the electrodes, and having a step on the second face; a drive part including a membrane part disposed so as to cover the step of the spacer and so as to be opposed to the electrodes, a casing part having an opening at a bottom face of which the membrane part is exposed and supporting the membrane part, and a reflection film provided on the membrane part; and a voltage generator configured to generate predetermined voltage patterns on the electrodes, respectively.

Abstract: In the information display panel, in which one or more groups of display media are sealed between opposed two substrates, at least one substrate being transparent, and, in which the display media, to which an electrostatic field generated between the substrates is applied, are made to move so as to display information such as an image, at least one substrate of the two substrates (both substrates in the figure) is a laminated substrate in which a first substrate, a low elastic layer and a second substrate are successively laminated from an outer surface, so that a stress concentration at a rib adhesion portion and so on of a partition wall can be reduced, If the laminated substrate with a laminated construction including a buffer layer for reducing stress concentration, it is possible to provide the information display panel, which can improve a mechanical strength with respect to an external force.

Abstract: A liquid lens group includes two liquid lens portions and a light-pervious separator. The light pervious separator includes a first contact surface and an opposite second contact surface, which are in contact with the two liquid lens portions respectively. The liquid lens group has a wide focus range and highly compacted volume.

Abstract: This invention relates to display apparatuses having an array of light modulators and a plurality of apertures formed in a layer of material. Each light modulator corresponds to one or more apertures and has a portion which may overlap a corresponding aperture, where the size of the overlap is proportional to a distance between the array and the layer of material.

Abstract: Provided are an electrophoretic display device and a manufacturing method thereof, and more specifically, electrophoretic e-paper to which a high-k dielectric material is applied in order to improve a reaction rate. The electrophoretic display device of the present invention comprises a plurality of capsules comprising a dielectric fluid and at least one type of particles individually operating in response to an applied electric field and suspended in the dielectric fluid; first and second substrates respectively formed on and below the capsules and having electrodes formed thereon; and a dielectric layer formed on at least one of the first and second substrates to be in contact with the capsules.

Abstract: A wavefront correction system using a dual frequency liquid crystal spatial light modulator to vary phase relationships of a wavefront is disclosed. A light beam from the dual frequency liquid crystal spatial light modulator can be split into a reference beam and a plurality of measurement beams to enhance a speed and/or accuracy of phase measurement. A temperature of the dual frequency liquid crystal spatial light modulator can be sensed to facilitate temperature control and/or temperature compensation, so as to enhance the accuracy associated with use of the crossover frequency used to control the dual frequency liquid crystal spatial light modulator.

Abstract: A lens unit includes a front group, a stop, and a rear group, in order from the object side toward the image side. The front group includes at least: a first lens having a negative meniscus shape; a negative second lens formed from a plastic and having an aspherical surface; and a positive third lens, in order from the object side toward the image side. The rear group includes at least: a positive first lens; and a negative second lens, in order from the object side toward the image side.