Abstract: An alignment tool, method and system are provided for aligning a robot blade and a cassette in a workpiece handling system, in which the tool comprises a frame or fixture adapted to emulate a plurality of different types of cassettes. The frame is adapted to be supported by a cassette handler system and includes a plurality of alignment and registration surfaces adapted to emulate corresponding alignment and registration surfaces of a cassette. A removable H bar may be attached to the frame in a plurality of selectable positions to emulate one or more of a plurality of different cassette H bar positions of different types of cassettes. A kit of selectable and removable rear guide rails permit one pair of rear guide rails to be substituted for another pair of rear guide rails to permit the frame to emulate the particular rear guide rail arrangement of a plurality of different cassettes.

Abstract: A facilities connection box is provided to accommodate pre-plumbing of facilities lines required in connection with an installation of semiconductor device manufacturing equipment. The facilities connection box accommodates termination of double-containment facilities lines that are adapted to carry hazardous materials required for operation of the semiconductor device manufacturing equipment. Each double-containment facilities line is terminated in an isolation compartment of the facilities connection box. Each isolation compartment has an entry port adapted to couple to an incoming double-containment line and an exit port adapted to permit egress from the isolation compartment of a respective outgoing line.

Abstract: Methods and apparatuses for aligning workpiece and cassette handlers in an automated workpiece handling system are provided. The apparatus comprises an alignment pin and a frame adapted to be supported by a cassette handler support surface. The frame has first and second apertures defined by first and second alignment surfaces which are adapted to receive the alignment pin. The robot blade has a blade aperture which is defined by a blade alignment surface which is adapted to receive the alignment pin when the robot blade is positioned in a first predetermined position when the pin is received by the first aperture and the blade aperture. The blade alignment surface is further adapted to receive the alignment pin when the robot blade is positioned in a second predetermined position when the pin is received by the second aperture and the blade aperture.

Abstract: A carrier alignment tool system in accordance with a preferred embodiment of the present invention provides a tool and method of using the tool, which emulates the door of a substrate carrier having a removable door. The tool permits the alignment between a door opener mechanism and the load-port or other handler, on which a carrier is to be supported to be tested and corrected, until proper alignment is achieved prior to beginning substrate processing.

Abstract: An alignment tool, method and system are provided for aligning a cassette handler to a robot blade in a workpiece handling system, in which the tool comprises a frame or fixture adapted to be supported by the cassette handler support surface, in which the frame has one or more distance sensors positioned to measure the distance of a workpiece or robot blade from the sensor or a predetermined reference point or surface. In a preferred embodiment, the frame emulates a workpiece cassette and the distance sensors provide a numerical output of the distance to the workpiece. As explained in greater detail below, these distance measurements facilitate accurately leveling and aligning the cassette handler support surface relative to a workpiece supported by the robot blade such that when the frame is replaced by an actual workpiece cassette, the workpiece cassette will also be level and aligned with respect to the robot blade and the workpiece held by the blade.

Abstract: An alignment tool, method and system are provided for aligning a cassette handler to a robot blade in a workpiece handling system, in which the tool comprises a frame or fixture adapted to be supported by the cassette handler support surface, in which the frame has one or more distance sensors positioned to measure the distance of a workpiece or robot blade from the sensor or a predetermined reference point or surface. In a preferred embodiment, the frame emulates a workpiece cassette and the distance sensors provide a numerical output of the distance to the workpiece. As explained in greater detail below, these distance measurements facilitate accurately leveling and aligning the cassette handler support surface relative to a workpiece supported by the robot blade such that when the frame is replaced by an actual workpiece cassette, the workpiece cassette will also be level and aligned with respect to the robot blade and the workpiece held by the blade.

Abstract: An alignment tool, method and system are provided for aligning a robot blade and a cassette in a workpiece handling system, in which the tool comprises a frame or fixture adapted to emulate a plurality of different types of cassettes. The frame is adapted to be supported by a cassette handler system and includes a plurality of alignment and registration surfaces adapted to emulate corresponding alignment and registration surfaces of a cassette. A removable H bar may be attached to the frame in a plurality of selectable positions to emulate one or more of a plurality of different cassette H bar positions of different types of cassettes. A kit of selectable and removable rear guide rails permit one pair of rear guide rails to be substituted for another pair of rear guide rails to permit the frame to emulate the particular rear guide rail arrangement of a plurality of different cassettes.

Abstract: An alignment tool, method and system are provided for aligning a robot blade in a workpiece handling system, in which the tool comprises a frame or fixture adapted to be supported by a transfer chamber support surface or other support surface in the system, in which the frame has one or more non-contact distance sensors positioned to measure the distance of a workpiece or robot blade from the sensor or a predetermined reference point or surface. In one embodiment, the frame is used to align a robot blade relative to a robot support alignment surface in a robot chamber. In another embodiment, the frame emulates a workpiece cassette and the distance sensors provide an output to align the robot blade to a cassette support alignment surface. As a consequence, accidental scratching and breakage of workpieces such as semiconductor wafers and display substrates may be reduced or eliminated.