Abstract: A substrate liquid processing apparatus includes: at least one liquid pipe through which a processing liquid flows; a discharge nozzle configured to discharge the processing liquid supplied via the at least one liquid pipe; a valve mechanism configured to regulate a flow of the processing liquid in the at least one liquid pipe; and a liquid detection sensor configured to detect presence or absence of the processing liquid in the at least one liquid pipe, wherein in a state in which the valve mechanism is operating so that the processing liquid in the at least one liquid pipe is located at an upstream of a first pipe measurement site of the at least one liquid pipe, the liquid detection sensor detects the presence or absence of the processing liquid at the first pipe measurement site located at a first measurement point.

Abstract: A raw material supply apparatus includes: a raw material supply path through which a raw material gas is supplied into a processing container; a valve provided in the raw material supply path; a pressure sensor configured to detect an internal pressure of the raw material supply path; a raw material exhaust path connected to the raw material supply path and through which the raw material gas in the raw material supply path is exhausted; an opening degree adjustment mechanism provided in the raw material exhaust path and configured to control the internal pressure of the raw material supply path based on an adjustment of an opening degree of the opening degree adjustment mechanism; and a controller configured to perform the adjustment of the opening degree of the opening degree adjustment mechanism based on a value detected by the pressure sensor.

Abstract: A fluid control device 10 comprises a valve device V2 including actuators 22 and 24 for opening and closing a flow path and adjusting a flow rate of a fluid flowing through the flow path, a pressure sensor PT provided upstream of the valve device V2, and a control circuit 12 connected to the valve device V2 and the pressure sensor PT, and the control circuit 12 controls an operation of the actuator based on a pressure measured by the pressure sensor PT and a reference pressure drop curve, while the upstream side of the fluid control device is closed and the valve device is opened using the actuators.

Abstract: The present invention is directed to a metering valve for controlling the amount of a fluid passed through the valve and a servo-valve for controlling the metering valve, wherein the servo-valve is decoupled from the metering valve to thermally distance or thermally isolate the servo-valve from any heat from the fluid passing through the metering valve. The metering valve and servo-valve may be used to attemperate a steam stream in a power plant attemperation system, such as a system for attemperating a superheated steam gas stream from a power plant being used for a heat-recovery steam generator. An integrated metering valve and discharge valve for discharging fluid during periods of non-use is also provide. Changeable throttle plates are also provided that control the flow of the fluid through the control chamber of the metering valve and the discharge valve.

Abstract: A piezoelectric ring bender servo valve assembly reduces mechanical wear by removing mechanical components used in prior art servo valves. The assembly does not use torque motor, flapper, and feedback spring. In this manner, no moving parts are required, which reduces maintenance and costs. A pair of piezoelectric ring benders mount adjacently to a pair of nozzles. The piezoelectric ring benders independently regulate the flow of fluid through the nozzles by moving between an open position to enable flowage, and a closed position to restrict flowage. A linear position sensing device measures and provides feedback about the spool position to a valve controller. The valve controller allows the spool valve to move until valve position achieves command position and the force on the spool valve is in equilibrium with pressure difference across spool valve. An H-bridge operable to switch the polarity of a differential pressure applied across to a load.

Abstract: A solenoid assembly includes a solenoid adapted to be coupled to a solenoid connecting member extending from a support member. The solenoid assembly also includes a retaining bracket having a body portion and a securing portion. The body portion is adapted to be removably coupled to the support member. The securing portion is removably coupled to the solenoid. The retaining bracket is moveable between an unsecured position, and a secured position. The securing portion of the retaining bracket provides a spring force to the solenoid when the retaining bracket is in the secured position such that the solenoid is biased toward the solenoid connecting member to secure the solenoid between the solenoid connecting member and the securing portion of said retaining bracket.

Abstract: A flow rate control valve includes a base block and a valve opening/closing mechanism. The base block is provided with a valve chamber in which a valve seat through which a liquid raw material L flows, and a diaphragm that is brought into contact with or separated from the valve seat so as to close/open the valve seat are installed. The valve opening/closing mechanism includes a slide bearing part, a support post part, a piezoelectric actuator part, and a valve-actuating part. The slide bearing part is installed on the base block 1 and is provided with a bearing. The support post part includes a support post that is inserted slidably in the bearing and that moves upward and downward in a diaphragm direction.

Abstract: A washer fluid distribution device includes a plurality of nozzle units formed consecutively, a transfer conduit configured to pass through the plurality of nozzle units and having one end fluidly connected to an introduction part, the introduction part located at one end of the transfer conduit and configured to allow a washer fluid to be introduced from a washer pump, a plurality of discharge holes configured to correspond to the number of the nozzle units in the transfer conduit and having different angles based on a center of the transfer conduit, and a controller configured to control a rotation angle of the transfer conduit to allow the discharge holes to correspond to the nozzle units in response to a user's request.

Abstract: A washer fluid distribution device includes a plurality of nozzle units formed consecutively, a transfer conduit configured to pass through the plurality of nozzle units and having one end fluidly connected to an introduction part, the introduction part located at one end of the transfer conduit and configured to allow a washer fluid to be introduced from a washer pump, a plurality of discharge holes configured to correspond to the number of the nozzle units in the transfer conduit and having different angles based on a center of the transfer conduit, and a controller configured to control a rotation angle of the transfer conduit to allow the discharge holes to correspond to the nozzle units in response to a user's request.

Abstract: A system for equalizing a pressure in an ionization chamber of a radiation device is provided. The system may include the ionization chamber including: a chamber housing including one or more chamber walls; a chamber volume inside the chamber housing, the chamber volume being filled with a radiation sensitive material; and a pressure adjustment apparatus operably coupled to the chamber volume via at least one wall of the one or more chamber walls, the pressure adjustment apparatus being configured to equalize a first pressure of the radiation sensitive material inside the chamber volume and a second pressure of ambient air outside the chamber housing.

Abstract: A control valve features a first housing and a second housing. The first housing includes a first inlet port having a first inlet port orifice member with a first inlet port orifice size configured to provide a first inlet fluid with a first inlet volumetric flow rate, the first inlet port orifice member being detachably coupled inside the first inlet port; includes a second inlet port having a second inlet port orifice member with a second inlet port orifice size configured to provide a second inlet fluid with a second inlet volumetric flow rate, the second inlet port orifice member being detachably coupled inside the second inlet port; and includes a first housing rim configured to extend from the first fixed inlet and the second fixed inlet.

Abstract: A booster-ejector system captures and recycles leakage fluids from a process. When a pressure differential (head) of the process is above a threshold value, an ejector system uses motive fluid from a process high-pressure (HP) region to entrain and compress the leakage fluid, and direct it to a low pressure (LP) region. When the head is below the threshold value, a controller reconfigures a plumbing system and activates a leakage pump to pump the leakage fluid to the LP region. The system can include only one ejector, or a plurality thereof, which can be coupled such that the diffuser output of each ejector is directed to the suction input of the next ejector. At least one of the ejectors can include an exchangeable throat, which can impart a rotational component to the fluid. The HP and LP regions can be the output and input, respectively, of a compressor.

Abstract: An actuator pressure intensifying assembly includes a mode valve and a gear motor assembly, the mode valve arranged to receive, at an input port, a supply pressure and to provide, at an output port, a control pressure to an actuator, the mode valve further configured to move, in response to the supply pressure exceeding a predetermined activation threshold, from a first mode in which the supply pressure flows directly from the input port to the output port in a first fluid flow path, and a second mode in which the supply pressure flows from the input port to the output port in a second fluid flow path which includes the gear motor assembly between the input port and the output port which intensifies the supply pressure such that the control pressure is higher than the supply pressure.

Abstract: A mechanical shutdown valve for preventing an over pressure condition is described. A valve body has an inlet, an outlet, and a channel extending from the inlet to the outlet. A valve seat and a diaphragm are positioned in the valve body. The diaphragm controls a fluid flow through the valve body. A mesh is coupled to the diaphragm such that the mesh and the diaphragm separate an upstream portion of the channel from a downstream portion of the channel. The mesh extends from the diaphragm to an inner surface of the valve body and limits fluid flow between the diaphragm and the valve body. A spring biases the diaphragm towards the open position. A characteristic of the spring determines a differential pressure threshold between the upstream portion of the channel and a downstream portion of the channel at which the diaphragm engages the valve seat.

Abstract: The disclosure provides for a drain system for an appliance. The drain system can include a Y-hose having a flexible end coupled to a supply of water from tub, a recirculating end, and a drain end, a recirculating valve coupled with the recirculating end, a drain valve spaced from the recirculating valve and coupled with the drain end, and wherein the recirculating end and the drain end are connected via a continuous connecting wall.

Abstract: Disclosed are implementations for efficient purging of substrate carriers (and content held therein) and preventing external contaminants from entering a gas purge apparatus by coupling the gas purge apparatus to a substrate carrier, performing a first gas purging session of an environment of the substrate carrier, receiving a first signal of a first signal type, responsive to receiving the first signal, keeping the gas purge apparatus coupled to the substrate carrier, performing a second gas purging session of the environment of the substrate carrier, receiving a second signal of a second signal type, and, responsive to receiving the second signal, decoupling the purge apparatus from the substrate carrier.

Abstract: A capacity control valve includes: a valve body having first communication passages, second communication passages, third communication passages, and a main valve seat; a valve element having an intermediate communication passage, a main valve portion and an auxiliary valve portion; a pressure-sensitive element disposed in the valve body; a solenoid that drives a rod; a first biasing member that biases in a valve closing direction of the main valve portion; and a second biasing member that biases in a valve opening direction of the main valve portion, wherein the rod moves relative to the valve element to press the pressure-sensitive element. The capacity control valve can efficiently discharge a liquid refrigerant and can decrease a driving force of a compressor during a liquid refrigerant discharge operation.

Abstract: A cartridge flow rate adjusting assembly of a hydraulic valve may include a rod having a first end and a second end, a shutter integrally formed with the first end of the rod and to slidingly positioned against a passage opening of the valve for adjusting flow. The assembly may also include an elastic element to hold the rod with the shutter in a monostable position with the opening of the valve. A plunger element may be integrally formed with the rod and interposed between the shutter and second end. The assembly may further include a conduit formed in the rod. The opening of the valve may be in fluid communication with a portion of the chamber disposed between the plunger and second end so that a pressure in the portion of the chamber is equal to a pressure in the passage opening.

Abstract: A valve includes a valve housing defining at least one first opening and at least one second opening, the valve housing enclosing a valve chamber. An actuator with a positioning element is configured for opening or closing the valve. Also provided are at least one air mass measuring device for measuring an air mass flowing through the valve or at least one measuring wire of an air mass measuring device for measuring an air mass flowing through the valve. A valve arrangement and a seat comfort system are also disclosed.

Abstract: A packing box is provided. The packing box is formed by several splicing materials of a standard model. The splicing material on the top of the packing box is provided with an air pump with automatic pumping and the pressure monitoring functions. The inner side of each splicing material is provided with an air bag, and the air bags are inflatable and connected to one another via connection tubes. The air bags are able to be spliced or separated with one another, and the shape of each air bag is subject to the outline dimension of a packaged object when the air bags are inflated. The size and shape of the packing box can be determined according to the size and shape of the packaged object, so is applicable to the objects with any sizes and shapes. The packing box does not need additional fillers and is recyclable.