Abstract: The invention relates to an improved EUV generating device having coated supply pipes for the liquid tin, in order to provide an extreme UV radiation generating device which is capable of providing a less contaminated flow of tin to and from a plasma generating part.

Abstract: The present disclosure relates to polymer particles comprising a polymer matrix having a coating of an inorganic semimetal oxide or metal oxide, wherein the polymer matrix has at least one first functional group A and at least one second functional group B, both functional groups A and B being able to enter into at least one covalent bond with one another, functional group A being selected from the group consisting of an azide group, C—C double bond, C—C triple bond, aldehyde group, ketone group, imine group, thioketone group and thiol group, and functional group B being selected from the group consisting of a C—C double bond, C—C triple bond, C—N triple bond, diene group, thiol group and amine group.

Abstract: The present invention relates to a method of cleaning and after treatment of optical surfaces in an irradiation unit, said irradiation unit comprising a radiation source (1, 31) emitting EUV-radiation and/or soft X-rays, a first volume (40) following said radiation source (1, 31) and containing first optical components (3, 33) with said optical surfaces, and a second volume (41) following said first volume (40) and containing second optical components (38). The method comprises at least one cleaning step in which a first gas or gas mixture is brought into contact with said optical surfaces, thereby forming volatile compounds with contaminations deposited on said optical surfaces, wherein said compounds are pumped out of the first volume (40) together with the first gas or gas mixture.

Abstract: The present invention provides a method of cleaning optical surfaces in an irradiation unit in order to remove contaminations deposited on said optical surfaces. The method includes a cleaning step in which a first gas or gas mixture is brought into contact with said optical surfaces thereby forming a volatile compound with a first portion of said contaminations. In an operation pause of the irradiation unit prior to the cleaning step, a pretreatment step is performed, in which a second gas or gas mixture is brought into contact with said optical surfaces. Said second gas or gas mixture is selected to react with a second portion of said contaminations different from said first portion to form a reaction product, which is able to form a volatile compound with said first gas or gas mixture.

Abstract: The present invention relates to a method of cleaning a surface at least partly covered with contaminant or undesired material by applying atomic hydrogen. The invention also proposes an irradiation unit adapted to perform the cleaning method. In the present method the atomic hydrogen is generated by dissociation of molecular hydrogen directed to a surface containing catalytic material, which causes the dissociation of at least a part of the molecular hydrogen to atomic hydrogen. The surface with the catalytic material is arranged close to the surface to be cleaned and is dimensioned such that its total surface area is at least twice the surface area of the to be cleaned surface region. The method allows for the cleaning of the surface region in a constructive simple and efficient manner.

Abstract: The invention relates to an improved EUV generating device having a contamination captor for “catching” contamination and/or debris caused by corrosion or otherwise unwanted reactions of the tin bath.

Abstract: The invention relates to an improved EUV generating device having coated supply pipes for the liquid tin, in order to provide an extreme UV radiation generating device which is capable of providing a less contaminated flow of tin to and from a plasma generating part.

Abstract: A method of cleaning at least one optical component of at least one irradiation device is described, which device comprises at least one radiation source in a vacuum chamber, which source generates in particular extreme ultraviolet and/or soft X-ray radiation whose rays are guided via the optical component onto a workpiece to be treated, during which said optical component is at least partly polluted because of an inorganic substance introduced by the radiation source. It is proposed that at least one reaction partner (124) that is substantially translucent or transparent to the rays (118) be introduced via a feeder device (126) in dependence on the prevailing reaction conditions, which reaction partner (124) reacts chemically with the polluting deposits (128) so as to remove them from the optical component (110).

Abstract: The invention relates to a cell culture system comprising a three-dimensional, biocompatible frame structure and biocompatible nanoparticles, a method for the cultivation of cells, and the preparation of cells or cell products and tissues per se by means of such a cell culture system.

Abstract: The present invention relates to a method of cleaning and after treatment of optical surfaces in an irradiation unit, said irradiation unit comprising a radiation source (1, 31) emitting EUV-radiation and/or soft X-rays, a first volume (40) following said radiation source (1, 31) and containing first optical components (3, 33) with said optical surfaces, and a second volume (41) following said first volume (40) and containing second optical components (38). The method comprises at least one cleaning step in which a first gas or gas mixture is brought into contact with said optical surfaces, thereby forming volatile compounds with contaminations deposited on said optical surfaces, wherein said compounds are pumped out of the first volume (40) together with the first gas or gas mixture.

Abstract: The present invention provides a method of cleaning optical surfaces in an irradiation unit in order to remove contaminations deposited on said optical surfaces. The method includes a cleaning step in which a first gas or gas mixture is brought into contact with said optical surfaces thereby forming a volatile compound with a first portion of said contaminations. In an operation pause of the irradiation unit prior to the cleaning step, a pretreatment step is performed, in which a second gas or gas mixture is brought into contact with said optical surfaces. Said second gas or gas mixture is selected to react with a second portion of said contaminations different from said first portion to form a reaction product, which is able to form a volatile compound with said first gas or gas mixture.

Abstract: The present invention relates to a method of cleaning a surface at least partly covered with contaminant or undesired material by applying atomic hydrogen. The invention also proposes an irradiation unit adapted to perform the cleaning method. In the present method the atomic hydrogen is generated by dissociation of molecular hydrogen directed to a surface containing catalytic material, which causes the dissociation of at least a part of the molecular hydrogen to atomic hydrogen. The surface with the catalytic material is arranged close to the surface to be cleaned and is dimensioned such that its total surface area is at least twice the surface area of the to be cleaned surface region. The method allows for the cleaning of the surface region in a constructive simple and efficient manner.

Abstract: The present invention concerns means and methods of detection of Candida and Candida-related fungal cells in clinical material by means of protein biochips.

Abstract: In an arrangement for vibration damping in a vehicle, including a vehicle body with an auxiliary frame and support bearings for supporting a component on the auxiliary frame, wheels supported on the auxiliary frame by links and a spring-and-damper strut or a spring and damper supporting the vehicle body, a connecting device is provided in such a manner that a force flux circuit is formed wherein forces which are introduced into the vehicle by vibratory movements caused by the upward motions and the rebounding of the wheels are substantially absorbed in the force flux circuit.

Abstract: The invention relates to functional elements that comprise, disposed on a support, microstructures containing biofunctionalized nanoparticles, methods for producing these functional elements and use of the same.

Abstract: In an arrangement for vibration damping in a vehicle, including a vehicle body with an auxiliary frame and support bearings for supporting a component on the auxiliary frame, wheels supported on the auxiliary frame by links and a spring-and-damper strut or a springs and dampers supporting the vehils body, a connecting device is provided in such a manner that a force flux circuit is formed wherein forces which are introduced into the vehicle by vibratory movements caused by the upward motions and the rebounding of the wheels are substantially absorbed in the force flux circuit.

Abstract: The present invention relates to functional elements that comprise microstructures containing biofunctionalized nanoparticles arranged on a carrier, a method for the production of these functional elements and the use thereof.

Abstract: The present invention pertains to a process for preparing a benzo(a)pyrene-free, carbon-containing, refractory ceramic material that can subsequently be used for preparing ceramic preforms.