Patents by Inventor Akio Kawabata

Akio Kawabata has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20090269921
    Abstract: An electronic device having a structure of an ohmic connection to a carbon element cylindrical structure body, wherein a metal material is positioned inside the junction part of a carbon element cylindrical structure body joined to a connection objective and the carbon element cylindrical structure body and the connection objective are connected by an ohmic contact. Methods for producing such an electronic device are also disclosed. Further, a method for growing a carbon nanotube is disclosed.
    Type: Application
    Filed: July 8, 2009
    Publication date: October 29, 2009
    Applicant: FUJITSU LIMITED
    Inventors: Akio Kawabata, Mizuhisa Nihei
  • Publication number: 20090136412
    Abstract: Carbon atoms are fed to a catalytic metal particle 10 having a atomic arrangement of triangular lattices in a round (or partly round) of a side wall, and a graphen sheet 18 having a six-membered structure reflecting the atomic arrangement of the triangular lattices is consecutively formed by the metal catalyst, whereby a tubular structure of the carbon atoms is formed. Thus, the chirality of the tubular structure can be controlled by the growth direction of the graphen sheet with respect to the direction of the triangular lattices, and the diameter of the tubular structure can be controlled by the size of the catalytic metal particle.
    Type: Application
    Filed: August 1, 2007
    Publication date: May 28, 2009
    Applicants: FUJITSU LIMITED, MEIJO UNIVERSITY EDUCATIONAL FOUNDATION
    Inventors: Yuji Awano, Shigeya Naritsuka, Akio Kawabata, Takahiro Maruyama
  • Patent number: 7504570
    Abstract: A method of manufacturing carbon nanotubes that is capable of growing carbon nanotubes on a substrate by a CVD method without giving rise to residual carbon impurities is provided. The method of manufacturing carbon nanotubes according to the present invention is a method in which carbon nanotubes are grown on a substrate by a chemical vapor deposition (CVD) process using a reaction gas containing a compound for the carbon source, wherein a compound having a carbon skeleton and a functional group which is effective for removing carbon impurities that deposit during the growth of carbon nanotubes is used as the compound for the carbon source.
    Type: Grant
    Filed: June 20, 2005
    Date of Patent: March 17, 2009
    Assignee: Fujitsu Limited
    Inventor: Akio Kawabata
  • Publication number: 20090035209
    Abstract: According to a method of manufacturing carbon nanotubes, minute concavities and convexities are formed at a surface of a substrate, a catalyst metal layer having a predetermined film thickness is formed on the surface having the concavities and convexities, the substrate is subject to a heat treatment at a predetermined temperature to change the catalyst metal layer into a plurality of isolated fine particles. The catalyst metal fine particles have a uniform particle diameter and uniform distribution. Then, the substrate supporting the plurality of fine particles is placed in a carbon-containing gas atmosphere to grow carbon nanotubes on the catalyst metal fine particles by a CVD method using the carbon-containing gas. The carbon nanotubes can be formed to have a desired diameter and a desired shell number with superior reproducibility.
    Type: Application
    Filed: September 29, 2008
    Publication date: February 5, 2009
    Applicant: FUJITSU LIMITED
    Inventors: Daiyu KONDO, Akio KAWABATA, Shintaro SATO, Taisuke IWAI, Mizuhisa NIHEI
  • Publication number: 20090016951
    Abstract: An aggregate structure of carbon fibers, organized by a plurality of carbon fibers, includes, an aggregate of the carbon fibers aligned in a lengthwise direction, in which a density of the carbon fibers at one side end is different from a density of the carbon fibers at the other side end.
    Type: Application
    Filed: September 24, 2008
    Publication date: January 15, 2009
    Applicant: FUJITSU LIMITED
    Inventors: Akio KAWABATA, Shintaro SATO
  • Publication number: 20080260618
    Abstract: When growing carbon nanotubes, a substrate is delivered into a thermal CVD chamber whose internal temperature is a room temperature, and a mixed gas of an inert gas and a raw gas is introduced in the inside thereof. After a pressure inside of the chamber is stabilized at 1 kPa, the temperature in the chamber is raised to 510° C. in 1 minute. As a result, the carbon nanotubes start to grow linearly from the respective catalytic particles without any fusion of each of the catalytic particles. Subsequently, the temperature and an atmosphere are maintained for about 30 minutes. Once the carbon nanotubes start to grow, surfaces of the catalytic particles are covered by carbon, so that any fusion of each of the catalytic particles can be avoided even during the maintenance for about 30 minutes.
    Type: Application
    Filed: June 26, 2008
    Publication date: October 23, 2008
    Applicant: FUJITSU LIMITED
    Inventor: Akio KAWABATA
  • Publication number: 20080241493
    Abstract: With TiN being a base material, TiN fine particles are deposited on a silicone substrate by, for example, a laser ablation method so that diameters of the TiN fine particles are about 3 nm, and thereafter, Co fine particles are deposited on the silicon substrate on which the TiN fine particles are deposited, by, for example, the laser ablation method so that sizes of the Co fine particles are equal to or smaller than sizes of the fine particles of the TiN fine particles, here about 1 nm in diameter.
    Type: Application
    Filed: February 29, 2008
    Publication date: October 2, 2008
    Applicant: FUJITSU LIMITED
    Inventor: Akio Kawabata
  • Patent number: 7417320
    Abstract: A Ti film is pattern-formed on a desired portion on a silicon substrate, and a Co film is formed on the substrate so as to cover the Ti film. CNTs are formed only on a portion, under which the Ti film is formed, of the surface of the Co film at approximately 600° C. by a thermal CVD method. The length of the CNT can be controlled by adjusting the thickness of the Ti film.
    Type: Grant
    Filed: July 14, 2005
    Date of Patent: August 26, 2008
    Assignee: Fujitsu Limited
    Inventors: Akio Kawabata, Mizuhisa Nihei, Masahiro Horibe, Shintaro Sato, Daiyu Kondo, Yuji Awano
  • Publication number: 20080105982
    Abstract: A method of manufacturing a semiconductor device having an interconnection part formed of multiple carbon nanotubes is disclosed. The method includes the steps of (a) forming a growth mode control layer controlling the growth mode of the carbon nanotubes, (b) forming a catalyst layer on the growth mode control layer, and (c) causing the carbon nanotubes to grow by heating the catalyst layer by thermal CVD so that the carbon nanotubes serve as the interconnection part. The growth mode control layer is formed by sputtering or vacuum deposition in an atmospheric gas, using a metal selected from a group of Ti, Mo, V, Nb, and W. The growth mode is controlled in accordance with a predetermined concentration of oxygen gas of the atmospheric gas.
    Type: Application
    Filed: July 3, 2006
    Publication date: May 8, 2008
    Applicant: FUJITSU LIMITED
    Inventors: Masahiro Horibe, Akio Kawabata, Mizuhisa Nihei
  • Patent number: 7368823
    Abstract: A method of manufacturing a semiconductor device having an interconnection part formed of multiple carbon nanotubes is disclosed. The method includes the steps of (a) forming a growth mode control layer controlling the growth mode of the carbon nanotubes, (b) forming a catalyst layer on the growth mode control layer, and (c) causing the carbon nanotubes to grow by heating the catalyst layer by thermal CVD so that the carbon nanotubes serve as the interconnection part. The growth mode control layer is formed by sputtering or vacuum deposition in an atmospheric gas, using a metal selected from a group of Ti, Mo, V, Nb, and W. The growth mode is controlled in accordance with a predetermined concentration of oxygen gas of the atmospheric gas.
    Type: Grant
    Filed: July 3, 2006
    Date of Patent: May 6, 2008
    Assignee: Fujitsu Limited
    Inventors: Masahiro Horibe, Akio Kawabata, Mizuhisa Nihei
  • Publication number: 20070003471
    Abstract: A method of manufacturing carbon nanotubes that is capable of growing carbon nanotubes on a substrate by a CVD method without giving rise to residual carbon impurities is provided. The method of manufacturing carbon nanotubes according to the present invention is a method in which carbon nanotubes are grown on a substrate by a chemical vapor deposition (CVD) process using a reaction gas containing a compound for the carbon source, wherein a compound having a carbon skeleton and a functional group which is effective for removing carbon impurities that deposit during the growth of carbon nanotubes is used as the compound for the carbon source.
    Type: Application
    Filed: June 20, 2005
    Publication date: January 4, 2007
    Applicant: FUJITSU LIMITED
    Inventor: Akio Kawabata
  • Publication number: 20060290003
    Abstract: A Ti film is pattern-formed on a desired portion on a silicon substrate, and a Co film is formed on the substrate so as to cover the Ti film. CNTs are formed only on a portion, under which the Ti film is formed, of the surface of the Co film at approximately 600° C. by a thermal CVD method. The length of the CNT can be controlled by adjusting the thickness of the Ti film.
    Type: Application
    Filed: July 14, 2005
    Publication date: December 28, 2006
    Applicant: FUJITSU LIMITED
    Inventors: Akio Kawabata, Mizuhisa Nihei, Masahiro Horibe, Shintaro Sato, Daiyu Kondo, Yuji Awano
  • Publication number: 20060212974
    Abstract: After forming an opening, a resist film is formed on the entire surface and a resist pattern is formed by patterning the resist film. The shape of the resist pattern is such that it covers one side of the bottom of the opening. As a result, a Si substrate is exposed only in one part of the opening. Then, using the resist pattern as a mask, a catalytic layer is formed on the bottom of the opening. Then, the resist pattern is removed. Carbon nanotubes are grown on the catalytic layer. At this time, since the catalytic layer is formed on only one side of the bottom of the opening, the Van der Waals force biased towards that side works horizontally on the growing carbon nanotubes. Therefore, the carbon nanotubes are attracted towards the nearest side of the SiO2 film and grow biased towards that side.
    Type: Application
    Filed: July 29, 2005
    Publication date: September 21, 2006
    Applicant: Fujitsu Limited
    Inventors: Akio Kawabata, Mizuhisa Nihei, Daiyu Kondo, Shintaro Sato
  • Patent number: 7094692
    Abstract: A method of manufacturing a semiconductor device having an interconnection part formed of multiple carbon nanotubes is disclosed. The method includes the steps of (a) forming a growth mode control layer controlling the growth mode of the carbon nanotubes, (b) forming a catalyst layer on the growth mode control layer, and (c) causing the carbon nanotubes to grow by heating the catalyst layer by thermal CVD so that the carbon nanotubes serve as the interconnection part. The growth mode control layer is formed by sputtering or vacuum deposition in an atmospheric gas, using a metal selected from a group of Ti, Mo, V, Nb, and W. The growth mode is controlled in accordance with a predetermined concentration of oxygen gas of the atmospheric gas.
    Type: Grant
    Filed: October 26, 2004
    Date of Patent: August 22, 2006
    Assignee: Fujitsu Limited
    Inventors: Masahiro Horibe, Akio Kawabata, Mizuhisa Nihei
  • Publication number: 20060071334
    Abstract: A semiconductor device uses a carbon nanotube structure, which reduces an electric resistance and a thermal resistance by increasing a density of the carbon nanotubes. An insulation film covers a first electrically conductive material. A second electrically conductive material is provided on the insulation film. A plurality of carbon nanotubes extend through the insulation film by being filled in an opening part that exposes the first electrically conductive material. The carbon nanotubes electrically connect the first electrically conductive material and the second electrically conductive material to each other. Ends of the carbon nanotubes are fixed to a recessed part provided on a surface of the first electrically conductive material.
    Type: Application
    Filed: January 25, 2005
    Publication date: April 6, 2006
    Applicant: FUJITSU LIMITED
    Inventors: Akio Kawabata, Mizuhisa Nihei, Masahiro Horibe
  • Publication number: 20050215049
    Abstract: A method of manufacturing a semiconductor device having an interconnection part formed of multiple carbon nanotubes is disclosed. The method includes the steps of (a) forming a growth mode control layer controlling the growth mode of the carbon nanotubes, (b) forming a catalyst layer on the growth mode control layer, and (c) causing the carbon nanotubes to grow by heating the catalyst layer by thermal CVD so that the carbon nanotubes serve as the interconnection part. The growth mode control layer is formed by sputtering or vacuum deposition in an atmospheric gas, using a metal selected from a group of Ti, Mo, V, Nb, and W. The growth mode is controlled in accordance with a predetermined concentration of oxygen gas of the atmospheric gas.
    Type: Application
    Filed: October 26, 2004
    Publication date: September 29, 2005
    Inventors: Masahiro Horibe, Akio Kawabata, Mizuhisa Nihei
  • Publication number: 20040182600
    Abstract: An electronic device having a structure of an ohmic connection to a carbon element cylindrical structure body, wherein a metal material is positioned inside the junction part of a carbon element cylindrical structure body joined to a connection objective and the carbon element cylindrical structure body and the connection objective are connected by an ohmic contact. Methods for producing such an electronic device are also disclosed. Further, a method for growing a carbon nanotube is disclosed.
    Type: Application
    Filed: February 9, 2004
    Publication date: September 23, 2004
    Applicant: FUJITSU LIMITED
    Inventors: Akio Kawabata, Mizuhisa Nihei
  • Publication number: 20030124717
    Abstract: A method of manufacturing carbon cylindrical structures, as represented by carbon nanotubes, by growing them on a substrate using a chemical vapor deposition (CVD) method, comprising the steps of implanting metal ions to the substrate surface and then growing the carbon cylindrical structures using the metal ions as a catalyst. A method of manufacturing carbon nanotubes comprising a step of using nano-carbon material as seed material for growing carbon nanotubes is also disclosed. A biopolymer detection device comprising vibration inducing means for inducing vibration, binding means capable of resonating with the vibration induced by the vibration inducing means and capable of binding or interacting with a target biopolymer, and detection means for detecting whether or not the binding means have bound or interacted with the target biopolymer, is also disclosed.
    Type: Application
    Filed: November 25, 2002
    Publication date: July 3, 2003
    Inventors: Yuji Awano, Akio Kawabata, Shozo Fujita
  • Patent number: 5937738
    Abstract: In a coffee extracting apparatus for extracting coffee essence from the coffee material within an extracting device (10) with use of compressed air generated in an air compressor (11), use is made of an accumulator (23) for accumulating the compressed air. The accumulator is connected to an air passage (12) which connects the extracting device with the air compressor. An air control valve (22) is disposed in the air passage and is for controlling flow of the compressed air to make the accumulator accumulate the compressed air.
    Type: Grant
    Filed: June 10, 1997
    Date of Patent: August 17, 1999
    Assignee: Sanden Corporation
    Inventors: Karin Okamura, Isao Katou, Makoto Kobayashi, Akio Kawabata
  • Patent number: 5911810
    Abstract: A coffee brewing apparatus has a first cylinder, having a top opening and a bottom opening. A vertically movable second cylinder containing ground coffee, having a top opening and a bottom opening, is disposed below the first cylinder coaxially therewith. A vertically movable upwardly urged plunger, having a top head and a bottom head, is disposed through the bottom opening of the first cylinder, coaxially therewith, in a manner that the top head is sealingly and slidingly fitted in the first cylinder and the bottom head is adapted to be sealingly and slidingly fitted in the second cylinder through the top opening thereof. The plunger has a hot water exit channel vertically therethrough and a pressure-operated hot water release valve disposed in the channel.
    Type: Grant
    Filed: June 9, 1998
    Date of Patent: June 15, 1999
    Assignee: Sanden Corp.
    Inventor: Akio Kawabata