Abstract: Embodiments of present invention provide a SRAM memory. The SRAM memory includes a frontside and a backside; a first pull-up (PU) transistor stacked over a first pull-down (PD) transistor; a second PU transistor stacked over a second PD transistor; a frontside cross-couple at the frontside, above the first and second PU transistors, that connects a first source/drain (S/D) region of the first PU transistor with a gate of the second PU transistor; and a backside cross-couple, at the backside underneath the first and second PD transistors, that connects a first S/D region of the second PD transistor with a gate of the first PD transistor. A method of manufacturing the SRAM memory is also provided.

Abstract: Embodiments of present invention provide a semiconductor structure. The semiconductor structure includes a first device layer on top of a backside back-end-of-line (BEOL) structure; a middle BEOL structure on top of the first device layer, the middle BEOL structure including multiple layers of small pitch wires and multiple layers of large pitch wires on top of the multiple layers of small pitch wires; a second device layer on top of the middle BEOL structure; a frontside BEOL structure on top of the second device layer; a first type via connection from the second device layer to the multiple layers of small pitch wires; and a second type and a third type via connection form the second device layer to the multiple layers of large pitch wires. A method of forming the same is also provided.

Abstract: Embodiments of present invention provide a semiconductor structure. The structure includes a first cell unit including a first set of field-effect-transistors (FETs), a first cell boundary made of a first gate cut region, and a second cell boundary made of a second gate cut region; a second cell unit including a second set of FETs, a third cell boundary made of a third gate cut region, and a fourth cell boundary made of the first gate cut region; and a third cell unit including a third set of FETs, a fifth cell boundary made of the second gate cut region, and a sixth cell boundary made of a fourth gate cut region, where the first and third gate cut regions have a first width and the second and fourth gate cut region has a second width larger than the first width. A method of forming the same is also provided.

Abstract: Embodiments of present invention provide a semiconductor structure. The semiconductor structure includes a plurality of lower metal lines in a first metal level; a transition via directly on top of the plurality of lower metal lines; and an upper metal line directly on top of the transition via and the upper metal line being in a second metal level and orthogonal to the plurality of lower metal lines, where at least a first lower metal line of the plurality of lower metal lines has a recessed region and a rest region, the recessed region is directly underneath the transition via and filled with a dielectric material; and isolates the rest region of the first lower metal line from the transition via. A method of manufacturing the same is also provided.

Abstract: Embodiments of present invention provide a semiconductor structure. The semiconductor structure includes a first and a second dielectric bar each having a left sidewall and a right sidewall; a first set of nanosheets having a first end and a second end that is directly adjacent to the left sidewall of the first dielectric bar; a first conductive layer surrounding the first set of nanosheets and directly adjacent to the left sidewall of the first dielectric bar; a second set of nanosheets having a first end and a second end that is directly adjacent to the left sidewall of the second dielectric bar; and a second conductive layer surrounding the second set of nanosheets; directly adjacent to the left sidewall of the second dielectric bar; and separating the second set of nanosheets from the right sidewall of the first dielectric bar. A method of forming the same is also provided.

Abstract: Embodiments are disclosed for a system. The system includes multiple tracks. Further, one track includes a power rail for a first voltage. The system also includes a first via, disposed beneath, and in electrical contact with, the power rail. The system additionally includes a first contact, beneath, and in electrical contact with, the first via. The system further includes a first field effect transistor (FET), beneath, and in electrical isolation with, the first contact. Additionally, the system includes a second FET, beneath, and in electrical contact with, the first FET. Further, the system includes a second contact, beneath, and in electrical contact with, the second FET. Also, the system includes a second via, beneath, and in electrical contact with, the second contact. The system additionally includes a buried power rail (BPR), beneath, and in electrical contact with, the second via, wherein the BPR comprises a second voltage.

Abstract: A semiconductor structure includes an upper-level CMOS transistor layer having a plurality of upper-level N-type and P-type field effect transistors; and a frontside interconnect layer above, and interconnected with, the upper-level transistor layer. The frontside interconnect layer includes frontside power rails and frontside signal wiring, and at least three frontside interconnect layer metal levels. A lower-level CMOS transistor layer has a plurality of lower-level N-type and P-type field effect transistors; and a backside interconnect layer below, and interconnected with, the lower-level transistor layer. The backside interconnect layer includes backside power rails and backside signal wiring and at least three backside interconnect layer metal levels.

Abstract: A semiconductor structure includes an interconnect wiring level having metal lines. An insulating cut shape is disposed through a run length of one of the metal lines wherein the insulating cut shape divides the one of the metal lines into electrically isolated nets.

Abstract: A semiconductor structure, system, and method of forming a crescent-shaped dielectric isolation layer for stacked field-effect transistors (FETs). The semiconductor structure may include a transistor including an epi. The semiconductor may also include a substrate, where the epi is directly connected to the substrate. The semiconductor may also include an isolation layer directly connected to the epi and the substrate. The system may include a semiconductor structure. The method may include forming an isolation layer directly connected to a substrate. The method may also include forming a first transistor, where forming the first transistor includes growing a first epi, where the first epi is directly connected to the isolation layer and the substrate.

Abstract: A semiconductor device is provided. The semiconductor device includes an active region, a gate, a gate contact formed on the gate, the gate contact overlapping in plan view with at least a portion of the active region, and a source/drain contact formed on the active region and adjacent to the gate contact. The gate contact is offset from a centerline of the gate in a direction away from the source/drain contact.

Abstract: Embodiments provide metal tip-to-tip scaling for metal contacts. A structure includes a first metal line and a second metal line. The structure includes a spacer separating the first metal line from the second metal line, the spacer including a flat surface and curved tips, where the flat surface abuts the first metal line and the curved tips abut the second metal line.

Abstract: Embodiments disclosed herein include a semiconductor structure. The semiconductor structure may include a front-end-of-line (FEOL) including a first source/drain (S/D) adjacent to a first gate. A device may include a backside interconnect below the FEOL, with a plurality of signal lines and a plurality of power lines. A device may include an offset gate contact electrically connected between the first gate and a first signal line of the plurality of signal lines, wherein the offset gate contact is located directly below the first S/D.

Abstract: A semiconductor device is provided. The semiconductor device includes an active region, a first gate electrode, a second gate electrode having a height that is less than a height of the first gate electrode, and a gate contact formed on the first gate electrode and overlapping with the active region.

Abstract: A semiconductor device includes a top side and a bottom side opposite the top side. A central portion including a semiconductor substrate is disposed between the top side and the bottom side. A component is disposed in the central portion in contact with the semiconductor substrate. The component includes a first electrical connection from the top side and a second electrical connection from the bottom side.

Abstract: A semiconductor structure is provided that includes a self-aligned offset frontside gate contact structure and a direct backside source/drain contact structure. The presence of the off-centered frontside gate contact structure is attractive since it mitigates the risk of gate contact-to-source/drain contact shorts and it also improves the metal line, M1, spacing within the overlying frontside back-end-of-the-line (BEOL) structure.

Abstract: A semiconductor device includes a stacked transistor structure having field effect transistors on two levels. The two levels include a top side and a bottom side. Active regions are disposed on the bottom side including a leveled surface facing the top side and a faceted backside surface opposite the leveled surface. The leveled surface includes two different semiconductor materials. A backside contact in contact with the faceted backside surface forms a wraparound contact to reduce contact resistance.

Abstract: A semiconductor device includes a stacked transistor structure having field effect transistors on two levels. The two levels include a top side and bottom side. Active regions are disposed on the bottom side. The active regions include a recessed portion therein. A metal cap is disposed within the recessed portion. A contact is disposed within the metal cap to reduce contact resistance.

Abstract: A semiconductor device architecture includes a substrate and a device region including active components carried by the substrate. A plurality of tracks are on the substrate including conductive lines connecting power and signals to the active components in the device region. A first track includes a plurality of segments of a conductive line. A first segment in the first track delivers power to the device region. A second segment in the first track delivers a signal to the device region. The first segment and the second segment are arranged in the same first track.

Abstract: Embodiments of present invention provide a semiconductor structure. The semiconductor structure includes a first transistor having a first source/drain (S/D) region; a second transistor having a second S/D region, the second transistor being stacked on top of the first transistor; and a first S/D contact shared by the first S/D region of the first transistor and the second S/D region of the second transistor, where the first S/D contact has a first portion and a second portion, the first portion being in direct contact with a top surface of the first S/D region of the first transistor and in direct contact with a bottom surface of the second S/D region, and the second portion being in direct contact with an inner sidewall of the second S/D region of the second transistor. A method of manufacturing the semiconductor structure is also provided.

Abstract: A semiconductor device includes a plurality of gate caps over a plurality of gate regions, gate spacers over sidewalls of the plurality of gate regions and the plurality of gate caps, a backside contact under a first source and drain region and a dielectric cap over the first source and drain region. The first source and drain region is located between two adjacent gate regions of the plurality of gate regions.