Patents by Inventor Aaron T. Radomski

Aaron T. Radomski has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20140118031
    Abstract: A radio frequency (RF) generation module includes a power control module that receives first and second desired amplitudes of an output of the RF generation module in first and second respective states, and that outputs, based on the first and second desired amplitudes, input power setpoints corresponding to a transition from the first state to the second state. A frequency control module receives the input power setpoints and outputs frequency setpoints corresponding to the input power setpoints. A pulse shaping module receives the input power setpoints, the frequency setpoints, and an indication of when to transition from the first state to the second state, and transitions the output of the RF generation module from the first state to the second state based on the input power setpoints, the frequency setpoints, and the indication.
    Type: Application
    Filed: October 30, 2012
    Publication date: May 1, 2014
    Applicant: MKS INSTRUMENTS, INC.
    Inventors: Amish RUGHOONUNDON, Larry J. FISK, II, Aaron T. RADOMSKI
  • Publication number: 20100201371
    Abstract: An arc detection system includes a radio frequency (RF) signal probe that senses a RF signal at an input of a RF plasma chamber and that generates a signal based on at least one of the voltage, current, and power of the RF signal. A signal analyzer receives the signal, monitors the signal for frequency components that have a frequency greater than or equal to a fundamental frequency of the RF signal, and generates an output signal based on the frequency components. The output signal indicates that an arc is occurring in the RF plasma chamber.
    Type: Application
    Filed: April 21, 2010
    Publication date: August 12, 2010
    Applicant: MKS INSTRUMENTS, INC.
    Inventors: John Valcore, Yufeng Han, Jonathan Smyka, Salvatore Polizzo, Aaron T. Radomski
  • Patent number: 7728602
    Abstract: An arc detection system includes a radio frequency (RF) signal probe that senses a RF signal at an input of a RF plasma chamber and that generates a signal based on at least one of the voltage, current, and power of the RF signal. A signal analyzer receives the signal, monitors the signal for frequency components that have a frequency greater than or equal to a fundamental frequency of the RF signal, and generates an output signal based on the frequency components. The output signal indicates that an arc is occurring in the RF plasma chamber.
    Type: Grant
    Filed: February 16, 2007
    Date of Patent: June 1, 2010
    Assignee: MKS Instruments, Inc.
    Inventors: John Valcore, Yufeng Han, Jonathan Smyka, Salvatore Polizzo, Aaron T. Radomski
  • Publication number: 20080197854
    Abstract: An arc detection system includes a radio frequency (RF) signal probe that senses a RF signal at an input of a RF plasma chamber and that generates a signal based on at least one of the voltage, current, and power of the RF signal. A signal analyzer receives the signal, monitors the signal for frequency components that have a frequency greater than or equal to a fundamental frequency of the RF signal, and generates an output signal based on the frequency components. The output signal indicates that an arc is occurring in the RF plasma chamber.
    Type: Application
    Filed: February 16, 2007
    Publication date: August 21, 2008
    Applicant: MKS INSTRUMENTS, INC.
    Inventors: John Valcore, Yufeng Han, Jonathan Smyka, Salvatore Polizzo, Aaron T. Radomski
  • Patent number: 6868310
    Abstract: A predictive failure system for a power delivery system. The power delivery system includes a number of modules which are interconnected to a system monitor. The system monitor collects data on operating parameters of each module and environmental parameters. The system monitor analyzes the data in order to define conditions based upon the parameters. The parameters are then applied against a set of rules to determine whether a warning or a fault indicator should be generated. The system monitor may be implemented locally as part of the power delivery system or may be located remotely from the power delivery system to enable off site data collection and analysis.
    Type: Grant
    Filed: April 6, 2001
    Date of Patent: March 15, 2005
    Assignee: ENI Technology, Inc.
    Inventors: Kevin P. Nasman, Aaron T. Radomski
  • Patent number: 6778921
    Abstract: An industrial power delivery system configured in a modular architecture and having a plurality of modules. The modules interconnect via digital communication links and exchange data using a digital format. The modularity of the system enables the system to be scaled to vary future content of the product.
    Type: Grant
    Filed: April 6, 2001
    Date of Patent: August 17, 2004
    Assignee: ENI Technology, Inc.
    Inventors: Anthony R. A. Keane, Aaron T. Radomski, William R. Pulhamus, Jr.
  • Patent number: 6700092
    Abstract: A method of controlling an output of a generator is provided. The output provides an output signal having a settling time to a load having an impedance. The settling time of the output signal is determined. The output signal is amplitude modulated with a modulation waveform. A sense signal is generated that is representative of the modulated output signal. The sense signal is sampled at a sampling time based upon the settling time of the output signal. A digital representation of the sampled sense signal is generated. The amplitude modulation of the output is controlled based upon the digital representation of the sampled sense signal.
    Type: Grant
    Filed: August 23, 2002
    Date of Patent: March 2, 2004
    Assignee: ENI Technology, Inc.
    Inventors: Daniel J. Vona, Jr., Aaron T. Radomski, Kevin P. Nasman, William R. Pulhamus, Jr.
  • Publication number: 20040015245
    Abstract: An industrial power delivery system configured in a modular architecture and having a plurality of modules. The modules interconnect via digital communication links and exchange data using a digital format. The modularity of the system enables the system to be scaled to vary future content of the product.
    Type: Application
    Filed: April 6, 2001
    Publication date: January 22, 2004
    Inventors: Anthony R. A. Keane, Aaron T. Radomski, William R. Pulhamus
  • Publication number: 20030024907
    Abstract: A method of controlling an output of a generator is provided. The output provides an output signal having a settling time to a load having an impedance. The settling time of the output signal is determined. The output signal is amplitude modulated with a modulation waveform. A sense signal is generated that is representative of the modulated output signal. The sense signal is sampled at a sampling time based upon the settling time of the output signal. A digital representation of the sampled sense signal is generated. The amplitude modulation of the output is controlled based upon the digital representation of the sampled sense signal.
    Type: Application
    Filed: August 23, 2002
    Publication date: February 6, 2003
    Inventors: Daniel J. Vona, Aaron T. Radomski, Kevin P. Nasman, William R. Pulhamus
  • Publication number: 20020198627
    Abstract: A predictive failure system for a power delivery system. The power delivery system includes a number of modules which are interconnected to a system monitor. The system monitor collects data on operating parameters of each module and environmental parameters. The system monitor analyzes the data in order to define conditions based upon the parameters. The parameters are then applied against a set of rules to determine whether a warning or a fault indicator should be generated. The system monitor may be implemented locally as part of the power delivery system or may be located remotely from the power delivery system to enable off site data collection and analysis.
    Type: Application
    Filed: April 6, 2001
    Publication date: December 26, 2002
    Inventors: Kevin P. Nasman, Aaron T. Radomski
  • Publication number: 20020144983
    Abstract: A method of controlling an output of a generator is provided. The output provides an output signal having a settling time to a load having an impedance. The settling time of the output signal is determined. The output signal is amplitude modulated with a modulation waveform. A sense signal is generated that is representative of the modulated output signal. The sense signal is sampled at a sampling time based upon the settling time of the output signal. A digital representation of the sampled sense signal is generated. The amplitude modulation of the output is controlled based upon the digital representation of the sampled sense signal.
    Type: Application
    Filed: April 6, 2001
    Publication date: October 10, 2002
    Inventors: Daniel J. Vona, Aaron T. Radomski, Kevin P. Nasman, William R. Pulhamus
  • Patent number: 6459067
    Abstract: A method of controlling an output of a generator is provided. The output provides an output signal having a settling time to a load having an impedance. The settling time of the output signal is determined. The output signal is amplitude modulated with a modulation waveform. A sense signal is generated that is representative of the modulated output signal. The sense signal is sampled at a sampling time based upon the settling time of the output signal. A digital representation of the sampled sense signal is generated. The amplitude modulation of the output is controlled based upon the digital representation of the sampled sense signal.
    Type: Grant
    Filed: April 6, 2001
    Date of Patent: October 1, 2002
    Assignee: ENI Technology, Inc.
    Inventors: Daniel J. Vona, Jr., Aaron T. Radomski, Kevin P. Nasman, William R. Pulhamus, Jr.
  • Patent number: 6417732
    Abstract: A radio frequency (RF) power generator system includes a power generator that generates a RF power signal that is output to a load. The RF generator generates a forward power feedback signal and a reverse power feedback signal. A controller receives the forward power feedback signal and the reverse power feedback signal. The controller generates a setpoint signal that is output to the power generator. A setpoint modifier receives the forward feedback signal, the reverse feedback signal and an external setpoint signal. The setpoint modifier calculates a forward power limit based on the forward and reverse power feedback signals. The setpoint modifier and outputs a modified setpoint signal to the controller based on one of the forward power limit and the external setpoint signal. The setpoint modifier and the controller can be integrated.
    Type: Grant
    Filed: April 6, 2001
    Date of Patent: July 9, 2002
    Assignee: ENI Technology, Inc.
    Inventors: Aaron T. Radomski, Kevin P. Nasman