Patents by Inventor Alexander Susiti

Alexander Susiti has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 9754787
    Abstract: A Magnetic Czochralski semiconductor wafer having opposing first and second sides arranged distant from one another in a first vertical direction is treated by implanting first particles into the semiconductor wafer via the second side to form crystal defects in the semiconductor wafer. The crystal defects have a maximum defect concentration at a first depth. The semiconductor wafer is heated in a first thermal process to form radiation induced donors. Implantation energy and dose are chosen such that the semiconductor wafer has, after the first thermal process, an n-doped semiconductor region arranged between the second side and first depth, and the n-doped semiconductor region has, in the first vertical direction, a local maximum of a net doping concentration between the first depth and second side and a local minimum of the net doping concentration between the first depth and first maximum.
    Type: Grant
    Filed: June 24, 2014
    Date of Patent: September 5, 2017
    Assignee: Infineon Technologies AG
    Inventors: Johannes Laven, Hans-Joachim Schulze, Stephan Voss, Alexander Breymesser, Alexander Susiti, Shuhai Liu, Helmut Oefner
  • Publication number: 20160300920
    Abstract: A method of manufacturing a semiconductor device includes forming a trench in a semiconductor body at a first surface of the semiconductor body, forming a polysilicon material in the trench, introducing dopants into the polysilicon material by a high dose and low energy process, and performing a thermal treatment configured to drive-in the dopants into the polysilicon material.
    Type: Application
    Filed: June 21, 2016
    Publication date: October 13, 2016
    Inventors: Hans-Joachim Schulze, Alexander Susiti, Markus Zundel, Reinhard Ploss
  • Patent number: 9412824
    Abstract: A semiconductor component includes a semiconductor body having a first side and a second side opposite the first side. In the semiconductor body, a dopant region is formed by a dopant composed of an oxygen complex. The dopant region extends over a section L having a length of at least 10 ?m along a direction from the first side to the second side. The dopant region has an oxygen concentration in a range of 1×1017 cm?3 to 5×1017 cm?3 over the section L.
    Type: Grant
    Filed: September 9, 2014
    Date of Patent: August 9, 2016
    Assignee: Infineon Technologies AG
    Inventors: Thomas Neidhart, Franz Josef Niedernostheide, Hans-Joachim Schulze, Werner Schustereder, Alexander Susiti
  • Patent number: 9384960
    Abstract: A method of manufacturing a semiconductor device includes forming a continuous silicate glass structure over a first surface of a semiconductor body, including a first part of the continuous glass structure over an active area of the semiconductor body and a second part of the continuous glass structure over an area of the semiconductor body outside of the active area. A first composition of dopants included in the first part of continuous glass structure differs from a second composition of dopants of the second part of the continuous glass structure.
    Type: Grant
    Filed: August 12, 2015
    Date of Patent: July 5, 2016
    Assignee: Infineon Technologies AG
    Inventors: Hans-Joachim Schulze, Alexander Susiti, Markus Zundel, Reinhard Ploss
  • Publication number: 20150371858
    Abstract: A Magnetic Czochralski semiconductor wafer having opposing first and second sides arranged distant from one another in a first vertical direction is treated by implanting first particles into the semiconductor wafer via the second side to form crystal defects in the semiconductor wafer. The crystal defects have a maximum defect concentration at a first depth. The semiconductor wafer is heated in a first thermal process to form radiation induced donors. Implantation energy and dose are chosen such that the semiconductor wafer has, after the first thermal process, an n-doped semiconductor region arranged between the second side and first depth, and the n-doped semiconductor region has, in the first vertical direction, a local maximum of a net doping concentration between the first depth and second side and a local minimum of the net doping concentration between the first depth and first maximum.
    Type: Application
    Filed: June 24, 2014
    Publication date: December 24, 2015
    Inventors: Johannes Laven, Hans-Joachim Schulze, Stephan Voss, Alexander Breymesser, Alexander Susiti, Shuhai Liu, Helmut Oefner
  • Publication number: 20150348776
    Abstract: A method of manufacturing a semiconductor device includes forming a continuous silicate glass structure over a first surface of a semiconductor body, including a first part of the continuous glass structure over an active area of the semiconductor body and a second part of the continuous glass structure over an area of the semiconductor body outside of the active area. A first composition of dopants included in the first part of continuous glass structure differs from a second composition of dopants of the second part of the continuous glass structure.
    Type: Application
    Filed: August 12, 2015
    Publication date: December 3, 2015
    Inventors: Hans-Joachim Schulze, Alexander Susiti, Markus Zundel, Reinhard Ploss
  • Patent number: 9142401
    Abstract: A method of manufacturing a semiconductor device includes forming a continuous silicate glass structure over a first surface of a semiconductor body, including a first part of the continuous glass structure over an active area of the semiconductor body and a second part of the continuous glass structure over an area of the semiconductor body outside of the active area. A first composition of dopants included in the first part of continuous glass structure differs from a second composition of dopants of the second part of the continuous glass structure.
    Type: Grant
    Filed: June 16, 2014
    Date of Patent: September 22, 2015
    Assignee: Infineon Technologies AG
    Inventors: Hans-Joachim Schulze, Alexander Susiti, Markus Zundel, Reinhard Ploss
  • Publication number: 20150123247
    Abstract: A semiconductor component includes a semiconductor body having a first side and a second side opposite the first side. In the semiconductor body, a dopant region is formed by a dopant composed of an oxygen complex. The dopant region extends over a section L having a length of at least 10 ?m along a direction from the first side to the second side. The dopant region has an oxygen concentration in a range of 1×1017 cm?3 to 5×1017 cm?3 over the section L.
    Type: Application
    Filed: September 9, 2014
    Publication date: May 7, 2015
    Inventors: Thomas Neidhart, Franz Josef Niedernostheide, Hans-Joachim Schulze, Werner Schustereder, Alexander Susiti
  • Patent number: 8859409
    Abstract: A semiconductor component includes a semiconductor body having a first side and a second side opposite the first side. In the semiconductor body, a dopant region is formed by a dopant composed of an oxygen complex. The dopant region extends over a section L having a length of at least 10 ?m along a direction from the first side to the second side. The dopant region has an oxygen concentration in a range of 1×1017 cm?3 to 5×1017 cm?3 over the section L.
    Type: Grant
    Filed: September 13, 2012
    Date of Patent: October 14, 2014
    Assignee: Infineon Technologies AG
    Inventors: Thomas Neidhart, Franz Josef Niedernostheide, Hans-Joachim Schulze, Werner Schustereder, Alexander Susiti
  • Publication number: 20140291816
    Abstract: A method of manufacturing a semiconductor device includes forming a continuous silicate glass structure over a first surface of a semiconductor body, including a first part of the continuous glass structure over an active area of the semiconductor body and a second part of the continuous glass structure over an area of the semiconductor body outside of the active area. A first composition of dopants included in the first part of continuous glass structure differs from a second composition of dopants of the second part of the continuous glass structure.
    Type: Application
    Filed: June 16, 2014
    Publication date: October 2, 2014
    Inventors: Hans-Joachim Schulze, Alexander Susiti, Markus Zundel, Reinhard Ploss
  • Patent number: 8785997
    Abstract: A semiconductor device includes a semiconductor body including a first surface. The semiconductor device further includes a continuous silicate glass structure over the first surface. A first part of the continuous glass structure over an active area of the semiconductor body includes a first composition of dopants that differs from a second composition of dopants in a second part of the continuous glass structure over an area of the semiconductor body outside of the active area.
    Type: Grant
    Filed: May 16, 2012
    Date of Patent: July 22, 2014
    Assignee: Infineon Technologies AG
    Inventors: Hans-Joachim Schulze, Alexander Susiti, Markus Zundel, Reinhard Ploss
  • Publication number: 20130307127
    Abstract: A semiconductor device includes a semiconductor body including a first surface. The semiconductor device further includes a continuous silicate glass structure over the first surface. A first part of the continuous glass structure over an active area of the semiconductor body includes a first composition of dopants that differs from a second composition of dopants in a second part of the continuous glass structure over an area of the semiconductor body outside of the active area.
    Type: Application
    Filed: May 16, 2012
    Publication date: November 21, 2013
    Applicant: INFINEON TECHNOLOGIES AUSTRIA AG
    Inventors: Hans-Joachim Schulze, Alexander Susiti, Markus Zundel, Reinhard Ploss
  • Publication number: 20130249058
    Abstract: A semiconductor component includes a semiconductor body having a first side and a second side opposite the first side. In the semiconductor body, a dopant region is formed by a dopant composed of an oxygen complex. The dopant region extends over a section L having a length of at least 10 ?m along a direction from the first side to the second side. The dopant region has an oxygen concentration in a range of 1×1017 cm?3 to 5×1017 cm?3 over the section L.
    Type: Application
    Filed: September 13, 2012
    Publication date: September 26, 2013
    Applicant: INFINEON TECHNOLOGIES AG
    Inventors: Thomas Neidhart, Franz Josef Niedernostheide, Hans-Joachim Schulze, Werner Schustereder, Alexander Susiti