Patents by Inventor Akio Kawabata
Akio Kawabata has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 10847438Abstract: A CNT-metal composite structure is formed by forming a plurality of CNTs which stand side by side from a base substance, forming a sheet-shaped support film which covers upper ends of the CNTs, and filling gaps each present between adjacent ones of the CNTs with a metal. By this structure, highly reliable bonding sheet and heat dissipation mechanism which are very excellent in heat dissipation efficiency, and manufacturing methods of these are realized.Type: GrantFiled: October 23, 2018Date of Patent: November 24, 2020Assignee: FUJITSU LIMITEDInventor: Akio Kawabata
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Publication number: 20190057925Abstract: A CNT-metal composite structure is formed by forming a plurality of CNTs which stand side by side from a base substance, forming a sheet-shaped support film which covers upper ends of the CNTs, and filling gaps each present between adjacent ones of the CNTs with a metal. By this structure, highly reliable bonding sheet and heat dissipation mechanism which are very excellent in heat dissipation efficiency, and manufacturing methods of these are realized.Type: ApplicationFiled: October 23, 2018Publication date: February 21, 2019Inventor: Akio KAWABATA
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Publication number: 20160104655Abstract: A CNT-metal composite structure is formed by forming a plurality of CNTs which stand side by side from a base substance, forming a sheet-shaped support film which covers upper ends of the CNTs, and filling gaps each present between adjacent ones of the CNTs with a metal. By this structure, highly reliable bonding sheet and heat dissipation mechanism which are very excellent in heat dissipation efficiency, and manufacturing methods of these are realized.Type: ApplicationFiled: December 18, 2015Publication date: April 14, 2016Applicant: FUJITSU LIMITEDInventor: Akio KAWABATA
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Publication number: 20140037902Abstract: With TiN being a base material, TiN fine particles are deposited on a silicone substrate by, for example, a laser ablation method so that diameters of the TiN fine particles are about 3 nm, and thereafter, Co fine particles are deposited on the silicon substrate on which the TiN fine particles are deposited, by, for example, the laser ablation method so that sizes of the Co fine particles are equal to or smaller than sizes of the fine particles of the TiN fine particles, here about 1 nm in diameter.Type: ApplicationFiled: October 8, 2013Publication date: February 6, 2014Applicant: FUJITSU SEMICONDUCTOR LIMITEDInventor: Akio Kawabata
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Patent number: 8574679Abstract: With TiN being a base material, TiN fine particles are deposited on a silicone substrate by, for example, a laser ablation method so that diameters of the TiN fine particles are about 3 nm, and thereafter, Co fine particles are deposited on the silicon substrate on which the TiN fine particles are deposited, by, for example, the laser ablation method so that sizes of the Co fine particles are equal to or smaller than sizes of the fine particles of the TiN fine particles, here about 1 nm in diameter.Type: GrantFiled: February 29, 2008Date of Patent: November 5, 2013Assignee: Fujitsu Semiconductor LimitedInventor: Akio Kawabata
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Patent number: 8535635Abstract: A method of manufacturing carbon cylindrical structures, as represented by carbon nanotubes, by growing them on a substrate using a chemical vapor deposition (CVD) method, comprising the steps of implanting metal ions to the substrate surface and then growing the carbon cylindrical structures using the metal ions as a catalyst. A method of manufacturing carbon nanotubes comprising a step of using nano-carbon material as seed material for growing carbon nanotubes is also disclosed. A biopolymer detection device comprising vibration inducing part for inducing vibration, binding part capable of resonating with the vibration induced by the vibration inducing part and capable of binding or interacting with a target biopolymer, and detection part for detecting whether or not the binding part have bound or interacted with the target biopolymer, is also disclosed.Type: GrantFiled: June 19, 2009Date of Patent: September 17, 2013Assignee: Fujitsu LimitedInventors: Yuji Awano, Akio Kawabata, Shozo Fujita
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Patent number: 8501108Abstract: When growing carbon nanotubes, a substrate is delivered into a thermal CVD chamber whose internal temperature is a room temperature, and a mixed gas of an inert gas and a raw gas is introduced in the inside thereof. After a pressure inside of the chamber is stabilized at 1 kPa, the temperature in the chamber is raised to 510° C. in 1 minute. As a result, the carbon nanotubes start to grow linearly from the respective catalytic particles without any fusion of each of the catalytic particles. Subsequently, the temperature and an atmosphere are maintained for about 30 minutes. Once the carbon nanotubes start to grow, surfaces of the catalytic particles are covered by carbon, so that any fusion of each of the catalytic particles can be avoided even during the maintenance for about 30 minutes.Type: GrantFiled: February 7, 2011Date of Patent: August 6, 2013Assignee: Fujitsu LimitedInventor: Akio Kawabata
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Patent number: 8372487Abstract: After forming an opening, a resist film is formed on the entire surface and a resist pattern is formed by patterning the resist film. The shape of the resist pattern is such that it covers one side of the bottom of the opening. As a result, a Si substrate is exposed only in one part of the opening. Then, using the resist pattern as a mask, a catalytic layer is formed on the bottom of the opening. Then, the resist pattern is removed. Carbon nanotubes are grown on the catalytic layer. At this time, since the catalytic layer is formed on only one side of the bottom of the opening, the Van der Waals force biased towards that side works horizontally on the growing carbon nanotubes. Therefore, the carbon nanotubes are attracted towards the nearest side of the SiO2 film and grow biased towards that side.Type: GrantFiled: June 4, 2009Date of Patent: February 12, 2013Assignee: Fujitsu LimitedInventors: Akio Kawabata, Mizuhisa Nihei, Daiyu Kondo, Shintaro Sato
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Patent number: 8277770Abstract: Carbon atoms are fed to a catalytic metal particle 10 having a atomic arrangement of triangular lattices in a round (or partly round) of a side wall, and a graphen sheet 18 having a six-membered structure reflecting the atomic arrangement of the triangular lattices is consecutively formed by the metal catalyst, whereby a tubular structure of the carbon atoms is formed. Thus, the chirality of the tubular structure can be controlled by the growth direction of the graphen sheet with respect to the direction of the triangular lattices, and the diameter of the tubular structure can be controlled by the size of the catalytic metal particle.Type: GrantFiled: August 1, 2007Date of Patent: October 2, 2012Assignees: Fujitsu Limited, Meijo University Educational FoundationInventors: Yuji Awano, Shigeya Naritsuka, Akio Kawabata, Takahiro Maruyama
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Patent number: 8163647Abstract: An electronic device having a structure of an ohmic connection to a carbon element cylindrical structure body, wherein a metal material is positioned inside the junction part of a carbon element cylindrical structure body joined to a connection objective and the carbon element cylindrical structure body and the connection objective are connected by an ohmic contact. Methods for producing such an electronic device are also disclosed. Further, a method for growing a carbon nanotube is disclosed.Type: GrantFiled: July 8, 2009Date of Patent: April 24, 2012Assignee: Fujitsu LimitedInventors: Akio Kawabata, Mizuhisa Nihei
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Patent number: 8093147Abstract: An aggregate structure of carbon fibers, organized by a plurality of carbon fibers, includes, an aggregate of the carbon fibers aligned in a lengthwise direction, in which a density of the carbon fibers at one side end is different from a density of the carbon fibers at the other side end.Type: GrantFiled: June 11, 2010Date of Patent: January 10, 2012Assignee: Fujitsu LimitedInventors: Akio Kawabata, Shintaro Sato
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Patent number: 8029760Abstract: According to a method of manufacturing carbon nanotubes, minute concavities and convexities are formed at a surface of a substrate, a catalyst metal layer having a predetermined film thickness is formed on the surface having the concavities and convexities, the substrate is subject to a heat treatment at a predetermined temperature to change the catalyst metal layer into a plurality of isolated fine particles. The catalyst metal fine particles have a uniform particle diameter and uniform distribution. Then, the substrate supporting the plurality of fine particles is placed in a carbon-containing gas atmosphere to grow carbon nanotubes on the catalyst metal fine particles by a CVD method using the carbon-containing gas. The carbon nanotubes can be formed to have a desired diameter and a desired shell number with superior reproducibility.Type: GrantFiled: September 29, 2008Date of Patent: October 4, 2011Assignee: Fujitsu LimitedInventors: Daiyu Kondo, Akio Kawabata, Shintaro Sato, Taisuke Iwai, Mizuhisa Nihei
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Publication number: 20110142727Abstract: When growing carbon nanotubes, a substrate is delivered into a thermal CVD chamber whose internal temperature is a room temperature, and a mixed gas of an inert gas and a raw gas is introduced in the inside thereof. After a pressure inside of the chamber is stabilized at 1 kPa, the temperature in the chamber is raised to 510° C. in 1 minute. As a result, the carbon nanotubes start to grow linearly from the respective catalytic particles without any fusion of each of the catalytic particles. Subsequently, the temperature and an atmosphere are maintained for about 30 minutes. Once the carbon nanotubes start to grow, surfaces of the catalytic particles are covered by carbon, so that any fusion of each of the catalytic particles can be avoided even during the maintenance for about 30 minutes.Type: ApplicationFiled: February 7, 2011Publication date: June 16, 2011Applicant: FUJITSU LIMITEDInventor: Akio Kawabata
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Patent number: 7948081Abstract: A semiconductor device uses a carbon nanotube structure, which reduces an electric resistance and a thermal resistance by increasing a density of the carbon nanotubes. An insulation film covers a first electrically conductive material. A second electrically conductive material is provided on the insulation film. A plurality of carbon nanotubes extend through the insulation film by being filled in an opening part that exposes the first electrically conductive material. The carbon nanotubes electrically connect the first electrically conductive material and the second electrically conductive material to each other. Ends of the carbon nanotubes are fixed to a recessed part provided on a surface of the first electrically conductive material.Type: GrantFiled: January 25, 2005Date of Patent: May 24, 2011Assignee: Fujitsu LimitedInventors: Akio Kawabata, Mizuhisa Nihei, Masahiro Horibe
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Patent number: 7906095Abstract: When growing carbon nanotubes, a substrate is delivered into a thermal CVD chamber whose internal temperature is a room temperature, and a mixed gas of an inert gas and a raw gas is introduced in the inside thereof. After a pressure inside of the chamber is stabilized at 1 kPa, the temperature in the chamber is raised to 510° C. in 1 minute. As a result, the carbon nanotubes start to grow linearly from the respective catalytic particles without any fusion of each of the catalytic particles. Subsequently, the temperature and an atmosphere are maintained for about 30 minutes. Once the carbon nanotubes start to grow, surfaces of the catalytic particles are covered by carbon, so that any fusion of each of the catalytic particles can be avoided even during the maintenance for about 30 minutes.Type: GrantFiled: June 26, 2008Date of Patent: March 15, 2011Assignee: Fujitsu LimitedInventor: Akio Kawabata
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Publication number: 20100317187Abstract: An aggregate structure of carbon fibers, organized by a plurality of carbon fibers, includes, an aggregate of the carbon fibers aligned in a lengthwise direction, in which a density of the carbon fibers at one side end is different from a density of the carbon fibers at the other side end.Type: ApplicationFiled: June 11, 2010Publication date: December 16, 2010Applicant: FUJITSU LIMITEDInventors: Akio KAWABATA, Shintaro SATO
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Publication number: 20100316558Abstract: An aggregate structure of carbon fibers, organized by a plurality of carbon fibers, includes, an aggregate of the carbon fibers aligned in a lengthwise direction, in which a density of the carbon fibers at one side end is different from a density of the carbon fibers at the other side end.Type: ApplicationFiled: June 11, 2010Publication date: December 16, 2010Applicant: FUJITSU LIMITEDInventors: Akio KAWABATA, Shintaro Sato
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Patent number: 7736615Abstract: An aggregate structure of carbon fibers, organized by a plurality of carbon fibers, includes, an aggregate of the carbon fibers aligned in a lengthwise direction, in which a density of the carbon fibers at one side end is different from a density of the carbon fibers at the other side end.Type: GrantFiled: September 24, 2008Date of Patent: June 15, 2010Assignee: Fujitsu LimitedInventors: Akio Kawabata, Shintaro Sato
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Publication number: 20100124529Abstract: A method of manufacturing carbon cylindrical structures, as represented by carbon nanotubes, by growing them on a substrate using a chemical vapor deposition (CVD) method, comprising the steps of implanting metal ions to the substrate surface and then growing the carbon cylindrical structures using the metal ions as a catalyst. A method of manufacturing carbon nanotubes comprising a step of using nano-carbon material as seed material for growing carbon nanotubes is also disclosed. A biopolymer detection device comprising vibration inducing part for inducing vibration, binding part capable of resonating with the vibration induced by the vibration inducing part and capable of binding or interacting with a target biopolymer, and detection part for detecting whether or not the binding part have bound or interacted with the target biopolymer, is also disclosed.Type: ApplicationFiled: June 19, 2009Publication date: May 20, 2010Applicant: FUJITSU LIMTEDInventors: Yuji Awano, Akio Kawabata, Shozo Fujita
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Publication number: 20090291216Abstract: After forming an opening, a resist film is formed on the entire surface and a resist pattern is formed by patterning the resist film. The shape of the resist pattern is such that it covers one side of the bottom of the opening. As a result, a Si substrate is exposed only in one part of the opening. Then, using the resist pattern as a mask, a catalytic layer is formed on the bottom of the opening. Then, the resist pattern is removed. Carbon nanotubes are grown on the catalytic layer. At this time, since the catalytic layer is formed on only one side of the bottom of the opening, the Van der Waals force biased towards that side works horizontally on the growing carbon nanotubes. Therefore, the carbon nanotubes are attracted towards the nearest side of the SiO2 film and grow biased towards that side.Type: ApplicationFiled: June 4, 2009Publication date: November 26, 2009Applicant: FUJITSU LIMITEDInventors: Akio Kawabata, Mizuhisa Nihei, Daiyu Kondo, Shintaro Sato