Abstract: In a method for sputter depositing an additive-containing aluminium nitride film containing an additive element like Sc or Y, a first layer of the additive-containing aluminium nitride film is deposited onto a substrate disposed within a chamber by pulsed DC reactive sputtering. A second layer of the additive-containing aluminium nitride film is deposited onto the first layer by pulsed DC reactive sputtering. The second layer has the same composition as the first layer. A gas or gaseous mixture is introduced into the chamber when depositing the first layer. A gaseous mixture comprising nitrogen gas and an inert gas is introduced into the chamber when depositing the second layer. The percentage of nitrogen gas in the flow rate (in sccm) when depositing the first layer is greater than that when depositing the second layer.

Abstract: Sputter depositing a metallic layer on a substrate in the fabrication of a resonator device includes providing a magnetron sputtering apparatus comprising a chamber, a substrate support disposed within the chamber, a target made from a metallic material, and a plasma generating device, wherein the substrate support and the target are separated by a distance of 10 cm or less; supporting the substrate on the substrate support; performing a DC magnetron sputtering step that comprises sputtering the metallic material from the target onto the substrate so as to form a metallic layer on the substrate, wherein during the DC magnetron sputtering step the chamber has a pressure of at least 6 mTorr of a noble gas, the target is supplied with a power having a power density of at least 6 W/cm2, and the substrate has a temperature in the range of 200-600° C.

Abstract: A magnet assembly is disclosed for steering ions used in the formation of a material layer upon a substrate during a pulsed DC physical vapour deposition process. Apparatus and methods are also disclosed incorporating the assembly for controlling thickness variation in a material layer formed via pulsed DC physical vapour deposition. The magnet assembly comprises a magnetic field generating arrangement for generating a magnetic field proximate the substrate and means for rotating the ion steering magnetic field generating arrangement about an axis of rotation, relative to the substrate. The magnetic field generating arrangement comprises a plurality of magnets configured to an array which extends around the axis of rotation, wherein the array of magnets are configured to generate a varying magnetic field strength along a radial direction relative to the axis of rotation.

Abstract: According to one aspect, the present disclosure relates to a curable precursor of a structural adhesive composition, comprising: a) a thermally curable resin; b) a thermal curing initiator for the thermally curable resin; c) a radiation self-polymerizable multi-functional compound comprising a polyether oligomeric backbone and at least one free-radical (co)polymerizable reactive group at each terminal position of the oligomer backbone; and d) a free-radical polymerization initiator for the radiation self-polymerizable multi-functional compound; wherein the free-radical polymerization initiator is activated by visible light.

Abstract: In one or more arrangements, navigation system for a vehicle comprises a plurality of sensors which are configured to sense a respective physical property and output a set of physical parameter data which is indicative of the physical property; a weighting module which is configured to generate a weight value for each set of physical parameter data based on at least one further parameter; a memory for storing predetermined physical parameter data and associated predetermined location data; a compiler module which is configured to: rank the sets of physical parameter data according to the weight values, match at least some of the ranked sets of physical parameter data with sets of predetermined physical parameter data which are stored in the memory, generate vehicle location data and compile vehicle navigation data comprising at least one of a bearing or distance from the vehicle to a target.

Abstract: A substrate is positioned on a substrate supporting upper surface of a substrate support. An arrangement of permanent magnets is positioned beneath the substrate supporting upper surface so that permanent magnets are disposed underneath the substrate. The deposition material is deposited into the recesses formed in the substrate by sputtering a sputtering material from a target of a magnetron device. While depositing the deposition material, the arrangement of permanent magnets provides a substantially uniform lateral magnetic field across the surface of the substrate which extends into a region beyond a periphery of the substrate to enhance resputtering of deposited material deposited into the recesses.

Abstract: A flight control system (20) comprising: • at least one drive unit (4); • at least one wing (5) operatively connected to the at least one drive unit; and • a controller (21) configured to: • send a control signal to the at least one drive unit to operate the at least one drive unit through a demanded motion; • receive a feedback signal indicative of the actual motion of the at least one drive unit; and • compare the actual motion to the demanded motion to determine a motion error of the at least one drive unit.

Abstract: Provided herein is a canopy control system comprising a yoke, configured to be pivotably securable to a vehicle and securable to a line system of a canopy in use, such that the yoke pivots with respect to the vehicle in a first direction when the canopy is subjected to a wind force; and a control mechanism configured to apply a control force to the canopy line system to cause the canopy to oppose the wind force, such that yoke pivots with respect to the vehicle in a second direction which is opposite to the first direction.

Abstract: Pulsed DC reactive sputtering of a target deposits an additive-containing aluminium nitride film onto a metallic layer of a semiconductor substrate. The additive-containing aluminium nitride film contains an additive element selected from scandium, yttrium, titanium, chromium, magnesium and hafnium. Depositing the additive-containing aluminium nitride film includes introducing a gaseous mixture comprising nitrogen gas and an inert gas into the chamber at a flow rate, in which the flow rate of the gaseous mixture comprises a nitrogen gas flow rate, and in which the nitrogen gas flow rate is less than or equal to about 50% of the flow rate of the gaseous mixture and also is sufficient to fully poison the target.

Abstract: Sputter depositing a metallic layer on a substrate in the fabrication of a resonator device includes providing a magnetron sputtering apparatus comprising a chamber, a substrate support disposed within the chamber, a target made from a metallic material, and a plasma generating device, wherein the substrate support and the target are separated by a distance of 10 cm or less; supporting the substrate on the substrate support; performing a DC magnetron sputtering step that comprises sputtering the metallic material from the target onto the substrate so as to form a metallic layer on the substrate, wherein during the DC magnetron sputtering step the chamber has a pressure of at least 6 mTorr of a noble gas, the target is supplied with a power having a power density of at least 6 W/cm2, and the substrate has a temperature in the range of 200-600° C.

Abstract: A linear actuator comprising a support structure; at least one magnet provided on the support structure; a carriage; at least one coil arrangement provided around the carriage; and a spring arrangement operatively connected between the support structure and the carriage to urge the carriage towards a predetermined position relative to the support structure; wherein a part of one of the support structure and the carriage is received by a part of the other of the support structure and carriage so as to constrain motion of the carriage relative to the support structure substantially along a longitudinal axis of the linear actuator.

Abstract: In a method for sputter depositing an additive-containing aluminium nitride film containing an additive element like Sc or Y, a first layer of the additive-containing aluminium nitride film is deposited onto a substrate disposed within a chamber by pulsed DC reactive sputtering. A second layer of the additive-containing aluminium nitride film is deposited onto the first layer by pulsed DC reactive sputtering. The second layer has the same composition as the first layer. A gas or gaseous mixture is introduced into the chamber when depositing the first layer. A gaseous mixture comprising nitrogen gas and an inert gas is introduced into the chamber when depositing the second layer. The percentage of nitrogen gas in the flow rate (in sccm) when depositing the first layer is greater than that when depositing the second layer.

Abstract: An air-cooled antenna comprising one or more separate antenna arrays (4) and a plurality of separate respective radio transmitter and/or receiver modules (3) each adapted for generating and/or receiving radio-frequency (RF) transmissions for an antenna array associated therewith. An antenna housing (2) contains the transmitter and/or receiver modules and has a ventilation inlet (8) for receiving air into the housing to an exhaust outlet (9) for outputting the air from the housing. A ventilation driver (6) drives an air flow rate through the housing from the ventilation inlet to the exhaust outlet.

Abstract: A linear actuator comprising a support structure; at least one magnet provided on the support structure; a carriage; at least one coil arrangement provided around the carriage; and a spring arrangement operatively connected between the support structure and the carriage to urge the carriage towards a predetermined position relative to the support structure; wherein a part of one of the support structure and the carriage is received by a part of the other of the support structure and carriage so as to constrain motion of the carriage relative to the support structure substantially along a longitudinal axis of the linear actuator.

Abstract: A watercraft includes a chassis, a drive, a hydrofoil and a drive transfer arm. The drive is operatively connected to a first end of the drive transfer arm. The hydrofoil is pivotably connected to a second end of the drive transfer arm. The watercraft is configured such that operation of the drive causes the hydrofoil to oscillate, to provide thrust. The hydrofoil is pivotably connected to the second end of the drive transfer arm with an adjustable connection mechanism. The adjustable connection mechanism is such that the distance between a leading edge of the hydrofoil and a rotational axis of a pivoting connection point to the drive transfer arm is adjustable.

Abstract: A tubular admixture piece for receiving in a mixing device for controlled metering in of an adjuvant into a pumpable mixture has at least one sealing element for producing an at least partially fluid-tight connection between the admixture piece and the mixing device wherein the at least one sealing element is designed as an axial seal with respect to a longitudinal axis of the tubular admixture piece. A housing element of a mixing device has at least a sealing support for axial sealing of the admixture piece, and is also configured to exert a force that acts on the admixture piece in the axial direction and/or longitudinal direction of the through-flow opening, such that the axial seal of an admixture piece received at least partially in the through-flow opening can be pressed against the sealing support by the force.

Abstract: An ICP plasma etching apparatus for etching a substrate includes at least one chamber, a substrate support positioned within the chamber, a plasma production device for producing a plasma for use in etching the substrate, and a protective structure which surrounds the substrate support so that, in use, a peripheral portion of the substrate is protected from unwanted deposition of material. The protective structure is arranged to be electrically biased and is formed from a metallic material so that metallic material can be sputtered from the protective structure onto an interior surface of the chamber to adhere particulate material to the interior surface.

Abstract: A printed circuit board shield (100) is provided. The shield comprises a sealing surface (120) and a shielding surface (110). The sealing surface is configured to cooperate with, and be connectable to, a sealing region of a printed circuit board (80) upon assembly therewith. The shielding surface is substantially parallel to but offset from, the sealing surface. A concave cover for receiving at least part of the printed circuit board is thereby defined. The shielding surface comprises an array of perforations (130) formed therethrough. The array of perforations is configured to correspond to a location of an electronic component mounted on the printed circuit board.

Abstract: An LED-based light fixture that includes a light fixture housing forming a light emission aperture, one or more LEDs attached to a circuit board that is surrounded by the light fixture housing and emits light through the light emission aperture when powered. The LED-based light fixture further includes at least one flexible heat sink member that is thermally coupled with at least a portion of the circuit board and the light fixture housing.

Abstract: A luminaire includes a single luminaire housing that includes thermally isolated light source and power control device compartments. At least one light source is disposed within the luminaire housing, and at least one power control device is disposed within a second, thermally isolated compartment. The light source and power control device compartments are separated by a chamber that includes a substantially nonconductive member, which prevents heat from the light source compartment from travelling to the power control device compartment. Thermally isolating the power control device from at least a portion of the heat generated by the light source allows the power control device to be disposed relatively close to the light source without becoming overheated and damaged. A hollow, threaded rod extends between and couples together the light source compartment and power control device compartment.