Abstract: An object of the invention is to provide a stage apparatus that realizes compatibility between long stroke driving and reduction of a burden on a drive mechanism. In order to achieve the above object, there is suggested a stage apparatus including a first table that moves a sample in a first direction, a second table that moves the first table in a second direction different from the first direction, moving mechanisms that move the tables, respectively, a movable body that supports a moving mechanism, and a third moving mechanism that moves the movable body so as to follow the second table.

Abstract: To provide a stage device and a charged particle beam device using the same capable of effectively suppressing thermal deformation of a stage generated by temperature increase caused by heat generated by a linear motor. The stage device including a table, a linear motor driving the table in a prescribed direction, in which the table and a moving part of the linear motor are connected by components, a slide unit is attached to the component, movement of which is constrained by a rail fixed to a base, and at the same time, the slide unit is positioned vertically below a place where the component is joined to the table, thereby suppressing thermal deformation of the table.

Abstract: A magnetic angle detector (10) includes a detected object (20a) including a plurality of concave and convex parts (21a) formed at a predetermined pitch on an outer peripheral surface, and a detection body (30a) disposed to face an outer peripheral surface of the detected object. The detection body is a polyhedron, and at least two magnetic detection units (34a and 34b) matching a different detected object are arranged on one plane of the polyhedron. The at least two magnetic detection units are arranged rotationally symmetrically around an arbitrary axis of the detection body.

Abstract: A manufacturing adjustment system includes a decision part and a tolerance setting part. The decision part decides whether part dimensions calculated by a part dimension calculation part fall within a predetermined range of dimensions and a total machining time calculated by a total machining-time calculation part falls within a predetermined time. The tolerance setting part sets a workpiece tolerance for each machine based on the decision result of the decision part when the workpieces are produced by the machines.

Abstract: An object of this disclosure is to provide a fuel injection device that can reliably detect an operation timing of a valve body, that is, a valve opening timing with high accuracy. The current of an electromagnetic valve reaches I2 at time t3, an FET 201 and an FET 221 are turned on, and a battery voltage VB is applied to the electromagnetic valve until time t5 is reached. The amount of displacement of the valve body reaches a target amount of control lift at time t4 between time t3 and time t5, that is, a movable core 304 comes into contact with a fixed core 301. The detection of the valve opening timing is performed during the period from time t3 to time t5.

Abstract: A machine learning apparatus able to learn a point of connection of a ground wire or a shield wire optimal for reducing noise. It is a machine learning apparatus learning a point of connection of a ground wire or shield wire used in an electric motor apparatus provided with a status observing part and learning part. The status observing part observes a point of connection of a ground wire or shield wire and a feedback signal from an electric motor as status variables. The learning part learns a point of connection of a ground wire or a shield wire able to reduce noise included in the feedback signal in accordance with a training data set prepared based on the status variables.

Abstract: A rotation angle sensor for detecting a rotation angle of a shaft of the motor or shaft of a machine which is driven by a motor, equipped with a detected part at an outer circumferential part of a rotary body attached to the shaft and a detection element facing the detected part provided on a pedestal which is surrounding the shaft, wherein a recessed part which is provided at the pedestal is formed with an abutting surface which abuts against an end face of the detection element at the side far from the shaft of the detection element, the distance of the abutting surface from the axial line is made different along the peripheral direction of the pedestal, and a position of the detection element abutting against the abutting surface is moved in the peripheral direction so as to adjust the difference between the rotary body and the detection element.

Abstract: A rotation angle detection apparatus includes a rotator having a track unit to detect the rotation angle of a rotation axis; a detection unit disposed in correspondence with the track unit; a rotation angle calculation unit for calculating the rotation angle of the rotation axis based on signals generated by the detection unit; a rotation speed calculation unit for calculating the rotation speed of the rotation axis; and an abnormality detection unit for detecting an abnormality. The abnormality detection unit includes a frequency analyzing unit for calculating the frequency characteristic of the signals; a storage unit for storing the number of the signals per revolution of the rotator; a signal frequency calculation unit for calculating a signal frequency; and a determination unit for detecting the abnormality in the detection apparatus, when the frequency characteristic includes a component of a higher order than the signal frequency.

Abstract: A rotational angle detector includes a rotary element rotatable around a rotational axis line, the rotary element having a detected portion on an outer circumference, a detection element provided on a radially outside of the detected portion so as to face the detected portion, and a seat having a mounting surface on which the detection element can be mounted, the mounting surface extending around the rotational axis line. The seat is configured such that a distance between the mounting surface and the detected portion in a direction parallel to the rotational axis line varies along a circumferential direction of the seat.

Abstract: A machine learning apparatus able to learn a point of connection of a ground wire or a shield wire optimal for reducing noise. It is a machine learning apparatus learning a point of connection of a ground wire or shield wire used in an electric motor apparatus provided with a status observing part and learning part. The status observing part observes a point of connection of a ground wire or shield wire and a feedback signal from an electric motor as status variables. The learning part learns a point of connection of a ground wire or a shield wire able to reduce noise included in the feedback signal in accordance with a training data set prepared based on the status variables.

Abstract: To provide a stage device and a charged particle beam device using the same capable of effectively suppressing thermal deformation of a stage generated by temperature increase caused by heat generated by a linear motor. The stage device including a table, a linear motor driving the table in a prescribed direction, in which the table and a moving part of the linear motor are connected by components, a slide unit is attached to the component, movement of which is constrained by a rail fixed to a base, and at the same time, the slide unit is positioned vertically below a place where the component is joined to the table, thereby suppressing thermal deformation of the table.

Abstract: A rotation angle detector comprises a rotating body including a plurality of track parts, and an abnormality detecting unit for detecting an abnormality based on signals generated in detection units. The detection units generate a first signal based on a first track part and a second signal based on a second track part. The abnormality detecting unit includes a judgement unit for judging an occurrence of an abnormality when the difference between the fluctuation range of the first signal and the fluctuation range of the second signal is larger than a predetermined fluctuation range judgement value.

Abstract: A stage system includes a stage that holds an object, a linear motor mechanism that moves the stage by a thrust force generated by a current flowing through the coil, and a control section that controls the current flowing through the coil. The current flowing through the coil in a state where the stage is maintained in the static state be greater than a minimum current amount required for generating the thrust force greater than a maximum static friction force of the stage with respect to the guide rails.

Abstract: The purpose of the present invention is to provide a stage apparatus that effectively suppresses the transmission of heat generated by a drive mechanism to a sample, and a charged particle beam apparatus using the same. In order to achieve the purpose, there are proposed a stage apparatus and a charged particle beam apparatus. The stage apparatus comprises a table; a drive source that drives the table in a predetermined direction; a first connection member provided between the table and the drive source; a second connection member provided between the table and the drive source and closer to the drive source than the first member; a slide unit supported by the second connection member; and a rail guiding the slide unit in a predetermined direction, the first connection member comprising a member having a relatively low heat conductivity with respect to the second connection member.

Abstract: A stage system includes a stage that holds an object, a linear motor mechanism that moves the stage by a thrust force generated by a current flowing through the coil, and a control section that controls the current flowing through the coil. The current flowing through the coil in a state where the stage is maintained in the static state be greater than a minimum current amount required for generating the thrust force greater than a maximum static friction force of the stage with respect to the guide rails.

Abstract: An object of this disclosure is to provide a fuel injection device that can reliably detect an operation timing of a valve body, that is, a valve opening timing with high accuracy. The current of an electromagnetic valve reaches I2 at time t3, an FET 201 and an FET 221 are turned on, and a battery voltage VB is applied to the electromagnetic valve until time t5 is reached. The amount of displacement of the valve body reaches a target amount of control lift at time t4 between time t3 and time t5, that is, a movable core 304 comes into contact with a fixed core 301. The detection of the valve opening timing is performed during the period from time t3 to time t5.

Abstract: A rotation angle sensor for detecting a rotation angle of a shaft of the motor or shaft of a machine which is driven by a motor, equipped with a detected part at an outer circumferential part of a rotary body attached to the shaft and a detection element facing the detected part provided on a pedestal which is surrounding the shaft, wherein a recessed part which is provided at the pedestal is formed with an abutting surface which abuts against an end face of the detection element at the side far from the shaft of the detection element, the distance of the abutting surface from the axial line is made different along the peripheral direction of the pedestal, and a position of the detection element abutting against the abutting surface is moved in the peripheral direction so as to adjust the difference between the rotary body and the detection element.

Abstract: A touch panel system in which power consumption is reduced and detection sensitivity is enhanced, a controller for the touch panel system, and a method of operating the system. Touch panel system includes status detecting portion having status signal generating portions generating a status signal indicative of a close status of an indicator, a position calculating portion processing the status signal, thereby calculating a position of the indicator on a detecting surface, and a region setting portion for updating an effective region set in the detecting surface P based on the position of the indicator which is calculated by the position calculating portion. A first operation causes the status signal generating portions SL and DL to selectively generate a status signal and a second operation causes the position calculating portion to selectively process the status signals generated by the status signal generating portions SL and DL.

Abstract: A rotational angle detector includes a rotary element rotatable around a rotational axis line, the rotary element having a detected portion on an outer circumference, a detection element provided on a radially outside of the detected portion so as to face the detected portion, and a seat having a mounting surface on which the detection element can be mounted, the mounting surface extending around the rotational axis line. The seat is configured such that a distance between the mounting surface and the detected portion in a direction parallel to the rotational axis line varies along a circumferential direction of the seat.

Abstract: A magnetic angle detector (10) includes a detected object (20a) including a plurality of concave and convex parts (21a) formed at a predetermined pitch on an outer peripheral surface, and a detection body (30a) disposed to face an outer peripheral surface of the detected object. The detection body is a polyhedron, and at least two magnetic detection units (34a and 34b) matching a different detected object are arranged on one plane of the polyhedron. The at least two magnetic detection units are arranged rotationally symmetrically around an arbitrary axis of the detection body.