Abstract: A display device is provided for reflecting a black color, as enabled by an optical splitting photonic liquid crystal waveguide. Sets of top and bottom electrodes are formed in a periodic pattern. A first dielectric layer overlies the set of bottom electrodes, made from a liquid crystal (LC) material with molecules having dipoles responsive to an electric field. A plasmonic layer, including a plurality of discrete plasmonic particles, is interposed between the sets of top and bottom electrodes, and is in contact with the first dielectric layer. A voltage potential is applied between the top and bottom electrodes, generating an electric field. Dipole local orientation and non-orientation regions are created in the liquid crystal molecules in response to the electric field, and a wavelength of light outside the visible spectrum is reflected in response to optical spectrum splitting of the incident light.

Abstract: A method is provided for forming a reflective plasmonic display. The method provides a substrate and deposits a bottom dielectric layer. A conductive film is deposited overlying the bottom dielectric layer. A hard mask is formed with nano-size openings overlying the conductive film. The conductive film is plasma etched via nano-size openings in the hard mask, stopping at the dielectric layer. After removing the hard mask, a conductive film is left with nano-size openings to the dielectric layer. Metal is deposited in the nano-size openings, creating a pattern of metallic nanoparticles overlying the dielectric layer. Then, the conductive film is removed. The hard mask may be formed by conformally depositing an Al film overlying the conductive film and anodizing the Al film, creating a hard mask of porous anodized Al oxide (AAO) film. The porous AAO film may form a short-range hexagonal, and long-range random order hole patterns.

Abstract: A plasmonic display device is provided that uses physical modulation mechanisms. The device is made from an electrically conductive bottom electrode and a first dielectric layer overlying the bottom electrode. The first dielectric layer is a piezoelectric material having an index of expansion responsive to an electric field. An electrically conductive top electrode overlies the first dielectric layer. A first plasmonic layer, including a plurality of discrete plasmonic particles, is interposed between the top and bottom electrodes and in contact with the first dielectric layer. In one aspect, the plasmonic particles are an expandable polymer material covered with a metal coating having a size responsive to an electric field.

Abstract: An electrical pressure-sensitive reflective display includes an array of display pixels, each with a transparent top surface, first electrode, second electrode, an elastic polymer medium, and metallic nanoparticles distributed in the elastic polymer medium. When a first voltage potential is applied between the first and second electrodes of each display pixel, a first color is reflected from the incident spectrum of light, assuming no pressure is applied on the top surface of each display pixel. When the top surface of a first display pixel is deformed in response to an applied pressure, the elastic polymer medium in the first display pixel is compressed, decreasing the metallic nanoparticle-to-metallic nanoparticle mean distance in the first display pixel. In response to decreasing the metallic nanoparticle-to-metallic nanoparticle mean distance, the color reflected from the incident spectrum of light by the second display pixel is changed from the first color to second color.

Abstract: A color-tunable plasmonic device is provided with a partially modulated refractive index. A first dielectric layer overlies a bottom electrode, and has a refractive index non-responsive to an electric field. A second dielectric layer overlies the first dielectric layer, having a refractive index responsive to an electric field. An electrically conductive top electrode overlies the second dielectric layer. A plasmonic layer including a plurality of discrete plasmonic particles is interposed between the top and bottom electrodes. In one aspect, the plasmonic layer is interposed between the first and second dielectric layers. In a second aspect, the plasmonic layer is interposed between the first dielectric layer and the bottom electrode. In a third aspect, a first plasmonic layer is interposed between the first dielectric layer and the bottom electrode, and a second plasmonic layer of discrete plasmonic particles is interposed between the first dielectric layer and the second dielectric layer.

Abstract: An object is to provide a resonator and a vibrator with a high Q value in which dissipation of vibration energy in vibration of the vibrator is small, and a thickness of a support part of the vibrator of a beam structure is made thicker than a thickness of the vibrator and the support part is formed in axisymmetry with respect to a length direction of a beam. By this configuration, brittleness of the support part is improved and loss of vibration energy from the support part is reduced and also loss of vibration energy resulting from surface roughness of a surface of the vibrator can be reduced, so that a resonator having a high Q value can be provided.

Abstract: A full color range analog controlled interferometric modulation device is provided. The device includes a transparent substrate, and a transparent fixed-position electrically conductive electrode with a bottom surface overlying the substrate. A transparent spacer overlies the fixed-position electrode, and an induced absorber overlies the spacer. An optically reflective electrically conductive moveable membrane overlies the induced absorber. A cavity is formed between the induced absorber and the moveable membrane having a maximum air gap dimension less than the spacer thickness. In one aspect, the distance from the top surface of the fixed-position electrode to a cavity lower surface is at least twice as great as the cavity maximum air gap dimension. In another aspect, at least one anti-reflective coating (ARC) layer is interposed between the substrate and the fixed-position electrode, and at least one ARC layer is interposed between the fixed-position electrode and the spacer.

Abstract: A method is provided for color tuning a plasmonic device with a color tunable electronic skin. A plasmonic electronic skin is used, including a first substrate, a plasmonic structure, an electrically conductive transparent first electrode layer, an electrically conductive transparent second electrode layer, and a polymer-networked liquid crystal (PNLC) layer interposed between the first and second transparent electrode layers. In response to receiving a color tuning voltage, a full visible spectrum incident light, and a PNLC switch voltage, the plasmonic structure generates a first primary color. A primary color exhibits a single wavelength peak with a spectral full width at half magnitudes (FWHMs) in the visible spectrum of light. In response to receiving the PNLC switch voltage between the first and second electrode layers, the PNLC layer passes incident light.

Abstract: A plasmonic display device is provided with liquid crystal dipole molecule control. The device is made from a first set of electrodes including at least one electrically conductive top electrode and at least one electrically conductive bottom electrode capable of generating a first electric field in a first direction. A second set of electrodes, including an electrically conductive right electrode and an electrically conductive left electrode, is capable of generating a second electric field in a second first direction. A dielectric layer overlies the bottom electrode, made from a liquid crystal material with molecules having dipoles responsive to an electric field. A plasmonic layer, including a plurality of discrete plasmonic particles, is interposed between the first and second set of electrodes and in contact with the dielectric layer. In one aspect, the plasmonic layer is embedded in the dielectric layer.

Abstract: A display device is provided for reflecting a black color, as enabled by an optical splitting photonic liquid crystal waveguide. Sets of top and bottom electrodes are formed in a periodic pattern. A first dielectric layer overlies the set of bottom electrodes, made from a liquid crystal (LC) material with molecules having dipoles responsive to an electric field. A plasmonic layer, including a plurality of discrete plasmonic particles, is interposed between the sets of top and bottom electrodes, and is in contact with the first dielectric layer. A voltage potential is applied between the top and bottom electrodes, generating an electric field. Dipole local orientation and non-orientation regions are created in the liquid crystal molecules in response to the electric field, and a wavelength of light outside the visible spectrum is reflected in response to optical spectrum splitting of the incident light.

Abstract: A plasmonic display device is provided having dual modulation mechanisms. The device has an electrically conductive bottom electrode that may be either transparent or reflective. A dielectric layer overlies the bottom electrode, made from an elastic polymer material having a refractive index responsive to an electric field. An electrically conductive top electrode, either transparent or reflective, overlies the dielectric layer. A plasmonic layer, including a plurality of discrete plasmonic particles, is interposed between the top and bottom electrodes and in contact with the dielectric layer. In one aspect, the plasmonic layer is embedded in the dielectric layer. Alternately, the plasmonic layer overlies the bottom (or top) electrode. Then, the dielectric layer overlies the plasmonic layer particles and exposed regions of the bottom electrode between the first plasmonic layer particles.

Abstract: A color-tunable plasmonic device is provided with a partially modulated refractive index. A first dielectric layer overlies a bottom electrode, and has a refractive index non-responsive to an electric field. A second dielectric layer overlies the first dielectric layer, having a refractive index responsive to an electric field. An electrically conductive top electrode overlies the second dielectric layer. A plasmonic layer including a plurality of discrete plasmonic particles is interposed between the top and bottom electrodes. In one aspect, the plasmonic layer is interposed between the first and second dielectric layers. In a second aspect, the plasmonic layer is interposed between the first dielectric layer and the bottom electrode. In a third aspect, a first plasmonic layer is interposed between the first dielectric layer and the bottom electrode, and a second plasmonic layer of discrete plasmonic particles is interposed between the first dielectric layer and the second dielectric layer.

Abstract: A plasmonic display device is provided that uses physical modulation mechanisms. The device is made from an electrically conductive bottom electrode and a first dielectric layer overlying the bottom electrode. The first dielectric layer is a piezoelectric material having an index of expansion responsive to an electric field. An electrically conductive top electrode overlies the first dielectric layer. A first plasmonic layer, including a plurality of discrete plasmonic particles, is interposed between the top and bottom electrodes and in contact with the first dielectric layer. In one aspect, the plasmonic particles are an expandable polymer material covered with a metal coating having a size responsive to an electric field.

Abstract: A full color range analog controlled interferometric modulation device is provided. The device includes a transparent substrate, and a transparent fixed-position electrically conductive electrode with a bottom surface overlying the substrate. A transparent spacer overlies the fixed-position electrode, and an induced absorber overlies the spacer. An optically reflective electrically conductive moveable membrane overlies the induced absorber. A cavity is formed between the induced absorber and the moveable membrane having a maximum air gap dimension less than the spacer thickness. In one aspect, the distance from the top surface of the fixed-position electrode to a cavity lower surface is at least twice as great as the cavity maximum air gap dimension. In another aspect, at least one anti-reflective coating (ARC) layer is interposed between the substrate and the fixed-position electrode, and at least one ARC layer is interposed between the fixed-position electrode and the spacer.

Abstract: A display device is provided that includes a plurality of pixels, where each pixel includes a single subpixel. In a first aspect, a single subpixel is able to sequentially generate a plurality of (e.g., at least three) primary colors. As a result of the single subpixel, the display is able to supply a gamut of colors including at least 3 primaries colors. For example, the sequential generation of the 3 primary colors may involve operating the subpixel in a time division multiplex (TDM) mode, and a primary combination color is supplied in response to the subpixel generating 2 primary colors in respective TDM subframes. When the pixel includes at least two neighboring subpixels, the pixel may additionally be operated in a spatial division multiple (SDM) mode or in the TDM mode.

Abstract: An electromechanical resonator includes a resonator portion which includes a fixed electrode and an oscillator formed separately from the fixed electrode with a gap. The gap has a first gap region and a second gap region which are arranged in a thickness direction of the fixed electrode. The first gap region is different in width from the second gap region.

Abstract: A resonator and a filter that can be miniaturized and highly integrated are provided. In the invention, a resonator wherein parts of resonators, support sections, and joint sections are mutually shared is formed. The mutual configuration is selectively switched as required and a large number of frequencies can be selected in the same filter unit. The resonators, the support sections, and the joint sections different in size and shape are used in combination, whereby a filter unit having a large number of selective frequencies is provided.

Abstract: A resonator and a filter that can be miniaturized and highly integrated are provided. In the invention, a resonator wherein parts of resonators, support sections, and joint sections are mutually shared is formed. The mutual configuration is selectively switched as required and a large number of frequencies can be selected in the same filter unit. The resonators, the support sections, and the joint sections different in size and shape are used in combination, whereby a filter unit having a large number of selective frequencies is provided.

Abstract: An object of the invention is to provide a coupling element of an MEMS filter with design flexibility and minimization of mass loading effects. The invention provides a structure wherein the mass loading effects are not reflected on the MEMS filter characteristic by using a nanosize coupling element with a very small mass compared to a microsize MEMS resonator, such as a carbon nanotube (CNT), as a coupling element part.

Abstract: An object is to provide a resonator and a vibrator with a high Q value in which dissipation of vibration energy in vibration of the vibrator is small, and a thickness of a support part of the vibrator of a beam structure is made thicker than a thickness of the vibrator and the support part is formed in axisymmetry with respect to a length direction of a beam. By this configuration, brittleness of the support part is improved and loss of vibration energy from the support part is reduced and also loss of vibration energy resulting from surface roughness of a surface of the vibrator can be reduced, so that a resonator having a high Q value can be provided.