Abstract: A method of forming a non-volatile memory device may include forming a fin protruding from a substrate, forming a tunnel insulating layer on portions of the fin, and forming a floating gate on the tunnel insulting layer so that the tunnel insulating layer is between the floating gate and the fin. A dielectric layer may be formed on the floating gate so that the floating gate is between the dielectric layer and the fin, and a control gate electrode may be formed on the dielectric layer so that the dielectric layer is between the control gate and the fin. Related devices are also discussed.

Abstract: A pixel structure formed on a substrate and electrically connected with a scan line and a data line, and including a semiconductor pattern and a pixel electrode is provided. The semiconductor pattern includes at least two channel areas, at least one doping area, a source area, and a drain area. The channel areas are located below the scan line and have different aspect ratios. The doping area is connected between the channel areas. The pixel electrode electrically connects the drain area, the source area is connected between one of the channel areas and the data line, and the drain area is connected between the other channel area and the pixel electrode. The scan line has different widths above different channel areas, and a length of each channel area is substantially equal to the width of the scan line.

Abstract: A lateral DMOS device includes a body diode region and a protective diode region. The body diode region has a second conduction type well region formed in a first conduction type semiconductor substrate, the second conduction type well region including a first conduction type body region and a drain region each formed in the second conduction type well region, a first conduction type impurity region and a source region formed in the first conduction type body region, and a gate insulating film and a gate electrode formed on the first conduction type semiconductor substrate. The first conduction type body region and the second conduction type well region compose a body diode. In the protective diode region, the first conduction type impurity region is formed at a prescribed interval and the first conduction type body region and the second conduction type well region compose a protective diode.

Abstract: A solder attach film includes a first cover film, a flux layer, a solder layer, and a second cover film, and it can be treated or kept in a roll shape. A solder ball forming method using the solder attach film includes preparing a semiconductor package or a semiconductor die, adhering the solder attach film, gridding, and reflowing. In the solder attach film adhering operation, the first cover film and the second cover film are removed, and the flux layer is adhered to electrically conductive pads of the semiconductor package or the semiconductor die. Subsequently, in the reflowing operation, the flux layer is volatilized and removed, and the solder layer is fused and fixed to the electrically conductive pads, so that solder balls are formed.

Abstract: Methods of fabricating micro-electromechanical system devices from complementary metal oxide semiconductors (CMOS) are provided.

Abstract: A memory element having a storage layer containing an ion source layer between a first electrode and a second electrode is provided. The memory element stores information by changing an electrical characteristic of the storage layer, wherein at least Zr is added to the ion source layer as a metal element together with an ion conducting material.

Abstract: A device is disclosed which includes, in one illustrative example, an integrated circuit die having an active surface and a molded body extending around a perimeter of the die, the molded body having lips that are positioned above a portion of the active surface of the die. Another illustrative example includes an integrated circuit die having an active surface, a molded body extending around a perimeter of the die and a CTE buffer material formed around at least a portion of the perimeter of the die adjacent the active surface of the die, wherein the CTE buffer material is positioned between a portion of the die and a portion of the molded body and wherein the CTE buffer material has a coefficient of thermal expansion that is intermediate a coefficient of thermal expansion for the die and a coefficient of thermal expansion for the molded body.

Abstract: Exemplary embodiments provide triple-gate semiconductor devices isolated by reverse STI structures and methodologies for their manufacture. In an exemplary process, stacked layers including a form layer over a dielectric layer can be formed over a semiconductor substrate. One or more trenches can be formed by etching through the stacked layers. The one or more trenches can be filled by an active area material to form one or more active areas, which can be isolated by remaining portions of the dielectric layer. Bodies of the active area material can be exposed by removing the form layer. One or more triple-gate devices can then be formed on the exposed active area material. The exemplary triple-gate semiconductor devices can control the dimensions for the active areas and provide less isolation spacing between the active areas, which optimizes manufacturing efficiency and device integration quality.

Abstract: Provided are a power module having a stacked flip-chip and a method of fabricating the power module. The power module includes a lead frame; a control device part including a control device chip; a power device part including a power device chip and being electrically connected to the lead frame; and an interconnecting substrate of which the control and power device parts are respectively disposed at upper and lower portions, and each of the control and power device chips may be attached to one of the lead frame and the interconnecting substrate using a flip-chip bonding method.

Abstract: A MIM capacitor includes a lower electrode disposed on a semiconductor substrate. A dielectric layer is disposed on the lower electrode to completely cover an exposed surface of the lower electrode. An upper electrode is disposed on the dielectric layer. A method for forming a MIM capacitor includes forming a lower electrode on a semiconductor substrate. A dielectric layer and an upper metal layer are formed on an entire surface of the substrate to cover the lower electrode. The dielectric and upper metal layers are patterned on the lower electrode.

Abstract: A capacitor can prevent a problem of step coverage in semiconductor device, caused by a thickness of an insulator film and an upper metal film included a metal-insulator-metal (MIM) capacitor, between the MIM capacitor region and its circumferential region. A capacitor in a semiconductor device includes a first metal film provided with a recess having a predetermined depth over a semiconductor substrate. An insulator film and a second metal film may be formed in the recess with a thickness corresponding to a depth of the recess. The insulator and second metal films are disconnected from an inner lateral side of the recess. A dielectric film including a plurality of plugs is in contact with the first and second metal films and the insulator film. A plurality of metal electrodes is in contact with the plugs over the dielectric film.

Abstract: This semiconductor device includes a first conductivity type first semiconductor layer formed on the upper surface of a substrate, a first conductivity type second semiconductor layer formed on the first semiconductor layer, a first conductivity type third semiconductor layer formed on the second semiconductor layer, a second conductivity type fourth semiconductor layer formed on the third semiconductor layer, a first conductivity type fifth semiconductor layer formed on the fourth semiconductor layer and an electrode formed in a trench, so provided as to reach the second semiconductor layer through at least the fifth semiconductor layer, the fourth semiconductor layer and the third semiconductor layer, in contact with an insulating film, while the upper surface of the second semiconductor layer is arranged upward beyond the lower end of the electrode.

Abstract: The present invention in one embodiment provides a method of forming an interconnect comprising, providing a interlevel dielectric layer atop a substrate, the interlevel dielectric layer including at least one tungsten (W) stud extending from an upper surface of the interlevel dielectric to the substrate; recessing an upper surface of the at least one tungsten (W) stud below the upper surface of the interlevel dielectric to provide at least one recessed tungsten (W) stud; forming a first low-k dielectric layer atop the upper surface of the interlevel dielectric layer and the at least one recessed tungsten (W) stud; forming a opening through the first low-k dielectric layer to expose an upper surface of the at least one recessed tungsten stud; and filling the opening with copper (Cu).

Abstract: On a mask placement-side surface of a semiconductor wafer in which a plurality of semiconductor devices are formed, a mask is placed, while dicing lines for dicing the semiconductor wafer into the respective separate semiconductor devices are defined and a surface of a flawed semiconductor device among the respective semiconductor devices is partially exposed, and then plasma etching is applied to the mask placement-side surface of the semiconductor wafer so as to dice the semiconductor wafer into the respective semiconductor devices along the defined dicing lines, and an exposed portion of the flawed semiconductor device is removed so as to form a removed portion as a flawed semiconductor device distinguishing mark.

Abstract: A fully-silicided gate electrode is formed from silicon and a metal by depositing at least two layers of silicon with the metal layer therebetween. One of the silicon layers may be amorphous silicon whereas the other silicon layer may be polycrystalline silicon. The silicon between the metal layer and the gate dielectric may be deposited in two layers having different crystallinities. This process enables greater control to be exercised over the phase of the silicide resulting from this silicidation process.

Abstract: A method of packaging an integrated circuit die having a plurality of I/O pads is described. The method includes positioning the die within a die attach area of a first leadframe that includes a plurality of first leads. The method also includes positioning a second leadframe that includes a plurality of second leads over the first leadframe. The method further includes electrically connecting each of the second leads to both an associated I/O pad and a first lead.

Abstract: A semiconductor device comprises: a MOS transistor including: a semiconductor substrate; a source region, formed in the semiconductor substrate, that comprises an impurity of a first conductive type; a drain region, formed in the semiconductor substrate, that comprises an impurity of the first conductive type; and a gate electrode, formed through a gate insulating film on the semiconductor substrate, between the source region and the drain region; an impurity region of the first conductive type formed in the semiconductor substrate; an impurity region of a second conductive type to be opposite to the first conductive type formed in the semiconductor substrate; and a wiring provided to connect each of the impurity region of the first conductive type and the impurity region of the second conductive type to the gate electrode.

Abstract: Provided is a manufacturing method of a CCD solid-state imaging device having such an impurity concentration distribution with which shading is reduced and formation of a buried channel endowed with a large saturation signal charge amount is made possible. The manufacturing method includes: an oxide layer forming step of forming an oxide layer (12) on a semiconductor substrate (11); an ion implantation step of performing ion implantation through the oxide layer (12) to the semiconductor substrate (11) thereby forming a well in a position corresponding to a charge transfer portion; and an insulation layer forming step of performing insulation layer forming processing to the oxide layer (12) having undergone the ion implantation step, at least in a position corresponding to the well.

Abstract: A method for fabricating a gate structure is provided. A pad oxide layer, a pad conductive layer and a dielectric layer are sequentially formed over a substrate. A portion of the dielectric layer is removed to form an opening exposing a portion of the pad conductive layer. A liner conductive layer is formed to cover the dielectric layer and the pad conductive layer. A portion of the liner conductive layer and a portion of the pad conductive layer are removed to expose a surface of the pad oxide layer to form a conductive spacer. The pad oxide layer is removed and a gate oxide layer is formed over the substrate. A first gate conductive layer and a second gate conductive layer are sequentially formed over the gate oxide layer. A portion of the gate oxide layer is removed and a cap layer to fill the opening.