Patents by Inventor Alfons Dehé

Alfons Dehé has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • MEMS device
    Patent number: 9728653
    Abstract: A MEMS device includes a membrane comprising a first plurality of fingers. A counter electrode arrangement includes a second plurality of fingers disposed in a interdigitated relationship with the first plurality of fingers of the membrane. A deflector is configured to deflect the membrane such that the first and second plurality of fingers are displaced in a position excluding maximum overlapping of surfaces of the fingers.
    Type: Grant
    Filed: July 22, 2013
    Date of Patent: August 8, 2017
    Assignee: Infineon Technologies AG
    Inventors: Alfons Dehe, Mohsin Nawaz
  • System and Method for a MEMS Transducer
    Publication number: 20170217765
    Abstract: According to an embodiment, a microelectromechanical systems (MEMS) transducer includes a substrate with a first cavity that passes through the substrate from a backside of the substrate. The MEMS transducer also includes a perforated first electrode plate overlying the first cavity on a topside of the substrate, a second electrode plate overlying the first cavity on the topside of the substrate and spaced apart from the perforated first electrode plate by a spacing region, and a gas sensitive material in the spacing region between the perforated first electrode plate and the second electrode plate. The gas sensitive material has an electrical property that is dependent on a concentration of a target gas.
    Type: Application
    Filed: April 20, 2017
    Publication date: August 3, 2017
    Inventors: Vijaye Kumar Rajaraman, Yonsuang Arnanthigo, Alfons Dehe, Stefan Kolb
  • Hall effect sensor with graphene detection layer
    Patent number: 9714988
    Abstract: A Hall Effect sensor with a graphene detection layer implemented in a variety of geometries, including the possibility of a so-called “full 3-d” Hall sensor, with the option for integration in a BiCMOS process and a method for producing said Hall Effect sensor is disclosed.
    Type: Grant
    Filed: October 15, 2014
    Date of Patent: July 25, 2017
    Assignee: INFINEON TECHNOLOGIES AG
    Inventors: Markus Eckinger, Stefan Kolb, Alfons Dehe, Guenther Ruhl
  • MEMS device with polymer layer, system of a MEMS device with a polymer layer, method of making a MEMS device with a polymer layer
    Patent number: 9708180
    Abstract: A MEMS device, a method of making a MEMS device and a system of a MEMS device are shown. In one embodiment, a MEMS device includes a first polymer layer, a MEMS substrate disposed on the first polymer layer and a MEMS structure supported by the MEMS substrate. The MEMS device further includes a first opening disposed in the MEMS substrate and a second opening disposed in the first polymer layer.
    Type: Grant
    Filed: April 13, 2015
    Date of Patent: July 18, 2017
    Assignee: Infineon Technologies AG
    Inventor: Alfons Dehe
  • Field emission devices and methods of making thereof
    Patent number: 9711392
    Abstract: In one embodiment of the present invention, an electronic device includes a first emitter/collector region and a second emitter/collector region disposed in a substrate. The first emitter/collector region has a first edge/tip, and the second emitter/collector region has a second edge/tip. A gap separates the first edge/tip from the second edge/tip. The first emitter/collector region, the second emitter/collector region, and the gap form a field emission device.
    Type: Grant
    Filed: July 25, 2012
    Date of Patent: July 18, 2017
    Assignee: Infineon Technologies AG
    Inventors: Alfons Dehe, Damian Sojka, Andre Schmenn, Carsten Ahrens
  • System and Method for a Variable Flow Transducer
    Publication number: 20170201192
    Abstract: According to an embodiment, a microelectromechanical systems MEMS transducer includes a deflectable membrane attached to a support structure, an acoustic valve structure configured to cause the deflectable membrane to be acoustically transparent in a first mode and acoustically visible in a second mode, and an actuating mechanism coupled to the deflectable membrane. Other embodiments include corresponding systems and apparatus, each configured to perform various embodiment methods.
    Type: Application
    Filed: January 11, 2016
    Publication date: July 13, 2017
    Inventors: David Tumpold, Alfons Dehe, Christoph Glacer
  • MEMS Device
    Publication number: 20170180900
    Abstract: A MEMS device includes a backplate electrode and a membrane disposed spaced apart from the backplate electrode. The membrane includes a displaceable portion and a fixed portion. The backplate electrode and the membrane are arranged such that an overlapping area of the fixed portion of the membrane with the backplate electrode is less than maximum overlapping.
    Type: Application
    Filed: March 7, 2017
    Publication date: June 22, 2017
    Inventors: Alfons Dehe, Stefan Barzen
  • System and method for a microfabricated fracture test structure
    Patent number: 9679856
    Abstract: According to an embodiment, a micro-fabricated test structure includes a structure mechanically coupled between two rigid anchors and disposed above a substrate. The structure is released from the substrate and includes a test layer mechanically coupled between the two rigid anchors. The test layer includes a first region having a first cross-sectional area and a constricted region having a second cross-sectional area smaller than the first cross-sectional area. The structure also includes a first tensile stressed layer disposed on a surface of the test layer adjacent the first region.
    Type: Grant
    Filed: March 7, 2014
    Date of Patent: June 13, 2017
    Assignee: Infineon Technologies AG
    Inventors: Christoph Glacer, Alfons Dehe, John Brueckner
  • Sensor structure for sensing pressure waves and ambient pressure
    Patent number: 9670059
    Abstract: In various embodiments, a sensor structure is provided. The sensor structure may include a first conductive layer; an electrode element; and a second conductive layer arranged on an opposite side of the electrode element from the first conductive layer. The first conductive layer and the second conductive layer may form a chamber. The pressure in the chamber may be lower than the pressure outside of the chamber.
    Type: Grant
    Filed: March 23, 2016
    Date of Patent: June 6, 2017
    Assignee: INFINEON TECHNOLOGIES AG
    Inventors: Alfons Dehe, Roland Helm
  • Sound transducer with interdigitated first and second sets of comb fingers
    Patent number: 9674627
    Abstract: A sound transducer includes a substrate with a cavity with extending from a first surface of the substrate, a body at least partially covering the cavity and being connected to the substrate by at least one resilient hinge, a first set of comb fingers mounted to the substrate, and a second set of comb fingers mounted to the body. The first set of comb fingers and the second set of comb fingers are interdigitated and configured to create an electrostatic force driving the body in a direction perpendicular to the first surface of the substrate. The body and the at least one resilient hinge are configured for a resonant or a near-resonant excitation by the electrostatic force.
    Type: Grant
    Filed: April 15, 2016
    Date of Patent: June 6, 2017
    Assignee: Infineon Technologies AG
    Inventors: Shu-Ting Hsu, Alfons Dehe
  • Sound transducer structure and method for manufacturing a sound transducer structure
    Patent number: 9668056
    Abstract: A sound transducer structure includes a membrane, a counter electrode, and a plurality of elevations. The membrane includes a first main surface, made of a membrane material, in a sound transducing region and an edge region of the membrane. The counter electrode is made of counter electrode material, and includes a second main surface arranged in parallel to the first main surface of the membrane on a side of a free volume opposite the first main surface of the membrane. The plurality of elevations extend in the sound transducing region from the second main surface of the counter electrode into the free volume.
    Type: Grant
    Filed: August 26, 2013
    Date of Patent: May 30, 2017
    Assignee: INFINEON TECHNOLOGIES AG
    Inventors: Alfons Dehe, Stefan Barzen, Marc Fueldner
  • System and method for a MEMS transducer
    Patent number: 9658179
    Abstract: According to an embodiment, a microelectromechanical systems (MEMS) transducer includes a substrate with a first cavity that passes through the substrate from a backside of the substrate. The MEMS transducer also includes a perforated first electrode plate overlying the first cavity on a topside of the substrate, a second electrode plate overlying the first cavity on the topside of the substrate and spaced apart from the perforated first electrode plate by a spacing region, and a gas sensitive material in the spacing region between the perforated first electrode plate and the second electrode plate. The gas sensitive material has an electrical property that is dependent on a concentration of a target gas.
    Type: Grant
    Filed: June 24, 2015
    Date of Patent: May 23, 2017
    Assignee: Infineon Technologies AG
    Inventors: Vijaye Kumar Rajaraman, Yonsuang Arnanthigo, Alfons Dehe, Stefan Kolb
  • System and Method for a Perpendicular Electrode Transducer
    Publication number: 20170142525
    Abstract: According to an embodiment, a method of operating a microelectromechanical systems (MEMS) transducer that has a membrane includes transducing between out-of-plane deflection of the membrane and voltage on a first pair of electrostatic drive electrodes using the first pair of electrostatic drive electrodes. The first pair of electrostatic drive electrodes is formed on the membrane extending in an out-of-plane direction and form a variable capacitance between the first pair of electrostatic drive electrodes.
    Type: Application
    Filed: November 13, 2015
    Publication date: May 18, 2017
    Inventors: Christoph Glacer, Alfons Dehe
  • MEMS device
    Patent number: 9628886
    Abstract: A MEMS device includes a backplate electrode and a membrane disposed spaced apart from the backplate electrode. The membrane includes a displaceable portion and a fixed portion. The backplate electrode and the membrane are arranged such that an overlapping area of the fixed portion of the membrane with the backplate electrode is less than maximum overlapping.
    Type: Grant
    Filed: May 12, 2014
    Date of Patent: April 18, 2017
    Assignee: Infineon Technologies AG
    Inventors: Alfons Dehe, Stefan Barzen
  • PHOTOACOUSTIC GAS SENSOR DEVICE AND A METHOD FOR ANALYZING GAS
    Publication number: 20170074834
    Abstract: A photoacoustic gas sensor device for analyzing gas includes an emitter module and a pressure-sensitive module. The emitter module is arranged on a carrier substrate and emits light pulses. The pressure-sensitive module is arranged on the carrier substrate within a reference gas volume. The reference gas volume is separated from a volume intended to be filled with a gas to be analyzed. Further, the pressure-sensitive module generates a sensor signal indicating information on an acoustic wave caused by light pulses emitted by the emitter module interacting with a reference gas within the reference gas volume. Additionally, the emitter module is arranged so that light pulses emitted by the emitter module reach the reference gas volume after crossing the volume intended to be filled with the gas to be analyzed.
    Type: Application
    Filed: November 2, 2016
    Publication date: March 16, 2017
    Inventors: Alfons Dehe, Stefan Kolb, Horst Theuss
  • Comb MEMS Device and Method of Making a Comb MEMS Device
    Publication number: 20170073213
    Abstract: A MEMS device and a method to manufacture a MEMS device are disclosed. An embodiment includes forming trenches in a first main surface of a substrate, forming conductive fingers by forming a conductive material in the trenches and forming an opening from a second main surface of the substrate thereby exposing the conductive fingers, the second main surface opposite the first main surface.
    Type: Application
    Filed: November 7, 2016
    Publication date: March 16, 2017
    Inventor: Alfons Dehe
  • Apparatus and Method for In-Situ Calibration of a Photoacoustic Sensor
    Publication number: 20170067859
    Abstract: An apparatus for in-situ calibration of a photoacoustic sensor is provided. The apparatus includes a light emitter to emit light along a transmission path to a gas and an acoustic sensor element configured to detect an acoustic signal emitted from the gas based on the received light. Furthermore, the apparatus includes a sensing unit configured to detect the light transmitted along the transmission path and to provide an output signal, and a calibration unit to receive the output signal from the sensing unit and to provide a calibration information based on the output signal received from the sensing unit.
    Type: Application
    Filed: September 7, 2016
    Publication date: March 9, 2017
    Applicant: Infineon Technologies AG
    Inventors: Stefan KOLB, Alfons DEHE, Jochen HUBER, Franz JOST, Horst THEUSS, Juergen WOELLENSTEIN
  • Adjustable ventilation openings in MEMS structures
    Patent number: 9591408
    Abstract: A MEMS structure and a method for operation a MEMS structure are disclosed. In accordance with an embodiment of the present invention, a MEMS structure comprises a substrate, a backplate, and a membrane comprising a first region and a second region, wherein the first region is configured to sense a signal and the second region is configured to adjust a threshold frequency from a first value to a second value, and wherein the backplate and the membrane are mechanically connected to the substrate.
    Type: Grant
    Filed: November 25, 2014
    Date of Patent: March 7, 2017
    Assignee: Infineon Technologies AG
    Inventors: Alfons Dehe, Martin Wurzer
  • Micromechanical digital loudspeaker
    Patent number: 9584941
    Abstract: A digital loudspeaker and a method for operating a digital loudspeaker are disclosed. In an embodiment a digital loudspeaker includes a substrate, a first stator fixed with respect to the substrate, a second stator fixed with respect to the substrate and spaced at a distance from the first stator, and a membrane between the first stator and the second stator. The membrane is displaceable between a first position in which the membrane mechanically contacts the first stator and a second position in which the membrane mechanically contacts the second stator. The first stator and the second stator are arranged to electrostatically move the membrane from a rest position spaced apart from the first position and the second position to the first position and the second position, respectively.
    Type: Grant
    Filed: May 13, 2015
    Date of Patent: February 28, 2017
    Assignee: Infineon Technologies AG
    Inventor: Alfons Dehe
  • MEMS device and method of making a MEMS device
    Patent number: 9580299
    Abstract: A MEMS device and a method of making a MEMS device are disclosed. In one embodiment a semiconductor device comprises a substrate, a moveable electrode and a counter electrode, wherein the moveable electrode and the counter electrode are mechanically connected to the substrate. The movable electrode is configured to stiffen an inner region of the movable membrane.
    Type: Grant
    Filed: December 16, 2015
    Date of Patent: February 28, 2017
    Assignee: Infineon Technologies AG
    Inventors: Alfons Dehe, Martin Wurzer, Christian Herzum