Patents by Inventor Akinori Shibuya

Akinori Shibuya has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 11899361
    Abstract: Provided is a kit including a curable composition for imprinting which contains a polymerizable compound having an aromatic ring and a composition for forming an underlayer film for imprinting which contains a polymer and a solvent, in which the polymer contains at least one kind of specific constitutional unit and has a polymerizable group, a film formed of the composition for forming an underlayer film for imprinting is a solid film at 23° C., and a portion that has a continuous partial structure containing an aromatic ring which is included in the polymerizable compound and accounts for 60% by mass or more of the polymerizable compound is common to a continuous partial structure containing an aromatic ring which is included in a substituent R in a side chain in the polymer.
    Type: Grant
    Filed: August 7, 2020
    Date of Patent: February 13, 2024
    Assignee: FUJIFILM Corporation
    Inventors: Naoya Shimoju, Akinori Shibuya, Yuichiro Goto, Akihiro Hakamata
  • Patent number: 11860538
    Abstract: Provided are a photosensitive resin composition in which the progress of cyclization reaction is fast and storage stability over time is excellent, a heterocyclic ring-containing polymer precursor, a cured film, a laminate, a method for producing a cured film, and a semiconductor device, using the photosensitive resin composition. The photosensitive resin composition includes a heterocyclic ring-containing polymer precursor selected from a polyimide precursor and a polybenzoxazole precursor, and a solvent, in which a solid content of the photosensitive resin composition has an amine value of 0.0002 to 0.0200 mmol/g.
    Type: Grant
    Filed: August 15, 2019
    Date of Patent: January 2, 2024
    Assignee: FUJIFILM Corporation
    Inventors: Takeshi Kawabata, Yu Iwai, Akinori Shibuya
  • Publication number: 20230161249
    Abstract: An actinic ray-sensitive or radiation-sensitive resin composition contains a compound represented by General Formula (I). In General Formula (I), Ra and Rb each independently represent a hydrogen atom or a substituent, provided that Ra and Rb satisfy the following requirement (1) or (2): (1) at least one of Ra or Rb represents a secondary alkyl group, a tertiary alkyl group, a cycloalkyl group, or a perfluoroalkyl group, and Ra and Rb may be bonded to each other to form a ring, and (2) Ra and Rb are bonded to each other to form a ring, Rc represents a substituent, L0 represents a single bond or a divalent linking group, L1 represents a single bond or a divalent linking group, L2 represents a single bond or a divalent linking group, nM+ represents an organic cationic moiety, and n represents an integer of 1 or more.
    Type: Application
    Filed: January 24, 2023
    Publication date: May 25, 2023
    Applicant: FUJIFILM Corporation
    Inventors: Minoru Uemura, Takeshi Kawabata, Toshiaki Fukuhara, Akinori Shibuya, Kei Yamamoto
  • Patent number: 11567405
    Abstract: A photosensitive resin composition is also provided that includes a polymer precursor selected from a polyimide precursor and a polybenzoxazole precursor; a photo-radical polymerization initiator; and a solvent, in which an acid value of an acid group contained in the polymer precursor and having a neutralization point in a pH range of 7.0 to 12.0 is in a range of 2.5 to 34.0 mgKOH/g, and either the polymer precursor contains a radically polymerizable group or the photosensitive resin composition includes a radically polymerizable compound other than the polymer precursor.
    Type: Grant
    Filed: November 20, 2019
    Date of Patent: January 31, 2023
    Assignee: FUJIFILM Corporation
    Inventors: Takeshi Kawabata, Kenta Yoshida, Yu Iwai, Akinori Shibuya
  • Patent number: 11487202
    Abstract: A photosensitive resin composition is also provided that includes a polymer precursor selected from a polyimide precursor and a polybenzoxazole precursor; a photo-radical polymerization initiator; and a solvent, in which an acid value of an acid group contained in the polymer precursor and having a neutralization point in a pH range of 7.0 to 12.0 is in a range of 2.5 to 34.0 mgKOH/g, and either the polymer precursor contains a radically polymerizable group or the photosensitive resin composition includes a radically polymerizable compound other than the polymer precursor.
    Type: Grant
    Filed: November 20, 2019
    Date of Patent: November 1, 2022
    Assignee: FUJIFILM Corporation
    Inventors: Takeshi Kawabata, Kenta Yoshida, Yu Iwai, Akinori Shibuya
  • Patent number: 11441053
    Abstract: There are provided a composition for forming an adhesive film for imprinting having excellent adhesiveness and wettability, an adhesive film, a laminate, a method for producing a cured product pattern, and a method for manufacturing a circuit substrate. A composition for forming an adhesive film for imprinting contains a resin having a polymerizable group; and a solvent, in which the resin has at least one kind of a repeating unit derived from a polymerizable compound having a C log P value less than or equal to 0, and solubility of the resin in water at 25° C. is greater than or equal to 1 mass %, provided that the C log P value is a coefficient showing affinity of an organic compound with respect to water and 1-octanol.
    Type: Grant
    Filed: August 21, 2019
    Date of Patent: September 13, 2022
    Assignee: FUJIFILM Corporation
    Inventors: Naoya Shimoju, Akinori Shibuya, Yuichiro Goto
  • Patent number: 11401361
    Abstract: The curable composition for imprinting includes: a compound represented by the following Formula (1); a radically polymerizable compound other than the compound represented by Formula (1); and a photoradical polymerization initiator, in Formula (1), R1 and R2 each independently represent a hydrogen atom or an organic group having 1 to 8 carbon atoms and may be bonded to each other to form a ring, R3 represents a monovalent organic group, and R4 and R5 each independently represent a hydrogen atom or a monovalent organic group.
    Type: Grant
    Filed: January 23, 2020
    Date of Patent: August 2, 2022
    Assignee: FUJIFILM Corporation
    Inventors: Naoya Shimoju, Akinori Shibuya, Yuichiro Goto
  • Patent number: 11299653
    Abstract: There are provided a composition having excellent adhesiveness and wettability, an adhesive film, a laminate, a method for producing a cured product pattern, and a method for manufacturing a circuit substrate.
    Type: Grant
    Filed: October 10, 2019
    Date of Patent: April 12, 2022
    Assignee: FUJIFILM Corporation
    Inventors: Naoya Shimoju, Akinori Shibuya, Yuichiro Goto
  • Publication number: 20220009153
    Abstract: Provided are: a composition for forming a pattern, which contains a polymerizable compound, a photopolymerization initiator, and a sensitizer containing two or more of at least one kind of atom selected from the group consisting of a nitrogen atom and a sulfur atom, in which a length of a specific atom chain from one atom to another atom among the two or more atoms is 2 or 3 in terms of the number of atoms; a kit to which the composition for forming a pattern is applied; a cured film; a laminate; a pattern producing method; and a method for manufacturing a semiconductor element.
    Type: Application
    Filed: September 24, 2021
    Publication date: January 13, 2022
    Applicant: FUJIFILM Corporation
    Inventors: Yuichiro GOTO, Naoya SHIMOJU, Akinori SHIBUYA, Akihiro HAKAMATA
  • Publication number: 20210388134
    Abstract: Provided are: a curable composition for imprinting, which contains a compound C represented by Formula (C1) and a radical polymerization initiator; a kit including the curable composition; a pattern producing method using the curable composition; and a method for manufacturing a semiconductor element, which includes the pattern producing method as a step.
    Type: Application
    Filed: August 25, 2021
    Publication date: December 16, 2021
    Applicant: FUJIFILM Corporation
    Inventors: Naoya SHIMOJU, Akinori SHIBUYA
  • Publication number: 20200363718
    Abstract: Provided is a kit including a curable composition for imprinting which contains a polymerizable compound having an aromatic ring and a composition for forming an underlayer film for imprinting which contains a polymer and a solvent, in which the polymer contains at least one kind of specific constitutional unit and has a polymerizable group, a film formed of the composition for forming an underlayer film for imprinting is a solid film at 23° C., and a portion that has a continuous partial structure containing an aromatic ring which is included in the polymerizable compound and accounts for 60% by mass or more of the polymerizable compound is common to a continuous partial structure containing an aromatic ring which is included in a substituent R in a side chain in the polymer.
    Type: Application
    Filed: August 7, 2020
    Publication date: November 19, 2020
    Applicant: FUJIFILM Corporation
    Inventors: Naoya Shimoju, Akinori Shibuya, Yuichiro Goto, Akihiro Hakamata
  • Patent number: 10780679
    Abstract: Provided is a laminate that excels in adhesion among a plurality of resin layers formed as insulating layers containing polyimide and so forth, a method for manufacturing the laminate, a semiconductor device, and, a method for manufacturing the semiconductor device. The laminate comprises a substrate, and at least two resin layers, each of the resin layers is independently brought into contact, in at least a part of the surface thereof, with other resin layer, and the layers independently has a Young's modulus exceeding 2.8 GPa and not exceeding 5.0 GPa, and, an elongation after fracture exceeding 50% and not exceeding 200%, and further has a three-dimensional radical crosslinked structure, and at least one of the resin layers contains at least either polyimide or polybenzoxazole.
    Type: Grant
    Filed: March 29, 2018
    Date of Patent: September 22, 2020
    Assignee: FUJIFILM Corporation
    Inventors: Yu Iwai, Takeshi Kawabata, Akinori Shibuya
  • Publication number: 20200157267
    Abstract: The curable composition for imprinting includes: a compound represented by the following Formula (1); a radically polymerizable compound other than the compound represented by Formula (1); and a photoradical polymerization initiator, in Formula (1), R1 and R2 each independently represent a hydrogen atom or an organic group having 1 to 8 carbon atoms and may be bonded to each other to form a ring, R3 represents a monovalent organic group, and R4 and R5 each independently represent a hydrogen atom or a monovalent organic group.
    Type: Application
    Filed: January 23, 2020
    Publication date: May 21, 2020
    Applicant: FUJIFILM Corporation
    Inventors: Naoya SHIMOJU, Akinori Shibuya, Yuichiro Goto
  • Patent number: 10649329
    Abstract: An active-light-sensitive or radiation-sensitive resin composition includes a basic compound (A) corresponding to at least one of the following basic compound (A1) or (A2): (A1) a nonionic compound having an alicyclic structure (a1) and a basic site (b2) at a site different from the alicyclic structure within one molecule, or (A2) a nonionic compound having a heterocyclic structure (a2) having no basicity and a basic site (b2) at a site different from the heterocyclic structure within one molecule.
    Type: Grant
    Filed: December 20, 2016
    Date of Patent: May 12, 2020
    Assignee: FUJIFILM Corporation
    Inventors: Shohei Kataoka, Akinori Shibuya, Keiyu Ou
  • Publication number: 20200089113
    Abstract: A photosensitive resin composition is also provided that includes a polymer precursor selected from a polyimide precursor and a polybenzoxazole precursor; a photo-radical polymerization initiator; and a solvent, in which an acid value of an acid group contained in the polymer precursor and having a neutralization point in a pH range of 7.0 to 12.0 is in a range of 2.5 to 34.0 mgKOH/g, and either the polymer precursor contains a radically polymerizable group or the photosensitive resin composition includes a radically polymerizable compound other than the polymer precursor.
    Type: Application
    Filed: November 20, 2019
    Publication date: March 19, 2020
    Applicant: FUJIFILM Corporation
    Inventors: Takeshi KAWABATA, Kenta YOSHIDA, Yu IWAI, Akinori SHIBUYA
  • Publication number: 20200040222
    Abstract: There are provided a composition having excellent adhesiveness and wettability, an adhesive film, a laminate, a method for producing a cured product pattern, and a method for manufacturing a circuit substrate.
    Type: Application
    Filed: October 10, 2019
    Publication date: February 6, 2020
    Applicant: FUJIFILM Corporation
    Inventors: Naoya SHIMOJU, Akinori Shibuya, Yuichiro Goto
  • Patent number: 10538627
    Abstract: A photosensitive resin composition using a polyimide precursor composition, a cured film, a method for producing a cured film, a semiconductor device, and a method for producing a polyimide precursor composition are provided. In the polyimide precursor composition, the molar ratio of repeating units represented by General Formula (1-2) among structural isomers of the polyimide precursor is 60% to 90% by mole. In General Formula (1-2), A1 and A2 each independently represents an oxygen atom or NH, R111 and R112 each independently represents a single bond or a divalent organic group, and R113 and R114 each independently represents a hydrogen atom or a monovalent organic group.
    Type: Grant
    Filed: November 28, 2017
    Date of Patent: January 21, 2020
    Assignee: FUJIFILM Corporation
    Inventors: Takeshi Kawabata, Takuma Amemiya, Hidekazu Oohashi, Yu Iwai, Akinori Shibuya
  • Patent number: 10526448
    Abstract: Provided are photosensitive resin compositions having a wide exposure latitude, a precursor composition for providing such a photosensitive resin composition, a method for producing a precursor composition, a cured film, a method for producing a cured film; and a semiconductor device. The precursor composition is a precursor composition containing at least one kind of heterocycle-containing polymer precursor, in which the heterocycle-containing polymer precursor is selected from a polyimide precursor and a polybenzoxazole precursor; and the dispersity which is a weight-average molecular weight/a number-average molecular weight of the heterocycle-containing polymer precursor is 2.5 or more.
    Type: Grant
    Filed: December 22, 2017
    Date of Patent: January 7, 2020
    Assignee: FUJIFILM Corporation
    Inventors: Akinori Shibuya, Yu Iwai, Takeshi Kawabata, Ichiro Koyama
  • Publication number: 20190382623
    Abstract: There are provided a composition for forming an adhesive film for imprinting having excellent adhesiveness and wettability, an adhesive film, a laminate, a method for producing a cured product pattern, and a method for manufacturing a circuit substrate. A composition for forming an adhesive film for imprinting contains a resin having a polymerizable group; and a solvent, in which the resin has at least one kind of a repeating unit derived from a polymerizable compound having a C log P value less than or equal to 0, and solubility of the resin in water at 25° C. is greater than or equal to 1 mass %, provided that the C log P value is a coefficient showing affinity of an organic compound with respect to water and 1-octanol.
    Type: Application
    Filed: August 21, 2019
    Publication date: December 19, 2019
    Applicant: FUJIFILM Corporation
    Inventors: Naoya SHIMOJU, Akinori SHIBUYA, Yuichiro GOTO
  • Patent number: 10501580
    Abstract: A photosensitive resin composition using a polyimide precursor composition, a cured film, a method for producing a cured film, a semiconductor device, and a method for producing a polyimide precursor composition are provided. In the polyimide precursor composition, the molar ratio of repeating units represented by General Formula (1-2) among structural isomers of the polyimide precursor is 60% to 90% by mole. In General Formula (1-2), A1 and A2 each independently represents an oxygen atom or NH, R111 and R112 each independently represents a single bond or a divalent organic group, and R113 and R114 each independently represents a hydrogen atom or a monovalent organic group.
    Type: Grant
    Filed: November 28, 2017
    Date of Patent: December 10, 2019
    Assignee: FUJIFILM Corporation
    Inventors: Takeshi Kawabata, Takuma Amemiya, Hidekazu Oohashi, Yu Iwai, Akinori Shibuya