Patents by Inventor Ajit Paranjpe

Ajit Paranjpe has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Dual collimated deposition apparatus and method of use
    Patent number: 6592728
    Abstract: A dual collimation deposition apparatus and method are disclosed in which the dual collimation apparatus includes at least a long-throw collimator in combination with one or more physical collimators. A new physical collimator and shield design are also disclosed for improved process uniformity and increased equipment productivity.
    Type: Grant
    Filed: August 4, 1998
    Date of Patent: July 15, 2003
    Assignee: Veeco-CVC, Inc.
    Inventors: Ajit Paranjpe, Peter Schwartz, Jacques Kools, Kang Song, Dorian Heimanson, Mehrdad Moslehi
  • Dual collimated deposition apparatus and method of use
    Patent number: 6572744
    Abstract: A dual collimation deposition apparatus and method are disclosed in which the dual collimation apparatus includes at least a long-throw collimator in combination with one or more physical collimators. A new physical collimator and shield design are also disclosed for improved process uniformity and increased equipment productivity.
    Type: Grant
    Filed: January 22, 2001
    Date of Patent: June 3, 2003
    Assignee: Veeco Instruments, Inc.
    Inventors: Ajit Paranjpe, Peter Schwartz, Jacques Kools, Kang Song, Dorian Heimanson, Mehrdad Moslehi