Patents by Inventor Akinori Hashimura

Akinori Hashimura has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Mems Filter Device and Manufacturing Method Thereof
    Publication number: 20080284544
    Abstract: An object of the invention is to provide a coupling element of an MEMS filter with design flexibility and minimization of mass loading effects. The invention provides a structure wherein the mass loading effects are not reflected on the MEMS filter characteristic by using a nanosize coupling element with a very small mass compared to a microsize MEMS resonator, such as a carbon nanotube (CNT), as a coupling element part.
    Type: Application
    Filed: July 25, 2005
    Publication date: November 20, 2008
    Applicant: MATSUSHITA ELECTRIC INDUSTRIAL CO., LTD.
    Inventor: Akinori Hashimura
  • ELECTROMECHANICAL RESONATOR AND MANUFACTURING METHOD THEREOF
    Publication number: 20080266008
    Abstract: An electromechanical resonator includes a resonator portion which includes a fixed electrode and an oscillator formed separately from the fixed electrode with a gap. The gap has a first gap region and a second gap region which are arranged in a thickness direction of the fixed electrode. The first gap region is different in width from the second gap region.
    Type: Application
    Filed: January 21, 2008
    Publication date: October 30, 2008
    Applicant: Matshushita Electric Industrial Co., Ltd.
    Inventor: Akinori Hashimura
  • MEMS switch
    Patent number: 7405635
    Abstract: It is to provide an MEMS switch easy to manufacture, microscopic, and capable of obtaining a sufficient ON/OFF capacitance change ratio. An MEMS switch includes a substrate 46, a conductive beam 42 formed on a surface of the substrate, and three-layer structure beams B1 and B2 formed on the surface of the substrate and disposed to be opposed to the conductive beam.
    Type: Grant
    Filed: December 20, 2004
    Date of Patent: July 29, 2008
    Assignee: Matsushita Electric Industrial Co., Ltd.
    Inventors: Akinori Hashimura, Yasuyuki Naito, Kunihiko Nakamura, Yoshito Nakanishi
  • METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE AND SEMICONDUCTOR DEVICE USING THE SAME
    Publication number: 20070284680
    Abstract: A method for manufacturing a semiconductor device, includes: forming a protrusive portion on a surface of a semiconductor substrate, forming a thin film on the surfaces of the semiconductor substrate and the protrusive portion, applying a resist on a surface of the thin film so that at least an apex of the protrusive portion on which the thin film is formed is exposed, etching the thin film formed on the apex of the protrusive portion which is exposed from the resist to separate a pattern of the thin film into a plurality of patterns of the thin film and removing the resist.
    Type: Application
    Filed: April 20, 2007
    Publication date: December 13, 2007
    Applicants: MATSUSHITA ELECTRIC INDUSTRIAL CO., LTD., THE UNIVERSITY OF TOKYO
    Inventors: Akinori HASHIMURA, Hiroyuki FUJITA
  • Mems switch
    Publication number: 20070092180
    Abstract: It is to provide an MEMS switch easy to manufacture, microscopic, and capable of obtaining a sufficient ON/OFF capacitance change ratio. An MEMS switch includes a substrate 46, a conductive beam 42 formed on a surface of the substrate, and three-layer structure beams B1 and B2 formed on the surface of the substrate and disposed to be opposed to the conductive beam.
    Type: Application
    Filed: December 20, 2004
    Publication date: April 26, 2007
    Applicant: Matsushita Electric Industrial Co., Ltd.
    Inventors: Akinori Hashimura, Yasuyuki Naito, Kunihiko Nakamura, Yoshito Nakanishi