Patents by Inventor Alexander M. Derrickson

Alexander M. Derrickson has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 11949004
    Abstract: The present disclosure relates to semiconductor structures and, more particularly, to a lateral bipolar transistor and methods of manufacture. The structure includes: an extrinsic base region; an emitter region on a first side of the extrinsic base region; a collector region on a second side of the extrinsic base region; and a gate structure comprising a gate oxide and a gate control in a same channel region as the extrinsic base region.
    Type: Grant
    Filed: November 23, 2021
    Date of Patent: April 2, 2024
    Assignee: GLOBALFOUNDRIES U.S. Inc.
    Inventors: Judson R. Holt, Vibhor Jain, Alexander M. Derrickson
  • Patent number: 11916109
    Abstract: Embodiments of the disclosure provide a bipolar transistor structure having a base with a varying horizontal width and methods to form the same. The bipolar transistor structure includes a first emitter/collector (E/C) layer on an insulator layer. A base layer is over the insulator layer. A spacer between the first E/C layer and the base layer. The base layer includes a lower base region, and the spacer is adjacent to the lower base region and the first E/C layer. An upper base region is on the lower base region and the spacer. A horizontal width of the upper base region is larger than a horizontal width of the lower base region.
    Type: Grant
    Filed: May 26, 2022
    Date of Patent: February 27, 2024
    Assignee: GlobalFoundries U.S. Inc.
    Inventors: Peter Baars, Alexander M. Derrickson, Ketankumar Harishbhai Tailor, Zhixing Zhao, Judson R. Holt
  • Patent number: 11908898
    Abstract: Embodiments of the disclosure provide a lateral bipolar transistor with a base layer of varying horizontal thickness, and related methods to form the same. A lateral bipolar transistor may include an emitter/collector (E/C) layer on a semiconductor layer. A first base layer is on the semiconductor layer and horizontally adjacent the E/C layer. The first base layer has a lower portion having a first horizontal width from the E/C layer. The first base layer also has an upper portion on the lower portion, with a second horizontal width from the E/C layer greater than the first horizontal width. A second base layer is on the first base layer and adjacent a spacer. The upper portion of the first base layer separates a lower surface of the second base layer from the E/C layer.
    Type: Grant
    Filed: November 30, 2021
    Date of Patent: February 20, 2024
    Assignee: GlobalFoundries U.S. Inc.
    Inventors: Haiting Wang, Hong Yu, Zhenyu Hu, Alexander M. Derrickson
  • Patent number: 11888050
    Abstract: Embodiments of the disclosure provide a lateral bipolar transistor structure with inner and outer spacers, and related methods. A lateral bipolar transistor structure may have an emitter/collector (E/C) layer over an insulator. The E/C layer has a first doping type. A first base layer is on the insulator and adjacent the E/C layer. The first base layer has a second doping type opposite the first doping type. A second base layer is on the first base layer and having the second doping type. A dopant concentration of the second base layer is greater than a dopant concentration of the first base layer. An inner spacer is on the E/C layer and adjacent the second base layer. An outer spacer is on the E/C layer and adjacent the inner spacer.
    Type: Grant
    Filed: December 2, 2021
    Date of Patent: January 30, 2024
    Assignee: GlobalFoundries U.S. Inc.
    Inventors: John L. Lemon, Alexander M. Derrickson, Haiting Wang, Judson R. Holt
  • Patent number: 11881395
    Abstract: Embodiments of the disclosure provide a lateral bipolar transistor on a semiconductor fin and methods to form the same. A bipolar transistor structure according to the disclosure may include a doped semiconductor layer coupled to a base contact. A first semiconductor fin on the doped semiconductor layer may have a first doping type. An emitter/collector (E/C) material may be on a sidewall of an upper portion of the first semiconductor fin. The E/C material has a second doping type opposite the first doping type. The E/C material is coupled to an E/C contact.
    Type: Grant
    Filed: December 17, 2021
    Date of Patent: January 23, 2024
    Assignee: GlobalFoundries U.S. Inc.
    Inventors: Judson R. Holt, Hong Yu, Alexander M. Derrickson
  • Patent number: 11862717
    Abstract: Embodiments of the disclosure provide a lateral bipolar transistor structure with a superlattice layer and methods to form the same. The bipolar transistor structure may have a semiconductor layer of a first single crystal semiconductor material over an insulator layer. The semiconductor layer includes an intrinsic base region having a first doping type. An emitter/collector (E/C) region may be adjacent the intrinsic base region and may have a second doping type opposite the first doping type. A superlattice layer is on the E/C region of the semiconductor layer. A raised E/C terminal, including a single crystal semiconductor material, is on the superlattice layer. The superlattice layer separates the E/C region from the raised E/C terminal.
    Type: Grant
    Filed: November 24, 2021
    Date of Patent: January 2, 2024
    Assignee: GlobalFoundries U.S. Inc.
    Inventors: Vibhor Jain, John J. Pekarik, Alvin J. Joseph, Alexander M. Derrickson, Judson R. Holt
  • Patent number: 11855197
    Abstract: The present disclosure relates to semiconductor structures and, more particularly, to vertical bipolar transistors and methods of manufacture. The structure includes: an intrinsic base region comprising semiconductor-on-insulator material; a collector region confined within an insulator layer beneath the semiconductor-on-insulator material; an emitter region above the intrinsic base region; and an extrinsic base region above the intrinsic base region.
    Type: Grant
    Filed: January 20, 2022
    Date of Patent: December 26, 2023
    Assignee: GLOBALFOUNDRIES U.S. INC.
    Inventors: Shesh Mani Pandey, Alexander M. Derrickson, Judson R. Holt, Vibhor Jain
  • Patent number: 11843044
    Abstract: Embodiments of the disclosure provide a bipolar transistor structure on a semiconductor fin. The semiconductor fin may be on a substrate and may have a first doping type, a length in a first direction, and a width in a second direction perpendicular to the first direction. The semiconductor fin includes a first portion and a second portion adjacent the first portion along the length of the semiconductor fin. The second portion is coupled to a base contact. A dopant concentration of the first portion is less than a dopant concentration of the second portion. An emitter/collector (E/C) material is adjacent the first portion along the width of the semiconductor fin. The E/C material has a second doping type opposite the first doping type. The E/C material is coupled to an E/C contact.
    Type: Grant
    Filed: January 19, 2022
    Date of Patent: December 12, 2023
    Assignee: GLOBALFOUNDRIES U.S. Inc.
    Inventors: Hong Yu, Alexander M. Derrickson, Judson R. Holt
  • Patent number: 11837460
    Abstract: The present disclosure relates to semiconductor structures and, more particularly, to a lateral bipolar transistor and methods of manufacture. The structure includes: an extrinsic base region composed of semiconductor material; an emitter region on a first side of the extrinsic base region; a collector region on a second side of the extrinsic base region; and an extrinsic base contact wrapping around the semiconductor material of the extrinsic base region.
    Type: Grant
    Filed: December 14, 2021
    Date of Patent: December 5, 2023
    Assignee: GLOBALFOUNDRIES U.S. INC.
    Inventors: Jagar Singh, Alexander M. Derrickson, Alexander Martin
  • Patent number: 11837653
    Abstract: Disclosed is a semiconductor structure with a lateral bipolar junction transistor (BJT). This semiconductor structure can be readily integrated into advanced silicon-on-insulator (SOI) technology platforms. Furthermore, to maintain or improve upon performance characteristics (e.g., cut-off frequency (fT)/maximum oscillation frequency (fmax) and beta cut-off frequency) that would otherwise be negatively impacted due to changing of the orientation of the BJT from vertical to lateral, the semiconductor structure can further include a dielectric stress layer (e.g., a tensilely strained layer in the case of an NPN-type transistor or a compressively strained layer in the case of a PNP-type transistor) partially covering the lateral BJT for charge carrier mobility enhancement and the lateral BJT can be configured as a lateral heterojunction bipolar transistor (HBT). Also disclosed is a method for forming the semiconductor structure.
    Type: Grant
    Filed: December 20, 2021
    Date of Patent: December 5, 2023
    Assignee: GlobalFoundries U.S. Inc.
    Inventors: Jagar Singh, Alexander M. Derrickson, Alvin J. Joseph, Andreas Knorr, Judson R. Holt
  • Patent number: 11804542
    Abstract: The present disclosure relates to semiconductor structures and, more particularly, to annular bipolar transistors and methods of manufacture. The structure includes: a substate material; a collector region parallel to and above the substrate material; an intrinsic base region surrounding the collector region; an emitter region above the intrinsic base region; and an extrinsic base region contacting the intrinsic base region.
    Type: Grant
    Filed: December 21, 2021
    Date of Patent: October 31, 2023
    Assignee: GLOBALFOUNDRIES U.S. INC.
    Inventors: Alexander M. Derrickson, Arkadiusz Malinowski, Jagar Singh, Mankyu Yang, Judson R. Holt
  • Patent number: 11799021
    Abstract: Embodiments of the disclosure provide a lateral bipolar transistor structure with a marker layer for emitter and collector terminals. A lateral bipolar transistor structure according to the disclosure includes a semiconductor layer over an insulator layer. The semiconductor layer includes an emitter/collector (E/C) region having a first doping type and an intrinsic base region adjacent the E/C region and having a second doping type opposite the first doping type. A marker layer is on the E/C region of the semiconductor layer, and a raised E/C terminal is on the marker layer. An extrinsic base is on the intrinsic base region of the semiconductor layer, and a spacer is horizontally between the raised E/C terminal and the extrinsic base.
    Type: Grant
    Filed: October 14, 2021
    Date of Patent: October 24, 2023
    Assignee: GLOBALFOUNDRIES U.S. Inc.
    Inventors: Vibhor Jain, Alexander M. Derrickson, Judson R. Holt
  • Publication number: 20230290829
    Abstract: Embodiments of the disclosure provide a bipolar transistor structure having a base with a varying horizontal width and methods to form the same. The bipolar transistor structure includes a first emitter/collector (E/C) layer on an insulator layer. A base layer is over the insulator layer. A spacer between the first E/C layer and the base layer. The base layer includes a lower base region, and the spacer is adjacent to the lower base region and the first E/C layer. An upper base region is on the lower base region and the spacer. A horizontal width of the upper base region is larger than a horizontal width of the lower base region.
    Type: Application
    Filed: May 26, 2022
    Publication date: September 14, 2023
    Inventors: Peter Baars, Alexander M. Derrickson, Ketankumar Harishbhai Tailor, Zhixing Zhao, Judson R. Holt
  • Publication number: 20230275083
    Abstract: Disclosed are a forksheet semiconductor structure and a method of forming the structure. The structure can include a dielectric body with a first sidewall and a second sidewall opposite the first sidewall. The structure can include a first transistor, which incorporates first semiconductor nanosheet(s) positioned laterally immediately adjacent to the first sidewall of the dielectric body, and a second transistor, which incorporates second semiconductor nanosheet(s) positioned laterally immediately adjacent to the second sidewall. The first transistor and the second transistor can both be bipolar junction transistors (BJTs) (e.g., PNP-type BJTs, NPN-type BJTs or a PNP-type BJT and an NPN-type BJT). Alternatively, the first transistor can be a BJT (e.g., a PNP-type BJT or an NPN-type BJT) and the second transistor can be a field effect transistor (FET) (e.g., an N-type FET (NFET) or a P-type FET (PFET)).
    Type: Application
    Filed: June 21, 2022
    Publication date: August 31, 2023
    Inventors: Arkadiusz Malinowski, Alexander M. Derrickson
  • Publication number: 20230231041
    Abstract: The present disclosure relates to semiconductor structures and, more particularly, to vertical bipolar transistors and methods of manufacture. The structure includes: an intrinsic base region comprising semiconductor-on-insulator material; a collector region confined within an insulator layer beneath the semiconductor-on-insulator material; an emitter region above the intrinsic base region; and an extrinsic base region above the intrinsic base region.
    Type: Application
    Filed: January 20, 2022
    Publication date: July 20, 2023
    Inventors: Shesh Mani PANDEY, Alexander M. DERRICKSON, Judson R. HOLT, Vibhor JAIN
  • Publication number: 20230223462
    Abstract: Embodiments of the disclosure provide a bipolar transistor structure including a semiconductor fin on a substrate. The semiconductor fin has a first doping type, a length in a first direction, and a width in a second direction perpendicular to the first direction. A first emitter/collector (E/C) material is adjacent a first sidewall of the semiconductor fin along the width of the semiconductor fin. The first E/C material has a second doping type opposite the first doping type. A second E/C material is adjacent a second sidewall of the semiconductor fin along the width of the semiconductor fin. The second E/C material has the second doping type. A width of the first E/C material is different from a width of the second E/C material.
    Type: Application
    Filed: March 30, 2022
    Publication date: July 13, 2023
    Inventors: Hong Yu, Alexander M. Derrickson, Judson R. Holt
  • Patent number: 11646361
    Abstract: A structure includes a semiconductor fin on a substrate. A first fin transistor (finFET) is on the substrate, and a second finFET is on the substrate adjacent the first finFET. The first finFET and the second finFET include respective pairs of source/drain regions with each including a first dopant of a first polarity. An electrical isolation structure is in the semiconductor fin between one of the source/drain regions of the first finFET and one of the source/drain regions for the second FinFET, the electrical isolation structure including a second dopant of an opposing, second polarity. The electrical isolation structure extends to an upper surface of the semiconductor fin. A related method is also disclosed.
    Type: Grant
    Filed: March 4, 2021
    Date of Patent: May 9, 2023
    Assignee: GlobalFoundries U.S. Inc.
    Inventors: Arkadiusz Malinowski, Alexander M. Derrickson, Haiting Wang
  • Publication number: 20230098557
    Abstract: Embodiments of the disclosure provide a bipolar transistor structure on a semiconductor fin. The semiconductor fin may be on a substrate and may have a first doping type, a length in a first direction, and a width in a second direction perpendicular to the first direction. The semiconductor fin includes a first portion and a second portion adjacent the first portion along the length of the semiconductor fin. The second portion is coupled to a base contact. A dopant concentration of the first portion is less than a dopant concentration of the second portion. An emitter/collector (E/C) material is adjacent the first portion along the width of the semiconductor fin. The E/C material has a second doping type opposite the first doping type. The E/C material is coupled to an E/C contact.
    Type: Application
    Filed: January 19, 2022
    Publication date: March 30, 2023
    Inventors: Hong Yu, Alexander M. Derrickson, Judson R. Holt
  • Publication number: 20230083044
    Abstract: Embodiments of the disclosure provide a lateral bipolar transistor structure with inner and outer spacers, and related methods. A lateral bipolar transistor structure may have an emitter/collector (E/C) layer over an insulator. The E/C layer has a first doping type. A first base layer is on the insulator and adjacent the E/C layer. The first base layer has a second doping type opposite the first doping type. A second base layer is on the first base layer and having the second doping type. A dopant concentration of the second base layer is greater than a dopant concentration of the first base layer. An inner spacer is on the E/C layer and adjacent the second base layer. An outer spacer is on the E/C layer and adjacent the inner spacer.
    Type: Application
    Filed: December 2, 2021
    Publication date: March 16, 2023
    Inventors: Alexander M. Derrickson, John L. Lemon, Haiting Wang, Judson R. Holt
  • Publication number: 20230075949
    Abstract: The present disclosure relates to semiconductor structures and, more particularly, to a lateral bipolar transistor and methods of manufacture. The structure includes: an extrinsic base region composed of semiconductor material; an emitter region on a first side of the extrinsic base region; a collector region on a second side of the extrinsic base region; and an extrinsic base contact wrapping around the semiconductor material of the extrinsic base region.
    Type: Application
    Filed: December 14, 2021
    Publication date: March 9, 2023
    Inventors: Jagar Singh, Alexander M. Derrickson, Alexander Martin