Patents Examined by Yu-Hsi Sun
  • Patent number: 10658243
    Abstract: The present disclosure relates to methods for forming replacement metal gate (RMG) structures and related structures. A method may include: forming a portion of sacrificial material around each fin of a set of adjacent fins; forming a first dielectric region between the portions of sacrificial material; forming a second dielectric region on the first dielectric region; forming an upper source/drain region from an upper portion of each fin; removing only the second dielectric region and the sacrificial material; and forming a work function metal (WFM) in place of the second dielectric region and the sacrificial material. The semiconductor structure may include gate structures surrounding adjacent fins; a first dielectric region between the gate structures; a second dielectric region above the first dielectric region and between the gate structures; and a liner between the first dielectric region and the gate structures such that the second dielectric region directly contacts the gate structures.
    Type: Grant
    Filed: June 7, 2018
    Date of Patent: May 19, 2020
    Assignee: GLOBALFOUNDRIES INC.
    Inventors: Ruilong Xie, Daniel Chanemougame, Steven R. Soss, Steven J. Bentley, Chanro Park
  • Patent number: 9728623
    Abstract: A replacement metal gate transistor is described. Various examples provide a replacement metal gate transistor including a trench, a first sidewall and a second sidewall. A layer is disposed in the trench where the layer has a bottom section disposed on a bottom of the trench and sidewall sections disposed on the first and second sidewalls, wherein the sidewall sections of the layer are at least 50% thinner than the bottom section of the layer.
    Type: Grant
    Filed: June 19, 2013
    Date of Patent: August 8, 2017
    Assignee: Varian Semiconductor Equipment Associates, Inc.
    Inventors: Ying Zhang, Steven Sherman
  • Patent number: 8389391
    Abstract: Example embodiments provide triple-gate semiconductor devices isolated by reverse shallow trench isolation (STI) structures and methods for their manufacture. In an example process, stacked layers including a form layer over a dielectric layer can be formed over a semiconductor substrate. One or more trenches can be formed by etching through the stacked layers. The one or more trenches can be filled by an active area material to form one or more active areas, which can be isolated by remaining portions of the dielectric layer. Bodies of the active area material can be exposed by removing the form layer. One or more triple-gate devices can then be formed on the exposed active area material. The example triple-gate semiconductor devices can control the dimensions for the active areas and provide less isolation spacing between the active areas, which optimizes manufacturing efficiency and device integration quality.
    Type: Grant
    Filed: January 29, 2010
    Date of Patent: March 5, 2013
    Assignee: Texas Instruments Incorporated
    Inventors: James J. Chambers, Mark R. Visokay
  • Patent number: 8344411
    Abstract: A light emitting diode package includes a mount, a plurality of LED chips, and a first and a second sealants made of different materials. The mount has an accommodation space and at least one partition member to divide the accommodation space into a plurality of separate cavities. The LED chips are placed in the cavities, and emitting beams of the LED chips exiting through the cavities include a first emission with a first wavelength band and a second emission with a second wavelength band, and the second wavelength band is different to the first one. The first and the second sealants are respectively used for sealing at least one of the LED chips placed in at least one of the cavities through which the first or the second emission exits. The first and the second sealants are separate from each other by the partition member.
    Type: Grant
    Filed: August 19, 2008
    Date of Patent: January 1, 2013
    Assignee: Young Lighting Technology Inc.
    Inventors: Wei-Jen Chou, Sheng-Min Wang, Chiao-Chih Yang
  • Patent number: 8232124
    Abstract: A thin-film transistor array includes an electrically insulating substrate, a plurality of thin-film transistors arranged in a matrix on the substrate, and each including a channel, a source, and a drain each comprised of an oxide-semiconductor film, a pixel electrode integrally formed with the drain, a source signal line through which a source signal is transmitted to a group of thin-film transistors, a gate signal line through which a gate signal is transmitted to a group of thin-film transistors, a source terminal formed at an end of the source signal line, and a gate terminal formed at an end of the gate signal line. The source terminal and the gate terminal are formed in the same layer as a layer in which the channel is formed. The source terminal and the gate terminal have the same electric conductivity as that of the pixel electrode.
    Type: Grant
    Filed: August 25, 2010
    Date of Patent: July 31, 2012
    Assignees: NEC Corporation, NLT Technologies, Ltd.
    Inventors: Kazushige Takechi, Mitsuru Nakata
  • Patent number: 8183638
    Abstract: A dual triggered silicon controlled rectifier (DTSCR) comprises: a semiconductor substrate; a well region, a first N+ diffusion region, a first P+ diffusion region, a second N+ diffusion region, a second P+ diffusion region, a third P+ diffusion region, positioned in one side of the DTSCR and across the well region and semiconductor substrate; a third N+ diffusion region, positioned in another side of the DTSCR and across the well region and the semiconductor substrate; a first gate, positioned above the semiconductor substrate between the first P+ diffusion region and the third P+ diffusion region, utilized as a P-type trigger node to receive a first trigger current or a first trigger voltage; and a second gate, positioned above the well region between the second N+ diffusion region and the third N+ diffusion region, utilized as an N-type trigger node to receive a second trigger current or a second trigger voltage.
    Type: Grant
    Filed: June 8, 2010
    Date of Patent: May 22, 2012
    Assignee: Raydium Semiconductor Corporation
    Inventor: Kei-Kang Hung
  • Patent number: 8089127
    Abstract: A dual triggered silicon controlled rectifier (DTSCR) comprises: a semiconductor substrate; an N-well, a P-well, a first N+ diffusion region and a first P+ diffusion region, a second N+ diffusion region and a second P+ diffusion region, a third P+ diffusion region, positioned in one side of the DTSCR and across the N-well and the P-well; a third N+ diffusion region, positioned in another side of the DTSCR and across the N-well and the P-well; a first gate, positioned above the N-well between the second P+ diffusion region and the third P+ diffusion region, for use as a P-type trigger node to receive a first trigger current or a first trigger voltage; and a second gate, positioned above the P-well between the first N+ diffusion region and the third N+ diffusion region, for use as an N-type trigger node to receive a second trigger current or a second trigger voltage.
    Type: Grant
    Filed: June 9, 2010
    Date of Patent: January 3, 2012
    Assignee: Raydium Semiconductor Corporation
    Inventor: Kei-Kang Hung
  • Patent number: 8034726
    Abstract: By forming a buffer material above differently stressed contact etch stop layers followed by the deposition of a further stress-inducing material, enhanced overall device performance may be accomplished, wherein an undesired influence of the additional stress-inducing layer may be reduced in device regions, for instance, by removing the additional material or by performing a relaxation implantation process. Furthermore, process uniformity during a patterning sequence for forming contact openings may be enhanced by partially removing the additional stress-inducing layer at an area at which a contact opening is to be formed.
    Type: Grant
    Filed: July 1, 2008
    Date of Patent: October 11, 2011
    Assignee: Advanced Micro Devices, Inc.
    Inventors: Ralf Richter, Michael Finken, Joerg Hohage, Heike Salz
  • Patent number: 8022553
    Abstract: A mounting substrate and a method of manufacturing the mounting substrate. The mounting substrate can include an insulation layer, a bonding pad buried in one side of the insulation layer in correspondence with a mounting position of a chip, and a circuit pattern electrically connected to the bonding pad. By utilizing certain embodiments of the invention, the process for stacking a solder resist layer can be omitted, as the bonding pads can be implemented in a form recessed from the surface of the insulation layer. In this way, the manufacturing process can be simplified and manufacturing costs can be reduced. Since the surface of the mounting-substrate on which to mount a chip can be kept flat without any protuberances, the occurrence of voids in the underfill can be minimized. This is correlated to obtaining a high degree of reliability, and leads to a greater likelihood of successful mounting.
    Type: Grant
    Filed: June 5, 2008
    Date of Patent: September 20, 2011
    Assignee: Samsung Electro-Mechanics Co., Ltd.
    Inventors: Jin-Yong Ahn, Chang-Sup Ryu, Byung-Youl Min, Myung-Sam Kang
  • Patent number: 7999292
    Abstract: An image sensor can be formed of a first substrate having a readout circuitry, an interlayer dielectric, and lower lines, and a second substrate having a photodiode. The first substrate comprises a pixel portion and a peripheral portion. The readout circuitry is formed on the pixel portion. The interlayer dielectric is formed on the pixel portion and the peripheral portion. The lower lines pass through the interlayer dielectric to electrically connect with the readout circuitry and the peripheral portion. The photodiode is bonded to the first substrate and etched to correspond to the pixel portion. A transparent electrode is formed on the interlayer dielectric on which the photodiode is formed such that the transparent electrode can be connected with the photodiode and the lower line in the peripheral portion. A first passivation layer can be formed on the transparent electrode. In one embodiment, the first passivation layer includes a trench exposing a portion of the transparent electrode.
    Type: Grant
    Filed: September 5, 2008
    Date of Patent: August 16, 2011
    Assignee: Dongbu Hitek Co., Ltd.
    Inventor: Joon Hwang
  • Patent number: 7994072
    Abstract: By forming two or more individual dielectric layers of high intrinsic stress levels with intermediate interlayer dielectric material, the limitations of respective deposition techniques, such as plasma enhanced chemical vapor deposition, may be respected while nevertheless providing an increased amount of stressed material above a transistor element, even for highly scaled semiconductor devices.
    Type: Grant
    Filed: April 24, 2008
    Date of Patent: August 9, 2011
    Assignee: Advanced Micro Devices, Inc.
    Inventors: Joerg Hohage, Michael Finken, Ralf Richter
  • Patent number: 7994588
    Abstract: Example embodiments provide a nonvolatile memory device that may be integrated through stacking, a stack module, and a method of fabricating the nonvolatile memory device. In the nonvolatile memory device according to example embodiments, at least one bottom gate electrode may be formed on a substrate. At least one charge storage layer may be formed on the at least one bottom gate electrode, and at least one semiconductor channel layer may be formed on the at least one charge storage layer.
    Type: Grant
    Filed: March 5, 2008
    Date of Patent: August 9, 2011
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Huaxiang Yin, Young-soo Park, Sun-Il Kim
  • Patent number: 7989963
    Abstract: A specially designed mask controls the arrangement of conductive materials that form a source and drain of a transistor. Designing the mask can be costly and time-consuming, which means that the testing of a circuit involving a transistor can also be costly, time consuming and a barrier towards efficient circuit development and testing. Accordingly, the present invention provides a pre-fabricated, general-purpose pattern comprising an array of conductive islands. The pattern is used as a source and a drain terminal for the formation of a thin-film transistor and as a conductive source for the formation of other electrical components upon the array.
    Type: Grant
    Filed: March 14, 2008
    Date of Patent: August 2, 2011
    Assignee: Seiko Epson Corporation
    Inventor: Simon Tam
  • Patent number: 7981717
    Abstract: An image sensor includes a pixel array including a photodiode, a peripheral region including a logic circuit, and an isolation region formed between the pixel array and the peripheral region and formed under the peripheral region to electrically isolate the pixel array from the peripheral region.
    Type: Grant
    Filed: September 4, 2008
    Date of Patent: July 19, 2011
    Assignee: Dongbu Hitek Co., Ltd
    Inventor: Su Lim
  • Patent number: 7972929
    Abstract: A method for manufacturing a semiconductor device includes forming an ONO layer in a memory region and forming several gate oxide layer patterns in a logic region, a nitride layer in the logic region can be used as a hard mask, enabling a reduction in the number of masks used. This results in improved manufacturing efficiency and reduced manufacturing costs of a SONOS semiconductor device.
    Type: Grant
    Filed: October 16, 2008
    Date of Patent: July 5, 2011
    Assignee: Dongbu HiTek Co., Ltd.
    Inventor: In-Kun Lee
  • Patent number: 7964501
    Abstract: A method of fabricating a semiconductor device includes providing a semiconductor substrate including a first landing plug and a second landing plug. A bit line is formed over the semiconductor substrate. The bit line is electrically coupled to the first landing plug. A stacked structure of an etch stop film and an interlayer insulating film is deposited over the semiconductor substrate including the bit line. The stacked structure is selectively etched using a contact mask to form a contact hole having an upper part that is wider than a lower part of the contact hole. The contact hole exposes the second landing plug. A contact plug is formed over the contact hole. The contact plug is electrically coupled to the second landing plug.
    Type: Grant
    Filed: December 31, 2007
    Date of Patent: June 21, 2011
    Assignee: Hynix Semiconductor Inc.
    Inventor: Dae In Kang
  • Patent number: 7956948
    Abstract: A pixel structure formed on a substrate and electrically connected with a scan line and a data line, and including a semiconductor pattern and a pixel electrode is provided. The semiconductor pattern includes at least two channel areas, at least one doping area, a source area, and a drain area. The channel areas are located below the scan line and have different aspect ratios. The doping area is connected between the channel areas. The pixel electrode electrically connects the drain area, the source area is connected between one of the channel areas and the data line, and the drain area is connected between the other channel area and the pixel electrode. The scan line has different widths above different channel areas, and a length of each channel area is substantially equal to the width of the scan line.
    Type: Grant
    Filed: October 13, 2009
    Date of Patent: June 7, 2011
    Assignee: Au Optronics Corporation
    Inventors: Chia-Chiang Hsiao, Cheng Lo, Chih-Jen Hu
  • Patent number: 7951675
    Abstract: Memory devices having improved BVdss characteristics and methods of making the memory devices are provided. The memory devices contain bitline dielectrics on bitlines of a semiconductor substrate; first spacers adjacent the side surfaces of the bitline dielectrics and on the upper surface of the semiconductor substrate; a trench in the semiconductor substrate between the first spacers; and second spacers adjacent the side surfaces of the trench. By containing the trench and the first and second spacers between the bitlines, the memory device can improve the electrical isolation between the bitlines, thereby preventing and/or mitigating bitline-to-bitline current leakage and increasing BVdss.
    Type: Grant
    Filed: December 17, 2007
    Date of Patent: May 31, 2011
    Assignee: Spansion LLC
    Inventors: Lei Xue, Aimin Xing, Chih-Yuh Yang, Angela Hui, Chungho Lee
  • Patent number: 7939829
    Abstract: A semiconductor device can easily reduce a leak current which flows when a reversely-staggered-type TFT element in which an active layer is made of polycrystalline semiconductor is turned off. The semiconductor device includes a reversely-staggered-type TFT element in which a semiconductor layer, a source electrode and a drain electrode are arranged on a surface of an insulation film, and a portion of the source electrode and a portion of the drain electrode respectively get over the semiconductor layer.
    Type: Grant
    Filed: August 4, 2008
    Date of Patent: May 10, 2011
    Assignee: Hitachi Displays, Ltd.
    Inventor: Takeshi Sakai
  • Patent number: 7939348
    Abstract: A testing structure, and method of using the testing structure, where the testing structure comprised of at least one of eight test structures that exhibits a discernable defect characteristic upon voltage contrast scanning when it has at least one predetermined structural defect. The eight test structures being: 1) having an Active Area (AA)/P-N junction leakage; 2) having an isolation region to ground; 3) having an AA/P-N junction and isolation region; 4) having a gate dielectric leakage and gate to isolation region to ground; 5) having a gate dielectric leakage through AA/P-N junction to ground leakage; 6) having a gate dielectric to ground and gate/one side isolation region leakage to ground; 7) having an oversized gate dielectric through AA/P-N junction to ground leakage; and 8) having an AA/P-N junction leakage gate dielectric leakage.
    Type: Grant
    Filed: August 28, 2007
    Date of Patent: May 10, 2011
    Assignee: Chartered Semiconductor Manufacturing, Ltd.
    Inventors: Victor Seng Keong Lim, Jeffrey Lam