Abstract: A UV laser beam is used to machine semiconductor. The beams intensity (IB) is chosen so that it lies in a range of such values for which there is an increasing (preferably linear) material removal rate for increasing IB. An elongate formation such as a trough or a slot is machined in n scans laterally offset (O_center), for each value of z-integer in the z direction.

Abstract: A semiconductor is cut by directing a green laser beam of high power, and subsequently directing a UV beam along the cut line. The first beam performs cutting with relatively rough edges and a high material removal rate, and the second beam completes the cut at the edges for the required finish, with a lower material quantity removal.

Abstract: An inspection station (6) has a ring of 370 nm LEDs (24) for low-angle diffuse illumination of flux. This stimulates inherent fluorescent emission of the flux without the need for flux additives or pre-treatment. A CCD sensor (20) detects the emission. An image processor generates output data indicating flux volume according to a relationship between emission intensity and volume over the surface of the flux. Intensity non-uniformity indicates either height non-uniformity or hidden voids, both of which give rise to defects after application of solder paste and reflow. The inspection is particularly effective for pre solder application flux inspection.

Abstract: A system (1) has a projection lens (12) directing on-axis light and low level LEDs (18) directing light to blind microvias (5). A high resolution camera (14) captures blind microvia images and an image processor recognizes defects according to classifications (54-59) according to reflected light area and centroid position. The lens (12) is telecentric for particularly effective image capture in blind microvias (5). The system also has an array of 6000 back lighting LEDs (10) providing illumination for capture of images by a camera (15). These images are analyzed by the image processor to detect defects such as blocked through microvias.