Patents by Inventor Aaron T. Radomski
Aaron T. Radomski has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Publication number: 20160163514Abstract: A repeating setpoint generator module selectively varies a setpoint for an output parameter according to a predetermined pattern that repeats during successive time intervals. A closed-loop module, during a first one of the time intervals, generates N closed-loop values based on N differences between (i) N values of the setpoint at N times during the first one of the time intervals and (ii) N measurements of the output parameter at the N times during the first one of the time intervals, respectively. An adjusting module, during the first one of the time intervals, generates N adjustment values based on N differences between (i) N values of the setpoint at the N times during a second one of the time intervals and (ii) N measurements of the output parameter at the N times during the second one of the time intervals, respectively.Type: ApplicationFiled: November 30, 2015Publication date: June 9, 2016Inventors: Larry J. FISK, II, Aaron T. RADOMSKI, Jonathan SMYKA
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Patent number: 9214909Abstract: A scalable radio frequency (RF) generator system including at least one power supply, at least one power amplifier receiving input from the power supply, and a power supply control module, and a system controller. Output from the at least one power supply can be combined and applied to each of the power amplifiers. Output form each of the at least one power amplifiers can be combined to generate a single RF signal. A compensator module controls operation of the at least one power supply. The compensator module, system control module, and power supply controller communicate in a daisy chain configuration.Type: GrantFiled: July 27, 2006Date of Patent: December 15, 2015Assignee: MKS Instruments, Inc.Inventors: Aaron T. Radomski, Jonathan Smyka, Daniel J. Lincoln, Yogendra Chawla, David J. Coumou, Vadim Lubomirsky
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Patent number: 9136093Abstract: A radio frequency (RF) system is disclosed. The RF system includes an RF sensor, an analog to digital converter (ADC) module, a processing module, and a synchronization module. The RF sensor measures a parameter of an RF output and generates an RF signal based on the parameter. The ADC module converts samples of the RF signal into digital values. The processing module generates processed values based on the digital values. The synchronization module outputs one of the processed values in response to a transition in the RF output.Type: GrantFiled: February 7, 2013Date of Patent: September 15, 2015Assignee: MKS Instruments, Inc.Inventors: David J. Coumou, Larry J. Fisk, II, Aaron T. Radomski, Jaehyun Kim, Sang-Won Lee, Jonathan Smyka
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Patent number: 9041480Abstract: A radio frequency (RF) generation system includes an impedance determination module that receives an RF voltage and an RF current. The impedance determination module further determines an RF generator impedance based on the RF voltage and the RF current. The RF generation system also includes a control module that determines a plurality of electrical values based on the RF generator impedance. The matching module further matches an impedance of a load based on the RF generator impedance and the plurality of electrical components. The matching module also determines a 2 port transfer function based on the plurality of electrical values. The RF generation system also includes a virtual sensor module that estimates a load voltage, a load current, and a load impedance based on the RF voltage, the RF generator, the RF generator impedance, and the 2 port transfer function.Type: GrantFiled: March 15, 2013Date of Patent: May 26, 2015Assignee: MKS Instruments, Inc.Inventors: Aaron T. Radomski, Dennis M. Brown, Nicholas Nelson
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Patent number: 8890537Abstract: An arc detection system includes a radio frequency (RF) signal probe that senses a RF signal at an input of a RF plasma chamber and that generates a signal based on at least one of the voltage, current, and power of the RF signal. A signal analyzer receives the signal, monitors the signal for frequency components that have a frequency greater than or equal to a fundamental frequency of the RF signal, and generates an output signal based on the frequency components. The output signal indicates that an arc is occurring in the RF plasma chamber.Type: GrantFiled: April 21, 2010Date of Patent: November 18, 2014Assignee: MKS Instruments, Inc.Inventors: John Valcore, Jr., Yufeng Han, Jonathan Smyka, Salvatore Polizzo, Aaron T. Radomski
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Publication number: 20140266492Abstract: A radio frequency (RF) generation system includes an impedance determination module that receives an RF voltage and an RF current. The impedance determination module further determines an RF generator impedance based on the RF voltage and the RF current. The RF generation system also includes a control module that determines a plurality of electrical values based on the RF generator impedance. The matching module further matches an impedance of a load based on the RF generator impedance and the plurality of electrical components. The matching module also determines a 2 port transfer function based on the plurality of electrical values. The RF generation system also includes a virtual sensor module that estimates a load voltage, a load current, and a load impedance based on the RF voltage, the RF generator, the RF generator impedance, and the 2 port transfer function.Type: ApplicationFiled: March 15, 2013Publication date: September 18, 2014Applicant: MKS INSTRUMENTS, INC.Inventors: Aaron T. RADOMSKI, Dennis M. BROWN, Nicholas NELSON
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Publication number: 20140218076Abstract: A radio frequency (RF) system is disclosed. The RF system includes an RF sensor, an analog to digital converter (ADC) module, a processing module, and a synchronization module. The RF sensor measures a parameter of an RF output and generates an RF signal based on the parameter. The ADC module converts samples of the RF signal into digital values. The processing module generates processed values based on the digital values. The synchronization module outputs one of the processed values in response to a transition in the RF output.Type: ApplicationFiled: February 7, 2013Publication date: August 7, 2014Applicant: MKS INSTRUMENTS, INC.Inventors: David J. COUMOU, Larry J. FISK, II, Aaron T. RADOMSKI, Jaehyun KIM, Sang-Won LEE, Jonathan SMYKA
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Patent number: 8736377Abstract: A radio frequency (RF) generation module includes a power control module that receives first and second desired amplitudes of an output of the RF generation module in first and second respective states, and that outputs, based on the first and second desired amplitudes, input power setpoints corresponding to a transition from the first state to the second state. A frequency control module receives the input power setpoints and outputs frequency setpoints corresponding to the input power setpoints. A pulse shaping module receives the input power setpoints, the frequency setpoints, and an indication of when to transition from the first state to the second state, and transitions the output of the RF generation module from the first state to the second state based on the input power setpoints, the frequency setpoints, and the indication.Type: GrantFiled: October 30, 2012Date of Patent: May 27, 2014Assignee: MKS Instruments, Inc.Inventors: Amish Rughoonundon, Larry J. Fisk, II, Aaron T. Radomski
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Publication number: 20140118031Abstract: A radio frequency (RF) generation module includes a power control module that receives first and second desired amplitudes of an output of the RF generation module in first and second respective states, and that outputs, based on the first and second desired amplitudes, input power setpoints corresponding to a transition from the first state to the second state. A frequency control module receives the input power setpoints and outputs frequency setpoints corresponding to the input power setpoints. A pulse shaping module receives the input power setpoints, the frequency setpoints, and an indication of when to transition from the first state to the second state, and transitions the output of the RF generation module from the first state to the second state based on the input power setpoints, the frequency setpoints, and the indication.Type: ApplicationFiled: October 30, 2012Publication date: May 1, 2014Applicant: MKS INSTRUMENTS, INC.Inventors: Amish RUGHOONUNDON, Larry J. FISK, II, Aaron T. RADOMSKI
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Publication number: 20100201371Abstract: An arc detection system includes a radio frequency (RF) signal probe that senses a RF signal at an input of a RF plasma chamber and that generates a signal based on at least one of the voltage, current, and power of the RF signal. A signal analyzer receives the signal, monitors the signal for frequency components that have a frequency greater than or equal to a fundamental frequency of the RF signal, and generates an output signal based on the frequency components. The output signal indicates that an arc is occurring in the RF plasma chamber.Type: ApplicationFiled: April 21, 2010Publication date: August 12, 2010Applicant: MKS INSTRUMENTS, INC.Inventors: John Valcore, Yufeng Han, Jonathan Smyka, Salvatore Polizzo, Aaron T. Radomski
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Patent number: 7728602Abstract: An arc detection system includes a radio frequency (RF) signal probe that senses a RF signal at an input of a RF plasma chamber and that generates a signal based on at least one of the voltage, current, and power of the RF signal. A signal analyzer receives the signal, monitors the signal for frequency components that have a frequency greater than or equal to a fundamental frequency of the RF signal, and generates an output signal based on the frequency components. The output signal indicates that an arc is occurring in the RF plasma chamber.Type: GrantFiled: February 16, 2007Date of Patent: June 1, 2010Assignee: MKS Instruments, Inc.Inventors: John Valcore, Yufeng Han, Jonathan Smyka, Salvatore Polizzo, Aaron T. Radomski
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Publication number: 20080197854Abstract: An arc detection system includes a radio frequency (RF) signal probe that senses a RF signal at an input of a RF plasma chamber and that generates a signal based on at least one of the voltage, current, and power of the RF signal. A signal analyzer receives the signal, monitors the signal for frequency components that have a frequency greater than or equal to a fundamental frequency of the RF signal, and generates an output signal based on the frequency components. The output signal indicates that an arc is occurring in the RF plasma chamber.Type: ApplicationFiled: February 16, 2007Publication date: August 21, 2008Applicant: MKS INSTRUMENTS, INC.Inventors: John Valcore, Yufeng Han, Jonathan Smyka, Salvatore Polizzo, Aaron T. Radomski
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Patent number: 6868310Abstract: A predictive failure system for a power delivery system. The power delivery system includes a number of modules which are interconnected to a system monitor. The system monitor collects data on operating parameters of each module and environmental parameters. The system monitor analyzes the data in order to define conditions based upon the parameters. The parameters are then applied against a set of rules to determine whether a warning or a fault indicator should be generated. The system monitor may be implemented locally as part of the power delivery system or may be located remotely from the power delivery system to enable off site data collection and analysis.Type: GrantFiled: April 6, 2001Date of Patent: March 15, 2005Assignee: ENI Technology, Inc.Inventors: Kevin P. Nasman, Aaron T. Radomski
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Patent number: 6778921Abstract: An industrial power delivery system configured in a modular architecture and having a plurality of modules. The modules interconnect via digital communication links and exchange data using a digital format. The modularity of the system enables the system to be scaled to vary future content of the product.Type: GrantFiled: April 6, 2001Date of Patent: August 17, 2004Assignee: ENI Technology, Inc.Inventors: Anthony R. A. Keane, Aaron T. Radomski, William R. Pulhamus, Jr.
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Patent number: 6700092Abstract: A method of controlling an output of a generator is provided. The output provides an output signal having a settling time to a load having an impedance. The settling time of the output signal is determined. The output signal is amplitude modulated with a modulation waveform. A sense signal is generated that is representative of the modulated output signal. The sense signal is sampled at a sampling time based upon the settling time of the output signal. A digital representation of the sampled sense signal is generated. The amplitude modulation of the output is controlled based upon the digital representation of the sampled sense signal.Type: GrantFiled: August 23, 2002Date of Patent: March 2, 2004Assignee: ENI Technology, Inc.Inventors: Daniel J. Vona, Jr., Aaron T. Radomski, Kevin P. Nasman, William R. Pulhamus, Jr.
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Publication number: 20040015245Abstract: An industrial power delivery system configured in a modular architecture and having a plurality of modules. The modules interconnect via digital communication links and exchange data using a digital format. The modularity of the system enables the system to be scaled to vary future content of the product.Type: ApplicationFiled: April 6, 2001Publication date: January 22, 2004Inventors: Anthony R. A. Keane, Aaron T. Radomski, William R. Pulhamus
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Publication number: 20030024907Abstract: A method of controlling an output of a generator is provided. The output provides an output signal having a settling time to a load having an impedance. The settling time of the output signal is determined. The output signal is amplitude modulated with a modulation waveform. A sense signal is generated that is representative of the modulated output signal. The sense signal is sampled at a sampling time based upon the settling time of the output signal. A digital representation of the sampled sense signal is generated. The amplitude modulation of the output is controlled based upon the digital representation of the sampled sense signal.Type: ApplicationFiled: August 23, 2002Publication date: February 6, 2003Inventors: Daniel J. Vona, Aaron T. Radomski, Kevin P. Nasman, William R. Pulhamus
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Publication number: 20020198627Abstract: A predictive failure system for a power delivery system. The power delivery system includes a number of modules which are interconnected to a system monitor. The system monitor collects data on operating parameters of each module and environmental parameters. The system monitor analyzes the data in order to define conditions based upon the parameters. The parameters are then applied against a set of rules to determine whether a warning or a fault indicator should be generated. The system monitor may be implemented locally as part of the power delivery system or may be located remotely from the power delivery system to enable off site data collection and analysis.Type: ApplicationFiled: April 6, 2001Publication date: December 26, 2002Inventors: Kevin P. Nasman, Aaron T. Radomski
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Publication number: 20020144983Abstract: A method of controlling an output of a generator is provided. The output provides an output signal having a settling time to a load having an impedance. The settling time of the output signal is determined. The output signal is amplitude modulated with a modulation waveform. A sense signal is generated that is representative of the modulated output signal. The sense signal is sampled at a sampling time based upon the settling time of the output signal. A digital representation of the sampled sense signal is generated. The amplitude modulation of the output is controlled based upon the digital representation of the sampled sense signal.Type: ApplicationFiled: April 6, 2001Publication date: October 10, 2002Inventors: Daniel J. Vona, Aaron T. Radomski, Kevin P. Nasman, William R. Pulhamus
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Patent number: 6459067Abstract: A method of controlling an output of a generator is provided. The output provides an output signal having a settling time to a load having an impedance. The settling time of the output signal is determined. The output signal is amplitude modulated with a modulation waveform. A sense signal is generated that is representative of the modulated output signal. The sense signal is sampled at a sampling time based upon the settling time of the output signal. A digital representation of the sampled sense signal is generated. The amplitude modulation of the output is controlled based upon the digital representation of the sampled sense signal.Type: GrantFiled: April 6, 2001Date of Patent: October 1, 2002Assignee: ENI Technology, Inc.Inventors: Daniel J. Vona, Jr., Aaron T. Radomski, Kevin P. Nasman, William R. Pulhamus, Jr.