Patents by Inventor Alan J. Jensen

Alan J. Jensen has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method for processing a substrate using a system having a roller with treading
    Patent number: 6059889
    Abstract: A method for rotating wafers in a double sided scrubber where a rotating roller imparts rotary motion to a semiconductor wafer during a double sided cleaning process. The rotating roller and wafer contact at their outer edges and the friction between their outer edges causes the wafer to rotate. The roller has an outer edge with a groove in which the wafer edge is pinched. Treads or grooves extending from the groove channel liquids away from the groove to prevent wafer slippage when rotating and cleaning solutions are applied to the wafer.
    Type: Grant
    Filed: January 7, 1999
    Date of Patent: May 9, 2000
    Assignee: OnTrak Systems, Inc.
    Inventors: Alan J. Jensen, Norman A. Mertke, William Dyson, Jr., Lynn Ryle, Patrick Paino
  • Roller with treading and system including the same
    Patent number: 5862560
    Abstract: A method and apparatus for rotating wafers in a double sided scrubber where a rotating roller imparts rotary motion to a semiconductor wafer during a double sided cleaning process. The rotating roller and wafer contact at their outer edges and the friction between their outer edges causes the wafer to rotate. The roller has an outer edge with a groove in which the wafer edge is pinched. Treads or grooves extending from the groove channel liquids away from the groove to prevent wafer slippage when rotating and cleaning solutions are applied to the wafer.
    Type: Grant
    Filed: August 29, 1996
    Date of Patent: January 26, 1999
    Assignee: Ontrak Systems, Inc.
    Inventors: Alan J. Jensen, Norman A. Mertke, William Dyson, Jr., Lynn Ryle, Patrick Paino