Abstract: Described is a method of fabricating front-illuminated silicon photodiodes having high quantum efficiency, a short response time, (high gain and low excess noise in the case of avalanche diodes), low dark currents and good reliability. In the fabrication of an n.sup.+ -p-.pi.-p.sup.+ APD the method includes the steps of: (1) epitaxially growing a high resistivity .pi.-type silicon layer on a high conductivity p-type silicon substrate; (2) forming an n-type guard ring in the .pi.-layer; (3) forming a p-type channel stop around the guard ring; (4) forming in the .pi.-layer a p-layer by ion implantation and by driving in the implanted ions by heating in a suitable atmosphere; (5) masking the p-layer and introducing phosphorus into the backside to getter defects and/or impurities; (6) ramping the furnace temperature during steps (2) through (5) to reduce crystalline defects; (7) forming a thin n.sup.+ -layer in the p-layer; (8) forming an anti-reflection and passivation coating on the n.sup.