Patents by Inventor Adam Chen

Adam Chen has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 9898811
    Abstract: Defect classification includes acquiring one or more images of a specimen, receiving a manual classification of one or more training defects based on one or more attributes of the one or more training defects, generating an ensemble learning classifier based on the received manual classification and the attributes of the one or more training defects, generating a confidence threshold for each defect type of the one or more training defects based on a received classification purity requirement, acquiring one or more images including one or more test defects, classifying the one or more test defects with the generated ensemble learning classifier, calculating a confidence level for each of the one or more test defects with the generated ensemble learning classifier and reporting one or more test defects having a confidence level below the generated confidence threshold via the user interface device for manual classification.
    Type: Grant
    Filed: June 24, 2015
    Date of Patent: February 20, 2018
    Assignee: KLA-Tencor Corporation
    Inventors: Li He, Chien-Huei Adam Chen, Sankar Venkataraman, John R. Jordan, III, Huajun Ying, Harsh Sinha
  • Patent number: 9538967
    Abstract: A radiological image sensor has an electronic substrate and an imaging chip held within a housing, the imaging chip having electronics that create a dead space, with a cable attached to the housing at a cable button connector, the dead space being at a short distal side of the generally rectangular sensor opposite the short mesial side at which the cable exits the cable button connector. The mesial side of the sensor either does not have a dead space created by electronics of the imaging chip or the dead space found on the mesial side of the sensor is less than approximately 4 mm, and, preferably, approximately 2 mm or less. The cable can be a flat cable with a length of approximately one meter or less that can be connected to a round cable.
    Type: Grant
    Filed: May 18, 2016
    Date of Patent: January 10, 2017
    Assignee: CYBER MEDICAL IMAGING, INC.
    Inventors: Adam Chen, Douglas Yoon
  • Publication number: 20160328837
    Abstract: Defect classification includes acquiring one or more images of a specimen, receiving a manual classification of one or more training defects based on one or more attributes of the one or more training defects, generating an ensemble learning classifier based on the received manual classification and the attributes of the one or more training defects, generating a confidence threshold for each defect type of the one or more training defects based on a received classification purity requirement, acquiring one or more images including one or more test defects, classifying the one or more test defects with the generated ensemble learning classifier, calculating a confidence level for each of the one or more test defects with the generated ensemble learning classifier and reporting one or more test defects having a confidence level below the generated confidence threshold via the user interface device for manual classification.
    Type: Application
    Filed: June 24, 2015
    Publication date: November 10, 2016
    Inventors: Li He, ChienHuei Adam Chen, Sankar Venkataraman, John R. Jordan, III, Huajun Ying, Sinha Harsh
  • Patent number: 9489599
    Abstract: Methods and systems for decision tree construction for automatic classification of defects on semiconductor wafers are provided. One method includes creating a decision tree for classification of defects detected on a wafer by altering one or more floating trees in the decision tree. The one or more floating trees are sub-trees that are manipulated as individual units. In addition, the method includes classifying the defects detected on the wafer by applying the decision tree to the defects.
    Type: Grant
    Filed: April 21, 2014
    Date of Patent: November 8, 2016
    Assignee: KLA-Tencor Corp.
    Inventors: Chien-Huei (Adam) Chen, Chris Maher, Patrick Huet, Tai-Kam Ng, John Raymond Jordan, III
  • Publication number: 20160317106
    Abstract: A radiological image sensor has an electronic substrate and an imaging chip held within a housing, the imaging chip having electronics that create a dead space, with a cable attached to the housing at a cable button connector, the dead space being at a short distal side of the generally rectangular sensor opposite the short mesial side at which the cable exits the cable button connector. The mesial side of the sensor either does not have a dead space created by electronics of the imaging chip or the dead space found on the mesial side of the sensor is less than approximately 4 mm, and, preferably, approximately 2 mm or less. The cable can be a flat cable with a length of approximately one meter or less that can be connected to a round cable.
    Type: Application
    Filed: May 18, 2016
    Publication date: November 3, 2016
    Applicant: Cyber Medical Imaging, Inc.
    Inventors: Adam Chen, Douglas Yoon
  • Patent number: 9357972
    Abstract: A radiological image sensor has an electronic substrate and an imaging chip held within a housing, the imaging chip having electronics that create a dead space, with a cable attached to the housing at a cable button connector, the dead space being at a short distal side of the generally rectangular sensor opposite the short mesial side at which the cable exits the cable button connector. The mesial side of the sensor either does not have a dead space created by electronics of the imaging chip or the dead space found on the mesial side of the sensor is less than approximately 4 mm, and, preferably, approximately 2 mm or less. The cable can be a flat cable with a length of approximately one meter or less that can be connected to a round cable.
    Type: Grant
    Filed: July 16, 2013
    Date of Patent: June 7, 2016
    Assignee: CYBER MEDICAL IMAGING, INC.
    Inventors: Adam Chen, Douglas C Yoon
  • Patent number: 9360863
    Abstract: Various embodiments for determining parameters for wafer inspection and/or metrology are provided.
    Type: Grant
    Filed: June 9, 2011
    Date of Patent: June 7, 2016
    Assignee: KLA-Tencor Corp.
    Inventors: Govind Thattaisundaram, Mohan Mahadevan, Ajay Gupta, Chien-Huei Adam Chen, Ashok Kulkarni, Jason Kirkwood, Kenong Wu, Songnian Rong
  • Patent number: 9262821
    Abstract: Systems and methods for generating information for use in a wafer inspection process are provided. One method includes acquiring output of an inspection system for die(s) located on wafer(s), combining the output for the die(s) based on within die positions of the output, determining, on a within die position basis, a statistical property of variation in values of characteristic(s) of the combined output, and assigning the within die positions to different groups based on the statistical properties determined for the within die positions. The method also includes storing information for the within die positions and the different groups to which the within die positions are assigned in a storage medium that is accessible to the inspection system for performing the wafer inspection process, which includes applying defect detection parameter(s) to additional output of the inspection system generated for a wafer based on the information thereby detecting defects on the wafer.
    Type: Grant
    Filed: May 8, 2015
    Date of Patent: February 16, 2016
    Assignee: KLA-Tencor Corp.
    Inventors: Eugene Shifrin, Chetana Bhaskar, Ashok V. Kulkarni, Chien-Huei (Adam) Chen, Kris Bhaskar, Brian Duffy
  • Patent number: 9216003
    Abstract: A universal dental digital sensor holder has a bite block connected to a rod that has a connector which is used to flexibly attach a sensor holder so as to allow rotational movement of the sensor relative to the bite block and multiple sensor holders are removably connected to the connector so that they can be used to obtain different radiographic projection views due to their differing configurations for holding the intraoral sensor in the patient's mouth. The bite block can have an opening formed in it fitted with a sleeve to allow access to a tooth located beneath the opening in the patient's mouth. A cable protector can be formed in the rod adjacent an anterior bite surface so that an intraoral sensor cable can be held adjacent the rod and at least partially protected from one or more teeth biting the anterior bite surface.
    Type: Grant
    Filed: July 16, 2013
    Date of Patent: December 22, 2015
    Assignee: CYBER MEDICAL IMAGING, INC.
    Inventors: Adam Chen, Douglas C Yoon
  • Publication number: 20150324964
    Abstract: Systems and methods for generating information for use in a wafer inspection process are provided. One method includes acquiring output of an inspection system for die(s) located on wafer(s), combining the output for the die(s) based on within die positions of the output, determining, on a within die position basis, a statistical property of variation in values of characteristic(s) of the combined output, and assigning the within die positions to different groups based on the statistical properties determined for the within die positions. The method also includes storing information for the within die positions and the different groups to which the within die positions are assigned in a storage medium that is accessible to the inspection system for performing the wafer inspection process, which includes applying defect detection parameter(s) to additional output of the inspection system generated for a wafer based on the information thereby detecting defects on the wafer.
    Type: Application
    Filed: May 8, 2015
    Publication date: November 12, 2015
    Inventors: Eugene Shifrin, Chetana Bhaskar, Ashok V. Kulkarni, Chien-Huei (Adam) Chen, Kris Bhaskar, Brian Duffy
  • Patent number: 9170211
    Abstract: Systems and methods for design-based inspection using repeating structures are provided.
    Type: Grant
    Filed: March 14, 2012
    Date of Patent: October 27, 2015
    Assignee: KLA-Tencor Corp.
    Inventors: Ashok V. Kulkarni, Chien-Huei (Adam) Chen
  • Patent number: 9144410
    Abstract: A variable aperture X-ray collimating device that fits over existing intraoral radiographic sensor positioners enables clinicians to provide radiation protection for their patients while allowing the flexibility to accommodate various commercially available positioning kits. In addition, the variable aperture allows for easy accommodation of various sensor sizes.
    Type: Grant
    Filed: June 18, 2013
    Date of Patent: September 29, 2015
    Assignee: Cyber Medical, Inc.
    Inventors: Adam Chen, Douglas C Yoon
  • Patent number: 9053390
    Abstract: Methods and systems for determining inspection scenarios without input from a user are presented. Inspection scenarios include at least one acquisition mode, defect detection parameter values, and classification parameter values. In one example, a number of defect events are determined by a hot inspection of a wafer surface. The defect events are classified and attributes associated with each defect event are identified. The defect events are labeled with this information. Based on the identified attributes and classification, inspection scenarios are determined. The inspection scenarios are solutions in a mathematical space formed by the identified attributes. In some examples, a plurality of inspection scenarios are determined and a desired inspection scenario is selected from the plurality based on the number of defects of interest and the number of nuisance events captured by the selected inspection scenario.
    Type: Grant
    Filed: August 14, 2012
    Date of Patent: June 9, 2015
    Assignee: KLA-Tencor Corporation
    Inventors: Mohan Mahadevan, Govind Thattaisundaram, Ajay Gupta, Chien-Huei (Adam) Chen, Jason Kirkwood, Ashok Kulkarni, Songnian Rong, Ernesto Escorcia, Eugene Shifrin
  • Publication number: 20150125064
    Abstract: Methods and systems for decision tree construction for automatic classification of defects on semiconductor wafers are provided. One method includes creating a decision tree for classification of defects detected on a wafer by altering one or more floating trees in the decision tree. The one or more floating trees are sub-trees that are manipulated as individual units. In addition, the method includes classifying the defects detected on the wafer by applying the decision tree to the defects.
    Type: Application
    Filed: April 21, 2014
    Publication date: May 7, 2015
    Applicant: KLA-Tencor Corporation
    Inventors: Chien-Huei (Adam) Chen, Chris Maher, Patrick Huet, Tai-Kam Ng, John Raymond Jordan, III
  • Publication number: 20140329103
    Abstract: A multilayer polyolefin film useful for packaging contains a core layer including from 20% to 100% by weight of the core layer of a polyethylene homopolymer having a density of between about 0.94 and about 0.97; an ethylene/alpha-olefin copolymer having a density of between about 0.94 and about 0.97; polypropylene; or a mixture thereof; from 0% to 80% by weight of the core layer of linear low density polyethylene, low density polyethylene, a copolymer of ethylene and vinyl acetate; or a mixture thereof; and a skin layer laminated to the core layer. The skin layer is a layer of linear low density polyethylene, low density polyethylene, a copolymer of ethylene and vinyl acetate; or a mixture thereof. At least one of the core layer and the skin layer includes at least 20% modern carbon. If desired, two skin layers may be laminated to opposing surfaces of the core layer.
    Type: Application
    Filed: April 30, 2014
    Publication date: November 6, 2014
    Applicant: Avery Dennison Corporation
    Inventors: Vadim ZAIKOV, Wen-Li (Adam) A. Chen
  • Patent number: 8781781
    Abstract: Various embodiments for determining dynamic care areas are provided. In one embodiment, a first inspection process is performed on a wafer after a first fabrication step has been performed on the wafer and before a second fabrication process has been performed on the wafer. One embodiment includes determining care areas for a second inspection process based on inspection results generated by the first inspection process. The second inspection process will be performed on the wafer after the second fabrication step has been performed on the wafer.
    Type: Grant
    Filed: June 30, 2011
    Date of Patent: July 15, 2014
    Assignee: KLA-Tencor Corp.
    Inventors: Ashok V. Kulkarni, Chien-Huei Adam Chen
  • Publication number: 20140050389
    Abstract: Methods and systems for determining inspection scenarios without input from a user are presented. Inspection scenarios include at least one acquisition mode, defect detection parameter values, and classification parameter values. In one example, a number of defect events are determined by a hot inspection of a wafer surface. The defect events are classified and attributes associated with each defect event are identified. The defect events are labeled with this information. Based on the identified attributes and classification, inspection scenarios are determined. The inspection scenarios are solutions in a mathematical space formed by the identified attributes. In some examples, a plurality of inspection scenarios are determined and a desired inspection scenario is selected from the plurality based on the number of defects of interest and the number of nuisance events captured by the selected inspection scenario.
    Type: Application
    Filed: August 14, 2012
    Publication date: February 20, 2014
    Applicant: KLA-Tencor Corporation
    Inventors: Mohan Mahadevan, Govind Thattaisundaram, Ajay Gupta, Chien-Huei (Adam) Chen, Jason Kirkwood, Ashok Kulkarni, Songnian Rong, Ernesto Escorcia, Eugene Shifrin
  • Publication number: 20140023177
    Abstract: A radiological image sensor has an electronic substrate and an imaging chip held within a housing, the imaging chip having electronics that create a dead space, with a cable attached to the housing at a cable button connector, the dead space being at a short distal side of the generally rectangular sensor opposite the short mesial side at which the cable exits the cable button connector. The mesial side of the sensor either does not have a dead space created by electronics of the imaging chip or the dead space found on the mesial side of the sensor is less than approximately 4 mm, and, preferably, approximately 2 mm or less. The cable can be a flat cable with a length of approximately one meter or less that can be connected to a round cable.
    Type: Application
    Filed: July 16, 2013
    Publication date: January 23, 2014
    Inventors: Adam Chen, Douglas C. Yoon
  • Patent number: 8611639
    Abstract: Various methods, carrier media, and systems for monitoring a characteristic of a specimen are provided. One computer-implemented method for monitoring a characteristic of a specimen includes determining a property of individual pixels on the specimen using output generated by inspecting the specimen with an inspection system. The method also includes determining a characteristic of individual regions on the specimen using the properties of the individual pixels in the individual regions. The method further includes monitoring the characteristic of the specimen based on the characteristics of the individual regions.
    Type: Grant
    Filed: July 30, 2007
    Date of Patent: December 17, 2013
    Assignee: KLA-Tencor Technologies Corp
    Inventors: Ashok Kulkarni, Chien-Huei (Adam) Chen, Cecelia Campochiaro, Richard Wallingford, Yong Zhang, Brian Duffy
  • Publication number: 20120243773
    Abstract: Systems and methods for design-based inspection using repeating structures are provided.
    Type: Application
    Filed: March 14, 2012
    Publication date: September 27, 2012
    Applicant: KLA-TENCOR CORPORATION
    Inventors: Ashok V. Kulkarni, Chien-Huei (Adam) Chen